[Scan]
initial_time=2016-02-17T21:06:25
final_time=2016-02-17T21:06:44
ip_count=19
run=1032
dataset=7
scan=314
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08805E-4
ql1_vset=
ql1_vmon=-8.16107E-1
ql1_imon=1.36587E-8
ql2_vset=
ql2_vmon=-7.97868E-1
ql2_imon=1.92856E-9
ql3_vset=
ql3_vmon=-9.13124E0
ql3_imon=2.98619E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=3.98123E-10
mult1=-1.05471E-8
mult2=-2.80844E-9
rf_tmon=-4.1339E-3
rf_agc=3.34237E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=1.58608E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65528E0
bslens_imon=2.4999E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19973E1
lens5a_imon=1.99505E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12519E2
lens4a_imon=2.05201E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53598E1
cs_ef1b_imon=3.04195E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04622E2
lens23_imon=1.02145E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05168E1
cs_ea1_imon=2.18554E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3911E0
lens1_imon=2.90662E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64759E1
os_ef1alow_imon=2.98391E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03742E1
cs_ea2_imon=1.55183E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84632E1
cs_ef1a_imon=3.0058E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.71459E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11147E1
os_restr1_imon=4.2767E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15259E1
os_ea1_imon=2.20536E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63757E1
os_ef1bup_imon=3.08643E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25905E0
cs_ionrep_imon=1.26226E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91922E2
cs_nozzle_imon=1.9334E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01641E1
cs_anode1_imon=3.25081E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=3.69134E-8
tplens_vset=1.4E-1
tplens_vmon=1.58118E0
tplens_imon=-1.73301E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26428E1
iondef3_imon=1.49656E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26759E1
iondef2_imon=1.58972E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02945E2
lens6_imon=2.9853E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=4.04366E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27527E0
ionrepsh_imon=2.00478E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33675E1
lens5b_imon=2.18971E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74524E1
cs_ef2b_imon=3.11875E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.839E0
os_ea2_imon=-7.3297E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06147E2
lens4b_imon=2.00734E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71182E1
cs_ef2a_imon=3.17783E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10263E0
os_ef2alow_imon=-2.63714E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.5631E-1
os_ef2bup_imon=-5.38259E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10701E1
os_restr2_imon=3.53613E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.31145E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01798E1
cs_anode2_imon=2.28434E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72997E1
iondef1_imon=1.07072E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67848E1
iondef4_imon=1.07322E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.0894E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82571E-1
olens1_imon=9.78326E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11508E0
cs_ionaccel_imon=-1.98726E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47167E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56237E1
einzel_imon=7.62181E-6
window_vset=0.0E0
window_vmon=1.46443E-1
window_imon=-1.15668E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82598E2
mask1_imon=2.39181E-4
mask2_vset=0.0E0
mask2_vmon=-1.8617E1
mask2_imon=-8.2653E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92633E3
multa_neg_imon=7.40483E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.56706E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50109E3
multb_neg_imon=7.73159E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3949E0
defgridb_imon=6.00044E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33365E1
os_fil1_imon=9.57821E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07248E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63976E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30911E1
cs_fil1_imon=1.00514E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62273E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65954E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.64809E-2
os_fil2_imon=-2.66339E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.05716E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.07662E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37143E-1
cs_fil2_imon=-2.27532E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.58196E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22572E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.47825E-1
res40_imon=-2.69622E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	9.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-8.15868E-1	-7.9782E-1	-9.13141E0	-9.14235E0	5.67436E-3	9.30071E-2	2.73051E1	-3.26963E1	-3.26254E1	2.678E1	1.69652E-7	2.51709E-3	2.51709E-3	6.3074E-3	2.00399E-1
2.0E0	5.0E0	0.0E0	3.16E2	1.6E2	-2.09441E0	-8.15487E-1	-7.97892E-1	-9.1315E0	-9.14216E0	5.43594E-3	9.30309E-2	2.73327E1	-3.26398E1	-3.26609E1	2.68106E1	1.69875E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.00847E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09418E0	-8.15701E-1	-7.98106E-1	-9.13112E0	-9.14199E0	5.62668E-3	9.3317E-2	2.73092E1	-3.26608E1	-3.26537E1	2.67949E1	1.69875E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.00673E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09394E0	-8.1625E-1	-7.97868E-1	-9.13117E0	-9.14218E0	5.43594E-3	9.31263E-2	2.73117E1	-3.26813E1	-3.26374E1	2.67944E1	1.70007E-7	2.51603E-3	2.51603E-3	6.31798E-3	2.00567E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09394E0	-8.15845E-1	-7.98106E-1	-9.13134E0	-9.14202E0	5.57899E-3	9.35793E-2	2.73195E1	-3.27101E1	-3.26068E1	2.67914E1	1.69806E-7	2.52585E-3	2.52585E-3	6.29067E-3	1.99931E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-8.16178E-1	-7.98178E-1	-9.1316E0	-9.14197E0	5.65052E-3	9.35078E-2	2.73508E1	-3.2626E1	-3.26603E1	2.68196E1	1.69802E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.99803E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0941E0	-8.15916E-1	-7.98368E-1	-9.131E0	-9.14216E0	5.72205E-3	9.36985E-2	2.72727E1	-3.26685E1	-3.26632E1	2.68034E1	1.69725E-7	2.52815E-3	2.52815E-3	6.32356E-3	1.99E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-8.15964E-1	-7.98249E-1	-9.13134E0	-9.14218E0	5.84126E-3	9.34124E-2	2.73021E1	-3.26266E1	-3.26188E1	2.67986E1	1.69802E-7	2.51771E-3	2.51771E-3	6.29645E-3	1.99283E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.16274E-1	-7.98154E-1	-9.13129E0	-9.14202E0	5.72205E-3	9.31978E-2	2.72854E1	-3.26741E1	-3.26202E1	2.68221E1	1.69654E-7	2.50898E-3	2.50898E-3	6.29645E-3	1.99283E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.16178E-1	-7.98321E-1	-9.13131E0	-9.14209E0	5.84126E-3	9.32693E-2	2.73242E1	-3.26629E1	-3.26107E1	2.67889E1	1.69652E-7	2.51182E-3	2.51182E-3	6.31798E-3	1.99061E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.16131E-1	-7.98082E-1	-9.13115E0	-9.14197E0	5.50747E-3	9.3174E-2	2.73741E1	-3.27139E1	-3.26001E1	2.68034E1	1.69657E-7	2.51271E-3	2.51271E-3	6.3131E-3	1.98625E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09379E0	-8.16059E-1	-7.98011E-1	-9.13119E0	-9.14218E0	5.53131E-3	9.35555E-2	2.73069E1	-3.26693E1	-3.26272E1	2.67758E1	1.70023E-7	2.52977E-3	2.52977E-3	6.31837E-3	1.99283E-1
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.16059E-1	-7.98035E-1	-9.13143E0	-9.14207E0	5.76973E-3	9.32217E-2	2.73429E1	-3.26741E1	-3.26585E1	2.68286E1	1.69802E-7	2.51552E-3	2.51552E-3	6.29645E-3	1.99977E-1
1.7E1	3.2E1	0.0E0	6.87E2	4.7E2	-2.09464E0	-8.16321E-1	-7.98154E-1	-9.13126E0	-9.14197E0	5.45979E-3	9.29594E-2	2.73231E1	-3.26951E1	-3.26392E1	2.67974E1	1.69581E-7	2.52099E-3	2.52099E-3	6.29645E-3	1.9911E-1
1.8E1	7.0E1	0.0E0	7.27E2	5.0E2	-2.0941E0	-8.15964E-1	-7.97892E-1	-9.1311E0	-9.14235E0	5.31673E-3	9.30309E-2	2.72974E1	-3.26555E1	-3.26319E1	2.67937E1	1.69436E-7	2.50989E-3	2.50989E-3	6.33436E-3	2.00363E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.16154E-1	-7.97892E-1	-9.13143E0	-9.1423E0	5.50747E-3	9.32217E-2	2.73069E1	-3.26615E1	-3.26182E1	2.67824E1	1.69802E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.01197E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09603E0	-8.15916E-1	-7.9782E-1	-9.13126E0	-9.14204E0	5.31673E-3	9.32455E-2	2.73448E1	-3.26561E1	-3.26344E1	2.6795E1	1.69581E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.99977E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09611E0	-8.15916E-1	-7.97701E-1	-9.13126E0	-9.14209E0	5.45979E-3	9.31263E-2	2.73611E1	-3.26685E1	-3.26107E1	2.67535E1	1.69802E-7	2.52538E-3	2.52538E-3	6.31837E-3	1.97559E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0958E0	-8.15868E-1	-7.98059E-1	-9.13117E0	-9.14192E0	5.43594E-3	9.31978E-2	2.7242E1	-3.26337E1	-3.26673E1	2.68117E1	1.6987E-7	2.51954E-3	2.51954E-3	6.3074E-3	1.98238E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.16107E-1	-7.97868E-1	-9.13124E0	-9.14199E0	5.48363E-3	9.31263E-2	2.72997E1	-3.26759E1	-3.26428E1	2.67848E1