[Scan]
initial_time=2016-02-17T21:00:38
final_time=2016-02-17T21:00:58
ip_count=19
run=1032
dataset=7
scan=301
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0958E0
qbias_imon=-1.08798E-4
ql1_vset=
ql1_vmon=-8.16417E-1
ql1_imon=1.36933E-8
ql2_vset=
ql2_vmon=-7.97892E-1
ql2_imon=1.91125E-9
ql3_vset=
ql3_vmon=-9.13148E0
ql3_imon=3.58439E-10
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=4.06694E-10
mult1=-9.4755E-9
mult2=-2.70863E-9
rf_tmon=-4.57852E-3
rf_agc=3.39644E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.38826E-3
ql5_imon=1.5698E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65796E0
bslens_imon=2.47247E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19624E1
lens5a_imon=1.97696E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.04944E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53673E1
cs_ef1b_imon=3.03222E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02404E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05053E1
cs_ea1_imon=2.20525E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40029E0
lens1_imon=2.74854E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64713E1
os_ef1alow_imon=2.99781E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03844E1
cs_ea2_imon=1.56709E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84516E1
cs_ef1a_imon=3.00233E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.71218E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11303E1
os_restr1_imon=4.26419E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15188E1
os_ea1_imon=2.21303E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63473E1
os_ef1bup_imon=3.09199E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2344E0
cs_ionrep_imon=1.2627E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91913E2
cs_nozzle_imon=1.93289E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02093E1
cs_anode1_imon=3.25428E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20539E0
olens4_imon=3.70029E-8
tplens_vset=1.4E-1
tplens_vmon=1.59778E0
tplens_imon=-2.03323E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26314E1
iondef3_imon=1.47011E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26801E1
iondef2_imon=1.58691E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02975E2
lens6_imon=2.98487E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=4.0578E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26803E0
ionrepsh_imon=2.01164E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33846E1
lens5b_imon=2.19074E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74536E1
cs_ef2b_imon=3.12188E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.87149E0
os_ea2_imon=-5.96198E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06131E2
lens4b_imon=2.00626E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71298E1
cs_ef2a_imon=3.17991E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.11711E0
os_ef2alow_imon=-2.60586E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.72528E-1
os_ef2bup_imon=-5.42081E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10689E1
os_restr2_imon=3.52813E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23074E2
cs_ionfoca_imon=6.33043E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01844E1
cs_anode2_imon=2.27114E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73195E1
iondef1_imon=1.12042E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67998E1
iondef4_imon=1.08434E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.08876E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=9.75987E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10639E0
cs_ionaccel_imon=-1.7996E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47153E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56295E1
einzel_imon=7.71217E-6
window_vset=0.0E0
window_vmon=1.79458E-1
window_imon=-1.07675E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82654E2
mask1_imon=2.38945E-4
mask2_vset=0.0E0
mask2_vmon=-1.8606E1
mask2_imon=-5.65886E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92676E3
multa_neg_imon=8.18861E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.98876E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50155E3
multb_neg_imon=7.14803E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.28449E0
defgridb_imon=5.99064E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3335E1
os_fil1_imon=9.60567E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0693E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63695E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30902E1
cs_fil1_imon=1.00804E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62117E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66009E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.48347E-2
os_fil2_imon=-2.70973E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01661E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.24568E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37393E-1
cs_fil2_imon=-2.47805E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.7983E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22679E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.00705E-1
chamber_ion_pmon=1.69725E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.12117E-1
res40_imon=-2.7831E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	9.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.16464E-1	-7.98345E-1	-9.13165E0	-9.14214E0	5.62668E-3	9.29594E-2	2.72921E1	-3.27045E1	-3.26413E1	2.67956E1	1.69653E-7	2.51525E-3	2.51525E-3	6.30202E-3	1.98153E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.16274E-1	-7.9813E-1	-9.13162E0	-9.14197E0	5.53131E-3	9.35793E-2	2.7321E1	-3.26756E1	-3.26229E1	2.67956E1	1.69728E-7	2.51334E-3	2.51334E-3	6.3074E-3	1.9963E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.1625E-1	-7.98082E-1	-9.13167E0	-9.14218E0	5.43594E-3	9.3174E-2	2.72958E1	-3.26955E1	-3.26538E1	2.68029E1	1.69728E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.00325E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09379E0	-8.16298E-1	-7.98297E-1	-9.13136E0	-9.14237E0	5.43594E-3	9.31501E-2	2.73021E1	-3.26372E1	-3.26419E1	2.68194E1	1.70015E-7	2.52384E-3	2.52384E-3	6.32896E-3	1.9985E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.1656E-1	-7.97987E-1	-9.13124E0	-9.14214E0	5.60284E-3	9.32455E-2	2.73201E1	-3.26855E1	-3.26068E1	2.68142E1	1.69652E-7	2.51603E-3	2.51603E-3	6.30212E-3	2.00567E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.16536E-1	-7.9782E-1	-9.13117E0	-9.14204E0	5.38826E-3	9.33886E-2	2.72624E1	-3.26356E1	-3.26645E1	2.67848E1	1.69806E-7	2.52585E-3	2.52585E-3	6.3074E-3	2.00285E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09402E0	-8.16488E-1	-7.98035E-1	-9.13112E0	-9.14171E0	5.60284E-3	9.30548E-2	2.73129E1	-3.26915E1	-3.25936E1	2.68346E1	1.69728E-7	2.51552E-3	2.51552E-3	6.30192E-3	2.00673E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.16536E-1	-7.97987E-1	-9.13095E0	-9.14178E0	5.72205E-3	9.32932E-2	2.7349E1	-3.26609E1	-3.25984E1	2.68136E1	1.69728E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.00325E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-8.1656E-1	-7.97963E-1	-9.13124E0	-9.14185E0	5.34058E-3	9.3317E-2	2.73287E1	-3.26649E1	-3.26065E1	2.68034E1	1.69802E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.00499E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.16703E-1	-7.98035E-1	-9.13112E0	-9.14166E0	5.48363E-3	9.33647E-2	2.72647E1	-3.26848E1	-3.26076E1	2.67866E1	1.69725E-7	2.52384E-3	2.52384E-3	6.31278E-3	1.9934E-1
1.4E1	0.0E0	1.0E0	5.66E2	3.82E2	-2.09472E0	-8.16584E-1	-7.98011E-1	-9.13115E0	-9.14187E0	5.65052E-3	9.33886E-2	2.72727E1	-3.25877E1	-3.26024E1	2.67776E1	1.69881E-7	2.52027E-3	2.52027E-3	6.32978E-3	1.98872E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.16321E-1	-7.97486E-1	-9.13136E0	-9.14202E0	5.62668E-3	9.32455E-2	2.73207E1	-3.27011E1	-3.26326E1	2.68146E1	1.6987E-7	2.51632E-3	2.51632E-3	6.3074E-3	1.9934E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.16417E-1	-7.97486E-1	-9.13124E0	-9.14207E0	5.79357E-3	9.3174E-2	2.73093E1	-3.26356E1	-3.26482E1	2.67839E1	1.69507E-7	2.51225E-3	2.51225E-3	6.31288E-3	2.00151E-1
1.7E1	2.1E1	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.16202E-1	-7.97558E-1	-9.13136E0	-9.14195E0	5.34058E-3	9.36508E-2	2.73181E1	-3.26697E1	-3.26325E1	2.67972E1	1.69654E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.01022E-1
1.8E1	8.6E1	0.0E0	7.27E2	5.0E2	-2.09441E0	-8.16321E-1	-7.97558E-1	-9.13138E0	-9.14218E0	5.05447E-3	9.33647E-2	2.73099E1	-3.26657E1	-3.26536E1	2.67812E1	1.69728E-7	2.52757E-3	2.52757E-3	6.32386E-3	1.99977E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09418E0	-8.16202E-1	-7.97772E-1	-9.13167E0	-9.14216E0	5.48363E-3	9.32932E-2	2.72889E1	-3.26843E1	-3.26573E1	2.68256E1	1.70015E-7	2.52169E-3	2.52169E-3	6.33436E-3	1.9934E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.16393E-1	-7.97892E-1	-9.1315E0	-9.1419E0	5.31673E-3	9.29117E-2	2.73177E1	-3.26987E1	-3.26128E1	2.68058E1	1.69654E-7	2.51662E-3	2.51662E-3	6.34588E-3	1.99283E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.16345E-1	-7.98011E-1	-9.13103E0	-9.14199E0	5.17368E-3	9.29594E-2	2.72903E1	-3.26826E1	-3.26514E1	2.67804E1	1.69728E-7	2.5188E-3	2.5188E-3	6.29098E-3	2.00151E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09611E0	-8.16417E-1	-7.97963E-1	-9.13124E0	-9.14176E0	5.34058E-3	9.2864E-2	2.73181E1	-3.26567E1	-3.26596E1	2.68022E1	1.69725E-7	2.52384E-3	2.52384E-3	6.3074E-3	2.00021E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0958E0	-8.16417E-1	-7.97892E-1	-9.13148E0	-9.14197E0	5.38826E-3	9.3174E-2	2.73195E1	-3.26801E1	-3.26314E1	2.67998E1	1.69725E-7	2.52276E-3	2.52276E-3	6.31278E-3	2.00705E-1