[Scan]
initial_time=2016-02-17T21:59:52
final_time=2016-02-17T22:00:13
ip_count=19
run=1032
dataset=9
scan=405
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08841E-4
ql1_vset=
ql1_vmon=-8.1923E-1
ql1_imon=1.44197E-8
ql2_vset=
ql2_vmon=-7.98798E-1
ql2_imon=1.88484E-9
ql3_vset=
ql3_vmon=-9.13095E0
ql3_imon=2.59769E-9
ql4_vset=
ql4_vmon=-9.14221E0
ql4_imon=2.58243E-10
mult1=-9.23928E-9
mult2=-2.79577E-9
rf_tmon=-4.03165E-3
rf_agc=3.38105E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.84126E-3
ql5_imon=1.53496E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64188E0
bslens_imon=2.51612E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.2023E1
lens5a_imon=1.99645E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.05018E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54287E1
cs_ef1b_imon=3.02422E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02309E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05062E1
cs_ea1_imon=2.17541E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41013E0
lens1_imon=2.64249E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64493E1
os_ef1alow_imon=3.00858E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03907E1
cs_ea2_imon=1.57501E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84348E1
cs_ef1a_imon=2.97209E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=1.7221E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11071E1
os_restr1_imon=4.29304E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15021E1
os_ea1_imon=2.16823E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63896E1
os_ef1bup_imon=3.06593E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26234E0
cs_ionrep_imon=1.26183E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91869E2
cs_nozzle_imon=1.93543E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01468E1
cs_anode1_imon=3.26471E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20549E0
olens4_imon=3.6913E-8
tplens_vset=1.4E-1
tplens_vmon=1.6181E0
tplens_imon=-2.91187E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26402E1
iondef3_imon=1.50022E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26537E1
iondef2_imon=1.58423E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0301E2
lens6_imon=2.98435E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=4.01706E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23445E0
ionrepsh_imon=2.01079E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33777E1
lens5b_imon=2.18463E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74727E1
cs_ef2b_imon=3.11493E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.85375E0
os_ea2_imon=-6.29294E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06141E2
lens4b_imon=2.00602E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70922E1
cs_ef2a_imon=3.1893E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.11132E0
os_ef2alow_imon=-2.67189E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.343E-1
os_ef2bup_imon=-5.56678E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10753E1
os_restr2_imon=3.52744E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.29348E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02134E1
cs_anode2_imon=2.27843E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73434E1
iondef1_imon=1.09381E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6801E1
iondef4_imon=1.07217E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=1.08763E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82833E-1
olens1_imon=9.80598E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1145E0
cs_ionaccel_imon=-1.85173E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02083E2
cs_ionfocb_imon=1.47021E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55774E1
einzel_imon=7.70522E-6
window_vset=0.0E0
window_vmon=1.32542E-1
window_imon=-1.13235E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82603E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.86309E1
mask2_imon=-6.31916E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92666E3
multa_neg_imon=7.40672E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.64854E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.25645E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4986E0
defgridb_imon=6.09527E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33344E1
os_fil1_imon=9.57045E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07231E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64195E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30837E1
cs_fil1_imon=1.00535E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62511E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65868E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.59922E-2
os_fil2_imon=-2.53018E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.8081E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.77428E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3502E-1
cs_fil2_imon=-2.15369E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.04879E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22452E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.00705E-1
chamber_ion_pmon=1.69798E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.71573E-1
res40_imon=-2.71012E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	8.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-8.19564E-1	-7.98535E-1	-9.13074E0	-9.14195E0	5.96046E-3	9.30071E-2	2.73446E1	-3.26744E1	-3.26213E1	2.68215E1	1.69723E-7	2.51814E-3	2.51814E-3	6.33919E-3	1.98894E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09595E0	-8.19588E-1	-7.98321E-1	-9.13057E0	-9.14211E0	5.62668E-3	9.3317E-2	2.73363E1	-3.26652E1	-3.26334E1	2.67988E1	1.70015E-7	2.52384E-3	2.52384E-3	6.30202E-3	1.9883E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.19302E-1	-7.98297E-1	-9.13069E0	-9.14204E0	5.62668E-3	9.34839E-2	2.7312E1	-3.26758E1	-3.26185E1	2.68204E1	1.69806E-7	2.52139E-3	2.52139E-3	6.28511E-3	1.99224E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-8.19302E-1	-7.98488E-1	-9.13055E0	-9.14197E0	5.36442E-3	9.34362E-2	2.73334E1	-3.26555E1	-3.26549E1	2.68146E1	1.69581E-7	2.51814E-3	2.51814E-3	6.3074E-3	1.99562E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09627E0	-8.19588E-1	-7.98607E-1	-9.13045E0	-9.14221E0	5.60284E-3	9.32693E-2	2.73075E1	-3.26536E1	-3.26332E1	2.67962E1	1.6987E-7	2.52276E-3	2.52276E-3	6.30202E-3	2.00363E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.19325E-1	-7.98512E-1	-9.13033E0	-9.14204E0	5.45979E-3	9.31501E-2	2.72883E1	-3.26729E1	-3.26212E1	2.67914E1	1.69875E-7	2.51334E-3	2.51334E-3	6.31288E-3	1.99977E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.19492E-1	-7.98535E-1	-9.13091E0	-9.14202E0	5.67436E-3	9.32932E-2	2.73339E1	-3.26554E1	-3.26212E1	2.68076E1	1.69802E-7	2.52264E-3	2.52264E-3	6.29919E-3	1.9989E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.19135E-1	-7.98368E-1	-9.13069E0	-9.14199E0	5.6982E-3	9.33886E-2	2.72991E1	-3.26723E1	-3.26302E1	2.67866E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.19206E-1	-7.98368E-1	-9.13069E0	-9.14197E0	5.65052E-3	9.32455E-2	2.72865E1	-3.26386E1	-3.26266E1	2.67776E1	1.69725E-7	2.51632E-3	2.51632E-3	6.32356E-3	1.9934E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09433E0	-8.1923E-1	-7.98416E-1	-9.13095E0	-9.14202E0	5.88894E-3	9.31501E-2	2.72967E1	-3.26747E1	-3.26416E1	2.67577E1	1.69802E-7	2.51225E-3	2.51225E-3	6.32936E-3	2.00151E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.18968E-1	-7.98392E-1	-9.13084E0	-9.14178E0	5.98431E-3	9.33409E-2	2.73526E1	-3.27312E1	-3.25906E1	2.67752E1	1.69656E-7	2.51693E-3	2.51693E-3	6.32978E-3	2.00108E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-8.19039E-1	-7.98607E-1	-9.13057E0	-9.1418E0	5.84126E-3	9.36508E-2	2.73198E1	-3.26461E1	-3.2626E1	2.68016E1	1.69943E-7	2.51954E-3	2.51954E-3	6.29665E-3	1.99E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.19087E-1	-7.98583E-1	-9.13067E0	-9.14187E0	5.96046E-3	9.32217E-2	2.7355E1	-3.26705E1	-3.2629E1	2.68117E1	1.70023E-7	2.52099E-3	2.52099E-3	6.29645E-3	1.99283E-1
1.7E1	2.1E1	0.0E0	6.87E2	4.7E2	-2.09387E0	-8.19325E-1	-7.98559E-1	-9.13057E0	-9.14166E0	5.72205E-3	9.34362E-2	2.73128E1	-3.2695E1	-3.26372E1	2.67818E1	1.69725E-7	2.51632E-3	2.51632E-3	6.31817E-3	1.9951E-1
1.8E1	1.16E2	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.19135E-1	-7.98225E-1	-9.13057E0	-9.14199E0	5.72205E-3	9.32217E-2	2.72991E1	-3.26903E1	-3.26392E1	2.67974E1	1.69653E-7	2.5131E-3	2.5131E-3	6.31278E-3	1.9883E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.0965E0	-8.19492E-1	-7.98488E-1	-9.13048E0	-9.14183E0	5.38826E-3	9.35555E-2	2.72898E1	-3.26891E1	-3.26236E1	2.67998E1	1.69654E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.9963E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.19302E-1	-7.98821E-1	-9.13086E0	-9.14195E0	5.50747E-3	9.34124E-2	2.73129E1	-3.26843E1	-3.26404E1	2.68088E1	1.69802E-7	2.51225E-3	2.51225E-3	6.30192E-3	1.99283E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.18992E-1	-7.9875E-1	-9.13107E0	-9.14185E0	5.81741E-3	9.32693E-2	2.73145E1	-3.27098E1	-3.25759E1	2.67932E1	1.69943E-7	2.52169E-3	2.52169E-3	6.33436E-3	1.98153E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.19063E-1	-7.98726E-1	-9.13095E0	-9.14195E0	5.79357E-3	9.33409E-2	2.73556E1	-3.26266E1	-3.25058E1	2.68052E1	1.69728E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.99977E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-8.1923E-1	-7.98798E-1	-9.13095E0	-9.14221E0	5.84126E-3	9.31025E-2	2.73434E1	-3.26537E1	-3.26402E1	2.6801E1	1.69798E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.00705E-1