[Scan]
initial_time=2016-02-17T21:05:05
final_time=2016-02-17T21:05:24
ip_count=19
run=1032
dataset=7
scan=311
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.08807E-4
ql1_vset=
ql1_vmon=-8.16369E-1
ql1_imon=1.36526E-8
ql2_vset=
ql2_vmon=-7.98249E-1
ql2_imon=1.90978E-9
ql3_vset=
ql3_vmon=-9.13107E0
ql3_imon=3.15785E-10
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=3.85368E-10
mult1=-9.9324E-9
mult2=-2.7869E-9
rf_tmon=-5.70775E-3
rf_agc=3.35843E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.6982E-3
ql5_imon=1.57145E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66223E0
bslens_imon=2.48867E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19701E1
lens5a_imon=1.9728E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12494E2
lens4a_imon=2.04999E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53555E1
cs_ef1b_imon=3.04315E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04613E2
lens23_imon=1.02091E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0535E1
cs_ea1_imon=2.20116E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39752E0
lens1_imon=2.57852E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64521E1
os_ef1alow_imon=2.98477E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03815E1
cs_ea2_imon=1.58496E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=2.99749E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.71319E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11198E1
os_restr1_imon=4.27446E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15799E1
os_ea1_imon=2.18319E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63648E1
os_ef1bup_imon=3.07309E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25147E0
cs_ionrep_imon=1.2529E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93338E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01909E1
cs_anode1_imon=3.25161E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20542E0
olens4_imon=3.6907E-8
tplens_vset=1.4E-1
tplens_vmon=1.604E0
tplens_imon=-4.8001E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26508E1
iondef3_imon=1.52169E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26824E1
iondef2_imon=1.57972E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02965E2
lens6_imon=2.98642E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=4.00555E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30638E0
ionrepsh_imon=1.99713E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33327E1
lens5b_imon=2.17495E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74632E1
cs_ef2b_imon=3.12661E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.81925E0
os_ea2_imon=-5.77343E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06153E2
lens4b_imon=2.00582E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7132E1
cs_ef2a_imon=3.18462E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06953E0
os_ef2alow_imon=-2.80261E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.35058E-1
os_ef2bup_imon=-5.43739E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10843E1
os_restr2_imon=3.52519E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.32399E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01927E1
cs_anode2_imon=2.27442E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72803E1
iondef1_imon=1.08893E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68031E1
iondef4_imon=1.08653E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.08727E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82642E-1
olens1_imon=9.78309E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15197E0
cs_ionaccel_imon=-2.01667E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02038E2
cs_ionfocb_imon=1.47271E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56418E1
einzel_imon=7.75146E-6
window_vset=0.0E0
window_vmon=1.5522E-1
window_imon=-1.05108E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.39013E-4
mask2_vset=0.0E0
mask2_vmon=-1.86213E1
mask2_imon=-6.80569E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.6249E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93739E3
defgrida_imon=6.66653E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.61367E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44621E0
defgridb_imon=6.19858E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33373E1
os_fil1_imon=9.56386E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08365E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63992E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30848E1
cs_fil1_imon=1.00461E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61605E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65402E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.59452E-2
os_fil2_imon=-2.73112E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83483E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.9941E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34223E-1
cs_fil2_imon=-2.32567E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.24335E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22422E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.388E-1
res40_imon=-2.67911E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-8.1594E-1	-7.98154E-1	-9.13134E0	-9.14197E0	5.26905E-3	9.29594E-2	2.7301E1	-3.26549E1	-3.26319E1	2.67914E1	1.69887E-7	2.51611E-3	2.51611E-3	6.3074E-3	1.97197E-1
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.16131E-1	-7.98178E-1	-9.13143E0	-9.14185E0	5.26905E-3	9.30786E-2	2.73259E1	-3.26799E1	-3.26254E1	2.6772E1	1.69653E-7	2.50882E-3	2.50882E-3	6.32896E-3	1.96135E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09402E0	-8.16059E-1	-7.98178E-1	-9.13141E0	-9.14207E0	5.34058E-3	9.31263E-2	2.72673E1	-3.26933E1	-3.26201E1	2.67879E1	1.69806E-7	2.51804E-3	2.51804E-3	6.32418E-3	1.97119E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.16107E-1	-7.97606E-1	-9.1315E0	-9.14178E0	5.45979E-3	9.35316E-2	2.73285E1	-3.26458E1	-3.2635E1	2.67962E1	1.6987E-7	2.52276E-3	2.52276E-3	6.30202E-3	2.00534E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.15892E-1	-7.98059E-1	-9.13129E0	-9.14187E0	5.48363E-3	9.29832E-2	2.73033E1	-3.26687E1	-3.26284E1	2.67878E1	1.69728E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.00325E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.1594E-1	-7.97939E-1	-9.13129E0	-9.14204E0	5.38826E-3	9.30786E-2	2.73195E1	-3.26975E1	-3.26278E1	2.68016E1	1.69802E-7	2.51334E-3	2.51334E-3	6.29098E-3	1.98419E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.16464E-1	-7.98059E-1	-9.13103E0	-9.14202E0	5.24521E-3	9.31501E-2	2.73159E1	-3.26434E1	-3.26086E1	2.67956E1	1.69654E-7	2.52538E-3	2.52538E-3	6.31837E-3	2.00499E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09433E0	-8.16274E-1	-7.9813E-1	-9.13124E0	-9.1419E0	5.53131E-3	9.31978E-2	2.73204E1	-3.26531E1	-3.26567E1	2.67872E1	1.69654E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.99803E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.15964E-1	-7.98178E-1	-9.131E0	-9.14183E0	5.72205E-3	9.30071E-2	2.73357E1	-3.26921E1	-3.2608E1	2.68082E1	1.69802E-7	2.52647E-3	2.52647E-3	6.30192E-3	2.00499E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.16417E-1	-7.98297E-1	-9.13146E0	-9.14187E0	5.38826E-3	9.30548E-2	2.73237E1	-3.26699E1	-3.2617E1	2.68058E1	1.69725E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.00192E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09603E0	-8.16536E-1	-7.98368E-1	-9.13124E0	-9.14204E0	5.26905E-3	9.3174E-2	2.72852E1	-3.2655E1	-3.26835E1	2.67886E1	1.69949E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.00151E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09619E0	-8.1625E-1	-7.98225E-1	-9.13141E0	-9.14202E0	5.19753E-3	9.31263E-2	2.72921E1	-3.26726E1	-3.25735E1	2.67758E1	1.6972E-7	2.52093E-3	2.52093E-3	6.323E-3	1.98628E-1
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.16107E-1	-7.98035E-1	-9.13129E0	-9.14209E0	5.34058E-3	9.31978E-2	2.73228E1	-3.26517E1	-3.26358E1	2.6798E1	1.70015E-7	2.52923E-3	2.52923E-3	6.31817E-3	2.00192E-1
1.7E1	2.2E1	0.0E0	6.87E2	4.7E2	-2.0941E0	-8.16226E-1	-7.98011E-1	-9.13136E0	-9.14209E0	5.50747E-3	9.33409E-2	2.72874E1	-3.2685E1	-3.2649E1	2.68184E1	1.69656E-7	2.51693E-3	2.51693E-3	6.30182E-3	2.00463E-1
1.8E1	9.5E1	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.16274E-1	-7.97725E-1	-9.13122E0	-9.14171E0	5.65052E-3	9.30071E-2	2.73075E1	-3.2647E1	-3.26609E1	2.6816E1	1.69581E-7	2.52384E-3	2.52384E-3	6.3074E-3	2.00192E-1
1.9E1	4.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.16369E-1	-7.97963E-1	-9.13057E0	-9.14197E0	5.26905E-3	9.32932E-2	2.72883E1	-3.26669E1	-3.26266E1	2.68196E1	1.69581E-7	2.5188E-3	2.5188E-3	6.29098E-3	2.00847E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.16274E-1	-7.98082E-1	-9.13088E0	-9.14211E0	5.43594E-3	9.35078E-2	2.72659E1	-3.26643E1	-3.2626E1	2.68018E1	1.69654E-7	2.51662E-3	2.51662E-3	6.28552E-3	1.99803E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.16417E-1	-7.9813E-1	-9.13107E0	-9.14207E0	5.76973E-3	9.34124E-2	2.72223E1	-3.26081E1	-3.26817E1	2.67935E1	1.69701E-7	2.51721E-3	2.51721E-3	6.31638E-3	1.99567E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.16369E-1	-7.9813E-1	-9.13103E0	-9.14214E0	5.6982E-3	9.34124E-2	2.72402E1	-3.26659E1	-3.26807E1	2.68271E1	1.69548E-7	2.51974E-3	2.51974E-3	6.32455E-3	1.99309E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-8.16369E-1	-7.98249E-1	-9.13107E0	-9.14204E0	5.6982E-3	9.32217E-2	2.72803E1	-3.26824E1	-3.26508E1	2.68031E1