[Scan]
initial_time=2016-02-17T22:00:20
final_time=2016-02-17T22:00:41
ip_count=19
run=1032
dataset=9
scan=406
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0934E0
qbias_imon=-1.08791E-4
ql1_vset=
ql1_vmon=-8.18872E-1
ql1_imon=1.422E-8
ql2_vset=
ql2_vmon=-7.9875E-1
ql2_imon=1.87513E-9
ql3_vset=
ql3_vmon=-9.13057E0
ql3_imon=2.07088E-9
ql4_vset=
ql4_vmon=-9.14216E0
ql4_imon=2.96438E-10
mult1=-9.74039E-9
mult2=-2.75454E-9
rf_tmon=-5.53383E-3
rf_agc=3.31113E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.74589E-3
ql5_imon=1.51587E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6904E0
bslens_imon=2.47955E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19689E1
lens5a_imon=1.98864E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12506E2
lens4a_imon=2.04997E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54872E1
cs_ef1b_imon=3.06847E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04628E2
lens23_imon=1.02195E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05283E1
cs_ea1_imon=2.16631E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3525E0
lens1_imon=2.50079E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64656E1
os_ef1alow_imon=2.96937E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0395E1
cs_ea2_imon=1.57134E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8398E1
cs_ef1a_imon=3.00216E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.72273E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11424E1
os_restr1_imon=4.28373E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1537E1
os_ea1_imon=2.17269E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6283E1
os_ef1bup_imon=3.07136E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23027E0
cs_ionrep_imon=1.25739E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91891E2
cs_nozzle_imon=1.93225E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01755E1
cs_anode1_imon=3.26021E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20556E0
olens4_imon=3.6818E-8
tplens_vset=1.4E-1
tplens_vmon=1.5789E0
tplens_imon=-3.4136E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26068E1
iondef3_imon=1.48781E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26915E1
iondef2_imon=1.58125E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02962E2
lens6_imon=2.98491E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=4.06889E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28395E0
ionrepsh_imon=2.02828E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33646E1
lens5b_imon=2.19958E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74519E1
cs_ef2b_imon=3.12758E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.85498E0
os_ea2_imon=-5.46646E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.00432E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71366E1
cs_ef2a_imon=3.16794E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07138E0
os_ef2alow_imon=-2.74204E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.52084E-1
os_ef2bup_imon=-5.39095E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10745E1
os_restr2_imon=3.53267E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.30955E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01803E1
cs_anode2_imon=2.28641E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73664E1
iondef1_imon=1.10555E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6783E1
iondef4_imon=1.09711E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.09368E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=9.82771E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11873E0
cs_ionaccel_imon=-2.0717E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02064E2
cs_ionfocb_imon=1.47151E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56477E1
einzel_imon=7.79956E-6
window_vset=0.0E0
window_vmon=1.61481E-1
window_imon=-1.1599E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82611E2
mask1_imon=2.389E-4
mask2_vset=0.0E0
mask2_vmon=-1.85533E1
mask2_imon=-6.04886E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92658E3
multa_neg_imon=7.39579E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9376E3
defgrida_imon=6.53217E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50145E3
multb_neg_imon=7.1091E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52958E0
defgridb_imon=6.08267E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33347E1
os_fil1_imon=9.58326E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08597E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64235E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3086E1
cs_fil1_imon=1.00679E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62023E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66399E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.80005E-2
os_fil2_imon=-2.5999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90506E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.885E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36126E-1
cs_fil2_imon=-2.36564E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.41892E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2234E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=1.99283E-1
chamber_ion_pmon=1.69654E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.73708E-1
res40_imon=-2.60148E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=180
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	8.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.19206E-1	-7.98726E-1	-9.13084E0	-9.14211E0	5.55515E-3	9.33886E-2	2.72721E1	-3.26711E1	-3.26128E1	2.68022E1	1.69949E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.97045E-1
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.19254E-1	-7.98321E-1	-9.13093E0	-9.14211E0	5.65052E-3	9.29594E-2	2.728E1	-3.26695E1	-3.26597E1	2.67845E1	1.69581E-7	2.52276E-3	2.52276E-3	6.32896E-3	1.9883E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.18992E-1	-7.98225E-1	-9.13072E0	-9.14221E0	5.34058E-3	9.30309E-2	2.72862E1	-3.26679E1	-3.26183E1	2.67984E1	1.6981E-7	2.52179E-3	2.52179E-3	6.3131E-3	1.99703E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.18944E-1	-7.98488E-1	-9.13103E0	-9.14228E0	5.53131E-3	9.32693E-2	2.72961E1	-3.26597E1	-3.26356E1	2.6819E1	1.69865E-7	2.52236E-3	2.52236E-3	6.2863E-3	1.99896E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-8.18896E-1	-7.98655E-1	-9.13107E0	-9.14235E0	5.67436E-3	9.30786E-2	2.73117E1	-3.26543E1	-3.26561E1	2.6792E1	1.69728E-7	2.52977E-3	2.52977E-3	6.31288E-3	1.98592E-1
6.0E0	0.0E0	1.0E0	9.93E2	6.35E2	-2.09364E0	-8.1861E-1	-7.98678E-1	-9.13095E0	-9.14202E0	5.72205E-3	9.32455E-2	2.72835E1	-3.26392E1	-3.25912E1	2.67944E1	1.69656E-7	2.51581E-3	2.51581E-3	6.3074E-3	1.98872E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09402E0	-8.18706E-1	-7.98655E-1	-9.13091E0	-9.1419E0	5.55515E-3	9.34362E-2	2.7278E1	-3.26655E1	-3.26124E1	2.67938E1	1.69802E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.98937E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-8.18896E-1	-7.98655E-1	-9.13093E0	-9.14233E0	5.55515E-3	9.31025E-2	2.72843E1	-3.2694E1	-3.26076E1	2.67896E1	1.69725E-7	2.51203E-3	2.51203E-3	6.32896E-3	2.00705E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.18992E-1	-7.98368E-1	-9.13076E0	-9.14211E0	5.84126E-3	9.32932E-2	2.73279E1	-3.26711E1	-3.26062E1	2.67818E1	1.69728E-7	2.5199E-3	2.5199E-3	6.33486E-3	2.01022E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.18896E-1	-7.98607E-1	-9.13086E0	-9.14218E0	5.50747E-3	9.35078E-2	2.72883E1	-3.26627E1	-3.26506E1	2.67517E1	1.69802E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.00673E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.18944E-1	-7.98726E-1	-9.13062E0	-9.14211E0	5.4121E-3	9.32217E-2	2.73352E1	-3.26372E1	-3.26413E1	2.67842E1	1.69654E-7	2.52318E-3	2.52318E-3	6.34037E-3	2.00325E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-8.18682E-1	-7.98512E-1	-9.13088E0	-9.14218E0	5.48363E-3	9.32217E-2	2.73443E1	-3.26731E1	-3.26236E1	2.67722E1	1.69728E-7	2.5188E-3	2.5188E-3	6.29645E-3	2.00499E-1
1.6E1	4.0E0	0.0E0	6.47E2	4.41E2	-2.09611E0	-8.19254E-1	-7.98583E-1	-9.13081E0	-9.14192E0	5.6982E-3	9.32932E-2	2.73111E1	-3.26434E1	-3.2632E1	2.67956E1	1.69802E-7	2.51116E-3	2.51116E-3	6.29645E-3	2.00325E-1
1.7E1	1.8E1	0.0E0	6.87E2	4.7E2	-2.0958E0	-8.18944E-1	-7.98726E-1	-9.13079E0	-9.1424E0	5.36442E-3	9.29594E-2	2.73466E1	-3.26545E1	-3.26283E1	2.67908E1	1.69802E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.00499E-1
1.8E1	1.0E2	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.19135E-1	-7.98607E-1	-9.13086E0	-9.14223E0	5.26905E-3	9.35555E-2	2.73401E1	-3.26826E1	-3.26362E1	2.67633E1	1.69652E-7	2.52236E-3	2.52236E-3	6.31269E-3	1.99896E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.18944E-1	-7.98655E-1	-9.13067E0	-9.14211E0	5.53131E-3	9.35555E-2	2.73195E1	-3.26645E1	-3.26579E1	2.67926E1	1.6981E-7	2.52521E-3	2.52521E-3	6.3131E-3	2.0115E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.18753E-1	-7.98154E-1	-9.13048E0	-9.14221E0	5.6982E-3	9.33886E-2	2.73877E1	-3.26868E1	-3.26437E1	2.68106E1	1.69654E-7	2.52647E-3	2.52647E-3	6.32386E-3	1.99977E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09364E0	-8.18872E-1	-7.98798E-1	-9.13064E0	-9.14226E0	5.76973E-3	9.3627E-2	2.73628E1	-3.26675E1	-3.26639E1	2.68041E1	1.69654E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.99283E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09371E0	-8.1892E-1	-7.98583E-1	-9.13055E0	-9.14199E0	5.6982E-3	9.35793E-2	2.72886E1	-3.25552E1	-3.26579E1	2.68178E1	1.69581E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.98661E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0934E0	-8.18872E-1	-7.9875E-1	-9.13057E0	-9.14216E0	5.74589E-3	9.31978E-2	2.73664E1	-3.26915E1	-3.26068E1	2.6783E1	1.69654E-7	2.5188E-3	2.5188E-3	6.32386E-3	1.99283E-1