[Scan]
initial_time=2016-02-17T22:00:48
final_time=2016-02-17T22:01:09
ip_count=19
run=1032
dataset=9
scan=407
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09402E0
qbias_imon=-1.08764E-4
ql1_vset=
ql1_vmon=-8.18253E-1
ql1_imon=1.41148E-8
ql2_vset=
ql2_vmon=-7.98464E-1
ql2_imon=1.89985E-9
ql3_vset=
ql3_vmon=-9.13067E0
ql3_imon=1.65727E-9
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=3.34406E-10
mult1=-9.25877E-9
mult2=-2.73658E-9
rf_tmon=-4.79481E-3
rf_agc=3.27808E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.88894E-3
ql5_imon=1.55317E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65122E0
bslens_imon=2.69804E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19735E1
lens5a_imon=2.00026E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12509E2
lens4a_imon=2.04975E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54901E1
cs_ef1b_imon=3.07983E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04596E2
lens23_imon=1.02535E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05278E1
cs_ea1_imon=2.19249E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38473E0
lens1_imon=2.54509E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64666E1
os_ef1alow_imon=2.96862E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03852E1
cs_ea2_imon=1.56956E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84226E1
cs_ef1a_imon=3.00615E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.72056E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11164E1
os_restr1_imon=4.27531E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15161E1
os_ea1_imon=2.1984E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63462E1
os_ef1bup_imon=3.08643E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27122E0
cs_ionrep_imon=1.27756E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91869E2
cs_nozzle_imon=1.93406E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01525E1
cs_anode1_imon=3.2595E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=3.68939E-8
tplens_vset=1.4E-1
tplens_vmon=1.62231E0
tplens_imon=-4.82684E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26092E1
iondef3_imon=1.49586E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26843E1
iondef2_imon=1.5859E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02947E2
lens6_imon=2.98426E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=4.05058E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29149E0
ionrepsh_imon=2.02807E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33634E1
lens5b_imon=2.18867E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74327E1
cs_ef2b_imon=3.12084E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.85928E0
os_ea2_imon=-6.66922E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06109E2
lens4b_imon=2.00668E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71211E1
cs_ef2a_imon=3.18652E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.13391E0
os_ef2alow_imon=-2.65104E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.70211E-1
os_ef2bup_imon=-5.52507E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10718E1
os_restr2_imon=3.5191E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23095E2
cs_ionfoca_imon=6.31736E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01607E1
cs_anode2_imon=2.27114E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72781E1
iondef1_imon=1.07872E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67866E1
iondef4_imon=1.07912E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.09398E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82618E-1
olens1_imon=9.81585E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13941E0
cs_ionaccel_imon=-2.00812E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47018E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56289E1
einzel_imon=7.71564E-6
window_vset=0.0E0
window_vmon=1.67874E-1
window_imon=-1.04895E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82617E2
mask1_imon=2.39015E-4
mask2_vset=0.0E0
mask2_vmon=-1.86332E1
mask2_imon=-3.99074E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.27968E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93695E3
defgrida_imon=6.25073E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.52997E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2557E0
defgridb_imon=6.20206E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33324E1
os_fil1_imon=9.54184E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07323E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64328E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30866E1
cs_fil1_imon=1.00255E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6214E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66312E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.69784E-2
os_fil2_imon=-2.8082E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95869E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.74599E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36269E-1
cs_fil2_imon=-2.34483E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.0181E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22562E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.98247E-1
chamber_ion_pmon=1.69728E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.70993E-1
res40_imon=-2.83175E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	7.0E0	0.0E0	1.47E2	4.1E1	-2.09379E0	-8.18682E-1	-7.9844E-1	-9.13076E0	-9.14178E0	5.45979E-3	9.32932E-2	2.72626E1	-3.26537E1	-3.26242E1	2.681E1	1.69581E-7	2.51814E-3	2.51814E-3	6.32858E-3	1.99227E-1
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.18682E-1	-7.98392E-1	-9.13074E0	-9.14204E0	5.50747E-3	9.35555E-2	2.72769E1	-3.26272E1	-3.26278E1	2.68088E1	1.70015E-7	2.52276E-3	2.52276E-3	6.30202E-3	2.00192E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0941E0	-8.18896E-1	-7.98678E-1	-9.13057E0	-9.14218E0	5.17368E-3	9.35555E-2	2.73263E1	-3.26579E1	-3.26549E1	2.67978E1	1.6981E-7	2.52179E-3	2.52179E-3	6.33592E-3	2.01695E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-8.18992E-1	-7.98392E-1	-9.13103E0	-9.14176E0	5.38826E-3	9.31978E-2	2.73405E1	-3.2647E1	-3.26434E1	2.68232E1	1.69723E-7	2.52025E-3	2.52025E-3	6.31798E-3	2.00064E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.18944E-1	-7.98392E-1	-9.13098E0	-9.14211E0	5.38826E-3	9.36031E-2	2.73532E1	-3.26476E1	-3.26633E1	2.68028E1	1.69802E-7	2.52318E-3	2.52318E-3	6.31288E-3	2.00325E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09426E0	-8.18849E-1	-7.98583E-1	-9.13093E0	-9.14218E0	5.55515E-3	9.36031E-2	2.72835E1	-3.265E1	-3.26314E1	2.67806E1	1.69802E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.98764E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.18729E-1	-7.98368E-1	-9.13072E0	-9.14211E0	5.36442E-3	9.34124E-2	2.72793E1	-3.26554E1	-3.2626E1	2.68154E1	1.69875E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.9911E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.18849E-1	-7.98655E-1	-9.13103E0	-9.14199E0	5.74589E-3	9.30071E-2	2.7344E1	-3.26868E1	-3.26278E1	2.68214E1	1.69728E-7	2.52318E-3	2.52318E-3	6.32386E-3	1.98937E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09402E0	-8.19182E-1	-7.98583E-1	-9.13136E0	-9.14187E0	5.53131E-3	9.31978E-2	2.72721E1	-3.26392E1	-3.2617E1	2.68123E1	1.6987E-7	2.51847E-3	2.51847E-3	6.28592E-3	1.98322E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.18992E-1	-7.98202E-1	-9.13105E0	-9.1419E0	5.8651E-3	9.34362E-2	2.73255E1	-3.27167E1	-3.26218E1	2.6822E1	1.69949E-7	2.51007E-3	2.51007E-3	6.33486E-3	1.98937E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.18968E-1	-7.98345E-1	-9.13081E0	-9.14183E0	6.17504E-3	9.35078E-2	2.73387E1	-3.27077E1	-3.26176E1	2.67896E1	1.69728E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.01022E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.18777E-1	-7.98655E-1	-9.13079E0	-9.1419E0	6.03199E-3	9.31501E-2	2.73222E1	-3.26762E1	-3.26307E1	2.684E1	1.69581E-7	2.52428E-3	2.52428E-3	6.31837E-3	2.00325E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.1861E-1	-7.98583E-1	-9.1311E0	-9.14202E0	5.88894E-3	9.32932E-2	2.73192E1	-3.26603E1	-3.26511E1	2.68198E1	1.69728E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.9963E-1
1.7E1	2.3E1	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.18396E-1	-7.98702E-1	-9.131E0	-9.14228E0	5.91278E-3	9.30786E-2	2.73009E1	-3.26512E1	-3.26452E1	2.68159E1	1.69949E-7	2.52099E-3	2.52099E-3	6.29645E-3	1.99977E-1
1.8E1	8.8E1	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.18372E-1	-7.98965E-1	-9.13069E0	-9.14195E0	5.48363E-3	9.29594E-2	2.72957E1	-3.26885E1	-3.26467E1	2.67992E1	1.69581E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.9963E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.1861E-1	-7.98607E-1	-9.13069E0	-9.14199E0	5.53131E-3	9.30786E-2	2.72925E1	-3.26627E1	-3.26224E1	2.68016E1	1.69654E-7	2.5199E-3	2.5199E-3	6.34588E-3	1.99456E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.1861E-1	-7.98917E-1	-9.13088E0	-9.14218E0	5.72205E-3	9.30786E-2	2.73694E1	-3.26615E1	-3.26344E1	2.68196E1	1.6987E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.00363E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.18515E-1	-7.98535E-1	-9.13093E0	-9.14166E0	5.93662E-3	9.30309E-2	2.73104E1	-3.27045E1	-3.26579E1	2.67873E1	1.69654E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.00499E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.18515E-1	-7.98631E-1	-9.13074E0	-9.14183E0	5.74589E-3	9.30548E-2	2.72302E1	-3.25918E1	-3.27151E1	2.67866E1	1.69653E-7	2.52169E-3	2.52169E-3	6.31817E-3	1.9917E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09402E0	-8.18253E-1	-7.98464E-1	-9.13067E0	-9.14187E0	5.88894E-3	9.3174E-2	2.72781E1	-3.26843E1	-3.26092E1	2.67866E1	1.69728E-7	2.52099E-3	2.52099E-3	6.3074E-3	1.98247E-1