[Scan]
initial_time=2016-02-17T21:07:18
final_time=2016-02-17T21:07:37
ip_count=19
run=1032
dataset=7
scan=316
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0958E0
qbias_imon=-1.08744E-4
ql1_vset=
ql1_vmon=-8.16584E-1
ql1_imon=1.36621E-8
ql2_vset=
ql2_vmon=-7.98321E-1
ql2_imon=1.89275E-9
ql3_vset=
ql3_vmon=-9.13138E0
ql3_imon=3.30794E-10
ql4_vset=
ql4_vmon=-9.14192E0
ql4_imon=3.88837E-10
mult1=-9.12106E-9
mult2=-2.8526E-9
rf_tmon=-5.00499E-3
rf_agc=3.29788E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.36442E-3
ql5_imon=1.57284E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68356E0
bslens_imon=2.76847E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20013E1
lens5a_imon=1.96324E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12475E2
lens4a_imon=2.05089E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53316E1
cs_ef1b_imon=3.04649E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04638E2
lens23_imon=1.0197E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05036E1
cs_ea1_imon=2.20622E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36355E0
lens1_imon=2.60985E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6453E1
os_ef1alow_imon=2.96901E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04075E1
cs_ea2_imon=1.58472E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84184E1
cs_ef1a_imon=3.00721E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.71649E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1161E1
os_restr1_imon=4.27977E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14909E1
os_ea1_imon=2.20946E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63665E1
os_ef1bup_imon=3.08001E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27193E0
cs_ionrep_imon=1.28587E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.93543E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01953E1
cs_anode1_imon=3.25336E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20525E0
olens4_imon=3.68653E-8
tplens_vset=1.4E-1
tplens_vmon=1.64263E0
tplens_imon=-1.19098E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26284E1
iondef3_imon=1.49172E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26661E1
iondef2_imon=1.58004E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02956E2
lens6_imon=2.98587E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=4.05426E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26111E0
ionrepsh_imon=2.0029E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33598E1
lens5b_imon=2.19685E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74477E1
cs_ef2b_imon=3.12542E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.82589E0
os_ea2_imon=-1.0636E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.00817E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71132E1
cs_ef2a_imon=3.18416E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09781E0
os_ef2alow_imon=-2.77808E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.73708E-1
os_ef2bup_imon=-5.30085E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10577E1
os_restr2_imon=3.53771E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.28739E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01845E1
cs_anode2_imon=2.26695E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73116E1
iondef1_imon=1.10959E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68012E1
iondef4_imon=1.08954E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.08865E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82618E-1
olens1_imon=9.77401E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11392E0
cs_ionaccel_imon=-2.08972E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.47215E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56363E1
einzel_imon=7.64099E-6
window_vset=0.0E0
window_vmon=1.97521E-1
window_imon=-1.02655E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8261E2
mask1_imon=2.39041E-4
mask2_vset=0.0E0
mask2_vmon=-1.86416E1
mask2_imon=-6.94985E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92621E3
multa_neg_imon=8.13985E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.52123E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50111E3
multb_neg_imon=7.56306E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40156E0
defgridb_imon=6.15712E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33347E1
os_fil1_imon=9.58302E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07131E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63889E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30949E1
cs_fil1_imon=1.00645E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61393E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65698E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.64809E-2
os_fil2_imon=-2.61792E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.63476E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.05236E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33277E-1
cs_fil2_imon=-2.34161E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.55687E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22573E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.9951E-1
chamber_ion_pmon=1.6987E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.72817E-1
res40_imon=-2.67356E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=210
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E1	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.16131E-1	-7.98321E-1	-9.13134E0	-9.14202E0	5.67436E-3	9.34362E-2	2.73505E1	-3.26791E1	-3.26225E1	2.68134E1	1.69653E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.00021E-1
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.16298E-1	-7.98345E-1	-9.1311E0	-9.14197E0	5.65052E-3	9.31501E-2	2.73147E1	-3.26831E1	-3.26368E1	2.6786E1	1.69802E-7	2.52538E-3	2.52538E-3	6.3074E-3	2.00325E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.16417E-1	-7.98202E-1	-9.13155E0	-9.14202E0	5.31673E-3	9.32455E-2	2.73281E1	-3.26543E1	-3.26626E1	2.67854E1	1.69802E-7	2.51334E-3	2.51334E-3	6.32386E-3	2.00673E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.1625E-1	-7.98225E-1	-9.13122E0	-9.14204E0	5.8651E-3	9.32693E-2	2.73177E1	-3.26621E1	-3.26639E1	2.681E1	1.69653E-7	2.51954E-3	2.51954E-3	6.3074E-3	1.9968E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09418E0	-8.16417E-1	-7.98273E-1	-9.13138E0	-9.14202E0	5.57899E-3	9.33886E-2	2.73252E1	-3.26791E1	-3.26236E1	2.68041E1	1.69798E-7	2.51954E-3	2.51954E-3	6.33436E-3	2.00192E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09387E0	-8.16083E-1	-7.98082E-1	-9.13115E0	-9.14216E0	5.79357E-3	9.32693E-2	2.73334E1	-3.26744E1	-3.26242E1	2.68076E1	1.69802E-7	2.51771E-3	2.51771E-3	6.29645E-3	1.99803E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.1625E-1	-7.98225E-1	-9.13134E0	-9.1419E0	5.31673E-3	9.35078E-2	2.72931E1	-3.26428E1	-3.26536E1	2.68154E1	1.69794E-7	2.51603E-3	2.51603E-3	6.28103E-3	1.99227E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09595E0	-8.1625E-1	-7.98345E-1	-9.13141E0	-9.14192E0	5.50747E-3	9.34839E-2	2.73003E1	-3.26573E1	-3.26356E1	2.67872E1	1.69581E-7	2.5147E-3	2.5147E-3	6.32418E-3	1.98696E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09642E0	-8.16178E-1	-7.97987E-1	-9.13131E0	-9.1419E0	5.55515E-3	9.34124E-2	2.73045E1	-3.26482E1	-3.26302E1	2.67932E1	1.69725E-7	2.52061E-3	2.52061E-3	6.29665E-3	1.9968E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09611E0	-8.16226E-1	-7.98035E-1	-9.13134E0	-9.14166E0	5.24521E-3	9.34362E-2	2.73063E1	-3.26693E1	-3.26272E1	2.68034E1	1.69581E-7	2.51693E-3	2.51693E-3	6.3074E-3	1.99577E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0958E0	-8.16202E-1	-7.98082E-1	-9.13122E0	-9.14192E0	5.72205E-3	9.31978E-2	2.73454E1	-3.26705E1	-3.25323E1	2.6807E1	1.69802E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.00673E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09603E0	-8.16107E-1	-7.98225E-1	-9.13131E0	-9.14199E0	5.67436E-3	9.33886E-2	2.73111E1	-3.26687E1	-3.26146E1	2.67932E1	1.69653E-7	2.52169E-3	2.52169E-3	6.31278E-3	1.9951E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09634E0	-8.16011E-1	-7.98345E-1	-9.13115E0	-9.14154E0	5.79357E-3	9.32932E-2	2.73027E1	-3.26795E1	-3.25948E1	2.67806E1	1.69731E-7	2.5225E-3	2.5225E-3	6.32978E-3	1.99224E-1
1.7E1	1.3E1	0.0E0	6.87E2	4.7E2	-2.09549E0	-8.16512E-1	-7.97939E-1	-9.13088E0	-9.14159E0	5.65052E-3	9.34124E-2	2.73193E1	-3.26537E1	-3.26071E1	2.6818E1	1.69653E-7	2.51632E-3	2.51632E-3	6.31278E-3	1.9917E-1
1.8E1	9.2E1	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.16274E-1	-7.97915E-1	-9.13107E0	-9.14171E0	5.24521E-3	9.34601E-2	2.72835E1	-3.26404E1	-3.26476E1	2.67836E1	1.69728E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.98764E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.16417E-1	-7.97963E-1	-9.1311E0	-9.14173E0	5.53131E-3	9.29832E-2	2.73297E1	-3.26963E1	-3.2653E1	2.67872E1	1.69728E-7	2.52209E-3	2.52209E-3	6.31837E-3	1.99283E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09394E0	-8.16488E-1	-7.97939E-1	-9.13124E0	-9.14161E0	5.6982E-3	9.28879E-2	2.73111E1	-3.26681E1	-3.26645E1	2.67734E1	1.69581E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.99977E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.16512E-1	-7.98154E-1	-9.13107E0	-9.14173E0	5.60284E-3	9.31263E-2	2.72986E1	-3.26596E1	-3.26585E1	2.67794E1	1.69802E-7	2.51334E-3	2.51334E-3	6.3074E-3	1.99456E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.1656E-1	-7.98345E-1	-9.13122E0	-9.1419E0	5.74589E-3	9.31263E-2	2.73171E1	-3.27011E1	-3.26212E1	2.6795E1	1.69653E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.98322E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0958E0	-8.16584E-1	-7.98321E-1	-9.13138E0	-9.14192E0	5.36442E-3	9.34362E-2	2.73116E1	-3.26661E1	-3.26284E1	2.68012E1	1.6987E-7	2.51525E-3	2.51525E-3	6.3074E-3	1.9951E-1