[Scan]
initial_time=2016-02-17T21:07:45
final_time=2016-02-17T21:08:04
ip_count=19
run=1032
dataset=7
scan=317
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08735E-4
ql1_vset=
ql1_vmon=-8.16488E-1
ql1_imon=1.36726E-8
ql2_vset=
ql2_vmon=-7.97939E-1
ql2_imon=1.93532E-9
ql3_vset=
ql3_vmon=-9.13143E0
ql3_imon=3.61574E-10
ql4_vset=
ql4_vmon=-9.14211E0
ql4_imon=4.06957E-10
mult1=-9.70427E-9
mult2=-2.71661E-9
rf_tmon=-4.72271E-3
rf_agc=3.31413E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.6982E-3
ql5_imon=1.55197E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66614E0
bslens_imon=2.54857E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19785E1
lens5a_imon=2.01011E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12467E2
lens4a_imon=2.05075E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53526E1
cs_ef1b_imon=3.03856E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02262E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05012E1
cs_ea1_imon=2.20261E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38698E0
lens1_imon=2.65311E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64644E1
os_ef1alow_imon=2.97802E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03889E1
cs_ea2_imon=1.58436E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8401E1
cs_ef1a_imon=2.99351E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.71653E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.114E1
os_restr1_imon=4.28193E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15618E1
os_ea1_imon=2.18819E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63695E1
os_ef1bup_imon=3.07244E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21905E0
cs_ionrep_imon=1.23901E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93463E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01623E1
cs_anode1_imon=3.2512E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20539E0
olens4_imon=3.69172E-8
tplens_vset=1.4E-1
tplens_vmon=1.60058E0
tplens_imon=-2.99346E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26146E1
iondef3_imon=1.48595E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26573E1
iondef2_imon=1.57499E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02955E2
lens6_imon=2.98591E-4
ql6_vset=1.0E-1
ql6_vmon=9.30071E-2
ql6_imon=4.0875E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24188E0
ionrepsh_imon=2.0184E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34379E1
lens5b_imon=2.18134E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74705E1
cs_ef2b_imon=3.11533E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.82529E0
os_ea2_imon=-7.35545E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06154E2
lens4b_imon=2.00634E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.19317E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10321E0
os_ef2alow_imon=-2.73483E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.61695E-1
os_ef2bup_imon=-5.46303E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10829E1
os_restr2_imon=3.53411E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.31082E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02103E1
cs_anode2_imon=2.28173E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72847E1
iondef1_imon=1.10454E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6807E1
iondef4_imon=1.07909E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=1.08757E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82881E-1
olens1_imon=9.76511E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10972E0
cs_ionaccel_imon=-1.92754E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47259E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55991E1
einzel_imon=7.6554E-6
window_vset=0.0E0
window_vmon=1.51871E-1
window_imon=-1.13107E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82618E2
mask1_imon=2.39153E-4
mask2_vset=0.0E0
mask2_vmon=-1.86146E1
mask2_imon=-7.23817E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92637E3
multa_neg_imon=7.25664E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.47797E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.31432E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.28728E0
defgridb_imon=6.04537E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3337E1
os_fil1_imon=9.57857E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07215E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63848E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30939E1
cs_fil1_imon=1.00562E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62648E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65684E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.6223E-2
os_fil2_imon=-2.67197E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.04922E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.0704E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3755E-1
cs_fil2_imon=-2.24551E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2143E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22559E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.00534E-1
chamber_ion_pmon=1.6987E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.00447E-1
res40_imon=-2.66635E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-8.16107E-1	-7.97796E-1	-9.13093E0	-9.14207E0	5.65052E-3	9.32455E-2	2.72927E1	-3.26567E1	-3.2613E1	2.68221E1	1.69802E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.01197E-1
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.15964E-1	-7.97653E-1	-9.13095E0	-9.14207E0	5.74589E-3	9.33886E-2	2.73143E1	-3.2634E1	-3.26591E1	2.68051E1	1.69725E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.00363E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.16059E-1	-7.97391E-1	-9.13131E0	-9.14209E0	5.67436E-3	9.29832E-2	2.73305E1	-3.26732E1	-3.25947E1	2.67955E1	1.69949E-7	2.52428E-3	2.52428E-3	6.29645E-3	2.00847E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09611E0	-8.15868E-1	-7.97749E-1	-9.13131E0	-9.14218E0	5.55515E-3	9.28879E-2	2.73261E1	-3.26675E1	-3.26248E1	2.6825E1	1.69798E-7	2.52384E-3	2.52384E-3	6.31278E-3	1.9883E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09642E0	-8.16274E-1	-7.98345E-1	-9.13119E0	-9.14216E0	5.6982E-3	9.28879E-2	2.73128E1	-3.2682E1	-3.26242E1	2.67848E1	1.69731E-7	2.51581E-3	2.51581E-3	6.31299E-3	1.99224E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09588E0	-8.16226E-1	-7.98154E-1	-9.13088E0	-9.14223E0	5.53131E-3	9.30786E-2	2.73003E1	-3.26458E1	-3.2617E1	2.67986E1	1.69798E-7	2.51525E-3	2.51525E-3	6.33436E-3	1.99E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.15797E-1	-7.98059E-1	-9.13138E0	-9.14199E0	5.65052E-3	9.28164E-2	2.73177E1	-3.26458E1	-3.26374E1	2.68148E1	1.69728E-7	2.5188E-3	2.5188E-3	6.34037E-3	2.00325E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09619E0	-8.16274E-1	-7.98249E-1	-9.13136E0	-9.14161E0	5.72205E-3	9.29356E-2	2.72668E1	-3.26419E1	-3.25983E1	2.67856E1	1.6987E-7	2.51203E-3	2.51203E-3	6.31817E-3	2.00876E-1
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-8.16226E-1	-7.98178E-1	-9.13177E0	-9.14185E0	5.76973E-3	9.27925E-2	2.73187E1	-3.26791E1	-3.26136E1	2.68148E1	1.69581E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.01197E-1
1.3E1	1.0E0	1.0E0	5.25E2	3.53E2	-2.09472E0	-8.16393E-1	-7.98345E-1	-9.13162E0	-9.14185E0	5.84126E-3	9.29117E-2	2.72899E1	-3.26796E1	-3.2629E1	2.67949E1	1.69508E-7	2.51954E-3	2.51954E-3	6.3074E-3	2.00363E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.16274E-1	-7.98035E-1	-9.13134E0	-9.14178E0	5.45979E-3	9.27925E-2	2.72847E1	-3.26176E1	-3.26807E1	2.6801E1	1.69581E-7	2.51364E-3	2.51364E-3	6.3074E-3	2.01276E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-8.16321E-1	-7.98059E-1	-9.13131E0	-9.1419E0	5.48363E-3	9.31501E-2	2.73186E1	-3.26621E1	-3.26187E1	2.67986E1	1.69875E-7	2.52647E-3	2.52647E-3	6.32936E-3	1.9911E-1
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.16345E-1	-7.97987E-1	-9.13148E0	-9.14221E0	5.36442E-3	9.29832E-2	2.73358E1	-3.26897E1	-3.26337E1	2.68136E1	1.69691E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.00064E-1
1.7E1	2.0E1	1.0E0	6.87E2	4.7E2	-2.09495E0	-8.16393E-1	-7.97963E-1	-9.13146E0	-9.14199E0	5.60284E-3	9.30071E-2	2.73075E1	-3.26771E1	-3.2617E1	2.68058E1					
1.8E1	9.6E1	0.0E0	7.27E2	5.0E2	-2.09402E0	-8.16298E-1	-7.97987E-1	-9.13138E0	-9.14233E0	5.65052E-3	9.27687E-2	2.72624E1	-3.26669E1	-3.26675E1	2.68304E1	1.69581E-7	2.52647E-3	2.52647E-3	6.31837E-3	1.99283E-1
1.9E1	2.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.16941E-1	-7.9813E-1	-9.1316E0	-9.14235E0	5.81741E-3	9.31263E-2	2.73021E1	-3.2647E1	-3.26699E1	2.67968E1	1.69875E-7	2.51771E-3	2.51771E-3	6.32936E-3	1.9911E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.16774E-1	-7.98106E-1	-9.13157E0	-9.14237E0	5.6982E-3	9.30309E-2	2.73273E1	-3.26362E1	-3.26561E1	2.67932E1	1.70015E-7	2.51954E-3	2.51954E-3	6.31278E-3	1.9934E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.16536E-1	-7.98059E-1	-9.13157E0	-9.14216E0	5.43594E-3	9.29117E-2	2.7288E1	-3.26649E1	-3.26354E1	2.67833E1	1.69728E-7	2.52428E-3	2.52428E-3	6.29645E-3	1.99803E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09379E0	-8.16464E-1	-7.9813E-1	-9.13153E0	-9.14216E0	5.38826E-3	9.33409E-2	2.73234E1	-3.26378E1	-3.26231E1	2.67932E1	1.69728E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.00847E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.16488E-1	-7.97939E-1	-9.13143E0	-9.14211E0	5.6982E-3	9.30071E-2	2.72847E1	-3.26573E1	-3.26146E1	2.6807E1	1.6987E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.00534E-1