[Scan]
initial_time=2016-02-17T21:49:05
final_time=2016-02-17T21:49:24
ip_count=19
run=1032
dataset=8
scan=383
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.16233E-2
qbias_imon=-3.75115E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-5.86081E-10
ql2_vset=
ql2_vmon=-5.72205E-4
ql2_imon=1.24861E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.59117E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=1.55529E-8
mult1=-1.09061E-8
mult2=-2.77029E-9
rf_tmon=-4.9637E-3
rf_agc=3.29198E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.74589E-3
ql5_imon=5.53954E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64751E0
bslens_imon=2.45844E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20007E1
lens5a_imon=1.98632E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12454E2
lens4a_imon=2.0506E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54043E1
cs_ef1b_imon=3.05514E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.02226E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05228E1
cs_ea1_imon=2.18783E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02814E0
lens1_imon=1.4094E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64801E1
os_ef1alow_imon=2.9827E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03792E1
cs_ea2_imon=1.57679E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8437E1
cs_ef1a_imon=3.00288E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=1.7266E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1143E1
os_restr1_imon=4.27256E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15143E1
os_ea1_imon=2.18747E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63942E1
os_ef1bup_imon=3.07712E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24128E0
cs_ionrep_imon=1.25163E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91881E2
cs_nozzle_imon=1.93449E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01779E1
cs_anode1_imon=3.27462E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20554E0
olens4_imon=4.21019E-8
tplens_vset=1.4E-1
tplens_vmon=1.58496E0
tplens_imon=-9.74686E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.2636E1
iondef3_imon=1.50325E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27192E1
iondef2_imon=1.58617E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02949E2
lens6_imon=2.98497E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=8.59344E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29055E0
ionrepsh_imon=2.01407E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3397E1
lens5b_imon=2.18639E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74627E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.82348E0
os_ea2_imon=-5.30063E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06131E2
lens4b_imon=2.00579E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71246E1
cs_ef2a_imon=3.18056E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07618E0
os_ef2alow_imon=-2.74204E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.70104E-1
os_ef2bup_imon=-5.38375E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10973E1
os_restr2_imon=3.54059E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23101E2
cs_ionfoca_imon=6.28378E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02037E1
cs_anode2_imon=2.28317E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73187E1
iondef1_imon=1.1013E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6804E1
iondef4_imon=1.07981E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.10372E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82785E-1
olens1_imon=9.83813E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11993E0
cs_ionaccel_imon=-2.0681E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47158E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56045E1
einzel_imon=7.63018E-6
window_vset=0.0E0
window_vmon=1.62682E-1
window_imon=-1.09503E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82616E2
mask1_imon=2.39149E-4
mask2_vset=0.0E0
mask2_vmon=-1.85966E1
mask2_imon=-6.19302E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92656E3
multa_neg_imon=7.4477E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.55727E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.09441E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.179E0
defgridb_imon=6.17875E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33344E1
os_fil1_imon=9.5677E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06981E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64405E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30878E1
cs_fil1_imon=1.00447E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62234E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66632E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.75127E-2
os_fil2_imon=-2.64795E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95912E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.68242E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36384E-1
cs_fil2_imon=-2.48577E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.1242E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22622E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.00021E-1
chamber_ion_pmon=1.69798E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.17846E-1
res40_imon=-2.66996E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4409E4	1.2E1	1.47E2	4.1E1	-7.15461E-2	-8.80019E1	-7.86781E-4	-8.80002E1	2.38419E-5	5.38826E-3	9.3174E-2	2.72957E1	-3.26738E1	-3.26272E1	2.6807E1	1.69875E-7	2.52318E-3	2.52318E-3	6.31837E-3	2.00151E-1
2.0E0	5.642E3	3.0E0	3.16E2	1.6E2	-7.24736E-2	-8.80019E1	-6.91414E-4	-8.80002E1	9.53674E-5	5.43594E-3	9.30786E-2	2.73222E1	-3.26719E1	-3.26401E1	2.6792E1	1.69725E-7	2.51739E-3	2.51739E-3	6.32896E-3	1.9917E-1
3.0E0	8.0E0	0.0E0	4.85E2	2.79E2	-7.20871E-2	-8.80018E1	-6.67572E-4	-8.80001E1	3.09944E-4	5.50747E-3	9.32217E-2	2.73051E1	-3.26857E1	-3.26277E1	2.68018E1	1.69956E-7	2.52027E-3	2.52027E-3	6.33538E-3	2.00108E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.24736E-2	-8.80017E1	-1.00136E-3	-8.80001E1	4.52995E-4	5.53131E-3	9.3317E-2	2.72913E1	-3.2641E1	-3.26398E1	2.67926E1	1.69794E-7	2.52025E-3	2.52025E-3	6.31269E-3	1.99061E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.21643E-2	-8.80014E1	-1.0252E-3	-8.80001E1	2.38419E-4	5.38826E-3	9.33647E-2	2.73345E1	-3.26687E1	-3.2641E1	2.67962E1	1.69875E-7	2.51552E-3	2.51552E-3	6.29645E-3	1.99456E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.20871E-2	-8.80013E1	-6.67572E-4	-8.8E1	7.15256E-5	5.34058E-3	9.32932E-2	2.73039E1	-3.26759E1	-3.26518E1	2.68082E1	1.69581E-7	2.5199E-3	2.5199E-3	6.31837E-3	1.9963E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.21643E-2	-8.80017E1	-8.82149E-4	-8.80004E1	7.15256E-5	5.60284E-3	9.33409E-2	2.73363E1	-3.26374E1	-3.2641E1	2.68208E1	1.69656E-7	2.52362E-3	2.52362E-3	6.32978E-3	1.98169E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.80017E1	-6.4373E-4	-8.80003E1	0.0E0	5.67436E-3	9.3317E-2	2.73341E1	-3.26937E1	-3.26232E1	2.67976E1	1.6987E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.00534E-1
1.2E1	3.9E2	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80016E1	-8.10623E-4	-8.79999E1	0.0E0	5.76973E-3	9.3317E-2	2.73108E1	-3.26769E1	-3.26406E1	2.68095E1	1.69652E-7	2.51814E-3	2.51814E-3	6.31269E-3	2.00064E-1
1.3E1	2.2E1	0.0E0	5.25E2	3.53E2	-7.23189E-2	-8.80018E1	-8.34465E-4	-8.80001E1	-2.38419E-5	5.4121E-3	9.34362E-2	2.73099E1	-3.26813E1	-3.26506E1	2.68034E1	1.69737E-7	2.5199E-3	2.5199E-3	6.3016E-3	2.0094E-1
1.4E1	5.98E2	0.0E0	5.66E2	3.82E2	-7.17007E-2	-8.80017E1	-5.48363E-4	-8.80001E1	-2.38419E-5	5.29289E-3	9.34124E-2	2.72603E1	-3.26178E1	-3.26183E1	2.68024E1	1.69943E-7	2.51793E-3	2.51793E-3	6.32626E-3	2.00448E-1
1.5E1	1.02E2	1.0E0	6.06E2	4.11E2	-7.17007E-2	-8.80016E1	-3.09944E-4	-8.80001E1	0.0E0	5.34058E-3	9.33886E-2	2.73237E1	-3.26801E1	-3.26194E1	2.68064E1					
1.6E1	3.16E3	2.0E0	6.47E2	4.41E2	-7.22418E-2	-8.80017E1	-4.76837E-4	-8.80004E1	3.09944E-4	5.45979E-3	9.35316E-2	2.72892E1	-3.26697E1	-3.26154E1	2.68034E1	1.69654E-7	2.51225E-3	2.51225E-3	6.33486E-3	2.01372E-1
1.7E1	3.8352E4	2.1E1	6.87E2	4.7E2	-7.18554E-2	-8.80015E1	-5.72205E-4	-8.80004E1	-9.53674E-5	5.53131E-3	9.32217E-2	2.73387E1	-3.26741E1	-3.26434E1	2.68148E1	1.69798E-7	2.5131E-3	2.5131E-3	6.31278E-3	1.9951E-1
1.8E1	1.65749E5	8.6E1	7.27E2	5.0E2	-7.21643E-2	-8.80017E1	-6.4373E-4	-8.80001E1	-1.19209E-4	5.76973E-3	9.32217E-2	2.73369E1	-3.26909E1	-3.26236E1	2.68076E1	1.69731E-7	2.52362E-3	2.52362E-3	6.32418E-3	1.99048E-1
1.9E1	3.673E3	3.0E0	7.68E2	5.29E2	-7.21643E-2	-8.80016E1	-7.15256E-4	-8.8E1	-9.53674E-5	5.60284E-3	9.35793E-2	2.73257E1	-3.26543E1	-3.26502E1	2.67984E1	1.69798E-7	2.52384E-3	2.52384E-3	6.31278E-3	1.9883E-1
2.0E1	3.63E2	0.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80016E1	-4.29153E-4	-8.80004E1	-1.66893E-4	5.76973E-3	9.29594E-2	2.731E1	-3.27117E1	-3.26046E1	2.67939E1	1.6987E-7	2.51417E-3	2.51417E-3	6.35059E-3	1.9934E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.17007E-2	-8.80017E1	-7.15256E-4	-8.80003E1	4.76837E-5	5.6982E-3	9.32932E-2	2.73316E1	-3.26691E1	-3.2626E1	2.67873E1	1.69656E-7	2.5147E-3	2.5147E-3	6.30182E-3	1.99931E-1
2.2E1	5.2E1	0.0E0	8.89E2	6.17E2	-7.20871E-2	-8.80017E1	-7.15256E-4	-8.80001E1	9.53674E-5	5.6982E-3	9.31501E-2	2.72937E1	-3.26554E1	-3.26488E1	2.67908E1	1.69654E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.00847E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.16233E-2	-8.80015E1	-5.72205E-4	-8.80002E1	1.43051E-4	5.74589E-3	9.31263E-2	2.73187E1	-3.27192E1	-3.2636E1	2.6804E1	1.69798E-7	2.52384E-3	2.52384E-3	6.31278E-3	2.00021E-1