[Scan]
initial_time=2016-02-17T21:01:05
final_time=2016-02-17T21:01:25
ip_count=19
run=1032
dataset=7
scan=302
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09603E0
qbias_imon=-1.08718E-4
ql1_vset=
ql1_vmon=-8.16298E-1
ql1_imon=1.36669E-8
ql2_vset=
ql2_vmon=-7.98321E-1
ql2_imon=1.91286E-9
ql3_vset=
ql3_vmon=-9.13146E0
ql3_imon=3.7961E-10
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=4.11856E-10
mult1=-1.01257E-8
mult2=-2.73059E-9
rf_tmon=-6.26083E-3
rf_agc=3.26847E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.62668E-3
ql5_imon=1.61068E-9
bslens_vset=-6.2E0
bslens_vmon=-6.60846E0
bslens_imon=2.50531E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20223E1
lens5a_imon=1.96505E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12503E2
lens4a_imon=2.05241E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53706E1
cs_ef1b_imon=3.0346E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.02121E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04531E1
cs_ea1_imon=2.20802E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37376E0
lens1_imon=2.64951E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6465E1
os_ef1alow_imon=2.96684E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04369E1
cs_ea2_imon=1.60383E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8446E1
cs_ef1a_imon=3.01586E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.71363E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1131E1
os_restr1_imon=4.2758E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15216E1
os_ea1_imon=2.19E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63479E1
os_ef1bup_imon=3.0746E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.29295E0
cs_ionrep_imon=1.25956E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91895E2
cs_nozzle_imon=1.93373E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01695E1
cs_anode1_imon=3.25011E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20513E0
olens4_imon=3.69163E-8
tplens_vset=1.4E-1
tplens_vmon=1.66366E0
tplens_imon=-2.23642E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26248E1
iondef3_imon=1.52344E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26506E1
iondef2_imon=1.58761E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02966E2
lens6_imon=2.98436E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=4.05655E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3272E0
ionrepsh_imon=1.99497E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33538E1
lens5b_imon=2.18747E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74597E1
cs_ef2b_imon=3.13046E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.85893E0
os_ea2_imon=-9.08583E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0612E2
lens4b_imon=2.00814E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71065E1
cs_ef2a_imon=3.17767E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08639E0
os_ef2alow_imon=-2.69879E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.68903E-1
os_ef2bup_imon=-5.35491E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10835E1
os_restr2_imon=3.52654E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23048E2
cs_ionfoca_imon=6.29748E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01917E1
cs_anode2_imon=2.27849E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73315E1
iondef1_imon=1.14095E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6807E1
iondef4_imon=1.08017E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=1.08657E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=9.76814E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12894E0
cs_ionaccel_imon=-2.09332E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47324E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56255E1
einzel_imon=7.61216E-6
window_vset=0.0E0
window_vmon=1.98722E-1
window_imon=-1.09503E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8262E2
mask1_imon=2.39106E-4
mask2_vset=0.0E0
mask2_vmon=-1.862E1
mask2_imon=-7.49045E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.34676E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93734E3
defgrida_imon=7.02592E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50118E3
multb_neg_imon=7.99205E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.53991E0
defgridb_imon=6.359E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33362E1
os_fil1_imon=9.60488E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06879E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64258E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30891E1
cs_fil1_imon=1.00857E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61537E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66161E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.6223E-2
os_fil2_imon=-2.75607E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.851E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.0008E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35737E-1
cs_fil2_imon=-2.46775E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.89945E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2263E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.00151E-1
chamber_ion_pmon=1.69654E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.68612E-1
res40_imon=-2.60869E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=206
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	9.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.1625E-1	-7.98011E-1	-9.13165E0	-9.14178E0	5.48363E-3	9.33409E-2	2.73476E1	-3.26614E1	-3.26278E1	2.67879E1	1.69802E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.00151E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09456E0	-8.16059E-1	-7.98225E-1	-9.13148E0	-9.14199E0	5.53131E-3	9.32932E-2	2.73099E1	-3.2653E1	-3.26801E1	2.68142E1	1.69834E-7	2.51793E-3	2.51793E-3	6.31817E-3	2.00106E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.1625E-1	-7.9782E-1	-9.13148E0	-9.1419E0	5.76973E-3	9.32693E-2	2.73051E1	-3.26621E1	-3.26843E1	2.6807E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.16226E-1	-7.98225E-1	-9.13115E0	-9.14209E0	5.48363E-3	9.35078E-2	2.72949E1	-3.26949E1	-3.26368E1	2.67926E1	1.69802E-7	2.52428E-3	2.52428E-3	6.34588E-3	2.00673E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.15988E-1	-7.98345E-1	-9.13126E0	-9.14187E0	5.6982E-3	9.31978E-2	2.73469E1	-3.26416E1	-3.27015E1	2.67932E1	1.69794E-7	2.51498E-3	2.51498E-3	6.3074E-3	2.00735E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.16154E-1	-7.98202E-1	-9.13136E0	-9.14216E0	5.96046E-3	9.34839E-2	2.7324E1	-3.26968E1	-3.26296E1	2.68204E1	1.69731E-7	2.52139E-3	2.52139E-3	6.3074E-3	1.99931E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.16345E-1	-7.98202E-1	-9.1315E0	-9.14176E0	5.65052E-3	9.3627E-2	2.73057E1	-3.26524E1	-3.2608E1	2.67842E1	1.69725E-7	2.52276E-3	2.52276E-3	6.32356E-3	1.9934E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.1656E-1	-7.9813E-1	-9.13153E0	-9.14202E0	5.6982E-3	9.35793E-2	2.72654E1	-3.26362E1	-3.26627E1	2.68088E1	1.69802E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.99456E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.16298E-1	-7.98202E-1	-9.13136E0	-9.14192E0	5.72205E-3	9.39131E-2	2.73139E1	-3.26531E1	-3.2626E1	2.67806E1	1.69802E-7	2.51443E-3	2.51443E-3	6.32386E-3	1.99456E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.16202E-1	-7.97892E-1	-9.13122E0	-9.14226E0	5.72205E-3	9.34362E-2	2.73363E1	-3.26741E1	-3.25984E1	2.68208E1	1.69875E-7	2.52099E-3	2.52099E-3	6.30192E-3	1.98937E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.16393E-1	-7.98035E-1	-9.13117E0	-9.14216E0	5.8651E-3	9.35555E-2	2.72815E1	-3.26024E1	-3.26467E1	2.67943E1	1.69581E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.99456E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.16464E-1	-7.97892E-1	-9.13138E0	-9.14218E0	5.74589E-3	9.3627E-2	2.73532E1	-3.26801E1	-3.26398E1	2.67962E1	1.69436E-7	2.52384E-3	2.52384E-3	6.31278E-3	2.00192E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09619E0	-8.16607E-1	-7.98035E-1	-9.13122E0	-9.14195E0	5.55515E-3	9.34362E-2	2.73147E1	-3.26765E1	-3.26362E1	2.68088E1	1.6987E-7	2.52276E-3	2.52276E-3	6.32896E-3	2.00705E-1
1.7E1	1.7E1	0.0E0	6.87E2	4.7E2	-2.0965E0	-8.16703E-1	-7.98035E-1	-9.13129E0	-9.14171E0	5.31673E-3	9.32932E-2	2.73129E1	-3.27119E1	-3.25978E1	2.68028E1	1.69581E-7	2.52139E-3	2.52139E-3	6.30182E-3	2.0153E-1
1.8E1	8.5E1	0.0E0	7.27E2	5.0E2	-2.09634E0	-8.16941E-1	-7.9813E-1	-9.13146E0	-9.14192E0	5.67436E-3	9.32217E-2	2.73345E1	-3.26536E1	-3.26597E1	2.68304E1	1.69802E-7	2.52209E-3	2.52209E-3	6.29645E-3	2.01372E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.16703E-1	-7.97915E-1	-9.13141E0	-9.1419E0	5.79357E-3	9.3174E-2	2.73231E1	-3.26909E1	-3.26476E1	2.68112E1	1.6987E-7	2.52061E-3	2.52061E-3	6.33436E-3	2.00876E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.16631E-1	-7.98154E-1	-9.13153E0	-9.14197E0	5.57899E-3	9.31025E-2	2.73387E1	-3.26673E1	-3.26107E1	2.68082E1	1.69875E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.99283E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.16512E-1	-7.98082E-1	-9.13143E0	-9.14218E0	5.65052E-3	9.34601E-2	2.72638E1	-3.26537E1	-3.2649E1	2.68124E1	1.69802E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.00499E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.1625E-1	-7.98249E-1	-9.13124E0	-9.14173E0	5.74589E-3	9.3317E-2	2.73147E1	-3.26861E1	-3.26092E1	2.67897E1	1.69943E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.00021E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09603E0	-8.16298E-1	-7.98321E-1	-9.13146E0	-9.14197E0	5.62668E-3	9.32932E-2	2.73315E1	-3.26506E1	-3.26248E1	2.6807E1	1.69654E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.00151E-1