[Scan]
initial_time=2016-02-17T21:10:35
final_time=2016-02-17T21:10:54
ip_count=19
run=1032
dataset=8
scan=323
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.19325E-2
qbias_imon=-3.73629E-6
ql1_vset=
ql1_vmon=-8.79979E1
ql1_imon=-3.01592E-9
ql2_vset=
ql2_vmon=-1.90735E-4
ql2_imon=1.50133E-9
ql3_vset=
ql3_vmon=-8.80012E1
ql3_imon=-8.12095E-9
ql4_vset=
ql4_vmon=3.8147E-4
ql4_imon=1.61197E-8
mult1=-1.07757E-8
mult2=-2.77684E-9
rf_tmon=-5.57453E-3
rf_agc=3.22999E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.57899E-3
ql5_imon=7.48241E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67742E0
bslens_imon=2.46893E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20031E1
lens5a_imon=1.9674E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.05058E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53688E1
cs_ef1b_imon=3.04721E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04625E2
lens23_imon=1.02429E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04953E1
cs_ea1_imon=2.201E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03183E0
lens1_imon=1.39295E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6465E1
os_ef1alow_imon=2.98703E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0356E1
cs_ea2_imon=1.57559E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84556E1
cs_ef1a_imon=3.01802E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.71219E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11424E1
os_restr1_imon=4.2722E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15854E1
os_ea1_imon=2.19888E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63605E1
os_ef1bup_imon=3.07712E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26331E0
cs_ionrep_imon=1.2312E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91876E2
cs_nozzle_imon=1.93424E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02169E1
cs_anode1_imon=3.26129E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20532E0
olens4_imon=4.23104E-8
tplens_vset=1.4E-1
tplens_vmon=1.59247E0
tplens_imon=-2.8473E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26413E1
iondef3_imon=1.50763E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26799E1
iondef2_imon=1.56709E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02973E2
lens6_imon=2.98565E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=9.95445E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29988E0
ionrepsh_imon=2.01554E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33894E1
lens5b_imon=2.19038E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74669E1
cs_ef2b_imon=3.11533E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.83079E0
os_ea2_imon=-7.16537E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06142E2
lens4b_imon=2.00793E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71035E1
cs_ef2a_imon=3.18741E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0966E0
os_ef2alow_imon=-2.60509E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.80916E-1
os_ef2bup_imon=-5.33689E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10985E1
os_restr2_imon=3.52762E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23066E2
cs_ionfoca_imon=6.30848E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01851E1
cs_anode2_imon=2.27308E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73094E1
iondef1_imon=1.07334E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67901E1
iondef4_imon=1.08449E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.10366E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82547E-1
olens1_imon=9.77098E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11873E0
cs_ionaccel_imon=-2.02845E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47154E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56165E1
einzel_imon=7.52566E-6
window_vset=0.0E0
window_vmon=1.72894E-1
window_imon=-1.00132E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82644E2
mask1_imon=2.39225E-4
mask2_vset=0.0E0
mask2_vmon=-1.86242E1
mask2_imon=-6.15698E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92637E3
multa_neg_imon=6.54633E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.56049E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5015E3
multb_neg_imon=7.0914E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38489E0
defgridb_imon=5.97648E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33379E1
os_fil1_imon=9.56914E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0602E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63884E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30913E1
cs_fil1_imon=1.00457E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61849E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65556E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.72407E-2
os_fil2_imon=-2.64194E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82698E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.98751E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36514E-1
cs_fil2_imon=-2.47976E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.89945E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22511E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.00876E-1
chamber_ion_pmon=1.69653E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.97734E-1
res40_imon=-2.64473E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3706E4	1.4E1	1.47E2	4.1E1	-7.09279E-2	-8.79979E1	-2.86102E-4	-8.80013E1	5.48363E-4	5.62668E-3	9.33886E-2	2.73346E1	-3.26986E1	-3.26124E1	2.6814E1	1.69943E-7	2.52492E-3	2.52492E-3	6.35059E-3	1.9985E-1
2.0E0	5.615E3	9.0E0	3.16E2	1.6E2	-7.16233E-2	-8.79975E1	-2.86102E-4	-8.80013E1	2.14577E-4	5.57899E-3	9.32932E-2	2.73182E1	-3.26304E1	-3.26491E1	2.68026E1	1.69802E-7	2.5199E-3	2.5199E-3	6.32936E-3	1.9963E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.26282E-2	-8.79976E1	-5.00679E-4	-8.80011E1	1.43051E-4	5.74589E-3	9.32932E-2	2.73304E1	-3.26596E1	-3.26288E1	2.68194E1	1.69806E-7	2.51915E-3	2.51915E-3	6.34099E-3	1.98696E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.13915E-2	-8.79977E1	-5.24521E-4	-8.80014E1	4.05312E-4	5.81741E-3	9.36031E-2	2.73143E1	-3.26627E1	-3.26383E1	2.67974E1	1.69581E-7	2.51723E-3	2.51723E-3	6.3074E-3	1.99389E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.20871E-2	-8.79977E1	-3.33786E-4	-8.80015E1	4.29153E-4	5.88894E-3	9.35078E-2	2.73009E1	-3.26813E1	-3.26236E1	2.67914E1	1.69731E-7	2.5225E-3	2.5225E-3	6.34661E-3	2.00108E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.16233E-2	-8.79976E1	-3.09944E-4	-8.80016E1	2.14577E-4	5.76973E-3	9.33886E-2	2.72985E1	-3.27089E1	-3.265E1	2.67806E1	1.69581E-7	2.51552E-3	2.51552E-3	6.30192E-3	1.99977E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.20871E-2	-8.79976E1	1.43051E-4	-8.80012E1	4.05312E-4	5.6982E-3	9.32932E-2	2.73175E1	-3.26874E1	-3.26354E1	2.68094E1	1.69875E-7	2.52318E-3	2.52318E-3	6.31837E-3	2.00847E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.20871E-2	-8.79978E1	-4.76837E-5	-8.80012E1	3.09944E-4	5.6982E-3	9.34124E-2	2.73399E1	-3.26422E1	-3.26344E1	2.6846E1	1.69949E-7	2.52538E-3	2.52538E-3	6.33486E-3	2.00325E-1
1.2E1	3.3E2	0.0E0	4.85E2	3.23E2	-7.17007E-2	-8.79976E1	3.57628E-4	-8.80013E1	4.52995E-4	5.62668E-3	9.32932E-2	2.73099E1	-3.26675E1	-3.26368E1	2.68004E1	1.69802E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.00847E-1
1.3E1	2.3E1	0.0E0	5.25E2	3.53E2	-7.26282E-2	-8.79976E1	0.0E0	-8.80014E1	2.6226E-4	5.53131E-3	9.33886E-2	2.73201E1	-3.26392E1	-3.26494E1	2.68208E1	1.69725E-7	2.50989E-3	2.50989E-3	6.31278E-3	1.9951E-1
1.4E1	6.28E2	0.0E0	5.66E2	3.82E2	-7.201E-2	-8.79977E1	-1.19209E-4	-8.80012E1	2.38419E-4	5.60284E-3	9.37462E-2	2.73836E1	-3.26803E1	-3.26832E1	2.6792E1	1.69654E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.00673E-1
1.5E1	9.4E1	0.0E0	6.06E2	4.11E2	-7.12368E-2	-8.79977E1	-3.33786E-4	-8.80014E1	2.86102E-4	5.76973E-3	9.34839E-2	2.72907E1	-3.26867E1	-3.26681E1	2.68034E1	1.69654E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.00325E-1
1.6E1	3.198E3	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.79977E1	-3.09944E-4	-8.80012E1	1.19209E-4	5.126E-3	9.35555E-2	2.72931E1	-3.26627E1	-3.2635E1	2.68424E1	1.70015E-7	2.52492E-3	2.52492E-3	6.30202E-3	2.00021E-1
1.7E1	3.8149E4	2.4E1	6.87E2	4.7E2	-7.18554E-2	-8.79981E1	-9.53674E-5	-8.80011E1	1.90735E-4	5.22137E-3	9.33886E-2	2.72973E1	-3.26615E1	-3.26182E1	2.67992E1	1.69802E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.00499E-1
1.8E1	1.67191E5	1.17E2	7.27E2	5.0E2	-7.23189E-2	-8.79979E1	-4.52995E-4	-8.80011E1	9.53674E-5	5.43594E-3	9.33409E-2	2.72648E1	-3.26428E1	-3.26206E1	2.6807E1	1.69654E-7	2.52318E-3	2.52318E-3	6.35692E-3	2.00325E-1
1.9E1	3.68E3	0.0E0	7.68E2	5.29E2	-7.201E-2	-8.7998E1	-4.05312E-4	-8.80011E1	2.38419E-5	5.29289E-3	9.36031E-2	2.73285E1	-3.26759E1	-3.25942E1	2.68274E1	1.69949E-7	2.5188E-3	2.5188E-3	6.30192E-3	1.9963E-1
2.0E1	3.34E2	0.0E0	8.08E2	5.58E2	-7.19325E-2	-8.7998E1	-3.57628E-4	-8.80012E1	4.52995E-4	5.14984E-3	9.36985E-2	2.73153E1	-3.26687E1	-3.26663E1	2.6816E1	1.69654E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.00325E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.19325E-2	-8.79975E1	1.19209E-4	-8.8001E1	1.66893E-4	5.4121E-3	9.35555E-2	2.72809E1	-3.26644E1	-3.26296E1	2.6795E1	1.69763E-7	2.51484E-3	2.51484E-3	6.32099E-3	2.0043E-1
2.2E1	4.0E1	0.0E0	8.89E2	6.17E2	-7.18554E-2	-8.79979E1	9.53674E-5	-8.80013E1	1.90735E-4	5.55515E-3	9.34362E-2	2.72945E1	-3.26531E1	-3.26012E1	2.67995E1					
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.19325E-2	-8.79979E1	-1.90735E-4	-8.80012E1	3.8147E-4	5.57899E-3	9.3317E-2	2.73094E1	-3.26799E1	-3.26413E1	2.67901E1	1.69653E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.00876E-1