[Scan]
initial_time=2016-02-17T21:20:40
final_time=2016-02-17T21:21:06
ip_count=19
run=1032
dataset=8
scan=345
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.78684E-6
ql1_vset=
ql1_vmon=-8.80009E1
ql1_imon=-7.00128E-10
ql2_vset=
ql2_vmon=-4.76837E-5
ql2_imon=1.30881E-9
ql3_vset=
ql3_vmon=-8.80009E1
ql3_imon=-1.93719E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=1.55926E-8
mult1=-9.94443E-9
mult2=-2.66968E-9
rf_tmon=-5.76198E-3
rf_agc=3.18825E-2
counter1=7
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.91278E-3
ql5_imon=5.69642E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65725E0
bslens_imon=2.31121E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19695E1
lens5a_imon=1.98723E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12526E2
lens4a_imon=2.05018E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53558E1
cs_ef1b_imon=3.05013E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04636E2
lens23_imon=1.02336E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05153E1
cs_ea1_imon=2.20956E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04338E0
lens1_imon=1.44374E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64597E1
os_ef1alow_imon=2.98101E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03844E1
cs_ea2_imon=1.5815E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.844E1
cs_ef1a_imon=3.00316E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.72261E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11347E1
os_restr1_imon=4.27654E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15231E1
os_ea1_imon=2.15047E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63674E1
os_ef1bup_imon=3.07664E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19062E0
cs_ionrep_imon=1.25569E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91844E2
cs_nozzle_imon=1.93526E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02033E1
cs_anode1_imon=3.26689E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20542E0
olens4_imon=4.21334E-8
tplens_vset=1.4E-1
tplens_vmon=1.61183E0
tplens_imon=-3.90229E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26427E1
iondef3_imon=1.50227E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26418E1
iondef2_imon=1.5856E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0296E2
lens6_imon=2.98622E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=8.59201E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30162E0
ionrepsh_imon=2.01387E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33572E1
lens5b_imon=2.19112E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7444E1
cs_ef2b_imon=3.11858E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.83952E0
os_ea2_imon=-6.66862E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06107E2
lens4b_imon=2.00551E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71515E1
cs_ef2a_imon=3.182E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09315E0
os_ef2alow_imon=-2.66027E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.69193E-1
os_ef2bup_imon=-5.29427E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10877E1
os_restr2_imon=3.54472E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.29997E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01675E1
cs_anode2_imon=2.27704E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7299E1
iondef1_imon=1.09278E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67801E1
iondef4_imon=1.08822E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.10251E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=9.82383E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14971E0
cs_ionaccel_imon=-2.10662E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.4729E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56472E1
einzel_imon=7.64757E-6
window_vset=0.0E0
window_vmon=1.7103E-1
window_imon=-1.09664E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.39067E-4
mask2_vset=0.0E0
mask2_vmon=-1.86059E1
mask2_imon=-7.04057E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9261E3
multa_neg_imon=7.47161E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9369E3
defgrida_imon=6.45387E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.65603E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42452E0
defgridb_imon=6.07478E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33317E1
os_fil1_imon=9.59561E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07128E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64577E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30858E1
cs_fil1_imon=1.00559E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61801E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66318E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.55034E-2
os_fil2_imon=-2.73929E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.93592E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.57523E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33871E-1
cs_fil2_imon=-2.13531E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.48853E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22574E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31189E-3
inlet_lpb_pmon=2.00705E-1
chamber_ion_pmon=1.69943E-7
chamber_cvt_pmon=2.52348E-3
foreline_cvt_pmon=2.52348E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.73107E-1
res40_imon=-2.62336E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=113
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4175E4	1.4E1	1.47E2	4.1E1	-7.26282E-2	-8.80011E1	-2.6226E-4	-8.80008E1	-1.90735E-4	5.60284E-3	9.34124E-2	2.72886E1	-3.26685E1	-3.26018E1	2.68018E1	1.69581E-7	2.52093E-3	2.52093E-3	6.30221E-3	2.01261E-1
2.0E0	5.777E3	6.0E0	3.16E2	1.6E2	-7.32464E-2	-8.8001E1	-3.8147E-4	-8.80008E1	-2.14577E-4	5.6982E-3	9.31025E-2	2.7315E1	-3.26748E1	-3.26382E1	2.67972E1	1.69581E-7	2.51632E-3	2.51632E-3	6.32896E-3	1.9968E-1
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.38649E-2	-8.80009E1	-1.19209E-4	-8.80008E1	-1.43051E-4	5.84126E-3	9.32932E-2	2.7246E1	-3.2652E1	-3.26241E1	2.68354E1	1.69644E-7	2.52006E-3	2.52006E-3	6.31451E-3	1.99408E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.34782E-2	-8.80012E1	-2.38419E-4	-8.80007E1	9.53674E-5	5.57899E-3	9.32693E-2	2.72635E1	-3.26712E1	-3.2616E1	2.67985E1	1.6966E-7	2.52384E-3	2.52384E-3	6.33112E-3	1.9997E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.35556E-2	-8.80008E1	-1.66893E-4	-8.80007E1	2.14577E-4	5.62668E-3	9.3317E-2	2.73127E1	-3.26745E1	-3.26198E1	2.68064E1	1.69861E-7	2.51436E-3	2.51436E-3	6.29075E-3	2.00031E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.41738E-2	-8.8001E1	1.19209E-4	-8.80009E1	2.14577E-4	5.93662E-3	9.34124E-2	2.73245E1	-3.26745E1	-3.2621E1	2.68065E1	1.6969E-7	2.52125E-3	2.52125E-3	6.31146E-3	1.9971E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.80015E1	-3.8147E-4	-8.8001E1	1.66893E-4	5.79357E-3	9.31263E-2	2.72589E1	-3.26694E1	-3.26045E1	2.67987E1	1.69685E-7	2.51886E-3	2.51886E-3	6.29573E-3	1.9994E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80012E1	-1.90735E-4	-8.80007E1	-9.53674E-5	5.29289E-3	9.34362E-2	2.73303E1	-3.26598E1	-3.26247E1	2.6805E1	1.69746E-7	2.51826E-3	2.51826E-3	6.29919E-3	1.99543E-1
1.2E1	3.28E2	1.0E0	4.85E2	3.23E2	-7.27828E-2	-8.8001E1	2.38419E-5	-8.80009E1	-4.76837E-5	5.29289E-3	9.34362E-2	2.72965E1	-3.26715E1	-3.26485E1	2.68132E1	1.69636E-7	2.52236E-3	2.52236E-3	6.31563E-3	1.99933E-1
1.3E1	2.5E1	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.80009E1	-4.76837E-4	-8.80007E1	9.53674E-5	5.43594E-3	9.33647E-2	2.73124E1	-3.2631E1	-3.26182E1	2.67822E1	1.69691E-7	2.52072E-3	2.52072E-3	6.31151E-3	1.99933E-1
1.4E1	7.06E2	0.0E0	5.66E2	3.82E2	-7.21643E-2	-8.8001E1	-3.33786E-4	-8.80007E1	-3.33786E-4	5.65052E-3	9.31978E-2	2.73174E1	-3.26441E1	-3.26576E1	2.68082E1	1.69805E-7	2.51685E-3	2.51685E-3	6.3241E-3	1.99239E-1
1.5E1	1.15E2	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.80008E1	-6.91414E-4	-8.80005E1	-1.19209E-4	5.74589E-3	9.35316E-2	2.72905E1	-3.26594E1	-3.26361E1	2.68032E1	1.69883E-7	2.52189E-3	2.52189E-3	6.31865E-3	1.9885E-1
1.6E1	3.201E3	1.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80015E1	-2.86102E-4	-8.80005E1	2.38419E-5	5.65052E-3	9.32455E-2	2.73187E1	-3.26894E1	-3.26217E1	2.67866E1	1.69637E-7	2.51851E-3	2.51851E-3	6.3074E-3	1.97927E-1
1.7E1	3.8824E4	1.7E1	6.87E2	4.7E2	-7.30918E-2	-8.80016E1	-3.33786E-4	-8.80004E1	-1.43051E-4	5.48363E-3	9.32455E-2	2.73161E1	-3.26563E1	-3.26072E1	2.68073E1	1.69759E-7	2.51344E-3	2.51344E-3	6.32953E-3	1.99469E-1
1.8E1	1.69386E5	9.7E1	7.27E2	5.0E2	-7.30918E-2	-8.80011E1	-1.43051E-4	-8.80005E1	-2.6226E-4	5.60284E-3	9.3174E-2	2.73134E1	-3.26371E1	-3.26353E1	2.68082E1	1.69742E-7	2.51937E-3	2.51937E-3	6.29143E-3	2.0089E-1
1.9E1	3.725E3	1.0E0	7.68E2	5.29E2	-7.286E-2	-8.8001E1	-5.72205E-4	-8.80005E1	-9.53674E-5	5.84126E-3	9.32217E-2	2.7296E1	-3.26662E1	-3.26274E1	2.68301E1	1.69751E-7	2.51877E-3	2.51877E-3	6.33282E-3	1.98395E-1
2.0E1	3.72E2	0.0E0	8.08E2	5.58E2	-7.30146E-2	-8.80009E1	-5.72205E-4	-8.80008E1	0.0E0	5.36442E-3	9.30309E-2	2.73137E1	-3.2678E1	-3.2628E1	2.67863E1	1.69805E-7	2.52101E-3	2.52101E-3	6.2866E-3	1.97796E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.25507E-2	-8.8001E1	-4.76837E-4	-8.80007E1	2.14577E-4	5.8651E-3	9.3174E-2	2.73414E1	-3.26744E1	-3.26356E1	2.68144E1	1.69726E-7	2.52038E-3	2.52038E-3	6.30379E-3	1.97166E-1
2.2E1	4.0E1	0.0E0	8.89E2	6.17E2	-7.23964E-2	-8.80013E1	-2.86102E-4	-8.80006E1	4.52995E-4	5.81741E-3	9.34124E-2	2.72625E1	-3.26701E1	-3.26405E1	2.68107E1	1.69657E-7	2.51838E-3	2.51838E-3	6.30171E-3	1.98625E-1
2.3E1	7.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.80009E1	-4.76837E-5	-8.80009E1	2.14577E-4	5.91278E-3	9.34362E-2	2.7299E1	-3.26418E1	-3.26427E1	2.67801E1	1.69943E-7	2.52348E-3	2.52348E-3	6.31189E-3	2.00705E-1