[Scan]
initial_time=2016-02-17T21:09:58
final_time=2016-02-17T21:10:17
ip_count=19
run=1032
dataset=7
scan=322
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.088E-4
ql1_vset=
ql1_vmon=-8.16393E-1
ql1_imon=1.36463E-8
ql2_vset=
ql2_vmon=-7.98106E-1
ql2_imon=1.87546E-9
ql3_vset=
ql3_vmon=-9.13167E0
ql3_imon=3.18027E-10
ql4_vset=
ql4_vmon=-9.14176E0
ql4_imon=3.91531E-10
mult1=-9.48754E-9
mult2=-2.76652E-9
rf_tmon=-4.94502E-3
rf_agc=3.28169E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.22137E-3
ql5_imon=1.60773E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65088E0
bslens_imon=2.73439E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19836E1
lens5a_imon=1.96492E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12521E2
lens4a_imon=2.05128E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53424E1
cs_ef1b_imon=3.03604E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0461E2
lens23_imon=1.01937E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0536E1
cs_ea1_imon=2.18507E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38259E0
lens1_imon=2.57865E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64656E1
os_ef1alow_imon=2.99712E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04156E1
cs_ea2_imon=1.55612E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84743E1
cs_ef1a_imon=3.00829E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.71469E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11364E1
os_restr1_imon=4.27004E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15429E1
os_ea1_imon=2.21268E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63641E1
os_ef1bup_imon=3.08253E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23617E0
cs_ionrep_imon=1.26978E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9187E2
cs_nozzle_imon=1.93459E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01617E1
cs_anode1_imon=3.26201E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20511E0
olens4_imon=3.69839E-8
tplens_vset=1.4E-1
tplens_vmon=1.61784E0
tplens_imon=-6.17468E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26122E1
iondef3_imon=1.4956E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26627E1
iondef2_imon=1.59081E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02988E2
lens6_imon=2.98431E-4
ql6_vset=1.0E-1
ql6_vmon=9.29594E-2
ql6_imon=4.02113E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27333E0
ionrepsh_imon=2.0035E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33593E1
lens5b_imon=2.18826E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74627E1
cs_ef2b_imon=3.11533E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.84613E0
os_ea2_imon=-7.73168E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06145E2
lens4b_imon=2.00467E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71084E1
cs_ef2a_imon=3.1802E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08399E0
os_ef2alow_imon=-2.6195E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.40071E-1
os_ef2bup_imon=-5.24679E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10757E1
os_restr2_imon=3.53519E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.231E2
cs_ionfoca_imon=6.32866E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01689E1
cs_anode2_imon=2.28677E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73093E1
iondef1_imon=1.08432E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67884E1
iondef4_imon=1.08665E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.09955E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82594E-1
olens1_imon=9.78065E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12113E0
cs_ionaccel_imon=-2.05008E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02096E2
cs_ionfocb_imon=1.47399E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56303E1
einzel_imon=7.57612E-6
window_vset=0.0E0
window_vmon=1.55475E-1
window_imon=-1.06259E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82646E2
mask1_imon=2.39066E-4
mask2_vset=0.0E0
mask2_vmon=-1.86422E1
mask2_imon=-6.98589E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92689E3
multa_neg_imon=8.12491E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93736E3
defgrida_imon=6.92151E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.37809E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.19E0
defgridb_imon=6.09328E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33365E1
os_fil1_imon=9.58494E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07155E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64227E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30884E1
cs_fil1_imon=1.00616E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62306E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65859E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.64809E-2
os_fil2_imon=-2.56386E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97113E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.8888E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34701E-1
cs_fil2_imon=-2.73204E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.56018E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22616E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=1.9951E-1
chamber_ion_pmon=1.69943E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.35576E-1
res40_imon=-2.64113E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E1	0.0E0	1.47E2	4.1E1	-2.09603E0	-8.1594E-1	-7.97772E-1	-9.13136E0	-9.14168E0	5.50747E-3	9.32693E-2	2.73171E1	-3.26747E1	-3.26272E1	2.68082E1	1.69507E-7	2.52209E-3	2.52209E-3	6.31837E-3	1.98592E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09634E0	-8.16131E-1	-7.97939E-1	-9.13119E0	-9.14166E0	5.24521E-3	9.31978E-2	2.73235E1	-3.26946E1	-3.25979E1	2.67944E1	1.69581E-7	2.52099E-3	2.52099E-3	6.31837E-3	1.98075E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09634E0	-8.16298E-1	-7.98106E-1	-9.1311E0	-9.14237E0	5.24521E-3	9.33409E-2	2.73269E1	-3.26762E1	-3.25971E1	2.68292E1	1.69875E-7	2.51334E-3	2.51334E-3	6.3074E-3	1.98247E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09719E0	-8.16083E-1	-7.9813E-1	-9.13122E0	-9.1419E0	5.60284E-3	9.32217E-2	2.73429E1	-3.26518E1	-3.26038E1	2.68058E1	1.69725E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.9934E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09642E0	-8.16083E-1	-7.97963E-1	-9.13112E0	-9.14142E0	5.67436E-3	9.30309E-2	2.73051E1	-3.26585E1	-3.26368E1	2.68226E1	1.69949E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.00325E-1
6.0E0	3.0E0	0.0E0	9.93E2	6.35E2	-2.0965E0	-8.15916E-1	-7.97915E-1	-9.13126E0	-9.14171E0	5.48363E-3	9.30548E-2	2.72668E1	-3.26614E1	-3.2626E1	2.67717E1	1.69802E-7	2.52538E-3	2.52538E-3	6.31288E-3	1.98937E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09642E0	-8.16083E-1	-7.97844E-1	-9.13119E0	-9.14173E0	5.34058E-3	9.31501E-2	2.73135E1	-3.26807E1	-3.26182E1	2.68172E1	1.698E-7	2.51593E-3	2.51593E-3	6.32099E-3	1.99397E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09595E0	-8.16107E-1	-7.98059E-1	-9.13134E0	-9.1418E0	5.57899E-3	9.31025E-2	2.72592E1	-3.26425E1	-3.26132E1	2.68523E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-8.16274E-1	-7.98178E-1	-9.13148E0	-9.14168E0	5.60284E-3	9.30071E-2	2.73287E1	-3.26791E1	-3.26573E1	2.68153E1	1.69581E-7	2.51693E-3	2.51693E-3	6.32418E-3	1.98872E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.16154E-1	-7.98368E-1	-9.13143E0	-9.14173E0	5.60284E-3	9.27925E-2	2.72984E1	-3.26652E1	-3.26199E1	2.67998E1	1.6987E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.9934E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.16417E-1	-7.98178E-1	-9.13143E0	-9.14183E0	5.60284E-3	9.29117E-2	2.73794E1	-3.2741E1	-3.25829E1	2.68064E1	1.69731E-7	2.5225E-3	2.5225E-3	6.31299E-3	2.00996E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09595E0	-8.16369E-1	-7.9844E-1	-9.13129E0	-9.14183E0	5.98431E-3	9.30071E-2	2.73075E1	-3.26392E1	-3.26482E1	2.68064E1	1.69725E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.00705E-1
1.6E1	3.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.16226E-1	-7.9813E-1	-9.13126E0	-9.14173E0	5.91278E-3	9.30071E-2	2.73063E1	-3.26685E1	-3.26579E1	2.67986E1	1.69654E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.9963E-1
1.7E1	2.7E1	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.16417E-1	-7.98392E-1	-9.13117E0	-9.14173E0	5.6982E-3	9.27925E-2	2.73021E1	-3.26753E1	-3.26386E1	2.6795E1	1.69802E-7	2.51552E-3	2.51552E-3	6.32936E-3	1.99977E-1
1.8E1	9.8E1	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.16441E-1	-7.9844E-1	-9.13155E0	-9.14218E0	5.60284E-3	9.30309E-2	2.72985E1	-3.26831E1	-3.26266E1	2.68082E1	1.69725E-7	2.52492E-3	2.52492E-3	6.3074E-3	1.9951E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.16369E-1	-7.98559E-1	-9.13172E0	-9.14211E0	5.72205E-3	9.28402E-2	2.73045E1	-3.26416E1	-3.26218E1	2.67884E1	1.69802E-7	2.52428E-3	2.52428E-3	6.32936E-3	1.9911E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.16417E-1	-7.98035E-1	-9.13153E0	-9.14197E0	5.55515E-3	9.3317E-2	2.73291E1	-3.26621E1	-3.26549E1	2.67908E1	1.69802E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.97903E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09588E0	-8.16441E-1	-7.9813E-1	-9.13122E0	-9.14226E0	5.38826E-3	9.31501E-2	2.73177E1	-3.26783E1	-3.26158E1	2.68322E1	1.69654E-7	2.52647E-3	2.52647E-3	6.3074E-3	2.00499E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09595E0	-8.16488E-1	-7.98011E-1	-9.13124E0	-9.14209E0	5.19753E-3	9.30548E-2	2.72933E1	-3.26231E1	-3.26207E1	2.6814E1	1.69654E-7	2.51771E-3	2.51771E-3	6.34588E-3	2.00673E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.16393E-1	-7.98106E-1	-9.13167E0	-9.14176E0	5.22137E-3	9.29594E-2	2.73093E1	-3.26627E1	-3.26122E1	2.67884E1	1.69943E-7	2.51847E-3	2.51847E-3	6.29665E-3	1.9951E-1