[Scan]
initial_time=2016-02-17T21:58:56
final_time=2016-02-17T21:59:17
ip_count=19
run=1032
dataset=9
scan=403
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08808E-4
ql1_vset=
ql1_vmon=-8.20017E-1
ql1_imon=1.60357E-8
ql2_vset=
ql2_vmon=-7.98559E-1
ql2_imon=1.75366E-9
ql3_vset=
ql3_vmon=-9.1301E0
ql3_imon=6.71357E-9
ql4_vset=
ql4_vmon=-9.14214E0
ql4_imon=-1.0643E-10
mult1=-9.32806E-9
mult2=-2.80734E-9
rf_tmon=-4.92563E-3
rf_agc=3.29427E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.93662E-3
ql5_imon=1.45775E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65232E0
bslens_imon=2.63148E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20343E1
lens5a_imon=1.97983E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.05396E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53989E1
cs_ef1b_imon=3.0555E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04652E2
lens23_imon=1.02211E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04832E1
cs_ea1_imon=2.18639E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36956E0
lens1_imon=2.65672E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6438E1
os_ef1alow_imon=2.98342E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03576E1
cs_ea2_imon=1.57175E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8413E1
cs_ef1a_imon=3.01153E-5
olens2_vset=9.7E-1
olens2_vmon=9.70531E-1
olens2_imon=1.72143E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=4.26067E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15402E1
os_ea1_imon=2.18639E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63287E1
os_ef1bup_imon=3.08433E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22867E0
cs_ionrep_imon=1.24622E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91899E2
cs_nozzle_imon=1.9346E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01893E1
cs_anode1_imon=3.26994E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=3.67666E-8
tplens_vset=1.4E-1
tplens_vmon=1.59517E0
tplens_imon=-4.32729E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26597E1
iondef3_imon=1.49496E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26676E1
iondef2_imon=1.55552E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03002E2
lens6_imon=2.9858E-4
ql6_vset=1.0E-1
ql6_vmon=9.29832E-2
ql6_imon=3.97621E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2557E0
ionrepsh_imon=2.00326E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34012E1
lens5b_imon=2.20622E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74465E1
cs_ef2b_imon=3.12073E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.8331E0
os_ea2_imon=-6.63446E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06107E2
lens4b_imon=2.00652E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.17083E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10381E0
os_ef2alow_imon=-2.62671E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.58691E-1
os_ef2bup_imon=-5.42699E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10715E1
os_restr2_imon=3.54456E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23037E2
cs_ionfoca_imon=6.29748E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01803E1
cs_anode2_imon=2.27993E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73045E1
iondef1_imon=1.11969E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6771E1
iondef4_imon=1.09134E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=1.06578E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82594E-1
olens1_imon=9.82866E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11633E0
cs_ionaccel_imon=-1.95998E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47176E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56093E1
einzel_imon=7.59774E-6
window_vset=0.0E0
window_vmon=1.75897E-1
window_imon=-1.09142E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.39026E-4
mask2_vset=0.0E0
mask2_vmon=-1.86272E1
mask2_imon=-7.59857E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92667E3
multa_neg_imon=7.82982E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.65461E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=6.84207E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40758E0
defgridb_imon=5.85431E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33362E1
os_fil1_imon=9.5901E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07131E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64281E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30813E1
cs_fil1_imon=1.00545E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62294E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66194E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.77707E-2
os_fil2_imon=-2.71402E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90506E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.79456E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32889E-1
cs_fil2_imon=-2.61792E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.50011E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22462E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=1.98661E-1
chamber_ion_pmon=1.69725E-7
chamber_cvt_pmon=2.52815E-3
foreline_cvt_pmon=2.52815E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.69213E-1
res40_imon=-2.78168E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	8.0E0	0.0E0	1.47E2	4.1E1	-2.09371E0	-8.21185E-1	-7.98416E-1	-9.13169E0	-9.14185E0	5.45979E-3	9.31978E-2	2.73099E1	-3.26795E1	-3.26518E1	2.67763E1	1.69728E-7	2.52099E-3	2.52099E-3	6.3074E-3	1.99456E-1
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09356E0	-8.2109E-1	-7.9844E-1	-9.13174E0	-9.14195E0	5.79357E-3	9.33409E-2	2.73033E1	-3.26771E1	-3.26308E1	2.68163E1	1.69653E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.00363E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09426E0	-8.20661E-1	-7.98488E-1	-9.13184E0	-9.14185E0	5.4121E-3	9.31025E-2	2.73167E1	-3.27042E1	-3.26474E1	2.68065E1	1.69656E-7	2.51804E-3	2.51804E-3	6.29624E-3	2.00285E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.20661E-1	-7.98345E-1	-9.13153E0	-9.14202E0	5.45979E-3	9.33647E-2	2.73137E1	-3.2634E1	-3.2648E1	2.68381E1	1.69865E-7	2.52131E-3	2.52131E-3	6.31269E-3	1.99061E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09402E0	-8.20208E-1	-7.98345E-1	-9.13193E0	-9.14192E0	5.74589E-3	9.32932E-2	2.72841E1	-3.26549E1	-3.26344E1	2.6813E1	1.69656E-7	2.5225E-3	2.5225E-3	6.3074E-3	1.98696E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.20184E-1	-7.98321E-1	-9.13162E0	-9.14202E0	5.74589E-3	9.31978E-2	2.72561E1	-3.26467E1	-3.25942E1	2.6813E1	1.69949E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.9963E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-8.20351E-1	-7.98321E-1	-9.13146E0	-9.14199E0	5.88894E-3	9.32693E-2	2.72782E1	-3.26891E1	-3.26181E1	2.68268E1	1.69653E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.00192E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09402E0	-8.20398E-1	-7.98464E-1	-9.13153E0	-9.14204E0	5.65052E-3	9.32932E-2	2.72835E1	-3.26975E1	-3.26212E1	2.67962E1	1.69654E-7	2.52538E-3	2.52538E-3	6.33486E-3	1.99977E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.20208E-1	-7.98464E-1	-9.13146E0	-9.14218E0	5.74589E-3	9.32693E-2	2.73405E1	-3.26561E1	-3.26554E1	2.6783E1	1.69728E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.99456E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.20231E-1	-7.98202E-1	-9.13141E0	-9.14211E0	5.67436E-3	9.36508E-2	2.73075E1	-3.26801E1	-3.26314E1	2.67878E1	1.69881E-7	2.52362E-3	2.52362E-3	6.3074E-3	1.99401E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.20136E-1	-7.98202E-1	-9.13179E0	-9.14226E0	5.76973E-3	9.35793E-2	2.72575E1	-3.26266E1	-3.26222E1	2.68114E1	1.69949E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.9963E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.20184E-1	-7.98202E-1	-9.13191E0	-9.14199E0	5.6982E-3	9.3317E-2	2.72901E1	-3.27071E1	-3.26224E1	2.68202E1	1.69776E-7	2.51764E-3	2.51764E-3	6.31225E-3	2.00564E-1
1.6E1	3.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.2047E-1	-7.98249E-1	-9.1316E0	-9.14228E0	5.74589E-3	9.36747E-2	2.73328E1	-3.26419E1	-3.26425E1	2.68022E1	1.69875E-7	2.51552E-3	2.51552E-3	6.33486E-3	2.00325E-1
1.7E1	1.8E1	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.20374E-1	-7.98225E-1	-9.13119E0	-9.14237E0	5.67436E-3	9.35555E-2	2.72925E1	-3.26969E1	-3.26795E1	2.6813E1	1.69654E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.9911E-1
1.8E1	8.2E1	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.20589E-1	-7.98416E-1	-9.13117E0	-9.14223E0	6.03199E-3	9.35555E-2	2.73339E1	-3.26801E1	-3.26398E1	2.68192E1	1.69654E-7	2.51662E-3	2.51662E-3	6.29098E-3	1.98937E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.20518E-1	-7.98535E-1	-9.13119E0	-9.14233E0	6.05583E-3	9.34124E-2	2.73255E1	-3.26488E1	-3.2623E1	2.67896E1	1.6969E-7	2.51755E-3	2.51755E-3	6.31555E-3	2.00344E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.20255E-1	-7.98512E-1	-9.13117E0	-9.14171E0	6.00815E-3	9.29356E-2	2.73051E1	-3.2685E1	-3.26313E1	2.6813E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.19945E-1	-7.98798E-1	-9.13091E0	-9.14202E0	5.98431E-3	9.29117E-2	2.73263E1	-3.26372E1	-3.26307E1	2.67974E1	1.69728E-7	2.51771E-3	2.51771E-3	6.29645E-3	2.00673E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.19874E-1	-7.98869E-1	-9.13067E0	-9.14197E0	6.07967E-3	9.29117E-2	2.73069E1	-3.2639E1	-3.26449E1	2.68117E1	1.69798E-7	2.52707E-3	2.52707E-3	6.31278E-3	1.9917E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.20017E-1	-7.98559E-1	-9.1301E0	-9.14214E0	5.93662E-3	9.29832E-2	2.73045E1	-3.26676E1	-3.26597E1	2.6771E1	1.69725E-7	2.52815E-3	2.52815E-3	6.31278E-3	1.98661E-1