[Scan]
initial_time=2016-02-17T21:41:57
final_time=2016-02-17T21:42:17
ip_count=19
run=1032
dataset=8
scan=367
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.72386E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-5.99086E-10
ql2_vset=
ql2_vmon=-5.48363E-4
ql2_imon=1.28403E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.72155E-9
ql4_vset=
ql4_vmon=1.19209E-4
ql4_imon=1.55084E-8
mult1=-9.46345E-9
mult2=-2.80444E-9
rf_tmon=-4.44633E-3
rf_agc=3.33516E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.55515E-3
ql5_imon=5.46241E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66177E0
bslens_imon=2.73773E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20013E1
lens5a_imon=2.00264E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12518E2
lens4a_imon=2.05229E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54691E1
cs_ef1b_imon=3.05766E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04663E2
lens23_imon=1.02143E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04976E1
cs_ea1_imon=2.19437E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05063E0
lens1_imon=1.45586E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64506E1
os_ef1alow_imon=2.97513E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03947E1
cs_ea2_imon=1.5707E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.844E1
cs_ef1a_imon=3.00613E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.72332E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11244E1
os_restr1_imon=4.28589E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15496E1
os_ea1_imon=2.17049E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63641E1
os_ef1bup_imon=3.06487E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23128E0
cs_ionrep_imon=1.26547E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93493E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01935E1
cs_anode1_imon=3.27967E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20549E0
olens4_imon=4.21918E-8
tplens_vset=1.4E-1
tplens_vmon=1.60654E0
tplens_imon=-2.70438E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26086E1
iondef3_imon=1.49283E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26633E1
iondef2_imon=1.57327E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02957E2
lens6_imon=2.98386E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=8.66401E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25944E0
ionrepsh_imon=2.01146E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33603E1
lens5b_imon=2.19657E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74441E1
cs_ef2b_imon=3.11244E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.86487E0
os_ea2_imon=-4.90817E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0615E2
lens4b_imon=2.00575E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71354E1
cs_ef2a_imon=3.19065E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07258E0
os_ef2alow_imon=-2.81051E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.83919E-1
os_ef2bup_imon=-5.254E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10889E1
os_restr2_imon=3.53879E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23066E2
cs_ionfoca_imon=6.30185E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01761E1
cs_anode2_imon=2.25938E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73381E1
iondef1_imon=1.09248E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6792E1
iondef4_imon=1.09494E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=1.10073E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=9.8146E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13495E0
cs_ionaccel_imon=-2.0681E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47331E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56423E1
einzel_imon=7.50764E-6
window_vset=0.0E0
window_vmon=1.64484E-1
window_imon=-8.64372E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82603E2
mask1_imon=2.39026E-4
mask2_vset=0.0E0
mask2_vmon=-1.86182E1
mask2_imon=-5.79658E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.27752E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.60169E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=7.32894E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46177E0
defgridb_imon=6.31153E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33307E1
os_fil1_imon=9.59629E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07527E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6422E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30825E1
cs_fil1_imon=1.00682E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61993E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65926E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.52982E-2
os_fil2_imon=-2.91224E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.87503E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.82547E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35478E-1
cs_fil2_imon=-2.19145E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.07014E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22449E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.2752E-3
inlet_lpb_pmon=2.00021E-1
chamber_ion_pmon=1.69725E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.62606E-1
res40_imon=-2.83935E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=213
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4099E4	1.2E1	1.47E2	4.1E1	-7.27828E-2	-8.80014E1	-4.76837E-4	-8.80003E1	-9.53674E-5	5.48363E-3	9.31501E-2	2.72874E1	-3.26449E1	-3.26431E1	2.68076E1	1.69802E-7	2.52428E-3	2.52428E-3	6.27461E-3	2.01022E-1
2.0E0	5.764E3	6.0E0	3.16E2	1.6E2	-7.21643E-2	-8.80015E1	-3.57628E-4	-8.80001E1	2.38419E-5	5.67436E-3	9.32693E-2	2.72965E1	-3.26695E1	-3.2607E1	2.68022E1	1.70023E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.00847E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.18554E-2	-8.80017E1	-6.91414E-4	-8.8E1	0.0E0	5.26905E-3	9.28879E-2	2.72964E1	-3.26921E1	-3.26393E1	2.67978E1	1.69728E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.00499E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.26282E-2	-8.80016E1	-5.00679E-4	-8.80001E1	2.38419E-4	5.6982E-3	9.33409E-2	2.72845E1	-3.26703E1	-3.26248E1	2.68064E1	1.69723E-7	2.51709E-3	2.51709E-3	6.31798E-3	1.99729E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.14689E-2	-8.80015E1	-7.86781E-4	-8.80002E1	2.6226E-4	5.79357E-3	9.29594E-2	2.72961E1	-3.26591E1	-3.26621E1	2.68208E1	1.69949E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.9911E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.13143E-2	-8.80015E1	-6.91414E-4	-8.80003E1	3.33786E-4	5.88894E-3	9.3317E-2	2.73003E1	-3.26326E1	-3.26554E1	2.68064E1	1.69728E-7	2.52867E-3	2.52867E-3	6.30192E-3	1.98937E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17779E-2	-8.80015E1	-6.19888E-4	-8.80003E1	2.38419E-4	5.76973E-3	9.31501E-2	2.73045E1	-3.26296E1	-3.26633E1	2.6801E1	1.69875E-7	2.52867E-3	2.52867E-3	6.32936E-3	1.98764E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.80015E1	-4.76837E-4	-8.80001E1	-7.15256E-5	5.57899E-3	9.34839E-2	2.72768E1	-3.26178E1	-3.26378E1	2.67949E1	1.69798E-7	2.51525E-3	2.51525E-3	6.33436E-3	2.00192E-1
1.2E1	3.18E2	0.0E0	4.85E2	3.23E2	-7.15461E-2	-8.80015E1	-6.19888E-4	-8.80001E1	-3.8147E-4	6.12736E-3	9.31978E-2	2.72915E1	-3.26779E1	-3.26614E1	2.6801E1	1.69725E-7	2.5131E-3	2.5131E-3	6.32896E-3	1.9985E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.13915E-2	-8.80014E1	-4.52995E-4	-8.80002E1	-7.15256E-5	5.91278E-3	9.30071E-2	2.72921E1	-3.26526E1	-3.2616E1	2.68128E1	1.69654E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.00673E-1
1.4E1	6.78E2	0.0E0	5.66E2	3.82E2	-7.17779E-2	-8.80013E1	-8.34465E-4	-8.80003E1	-9.53674E-5	6.17504E-3	9.29356E-2	2.73051E1	-3.27125E1	-3.27047E1	2.67929E1	1.69725E-7	2.52061E-3	2.52061E-3	6.31278E-3	1.9951E-1
1.5E1	8.0E1	0.0E0	6.06E2	4.11E2	-7.10051E-2	-8.80015E1	-7.62939E-4	-8.80003E1	-7.15256E-5	5.6982E-3	9.30309E-2	2.72997E1	-3.26873E1	-3.26218E1	2.68005E1	1.69875E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.00673E-1
1.6E1	3.183E3	3.0E0	6.47E2	4.41E2	-7.08504E-2	-8.80013E1	-5.00679E-4	-8.80006E1	-4.76837E-5	5.8651E-3	9.32932E-2	2.72973E1	-3.26957E1	-3.26434E1	2.67998E1	1.69653E-7	2.51739E-3	2.51739E-3	6.30202E-3	2.00192E-1
1.7E1	3.7949E4	1.5E1	6.87E2	4.7E2	-7.17779E-2	-8.80013E1	-4.76837E-4	-8.80004E1	7.15256E-5	5.65052E-3	9.34124E-2	2.73033E1	-3.26944E1	-3.26425E1	2.68106E1	1.69728E-7	2.52538E-3	2.52538E-3	6.33486E-3	2.00499E-1
1.8E1	1.66009E5	1.11E2	7.27E2	5.0E2	-7.17007E-2	-8.80017E1	-4.76837E-4	-8.80002E1	7.15256E-5	5.84126E-3	9.36031E-2	2.73252E1	-3.26437E1	-3.26148E1	2.6803E1	1.69581E-7	2.51847E-3	2.51847E-3	6.29665E-3	1.9917E-1
1.9E1	3.69E3	2.0E0	7.68E2	5.29E2	-7.201E-2	-8.80014E1	-5.48363E-4	-8.8E1	-3.09944E-4	5.34058E-3	9.3317E-2	2.73249E1	-3.26867E1	-3.26098E1	2.6783E1	1.69728E-7	2.52428E-3	2.52428E-3	6.3074E-3	1.99283E-1
2.0E1	3.45E2	0.0E0	8.08E2	5.58E2	-7.21643E-2	-8.80018E1	-5.00679E-4	-8.80002E1	-1.90735E-4	5.50747E-3	9.35555E-2	2.73015E1	-3.26176E1	-3.26494E1	2.67944E1	1.70015E-7	2.52169E-3	2.52169E-3	6.32356E-3	1.9934E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.15461E-2	-8.80015E1	-1.19209E-4	-8.80003E1	9.53674E-5	5.45979E-3	9.33409E-2	2.73155E1	-3.26642E1	-3.26092E1	2.67824E1	1.69654E-7	2.52428E-3	2.52428E-3	6.31288E-3	1.99803E-1
2.2E1	4.8E1	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80015E1	-5.00679E-4	-8.80003E1	2.38419E-5	5.50747E-3	9.3174E-2	2.73653E1	-3.27517E1	-3.26083E1	2.68001E1	1.69725E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.00876E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80015E1	-5.48363E-4	-8.80001E1	1.19209E-4	5.55515E-3	9.34124E-2	2.73381E1	-3.26633E1	-3.26086E1	2.6792E1	1.69725E-7	2.52276E-3	2.52276E-3	6.2752E-3	2.00021E-1