[Scan]
initial_time=2016-02-17T21:15:01
final_time=2016-02-17T21:15:20
ip_count=19
run=1032
dataset=8
scan=333
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.34782E-2
qbias_imon=-3.79418E-6
ql1_vset=
ql1_vmon=-8.80003E1
ql1_imon=-7.47263E-10
ql2_vset=
ql2_vmon=-4.05312E-4
ql2_imon=1.28336E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-2.28907E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=1.55925E-8
mult1=-9.65304E-9
mult2=-2.67622E-9
rf_tmon=-4.69234E-3
rf_agc=3.31439E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.74589E-3
ql5_imon=5.44488E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65914E0
bslens_imon=2.45123E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19948E1
lens5a_imon=1.9766E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12496E2
lens4a_imon=2.0504E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53343E1
cs_ef1b_imon=3.03465E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04581E2
lens23_imon=1.02156E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04905E1
cs_ea1_imon=2.20702E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0159E0
lens1_imon=1.48851E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64771E1
os_ef1alow_imon=2.99468E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03749E1
cs_ea2_imon=1.55895E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83728E1
cs_ef1a_imon=2.98287E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.71325E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11407E1
os_restr1_imon=4.29373E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15034E1
os_ea1_imon=2.1872E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63236E1
os_ef1bup_imon=3.06558E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22614E0
cs_ionrep_imon=1.26447E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.93466E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02093E1
cs_anode1_imon=3.27409E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20549E0
olens4_imon=4.20625E-8
tplens_vset=1.4E-1
tplens_vmon=1.63494E0
tplens_imon=-2.77651E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26337E1
iondef3_imon=1.51152E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26655E1
iondef2_imon=1.5816E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02981E2
lens6_imon=2.98533E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=8.67152E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26154E0
ionrepsh_imon=1.99678E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33451E1
lens5b_imon=2.21516E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74339E1
cs_ef2b_imon=3.11249E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.84082E0
os_ea2_imon=-5.92658E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06154E2
lens4b_imon=2.00485E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71426E1
cs_ef2a_imon=3.182E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07715E0
os_ef2alow_imon=-2.78657E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.39513E-1
os_ef2bup_imon=-5.29918E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10886E1
os_restr2_imon=3.53265E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2308E2
cs_ionfoca_imon=6.31344E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02105E1
cs_anode2_imon=2.26801E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72791E1
iondef1_imon=1.10343E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68325E1
iondef4_imon=1.08051E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.09574E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82618E-1
olens1_imon=9.77873E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13014E0
cs_ionaccel_imon=-1.97336E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.47254E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56243E1
einzel_imon=7.74692E-6
window_vset=0.0E0
window_vmon=1.49918E-1
window_imon=-1.07327E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82579E2
mask1_imon=2.39216E-4
mask2_vset=0.0E0
mask2_vmon=-1.86489E1
mask2_imon=-6.56243E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92725E3
multa_neg_imon=8.35497E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.62066E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.52321E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.51481E0
defgridb_imon=6.24194E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33353E1
os_fil1_imon=9.60914E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06553E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64175E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30908E1
cs_fil1_imon=1.0063E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62546E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65785E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.66075E-2
os_fil2_imon=-2.84295E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01082E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.85969E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34646E-1
cs_fil2_imon=-2.0031E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.55325E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22618E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.80261E-1
res40_imon=-2.64409E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4217E4	1.6E1	1.47E2	4.1E1	-7.17779E-2	-8.8E1	-2.14577E-4	-8.80007E1	2.38419E-5	5.79357E-3	9.3174E-2	2.73234E1	-3.26744E1	-3.26266E1	2.68052E1	1.69725E-7	2.52169E-3	2.52169E-3	6.32896E-3	1.9985E-1
2.0E0	5.599E3	5.0E0	3.16E2	1.6E2	-7.19325E-2	-8.8E1	-3.09944E-4	-8.8001E1	4.05312E-4	5.98431E-3	9.30071E-2	2.731E1	-3.26744E1	-3.26248E1	2.67963E1	1.6987E-7	2.51632E-3	2.51632E-3	6.30202E-3	2.00534E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.20871E-2	-8.79998E1	-7.15256E-4	-8.80005E1	1.66893E-4	5.57899E-3	9.31025E-2	2.73132E1	-3.26724E1	-3.26208E1	2.6796E1	1.69806E-7	2.5225E-3	2.5225E-3	6.32978E-3	2.00108E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.286E-2	-8.8E1	-5.24521E-4	-8.8001E1	1.43051E-4	5.38826E-3	9.30309E-2	2.73159E1	-3.26951E1	-3.26032E1	2.6807E1	1.69581E-7	2.51498E-3	2.51498E-3	6.29684E-3	1.99227E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.21643E-2	-8.80003E1	-4.29153E-4	-8.80009E1	3.33786E-4	5.34058E-3	9.33647E-2	2.7347E1	-3.26944E1	-3.26048E1	2.68157E1	1.69656E-7	2.52027E-3	2.52027E-3	6.29624E-3	1.98696E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.80003E1	-1.66893E-4	-8.80008E1	4.52995E-4	5.57899E-3	9.32693E-2	2.7275E1	-3.26673E1	-3.25977E1	2.67998E1	1.69798E-7	2.52384E-3	2.52384E-3	6.3074E-3	2.00021E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.80001E1	-7.15256E-5	-8.80006E1	9.53674E-5	5.45979E-3	9.3317E-2	2.72853E1	-3.26645E1	-3.26759E1	2.67914E1	1.69725E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.9985E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.35556E-2	-8.80001E1	-7.15256E-5	-8.80005E1	7.15256E-5	5.17368E-3	9.30786E-2	2.72895E1	-3.26699E1	-3.26476E1	2.68256E1	1.69653E-7	2.52276E-3	2.52276E-3	6.31817E-3	1.9934E-1
1.2E1	3.45E2	0.0E0	4.85E2	3.23E2	-7.22418E-2	-8.80002E1	-4.76837E-5	-8.80006E1	2.38419E-4	5.43594E-3	9.3174E-2	2.73225E1	-3.26669E1	-3.26128E1	2.6801E1	1.69802E-7	2.52428E-3	2.52428E-3	6.28552E-3	2.00499E-1
1.3E1	2.4E1	0.0E0	5.25E2	3.53E2	-7.34782E-2	-8.80003E1	9.53674E-5	-8.80005E1	-7.15256E-5	5.72205E-3	9.31025E-2	2.73222E1	-3.27027E1	-3.26071E1	2.68036E1	1.69802E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.00847E-1
1.4E1	6.89E2	0.0E0	5.66E2	3.82E2	-7.38649E-2	-8.80003E1	1.66893E-4	-8.80007E1	3.09944E-4	5.53131E-3	9.3174E-2	2.73296E1	-3.26327E1	-3.25881E1	2.68088E1	1.69654E-7	2.52209E-3	2.52209E-3	6.32386E-3	1.99977E-1
1.5E1	1.12E2	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.80001E1	7.15256E-5	-8.80006E1	6.91414E-4	5.67436E-3	9.33886E-2	2.72877E1	-3.2647E1	-3.26086E1	2.68011E1	1.69728E-7	2.52209E-3	2.52209E-3	6.29645E-3	1.98937E-1
1.6E1	3.229E3	4.0E0	6.47E2	4.41E2	-7.286E-2	-8.80002E1	-2.38419E-5	-8.80006E1	5.96046E-4	5.55515E-3	9.29117E-2	2.73063E1	-3.26644E1	-3.2672E1	2.67881E1	1.69802E-7	2.51443E-3	2.51443E-3	6.35692E-3	1.99977E-1
1.7E1	3.8155E4	1.0E1	6.87E2	4.7E2	-7.3401E-2	-8.80003E1	-9.53674E-5	-8.80004E1	2.38419E-4	5.57899E-3	9.30309E-2	2.73375E1	-3.26951E1	-3.26308E1	2.67728E1	1.69802E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.00673E-1
1.8E1	1.67692E5	8.1E1	7.27E2	5.0E2	-7.39421E-2	-8.80001E1	-4.29153E-4	-8.80005E1	4.76837E-4	5.96046E-3	9.3174E-2	2.73267E1	-3.26939E1	-3.26446E1	2.67782E1	1.69653E-7	2.52599E-3	2.52599E-3	6.32356E-3	2.00705E-1
1.9E1	3.849E3	0.0E0	7.68E2	5.29E2	-7.30146E-2	-8.80003E1	-2.14577E-4	-8.80004E1	2.6226E-4	5.81741E-3	9.30786E-2	2.73381E1	-3.26579E1	-3.26494E1	2.68016E1	1.69802E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.00325E-1
2.0E1	3.74E2	1.0E0	8.08E2	5.58E2	-7.40967E-2	-8.80001E1	-1.90735E-4	-8.80007E1	7.15256E-5	5.43594E-3	9.2721E-2	2.72588E1	-3.26915E1	-3.26194E1	2.68052E1	1.69581E-7	2.51581E-3	2.51581E-3	6.31299E-3	2.00818E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.41738E-2	-8.80002E1	-1.90735E-4	-8.80007E1	3.57628E-4	5.29289E-3	9.30786E-2	2.72979E1	-3.27047E1	-3.26194E1	2.68184E1	1.69725E-7	2.51847E-3	2.51847E-3	6.29665E-3	2.00192E-1
2.2E1	4.7E1	0.0E0	8.89E2	6.17E2	-7.44059E-2	-8.79999E1	-3.33786E-4	-8.80007E1	2.14577E-4	5.57899E-3	9.31263E-2	2.72786E1	-3.26573E1	-3.258E1	2.68106E1	1.69802E-7	2.51826E-3	2.51826E-3	6.32112E-3	2.00412E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.34782E-2	-8.80003E1	-4.05312E-4	-8.80005E1	2.86102E-4	5.74589E-3	9.33409E-2	2.72791E1	-3.26655E1	-3.26337E1	2.68325E1