[Scan]
initial_time=2016-02-17T21:08:11
final_time=2016-02-17T21:08:31
ip_count=19
run=1032
dataset=7
scan=318
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0941E0
qbias_imon=-1.08778E-4
ql1_vset=
ql1_vmon=-8.16488E-1
ql1_imon=1.36893E-8
ql2_vset=
ql2_vmon=-7.98249E-1
ql2_imon=1.92871E-9
ql3_vset=
ql3_vmon=-9.13141E0
ql3_imon=3.17013E-10
ql4_vset=
ql4_vmon=-9.14171E0
ql4_imon=3.88408E-10
mult1=-9.36713E-9
mult2=-2.7266E-9
rf_tmon=-4.70469E-3
rf_agc=3.35739E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.31673E-3
ql5_imon=1.57331E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66739E0
bslens_imon=2.63528E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20078E1
lens5a_imon=1.99041E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12513E2
lens4a_imon=2.05291E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5364E1
cs_ef1b_imon=3.05118E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02202E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04947E1
cs_ea1_imon=2.18543E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38613E0
lens1_imon=2.56803E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6462E1
os_ef1alow_imon=2.98234E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04091E1
cs_ea2_imon=1.56638E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8431E1
cs_ef1a_imon=3.00901E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.71783E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11208E1
os_restr1_imon=4.26391E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15323E1
os_ea1_imon=2.18507E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63851E1
os_ef1bup_imon=3.0901E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24384E0
cs_ionrep_imon=1.24571E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91927E2
cs_nozzle_imon=1.93317E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01755E1
cs_anode1_imon=3.2512E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20511E0
olens4_imon=3.69303E-8
tplens_vset=1.4E-1
tplens_vmon=1.61194E0
tplens_imon=-2.2456E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26657E1
iondef3_imon=1.51294E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26597E1
iondef2_imon=1.57771E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02974E2
lens6_imon=2.98385E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=4.07478E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29752E0
ionrepsh_imon=2.01129E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33416E1
lens5b_imon=2.19074E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7473E1
cs_ef2b_imon=3.1301E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.84908E0
os_ea2_imon=-7.37774E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06156E2
lens4b_imon=2.00651E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71282E1
cs_ef2a_imon=3.17804E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10742E0
os_ef2alow_imon=-2.60509E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.65899E-1
os_ef2bup_imon=-5.38375E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10805E1
os_restr2_imon=3.54276E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23076E2
cs_ionfoca_imon=6.32158E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01749E1
cs_anode2_imon=2.27849E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72967E1
iondef1_imon=1.10166E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68136E1
iondef4_imon=1.0899E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.0855E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.83334E-1
olens1_imon=9.78309E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11993E0
cs_ionaccel_imon=-2.04647E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02055E2
cs_ionfocb_imon=1.47345E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56207E1
einzel_imon=7.57972E-6
window_vset=0.0E0
window_vmon=1.89712E-1
window_imon=-9.83303E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.38987E-4
mask2_vset=0.0E0
mask2_vmon=-1.86098E1
mask2_imon=-5.83262E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92666E3
multa_neg_imon=7.5409E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.58172E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=7.15865E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38784E0
defgridb_imon=6.40121E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33361E1
os_fil1_imon=9.56614E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07023E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64074E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30906E1
cs_fil1_imon=1.00474E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62468E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65654E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.66075E-2
os_fil2_imon=-2.75607E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.85701E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.02294E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36902E-1
cs_fil2_imon=-2.41369E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.65919E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22542E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.00151E-1
chamber_ion_pmon=1.69581E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.40381E-1
res40_imon=-2.63752E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.4E1	0.0E0	1.47E2	4.1E1	-2.09394E0	-8.1594E-1	-7.9844E-1	-9.13148E0	-9.1419E0	5.45979E-3	9.33647E-2	2.73303E1	-3.26753E1	-3.26158E1	2.68118E1	1.69654E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.00673E-1
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09433E0	-8.15988E-1	-7.98345E-1	-9.13138E0	-9.14221E0	5.48363E-3	9.32693E-2	2.73358E1	-3.26773E1	-3.26467E1	2.6792E1	1.69581E-7	2.51632E-3	2.51632E-3	6.29665E-3	1.9951E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09402E0	-8.15868E-1	-7.98178E-1	-9.13177E0	-9.14207E0	5.91278E-3	9.31025E-2	2.73051E1	-3.27039E1	-3.26231E1	2.68004E1	1.69802E-7	2.52538E-3	2.52538E-3	6.30192E-3	2.00847E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09356E0	-8.15868E-1	-7.98321E-1	-9.13119E0	-9.14228E0	5.26905E-3	9.33409E-2	2.72817E1	-3.26675E1	-3.25936E1	2.67752E1	1.69725E-7	2.51847E-3	2.51847E-3	6.32896E-3	1.99E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.1594E-1	-7.98297E-1	-9.13126E0	-9.14209E0	5.38826E-3	9.33409E-2	2.73003E1	-3.26615E1	-3.26446E1	2.6789E1	1.69725E-7	2.51847E-3	2.51847E-3	6.31817E-3	1.9985E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.09426E0	-8.16011E-1	-7.98512E-1	-9.13122E0	-9.14211E0	5.34058E-3	9.32455E-2	2.73417E1	-3.26705E1	-3.26008E1	2.68118E1	1.69731E-7	2.5225E-3	2.5225E-3	6.30182E-3	1.99224E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.15868E-1	-7.98464E-1	-9.13126E0	-9.14204E0	5.55515E-3	9.34124E-2	2.72949E1	-3.26903E1	-3.26278E1	2.68124E1	1.69728E-7	2.51443E-3	2.51443E-3	6.28552E-3	1.99803E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.16178E-1	-7.98345E-1	-9.13138E0	-9.14226E0	5.48363E-3	9.34601E-2	2.73129E1	-3.26897E1	-3.25918E1	2.6816E1	1.69653E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.00534E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.16226E-1	-7.98059E-1	-9.13146E0	-9.14207E0	5.55515E-3	9.32455E-2	2.73105E1	-3.26524E1	-3.26002E1	2.68196E1	1.70031E-7	2.52027E-3	2.52027E-3	6.3074E-3	2.0064E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.16369E-1	-7.97844E-1	-9.13165E0	-9.14187E0	5.50747E-3	9.31263E-2	2.73088E1	-3.26836E1	-3.26517E1	2.68334E1	1.69581E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.00876E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09387E0	-8.16536E-1	-7.97963E-1	-9.13174E0	-9.14197E0	5.50747E-3	9.33647E-2	2.72895E1	-3.27118E1	-3.26776E1	2.6814E1	1.69734E-7	2.52521E-3	2.52521E-3	6.3131E-3	2.00244E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09418E0	-8.16298E-1	-7.97915E-1	-9.13157E0	-9.14216E0	5.34058E-3	9.32932E-2	2.73177E1	-3.26603E1	-3.2623E1	2.68334E1	1.69794E-7	2.51814E-3	2.51814E-3	6.3074E-3	2.00567E-1
1.6E1	3.0E0	0.0E0	6.47E2	4.41E2	-2.09325E0	-8.16369E-1	-7.98106E-1	-9.13155E0	-9.14226E0	5.34058E-3	9.33886E-2	2.72811E1	-3.26609E1	-3.26687E1	2.68058E1	1.69943E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.00363E-1
1.7E1	1.9E1	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.16464E-1	-7.98059E-1	-9.13148E0	-9.14207E0	5.34058E-3	9.3174E-2	2.73157E1	-3.26832E1	-3.2616E1	2.68262E1	1.69581E-7	2.52647E-3	2.52647E-3	6.32936E-3	1.98764E-1
1.8E1	9.5E1	0.0E0	7.27E2	5.0E2	-2.0941E0	-8.16417E-1	-7.97892E-1	-9.13196E0	-9.14197E0	5.26905E-3	9.32932E-2	2.72941E1	-3.26389E1	-3.26456E1	2.68106E1	1.69875E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.98937E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09348E0	-8.16345E-1	-7.97844E-1	-9.13181E0	-9.14202E0	5.45979E-3	9.35555E-2	2.72821E1	-3.26549E1	-3.26001E1	2.67896E1	1.69875E-7	2.52318E-3	2.52318E-3	6.31837E-3	1.99803E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09418E0	-8.1625E-1	-7.97749E-1	-9.1316E0	-9.14195E0	5.24521E-3	9.32455E-2	2.73015E1	-3.26488E1	-3.26428E1	2.6807E1	1.69654E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.00673E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09441E0	-8.16464E-1	-7.98011E-1	-9.13167E0	-9.14197E0	5.43594E-3	9.3317E-2	2.73033E1	-3.2682E1	-3.2652E1	2.68076E1	1.69654E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.00673E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09371E0	-8.16488E-1	-7.98011E-1	-9.13165E0	-9.14199E0	5.72205E-3	9.33409E-2	2.72883E1	-3.26182E1	-3.26308E1	2.68076E1	1.6987E-7	2.51632E-3	2.51632E-3	6.29665E-3	2.00192E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0941E0	-8.16488E-1	-7.98249E-1	-9.13141E0	-9.14171E0	5.31673E-3	9.34839E-2	2.72967E1	-3.26597E1	-3.26657E1	2.68136E1	1.69581E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.00151E-1