[Scan]
initial_time=2016-02-17T21:04:38
final_time=2016-02-17T21:04:58
ip_count=19
run=1032
dataset=7
scan=310
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08818E-4
ql1_vset=
ql1_vmon=-8.15773E-1
ql1_imon=1.36681E-8
ql2_vset=
ql2_vmon=-7.97963E-1
ql2_imon=1.90229E-9
ql3_vset=
ql3_vmon=-9.13107E0
ql3_imon=3.15142E-10
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=4.21393E-10
mult1=-1.0523E-8
mult2=-2.76253E-9
rf_tmon=-3.91761E-3
rf_agc=3.33877E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=1.60043E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68565E0
bslens_imon=2.56877E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19572E1
lens5a_imon=1.99566E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.125E2
lens4a_imon=2.05034E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5361E1
cs_ef1b_imon=3.03027E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04641E2
lens23_imon=1.02316E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05319E1
cs_ea1_imon=2.17747E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35603E0
lens1_imon=2.74874E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64723E1
os_ef1alow_imon=2.98342E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04088E1
cs_ea2_imon=1.55711E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83343E1
cs_ef1a_imon=2.99604E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.71355E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11069E1
os_restr1_imon=4.27941E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15214E1
os_ea1_imon=2.20612E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63767E1
os_ef1bup_imon=3.08577E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26189E0
cs_ionrep_imon=1.26658E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91851E2
cs_nozzle_imon=1.93376E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01172E1
cs_anode1_imon=3.26994E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20546E0
olens4_imon=3.68726E-8
tplens_vset=1.4E-1
tplens_vmon=1.61878E0
tplens_imon=-4.87144E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26086E1
iondef3_imon=1.50422E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26567E1
iondef2_imon=1.59825E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0297E2
lens6_imon=2.98408E-4
ql6_vset=1.0E-1
ql6_vmon=9.30309E-2
ql6_imon=4.04009E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30107E0
ionrepsh_imon=2.00631E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33505E1
lens5b_imon=2.18776E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74772E1
cs_ef2b_imon=3.12145E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.87773E0
os_ea2_imon=-7.51598E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00513E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71246E1
cs_ef2a_imon=3.17551E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.11462E0
os_ef2alow_imon=-2.63752E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.73708E-1
os_ef2bup_imon=-5.40177E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10781E1
os_restr2_imon=3.52221E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23094E2
cs_ionfoca_imon=6.33564E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01845E1
cs_anode2_imon=2.28029E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73063E1
iondef1_imon=1.09762E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6813E1
iondef4_imon=1.09386E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.08451E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=9.77432E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10732E0
cs_ionaccel_imon=-1.99241E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02061E2
cs_ionfocb_imon=1.47187E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56333E1
einzel_imon=7.79956E-6
window_vset=0.0E0
window_vmon=1.72293E-1
window_imon=-1.08421E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82608E2
mask1_imon=2.39019E-4
mask2_vset=0.0E0
mask2_vmon=-1.86194E1
mask2_imon=-6.84173E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92704E3
multa_neg_imon=7.60441E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93738E3
defgrida_imon=6.44008E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50144E3
multb_neg_imon=7.58605E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50161E0
defgridb_imon=6.02503E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33336E1
os_fil1_imon=9.56157E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07347E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64016E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30844E1
cs_fil1_imon=1.00411E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62702E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65768E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.60867E-2
os_fil2_imon=-2.8762E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.99516E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.03691E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3496E-1
cs_fil2_imon=-2.72603E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.83608E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22473E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28592E-3
inlet_lpb_pmon=1.9917E-1
chamber_ion_pmon=1.69653E-7
chamber_cvt_pmon=2.52492E-3
foreline_cvt_pmon=2.52492E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.72216E-1
res40_imon=-2.76006E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-8.16226E-1	-7.97987E-1	-9.13117E0	-9.14207E0	5.96046E-3	9.34839E-2	2.73496E1	-3.26705E1	-3.26512E1	2.68058E1	1.70245E-7	2.52099E-3	2.52099E-3	6.30192E-3	1.99456E-1
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.09565E0	-8.1625E-1	-7.98178E-1	-9.13105E0	-9.14173E0	5.53131E-3	9.32217E-2	2.72903E1	-3.26962E1	-3.26307E1	2.68209E1	1.69654E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.9911E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-8.15964E-1	-7.98202E-1	-9.13134E0	-9.1419E0	5.43594E-3	9.31025E-2	2.72889E1	-3.26747E1	-3.2617E1	2.68136E1	1.69798E-7	2.52492E-3	2.52492E-3	6.32896E-3	1.9934E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.16011E-1	-7.98249E-1	-9.13162E0	-9.14178E0	5.72205E-3	9.31978E-2	2.73352E1	-3.26543E1	-3.27033E1	2.68262E1	1.69654E-7	2.52428E-3	2.52428E-3	6.30192E-3	1.9963E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.15797E-1	-7.98059E-1	-9.13131E0	-9.14199E0	5.48363E-3	9.34362E-2	2.72835E1	-3.26494E1	-3.26326E1	2.67938E1	1.69798E-7	2.51525E-3	2.51525E-3	6.30202E-3	2.00192E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-8.16059E-1	-7.98154E-1	-9.13117E0	-9.14202E0	5.72205E-3	9.32693E-2	2.73165E1	-3.26308E1	-3.26597E1	2.68244E1	1.69691E-7	2.52045E-3	2.52045E-3	6.32936E-3	2.00151E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.15821E-1	-7.98178E-1	-9.13136E0	-9.14207E0	5.8651E-3	9.35555E-2	2.73119E1	-3.26226E1	-3.26505E1	2.68093E1					
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.1594E-1	-7.98082E-1	-9.13124E0	-9.14204E0	5.45979E-3	9.30071E-2	2.73484E1	-3.26506E1	-3.26554E1	2.67908E1	1.6972E-7	2.51679E-3	2.51679E-3	6.3074E-3	1.98955E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.16011E-1	-7.98273E-1	-9.13129E0	-9.14187E0	5.76973E-3	9.27687E-2	2.72859E1	-3.26368E1	-3.26326E1	2.67932E1	1.69875E-7	2.51443E-3	2.51443E-3	6.30192E-3	1.98764E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.1594E-1	-7.98225E-1	-9.13143E0	-9.14156E0	5.65052E-3	9.28164E-2	2.72973E1	-3.26645E1	-3.26194E1	2.67848E1	1.69875E-7	2.53087E-3	2.53087E-3	6.30192E-3	1.9963E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.1594E-1	-7.98011E-1	-9.13167E0	-9.14192E0	5.55515E-3	9.31501E-2	2.73267E1	-3.26717E1	-3.27077E1	2.68064E1	1.69581E-7	2.52647E-3	2.52647E-3	6.31837E-3	2.00847E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.1625E-1	-7.98106E-1	-9.13136E0	-9.14204E0	5.53131E-3	9.2864E-2	2.72901E1	-3.26735E1	-3.26266E1	2.68088E1	1.69765E-7	2.5199E-3	2.5199E-3	6.30466E-3	2.00238E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.16178E-1	-7.98178E-1	-9.13155E0	-9.14228E0	5.45979E-3	9.31025E-2	2.73147E1	-3.26561E1	-3.26452E1	2.67686E1					
1.7E1	2.5E1	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.16154E-1	-7.98225E-1	-9.13169E0	-9.14216E0	5.57899E-3	9.31025E-2	2.73189E1	-3.26837E1	-3.26422E1	2.67962E1	1.70023E-7	2.51552E-3	2.51552E-3	6.34588E-3	2.00151E-1
1.8E1	9.5E1	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.16083E-1	-7.97892E-1	-9.13124E0	-9.1419E0	5.22137E-3	9.31025E-2	2.73285E1	-3.26663E1	-3.26344E1	2.67866E1	1.69581E-7	2.52428E-3	2.52428E-3	6.31837E-3	2.00673E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.16107E-1	-7.97963E-1	-9.13167E0	-9.14178E0	5.38826E-3	9.31978E-2	2.73517E1	-3.26632E1	-3.26484E1	2.67974E1	1.69654E-7	2.51771E-3	2.51771E-3	6.29645E-3	2.00151E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.16154E-1	-7.98035E-1	-9.13162E0	-9.14171E0	5.4121E-3	9.27925E-2	2.73296E1	-3.26432E1	-3.26352E1	2.6798E1	1.69654E-7	2.51552E-3	2.51552E-3	6.33486E-3	1.99283E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09394E0	-8.16107E-1	-7.97772E-1	-9.13148E0	-9.14192E0	5.60284E-3	9.29356E-2	2.73139E1	-3.26762E1	-3.26543E1	2.67938E1	1.70023E-7	2.51771E-3	2.51771E-3	6.32936E-3	1.99977E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-8.15797E-1	-7.97915E-1	-9.13141E0	-9.14183E0	5.57899E-3	9.28879E-2	2.72036E1	-3.26437E1	-3.27228E1	2.68007E1	1.6987E-7	2.51632E-3	2.51632E-3	6.32356E-3	1.9934E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.15773E-1	-7.97963E-1	-9.13107E0	-9.14197E0	5.24521E-3	9.30309E-2	2.73063E1	-3.26567E1	-3.26086E1	2.6813E1	1.69653E-7	2.52492E-3	2.52492E-3	6.28592E-3	1.9917E-1