[Scan]
initial_time=2016-02-17T21:03:45
final_time=2016-02-17T21:04:04
ip_count=19
run=1032
dataset=7
scan=308
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09348E0
qbias_imon=-1.08774E-4
ql1_vset=
ql1_vmon=-8.16035E-1
ql1_imon=1.36066E-8
ql2_vset=
ql2_vmon=-7.98035E-1
ql2_imon=1.89586E-9
ql3_vset=
ql3_vmon=-9.13136E0
ql3_imon=3.27194E-10
ql4_vset=
ql4_vmon=-9.14207E0
ql4_imon=3.94535E-10
mult1=-9.81263E-9
mult2=-2.77051E-9
rf_tmon=-4.89094E-3
rf_agc=3.24924E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.60284E-3
ql5_imon=1.60842E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66503E0
bslens_imon=2.15392E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1996E1
lens5a_imon=1.99536E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12505E2
lens4a_imon=2.0527E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53628E1
cs_ef1b_imon=3.0382E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0465E2
lens23_imon=1.02227E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05035E1
cs_ea1_imon=2.20029E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40441E0
lens1_imon=2.77686E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64698E1
os_ef1alow_imon=2.98126E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03714E1
cs_ea2_imon=1.56851E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.844E1
cs_ef1a_imon=3.00865E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=1.71552E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11274E1
os_restr1_imon=4.26391E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1599E1
os_ea1_imon=2.18295E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63719E1
os_ef1bup_imon=3.08541E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23912E0
cs_ionrep_imon=1.27934E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91922E2
cs_nozzle_imon=1.93342E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02242E1
cs_anode1_imon=3.25552E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20561E0
olens4_imon=3.68793E-8
tplens_vset=1.4E-1
tplens_vmon=1.61548E0
tplens_imon=-4.15688E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.262E1
iondef3_imon=1.49807E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26597E1
iondef2_imon=1.60107E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02938E2
lens6_imon=2.98491E-4
ql6_vset=1.0E-1
ql6_vmon=9.36508E-2
ql6_imon=4.06337E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26626E0
ionrepsh_imon=2.01766E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33663E1
lens5b_imon=2.18153E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74796E1
cs_ef2b_imon=3.13082E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.87385E0
os_ea2_imon=-6.3867E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.00626E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71312E1
cs_ef2a_imon=3.17263E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0948E0
os_ef2alow_imon=-2.68437E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.64698E-1
os_ef2bup_imon=-5.30806E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10859E1
os_restr2_imon=3.53735E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.3007E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01965E1
cs_anode2_imon=2.28029E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73562E1
iondef1_imon=1.12856E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68058E1
iondef4_imon=1.07909E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.08685E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82499E-1
olens1_imon=9.76885E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.183E0
cs_ionaccel_imon=-1.99241E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47255E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56255E1
einzel_imon=7.69865E-6
window_vset=0.0E0
window_vmon=1.65085E-1
window_imon=-1.06259E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82614E2
mask1_imon=2.39181E-4
mask2_vset=0.0E0
mask2_vmon=-1.8635E1
mask2_imon=-7.45441E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92586E3
multa_neg_imon=7.68248E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.61358E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.07724E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52958E0
defgridb_imon=6.29149E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33355E1
os_fil1_imon=9.5862E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06302E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63816E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30845E1
cs_fil1_imon=1.00586E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62029E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65925E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.68608E-2
os_fil2_imon=-2.65395E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9351E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.99763E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34313E-1
cs_fil2_imon=-2.26353E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.14823E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2259E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=1.9917E-1
chamber_ion_pmon=1.69943E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.3017E-1
res40_imon=-2.70239E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.16369E-1	-7.97749E-1	-9.1315E0	-9.14197E0	5.36442E-3	9.28402E-2	2.72903E1	-3.26602E1	-3.26307E1	2.68099E1	1.69728E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.01372E-1
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09441E0	-8.16274E-1	-7.98082E-1	-9.13146E0	-9.14211E0	5.57899E-3	9.3174E-2	2.72919E1	-3.26561E1	-3.26374E1	2.67794E1	1.69725E-7	2.51847E-3	2.51847E-3	6.29665E-3	2.01047E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.16178E-1	-7.97987E-1	-9.13141E0	-9.14202E0	5.72205E-3	9.28879E-2	2.73015E1	-3.26903E1	-3.26098E1	2.67986E1	1.69728E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.99456E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-8.16393E-1	-7.97987E-1	-9.13107E0	-9.14178E0	5.29289E-3	9.3174E-2	2.73505E1	-3.26838E1	-3.25936E1	2.67848E1	1.69798E-7	2.51525E-3	2.51525E-3	6.31817E-3	1.98661E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.16417E-1	-7.98202E-1	-9.131E0	-9.14161E0	5.38826E-3	9.32693E-2	2.73171E1	-3.26651E1	-3.26512E1	2.68296E1	1.69728E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.99456E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09588E0	-8.16369E-1	-7.97915E-1	-9.13107E0	-9.14187E0	5.60284E-3	9.30786E-2	2.73327E1	-3.26524E1	-3.26494E1	2.68136E1	1.69654E-7	2.52099E-3	2.52099E-3	6.32936E-3	1.9911E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.0958E0	-8.16274E-1	-7.98011E-1	-9.13122E0	-9.1418E0	5.65052E-3	9.30071E-2	2.73688E1	-3.26687E1	-3.26332E1	2.68269E1	1.69949E-7	2.5188E-3	2.5188E-3	6.29645E-3	1.9911E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09402E0	-8.16536E-1	-7.97915E-1	-9.13124E0	-9.14192E0	5.6982E-3	9.31263E-2	2.72853E1	-3.26579E1	-3.26212E1	2.68111E1	1.69949E-7	2.5188E-3	2.5188E-3	6.28552E-3	1.99803E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.1625E-1	-7.98035E-1	-9.13129E0	-9.1419E0	5.88894E-3	9.28402E-2	2.72856E1	-3.26549E1	-3.2659E1	2.68154E1	1.69725E-7	2.52169E-3	2.52169E-3	6.29665E-3	2.01219E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.16059E-1	-7.98273E-1	-9.13124E0	-9.14233E0	5.43594E-3	9.32455E-2	2.72642E1	-3.26657E1	-3.26771E1	2.6795E1	1.69725E-7	2.51632E-3	2.51632E-3	6.30202E-3	1.9985E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.16202E-1	-7.9813E-1	-9.13126E0	-9.14202E0	5.55515E-3	9.31025E-2	2.73219E1	-3.27191E1	-3.27197E1	2.68304E1	1.69802E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.00673E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-8.16178E-1	-7.97725E-1	-9.13143E0	-9.14192E0	5.55515E-3	9.3317E-2	2.73417E1	-3.26801E1	-3.26224E1	2.67956E1	1.69507E-7	2.52977E-3	2.52977E-3	6.33486E-3	2.00151E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.16345E-1	-7.98106E-1	-9.13165E0	-9.14209E0	5.74589E-3	9.34124E-2	2.73339E1	-3.26488E1	-3.26254E1	2.68034E1	1.69728E-7	2.52428E-3	2.52428E-3	6.31837E-3	1.9911E-1
1.7E1	2.3E1	0.0E0	6.87E2	4.7E2	-2.09333E0	-8.16464E-1	-7.98178E-1	-9.13162E0	-9.14192E0	5.45979E-3	9.32217E-2	2.7301E1	-3.26697E1	-3.26307E1	2.68112E1	1.69654E-7	2.51771E-3	2.51771E-3	6.33486E-3	1.99803E-1
1.8E1	8.7E1	0.0E0	7.27E2	5.0E2	-2.0941E0	-8.16154E-1	-7.98416E-1	-9.13134E0	-9.14211E0	5.72205E-3	9.35078E-2	2.72967E1	-3.26879E1	-3.26482E1	2.67711E1	1.69802E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.00673E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09418E0	-8.16345E-1	-7.98106E-1	-9.13165E0	-9.14187E0	5.74589E-3	9.33409E-2	2.73027E1	-3.26194E1	-3.26603E1	2.68196E1	1.69654E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.00325E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.16202E-1	-7.97796E-1	-9.13134E0	-9.14178E0	5.55515E-3	9.33647E-2	2.73207E1	-3.2644E1	-3.25924E1	2.68142E1	1.6987E-7	2.52061E-3	2.52061E-3	6.30202E-3	2.00363E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09402E0	-8.16178E-1	-7.97963E-1	-9.13119E0	-9.14197E0	5.55515E-3	9.34601E-2	2.72962E1	-3.26449E1	-3.26183E1	2.68352E1	1.69802E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.00325E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09379E0	-8.16202E-1	-7.98106E-1	-9.13167E0	-9.14187E0	5.55515E-3	9.32932E-2	2.73243E1	-3.26404E1	-3.26759E1	2.68112E1	1.69728E-7	2.52099E-3	2.52099E-3	6.31837E-3	1.9911E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09348E0	-8.16035E-1	-7.98035E-1	-9.13136E0	-9.14207E0	5.60284E-3	9.36508E-2	2.73562E1	-3.26597E1	-3.262E1	2.68058E1	1.69943E-7	2.52061E-3	2.52061E-3	6.32896E-3	1.9917E-1