[Scan]
initial_time=2016-02-17T21:54:22
final_time=2016-02-17T21:54:44
ip_count=19
run=1032
dataset=8
scan=394
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.33239E-2
qbias_imon=-3.78053E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-5.93078E-10
ql2_vset=
ql2_vmon=-5.24521E-4
ql2_imon=1.31041E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.63791E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=1.55717E-8
mult1=-1.04869E-8
mult2=-2.78648E-9
rf_tmon=-4.45234E-3
rf_agc=3.35018E-2
counter1=6
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.53131E-3
ql5_imon=5.60677E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66554E0
bslens_imon=2.77568E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19827E1
lens5a_imon=1.98704E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12546E2
lens4a_imon=2.05136E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53238E1
cs_ef1b_imon=3.04721E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04613E2
lens23_imon=1.02193E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05018E1
cs_ea1_imon=2.19576E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03775E0
lens1_imon=1.50313E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64224E1
os_ef1alow_imon=2.97477E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04105E1
cs_ea2_imon=1.54867E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84568E1
cs_ef1a_imon=3.01045E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=1.72431E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11099E1
os_restr1_imon=4.27905E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15474E1
os_ea1_imon=2.19829E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63695E1
os_ef1bup_imon=3.07316E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2521E0
cs_ionrep_imon=1.2628E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91926E2
cs_nozzle_imon=1.93265E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01755E1
cs_anode1_imon=3.26741E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20511E0
olens4_imon=4.21605E-8
tplens_vset=1.4E-1
tplens_vmon=1.60118E0
tplens_imon=-1.51543E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26476E1
iondef3_imon=1.50109E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26795E1
iondef2_imon=1.57463E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02965E2
lens6_imon=2.98443E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=8.52454E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28635E0
ionrepsh_imon=2.01768E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33838E1
lens5b_imon=2.18315E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74519E1
cs_ef2b_imon=3.11208E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.86073E0
os_ea2_imon=-6.77866E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06155E2
lens4b_imon=2.00439E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71053E1
cs_ef2a_imon=3.18777E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10742E0
os_ef2alow_imon=-2.65554E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.76711E-1
os_ef2bup_imon=-5.3405E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10811E1
os_restr2_imon=3.53267E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23078E2
cs_ionfoca_imon=6.3411E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01893E1
cs_anode2_imon=2.28353E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73057E1
iondef1_imon=1.07498E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68149E1
iondef4_imon=1.09134E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.10557E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82642E-1
olens1_imon=9.86298E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14516E0
cs_ionaccel_imon=-1.80861E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0205E2
cs_ionfocb_imon=1.47223E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56357E1
einzel_imon=7.72028E-6
window_vset=0.0E0
window_vmon=1.73494E-1
window_imon=-9.68887E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.39037E-4
mask2_vset=0.0E0
mask2_vmon=-1.86086E1
mask2_imon=-6.40926E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9264E3
multa_neg_imon=7.31071E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.24364E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50183E3
multb_neg_imon=7.17012E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.58803E0
defgridb_imon=6.15712E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33344E1
os_fil1_imon=9.59497E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07563E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64439E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30856E1
cs_fil1_imon=1.0051E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.60672E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66524E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.6094E-2
os_fil2_imon=-2.50379E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.18137E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.77394E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35478E-1
cs_fil2_imon=-2.84617E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.05212E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22528E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.74018E-1
res40_imon=-2.69158E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.439E4	2.3E1	1.47E2	4.1E1	-7.286E-2	-8.80018E1	-7.62939E-4	-8.8E1	-4.76837E-5	5.45979E-3	9.35316E-2	2.73122E1	-3.26891E1	-3.26467E1	2.67891E1	1.69875E-7	2.51116E-3	2.51116E-3	6.31288E-3	2.00325E-1
2.0E0	5.762E3	4.0E0	3.16E2	1.6E2	-7.22418E-2	-8.80018E1	-6.67572E-4	-8.80002E1	4.76837E-5	5.17368E-3	9.34839E-2	2.7302E1	-3.26719E1	-3.26542E1	2.68126E1	1.69725E-7	2.53246E-3	2.53246E-3	6.30202E-3	1.98661E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.09279E-2	-8.80018E1	-4.52995E-4	-8.80001E1	-2.38419E-5	5.55515E-3	9.35555E-2	2.72909E1	-3.26573E1	-3.26368E1	2.67886E1	1.69656E-7	2.51915E-3	2.51915E-3	6.31858E-3	1.99401E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.13915E-2	-8.80025E1	-2.38419E-4	-8.80003E1	2.38419E-5	5.74589E-3	9.34362E-2	2.73003E1	-3.26633E1	-3.26338E1	2.68184E1	1.69688E-7	2.51777E-3	2.51777E-3	6.32877E-3	1.99283E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.13143E-2	-8.80017E1	-3.33786E-4	-8.80001E1	-1.19209E-4	5.24521E-3	9.34601E-2	2.73149E1	-3.26695E1	-3.26174E1	2.68238E1					
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.18554E-2	-8.80018E1	-2.14577E-4	-8.8E1	0.0E0	5.81741E-3	9.36031E-2	2.72762E1	-3.2675E1	-3.26136E1	2.68302E1	1.69875E-7	2.51443E-3	2.51443E-3	6.34588E-3	1.99283E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.20871E-2	-8.80018E1	-2.14577E-4	-8.80002E1	1.43051E-4	5.60284E-3	9.33409E-2	2.73237E1	-3.26338E1	-3.26434E1	2.67493E1	1.69728E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.00325E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.17007E-2	-8.80018E1	-6.19888E-4	-8.80001E1	-1.19209E-4	5.57899E-3	9.33409E-2	2.72915E1	-3.26219E1	-3.2636E1	2.68016E1	1.69798E-7	2.51525E-3	2.51525E-3	6.32896E-3	1.9985E-1
1.2E1	3.31E2	0.0E0	4.85E2	3.23E2	-7.14689E-2	-8.80017E1	-3.57628E-4	-8.79999E1	2.14577E-4	5.55515E-3	9.31025E-2	2.73357E1	-3.26395E1	-3.26285E1	2.67938E1	1.69949E-7	2.51771E-3	2.51771E-3	6.29645E-3	2.00325E-1
1.3E1	2.0E1	0.0E0	5.25E2	3.53E2	-7.14689E-2	-8.80018E1	-2.86102E-4	-8.8E1	0.0E0	5.60284E-3	9.3174E-2	2.73099E1	-3.26723E1	-3.26663E1	2.67637E1	1.69806E-7	2.52473E-3	2.52473E-3	6.32978E-3	2.00285E-1
1.4E1	7.17E2	0.0E0	5.66E2	3.82E2	-7.14689E-2	-8.80017E1	-3.33786E-4	-8.80003E1	3.33786E-4	5.48363E-3	9.33886E-2	2.73628E1	-3.27738E1	-3.25731E1	2.67944E1	1.69654E-7	2.51771E-3	2.51771E-3	6.29645E-3	2.00151E-1
1.5E1	1.01E2	0.0E0	6.06E2	4.11E2	-7.0464E-2	-8.80018E1	-1.19209E-4	-8.80001E1	7.15256E-5	5.48363E-3	9.33647E-2	2.7288E1	-3.26573E1	-3.26142E1	2.68196E1	1.69943E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.01047E-1
1.6E1	3.259E3	1.0E0	6.47E2	4.41E2	-7.06958E-2	-8.80024E1	-1.90735E-4	-8.80001E1	-9.53674E-5	5.74589E-3	9.33647E-2	2.73093E1	-3.26609E1	-3.26765E1	2.67704E1	1.69802E-7	2.51443E-3	2.51443E-3	6.33486E-3	2.00499E-1
1.7E1	3.7895E4	2.4E1	6.87E2	4.7E2	-7.15461E-2	-8.8002E1	-2.6226E-4	-8.80002E1	2.6226E-4	5.22137E-3	9.34124E-2	2.73219E1	-3.26909E1	-3.26248E1	2.67528E1	1.70097E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.99283E-1
1.8E1	1.65097E5	1.14E2	7.27E2	5.0E2	-7.201E-2	-8.80018E1	-2.6226E-4	-8.80004E1	1.43051E-4	5.6982E-3	9.32932E-2	2.73087E1	-3.26639E1	-3.26669E1	2.68076E1	1.69725E-7	2.52061E-3	2.52061E-3	6.30202E-3	1.9951E-1
1.9E1	3.715E3	3.0E0	7.68E2	5.29E2	-7.11597E-2	-8.80016E1	-2.86102E-4	-8.80003E1	-4.76837E-5	5.45979E-3	9.31978E-2	2.73177E1	-3.26314E1	-3.26813E1	2.68383E1	1.69949E-7	2.51771E-3	2.51771E-3	6.32936E-3	1.99283E-1
2.0E1	3.47E2	0.0E0	8.08E2	5.58E2	-7.19325E-2	-8.80017E1	-6.67572E-4	-8.80004E1	-7.15256E-5	5.76973E-3	9.33647E-2	2.73369E1	-3.27005E1	-3.25828E1	2.67806E1	1.69728E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.9963E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.80018E1	-4.29153E-4	-8.80003E1	7.15256E-5	5.72205E-3	9.33886E-2	2.72657E1	-3.2666E1	-3.26011E1	2.68034E1	1.69909E-7	2.51863E-3	2.51863E-3	6.31012E-3	1.99226E-1
2.2E1	4.1E1	0.0E0	8.89E2	6.17E2	-7.35556E-2	-8.80016E1	-2.86102E-4	-8.80003E1	1.19209E-4	5.29289E-3	9.3174E-2	2.73496E1	-3.26777E1	-3.26615E1	2.67763E1	1.69725E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.9883E-1
2.3E1	6.0E0	0.0E0	9.3E2	6.47E2	-7.33239E-2	-8.80016E1	-5.24521E-4	-8.80004E1	2.14577E-4	5.53131E-3	9.32693E-2	2.73057E1	-3.26795E1	-3.26476E1	2.68149E1