[Scan]
initial_time=2016-02-17T21:09:04
final_time=2016-02-17T21:09:24
ip_count=19
run=1032
dataset=7
scan=320
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.0871E-4
ql1_vset=
ql1_vmon=-8.15845E-1
ql1_imon=1.36536E-8
ql2_vset=
ql2_vmon=-7.97772E-1
ql2_imon=1.91312E-9
ql3_vset=
ql3_vmon=-9.13119E0
ql3_imon=3.42381E-10
ql4_vset=
ql4_vmon=-9.14161E0
ql4_imon=4.04346E-10
mult1=-1.00195E-8
mult2=-2.79185E-9
rf_tmon=-3.7367E-3
rf_agc=3.32678E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=1.59684E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65652E0
bslens_imon=2.47647E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19713E1
lens5a_imon=1.97911E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12523E2
lens4a_imon=2.05093E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53328E1
cs_ef1b_imon=3.03964E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02305E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0506E1
cs_ea1_imon=2.19793E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40741E0
lens1_imon=2.67114E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64861E1
os_ef1alow_imon=2.97081E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03816E1
cs_ea2_imon=1.57607E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83637E1
cs_ef1a_imon=3.00829E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.7162E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11418E1
os_restr1_imon=4.29166E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15438E1
os_ea1_imon=2.19973E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63719E1
os_ef1bup_imon=3.0692E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24909E0
cs_ionrep_imon=1.28443E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93593E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01743E1
cs_anode1_imon=3.2739E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20518E0
olens4_imon=3.69568E-8
tplens_vset=1.4E-1
tplens_vmon=1.55011E0
tplens_imon=-2.92136E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26337E1
iondef3_imon=1.5101E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26602E1
iondef2_imon=1.57896E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02961E2
lens6_imon=2.98404E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=4.09122E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28454E0
ionrepsh_imon=2.00398E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33676E1
lens5b_imon=2.19901E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74495E1
cs_ef2b_imon=3.10307E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.86794E0
os_ea2_imon=-5.48088E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06109E2
lens4b_imon=2.00522E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71108E1
cs_ef2a_imon=3.18993E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09841E0
os_ef2alow_imon=-2.91142E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.62896E-1
os_ef2bup_imon=-5.37293E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11328E1
os_restr2_imon=3.51681E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23066E2
cs_ionfoca_imon=6.30757E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01923E1
cs_anode2_imon=2.28533E-5
iondef1_vset=2.763E1
iondef1_vmon=2.736E1
iondef1_imon=1.10058E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67937E1
iondef4_imon=1.07044E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.08911E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=9.7703E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14155E0
cs_ionaccel_imon=-2.0717E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47114E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56183E1
einzel_imon=7.75992E-6
window_vset=0.0E0
window_vmon=1.37455E-1
window_imon=-1.08782E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82607E2
mask1_imon=2.39181E-4
mask2_vset=0.0E0
mask2_vmon=-1.86422E1
mask2_imon=-7.23817E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92586E3
multa_neg_imon=8.18311E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.33377E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50144E3
multb_neg_imon=7.42246E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45871E0
defgridb_imon=5.97327E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33348E1
os_fil1_imon=9.5722E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07834E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63839E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3088E1
cs_fil1_imon=1.00401E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62918E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65636E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.81576E-2
os_fil2_imon=-2.71402E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.04321E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.00338E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.39233E-1
cs_fil2_imon=-2.3296E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.67681E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22561E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.01391E-1
chamber_ion_pmon=1.6987E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.92929E-1
res40_imon=-2.54382E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.1E1	0.0E0	1.47E2	4.1E1	-2.09449E0	-8.15916E-1	-7.98345E-1	-9.13129E0	-9.1418E0	5.31673E-3	9.32217E-2	2.73003E1	-3.26693E1	-3.26458E1	2.68046E1	1.69949E-7	2.52647E-3	2.52647E-3	6.31837E-3	1.9963E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.16154E-1	-7.98273E-1	-9.13148E0	-9.14197E0	5.55515E-3	9.3174E-2	2.73213E1	-3.27017E1	-3.26561E1	2.67872E1	1.69653E-7	2.52061E-3	2.52061E-3	6.30202E-3	2.00192E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.16226E-1	-7.98225E-1	-9.13126E0	-9.14197E0	5.48363E-3	9.33409E-2	2.72797E1	-3.26767E1	-3.26284E1	2.67884E1	1.69731E-7	2.51693E-3	2.51693E-3	6.32978E-3	1.99931E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-8.15964E-1	-7.98178E-1	-9.13129E0	-9.14187E0	5.65052E-3	9.35316E-2	2.73187E1	-3.26443E1	-3.26307E1	2.67995E1	1.69798E-7	2.5131E-3	2.5131E-3	6.28592E-3	2.00192E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.16035E-1	-7.98106E-1	-9.13124E0	-9.14202E0	5.62668E-3	9.32693E-2	2.72931E1	-3.26675E1	-3.26368E1	2.68154E1	1.69725E-7	2.51847E-3	2.51847E-3	6.3074E-3	1.9968E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.16107E-1	-7.9813E-1	-9.13126E0	-9.14185E0	5.65052E-3	9.34839E-2	2.72901E1	-3.26699E1	-3.26104E1	2.6813E1	1.69802E-7	2.52428E-3	2.52428E-3	6.29098E-3	1.99803E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.16131E-1	-7.98225E-1	-9.13134E0	-9.1418E0	5.50747E-3	9.3317E-2	2.73087E1	-3.26422E1	-3.26098E1	2.67962E1	1.69728E-7	2.51334E-3	2.51334E-3	6.31288E-3	1.99977E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09387E0	-8.16226E-1	-7.98059E-1	-9.13124E0	-9.14218E0	5.45979E-3	9.3174E-2	2.73033E1	-3.26644E1	-3.26242E1	2.67944E1	1.69725E-7	2.51847E-3	2.51847E-3	6.29665E-3	2.00363E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-8.16441E-1	-7.9844E-1	-9.1311E0	-9.14228E0	5.57899E-3	9.34362E-2	2.73219E1	-3.2647E1	-3.26206E1	2.68178E1	1.6987E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.00021E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.16298E-1	-7.98368E-1	-9.13124E0	-9.14207E0	5.53131E-3	9.34124E-2	2.7263E1	-3.26356E1	-3.26218E1	2.67974E1	1.69581E-7	2.5199E-3	2.5199E-3	6.32936E-3	1.99456E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09441E0	-8.16345E-1	-7.98607E-1	-9.13141E0	-9.1419E0	5.55515E-3	9.34601E-2	2.73003E1	-3.26362E1	-3.25701E1	2.6777E1	1.69875E-7	2.52318E-3	2.52318E-3	6.31837E-3	1.99456E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.16154E-1	-7.98011E-1	-9.13117E0	-9.1419E0	5.55515E-3	9.33886E-2	2.73131E1	-3.26866E1	-3.26413E1	2.681E1	1.69656E-7	2.52139E-3	2.52139E-3	6.30182E-3	1.9852E-1
1.6E1	4.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.16298E-1	-7.98035E-1	-9.13143E0	-9.14199E0	5.36442E-3	9.37223E-2	2.72821E1	-3.26915E1	-3.26378E1	2.68124E1	1.69875E-7	2.51662E-3	2.51662E-3	6.32936E-3	1.9911E-1
1.7E1	2.2E1	0.0E0	6.87E2	4.7E2	-2.0941E0	-8.16393E-1	-7.98178E-1	-9.13136E0	-9.14171E0	5.93662E-3	9.32455E-2	2.73508E1	-3.26993E1	-3.26272E1	2.67866E1	1.69798E-7	2.52384E-3	2.52384E-3	6.33436E-3	2.00192E-1
1.8E1	8.9E1	0.0E0	7.27E2	5.0E2	-2.09449E0	-8.1625E-1	-7.98178E-1	-9.13138E0	-9.14171E0	5.45979E-3	9.35316E-2	2.72889E1	-3.26422E1	-3.26194E1	2.6777E1	1.69654E-7	2.52318E-3	2.52318E-3	6.32936E-3	1.9911E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09402E0	-8.16131E-1	-7.97844E-1	-9.13141E0	-9.14204E0	5.126E-3	9.35078E-2	2.73075E1	-3.26957E1	-3.26098E1	2.68354E1	1.69731E-7	2.5147E-3	2.5147E-3	6.31299E-3	1.99224E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.16035E-1	-7.97939E-1	-9.1315E0	-9.14218E0	5.48363E-3	9.32693E-2	2.72555E1	-3.26844E1	-3.26307E1	2.68148E1	1.69798E-7	2.52061E-3	2.52061E-3	6.32896E-3	1.9951E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09325E0	-8.16298E-1	-7.98082E-1	-9.13153E0	-9.14214E0	5.60284E-3	9.3174E-2	2.73261E1	-3.26801E1	-3.26044E1	2.67734E1	1.6987E-7	2.51954E-3	2.51954E-3	6.29665E-3	1.9951E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09379E0	-8.16274E-1	-7.98082E-1	-9.13148E0	-9.14176E0	5.34058E-3	9.34839E-2	2.72856E1	-3.26691E1	-3.25835E1	2.681E1	1.69654E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.01372E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.15845E-1	-7.97772E-1	-9.13119E0	-9.14161E0	5.29289E-3	9.32693E-2	2.736E1	-3.26602E1	-3.26337E1	2.67937E1	1.6987E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.01391E-1