[Scan]
initial_time=2016-02-17T22:01:16
final_time=2016-02-17T22:01:37
ip_count=19
run=1032
dataset=9
scan=408
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08727E-4
ql1_vset=
ql1_vmon=-8.18491E-1
ql1_imon=1.40465E-8
ql2_vset=
ql2_vmon=-7.98583E-1
ql2_imon=1.90424E-9
ql3_vset=
ql3_vmon=-9.13119E0
ql3_imon=1.49052E-9
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=3.26443E-10
mult1=-9.97222E-9
mult2=-2.74873E-9
rf_tmon=-5.18196E-3
rf_agc=3.30437E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.79357E-3
ql5_imon=1.57049E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63489E0
bslens_imon=2.62427E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20205E1
lens5a_imon=1.98451E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12513E2
lens4a_imon=2.05096E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54072E1
cs_ef1b_imon=3.06349E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04651E2
lens23_imon=1.02128E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05228E1
cs_ea1_imon=2.19937E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34973E0
lens1_imon=2.58462E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64446E1
os_ef1alow_imon=2.97209E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04195E1
cs_ea2_imon=1.5649E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84081E1
cs_ef1a_imon=2.99295E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.72163E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10926E1
os_restr1_imon=4.27358E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14939E1
os_ea1_imon=2.18711E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63566E1
os_ef1bup_imon=3.08713E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27313E0
cs_ionrep_imon=1.26785E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.93222E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=3.2595E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20549E0
olens4_imon=3.69221E-8
tplens_vset=1.4E-1
tplens_vmon=1.58796E0
tplens_imon=-3.02951E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26301E1
iondef3_imon=1.49821E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26443E1
iondef2_imon=1.58761E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02949E2
lens6_imon=2.98414E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=4.08252E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26952E0
ionrepsh_imon=2.01768E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33826E1
lens5b_imon=2.16837E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74571E1
cs_ef2b_imon=3.12674E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.83069E0
os_ea2_imon=-7.4636E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06137E2
lens4b_imon=2.0072E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7131E1
cs_ef2a_imon=3.1893E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10611E0
os_ef2alow_imon=-2.74834E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.62681E-1
os_ef2bup_imon=-5.46252E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10376E1
os_restr2_imon=3.52952E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23054E2
cs_ionfoca_imon=6.28955E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0178E1
cs_anode2_imon=2.2687E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72827E1
iondef1_imon=1.08868E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68196E1
iondef4_imon=1.10415E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=1.09052E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82642E-1
olens1_imon=9.82307E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11508E0
cs_ionaccel_imon=-1.97336E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47264E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56301E1
einzel_imon=7.72954E-6
window_vset=0.0E0
window_vmon=1.43547E-1
window_imon=-9.89867E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82595E2
mask1_imon=2.38928E-4
mask2_vset=0.0E0
mask2_vmon=-1.85661E1
mask2_imon=-9.79441E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=7.65318E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93734E3
defgrida_imon=6.47797E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5009E3
multb_neg_imon=7.05115E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.58803E0
defgridb_imon=6.11387E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33322E1
os_fil1_imon=9.55221E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07318E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64533E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30844E1
cs_fil1_imon=1.00311E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63142E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65915E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.75127E-2
os_fil2_imon=-2.76186E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.8081E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.66695E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3502E-1
cs_fil2_imon=-2.35062E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04354E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22267E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=1.9968E-1
chamber_ion_pmon=1.69798E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.32766E-1
res40_imon=-3.01941E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=217
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	7.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.18133E-1	-7.98607E-1	-9.13093E0	-9.14226E0	5.76973E-3	9.34124E-2	2.73151E1	-3.26744E1	-3.26178E1	2.67776E1	1.69581E-7	2.51739E-3	2.51739E-3	6.30202E-3	1.9951E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09441E0	-8.18396E-1	-7.98702E-1	-9.13081E0	-9.14202E0	5.55515E-3	9.32693E-2	2.72867E1	-3.26768E1	-3.26113E1	2.6792E1	1.69875E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.9963E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.18062E-1	-7.98607E-1	-9.13074E0	-9.14207E0	5.6982E-3	9.32932E-2	2.72993E1	-3.26758E1	-3.26057E1	2.67972E1	1.69654E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.99456E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.18419E-1	-7.98583E-1	-9.13074E0	-9.14202E0	5.74589E-3	9.34124E-2	2.7291E1	-3.26713E1	-3.26076E1	2.68148E1	1.6987E-7	2.52061E-3	2.52061E-3	6.3074E-3	1.98661E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.18419E-1	-7.98488E-1	-9.13048E0	-9.14223E0	5.67436E-3	9.30786E-2	2.73303E1	-3.26579E1	-3.26374E1	2.6792E1	1.69654E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.9963E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-8.18491E-1	-7.98655E-1	-9.13074E0	-9.14199E0	5.65052E-3	9.32217E-2	2.72897E1	-3.26693E1	-3.2622E1	2.68134E1	1.69949E-7	2.51443E-3	2.51443E-3	6.32386E-3	1.99977E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.183E-1	-7.98512E-1	-9.13088E0	-9.14207E0	5.81741E-3	9.30786E-2	2.73051E1	-3.26485E1	-3.26223E1	2.68494E1	1.69794E-7	2.52236E-3	2.52236E-3	6.31269E-3	1.99394E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09394E0	-8.18515E-1	-7.98678E-1	-9.13091E0	-9.14214E0	5.65052E-3	9.32455E-2	2.73117E1	-3.26681E1	-3.26248E1	2.67716E1	1.69734E-7	2.51384E-3	2.51384E-3	6.3245E-3	2.00064E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.18324E-1	-7.98702E-1	-9.13103E0	-9.14211E0	5.88894E-3	9.32693E-2	2.73099E1	-3.26759E1	-3.26248E1	2.67986E1	1.69654E-7	2.5188E-3	2.5188E-3	6.33486E-3	2.00673E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-8.18276E-1	-7.98821E-1	-9.1311E0	-9.14233E0	6.00815E-3	9.33409E-2	2.72959E1	-3.26768E1	-3.26401E1	2.67878E1	1.69653E-7	2.51954E-3	2.51954E-3	6.32356E-3	1.9968E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09379E0	-8.18491E-1	-7.98845E-1	-9.1311E0	-9.14218E0	5.88894E-3	9.30071E-2	2.72821E1	-3.26526E1	-3.26272E1	2.67958E1	1.69581E-7	2.52027E-3	2.52027E-3	6.3074E-3	1.99401E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09387E0	-8.18586E-1	-7.98798E-1	-9.13055E0	-9.14214E0	5.88894E-3	9.35555E-2	2.73027E1	-3.265E1	-3.26506E1	2.67605E1	1.69763E-7	2.51918E-3	2.51918E-3	6.31555E-3	2.00085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09348E0	-8.18753E-1	-7.98774E-1	-9.13095E0	-9.14214E0	6.00815E-3	9.32455E-2	2.73123E1	-3.27089E1	-3.26086E1	2.67968E1					
1.7E1	2.8E1	0.0E0	6.87E2	4.7E2	-2.09426E0	-8.18777E-1	-7.9875E-1	-9.13112E0	-9.14209E0	5.91278E-3	9.31501E-2	2.73045E1	-3.26609E1	-3.26344E1	2.68178E1	1.69731E-7	2.51915E-3	2.51915E-3	6.3074E-3	2.00108E-1
1.8E1	1.16E2	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.18944E-1	-7.98488E-1	-9.13115E0	-9.14195E0	5.79357E-3	9.3317E-2	2.73321E1	-3.26987E1	-3.2635E1	2.67938E1	1.69728E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.01197E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.18944E-1	-7.98655E-1	-9.13072E0	-9.14197E0	5.8651E-3	9.30309E-2	2.73099E1	-3.26567E1	-3.2647E1	2.67914E1	1.69728E-7	2.5188E-3	2.5188E-3	6.32936E-3	1.99456E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.18563E-1	-7.98726E-1	-9.13081E0	-9.14237E0	5.74589E-3	9.3317E-2	2.73277E1	-3.26872E1	-3.26089E1	2.67986E1	1.69875E-7	2.52209E-3	2.52209E-3	6.33486E-3	1.98764E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0941E0	-8.18563E-1	-7.98941E-1	-9.13057E0	-9.14259E0	5.8651E-3	9.31501E-2	2.73375E1	-3.26815E1	-3.25953E1	2.68296E1	1.69949E-7	2.52099E-3	2.52099E-3	6.32936E-3	1.9911E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09456E0	-8.18229E-1	-7.98655E-1	-9.13086E0	-9.14197E0	5.93662E-3	9.32217E-2	2.72715E1	-3.26838E1	-3.27399E1	2.68112E1	1.69798E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.00363E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.18491E-1	-7.98583E-1	-9.13119E0	-9.14195E0	5.79357E-3	9.31978E-2	2.72827E1	-3.26443E1	-3.26301E1	2.68196E1	1.69798E-7	2.51847E-3	2.51847E-3	6.32896E-3	1.9968E-1