[Scan]
initial_time=2016-02-17T22:01:44
final_time=2016-02-17T22:02:04
ip_count=19
run=1032
dataset=9
scan=409
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09634E0
qbias_imon=-1.08768E-4
ql1_vset=
ql1_vmon=-8.18014E-1
ql1_imon=1.39332E-8
ql2_vset=
ql2_vmon=-7.98512E-1
ql2_imon=1.90341E-9
ql3_vset=
ql3_vmon=-9.131E0
ql3_imon=1.29571E-9
ql4_vset=
ql4_vmon=-9.14192E0
ql4_imon=3.70502E-10
mult1=-9.88488E-9
mult2=-2.72061E-9
rf_tmon=-4.61457E-3
rf_agc=3.40245E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.34058E-3
ql5_imon=1.56082E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65206E0
bslens_imon=2.69191E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19995E1
lens5a_imon=1.9989E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12466E2
lens4a_imon=2.0499E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54962E1
cs_ef1b_imon=3.0519E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02287E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05065E1
cs_ea1_imon=2.19852E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3525E0
lens1_imon=2.74146E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64771E1
os_ef1alow_imon=2.98739E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03802E1
cs_ea2_imon=1.57877E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8458E1
cs_ef1a_imon=3.00757E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.72124E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11141E1
os_restr1_imon=4.27076E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15795E1
os_ea1_imon=2.18578E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63611E1
os_ef1bup_imon=3.08325E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26626E0
cs_ionrep_imon=1.29031E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.93491E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01977E1
cs_anode1_imon=3.25804E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=3.69311E-8
tplens_vset=1.4E-1
tplens_vmon=1.62138E0
tplens_imon=-2.95348E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26266E1
iondef3_imon=1.49914E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26861E1
iondef2_imon=1.60921E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02975E2
lens6_imon=2.9848E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=4.048E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29398E0
ionrepsh_imon=2.00881E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33569E1
lens5b_imon=2.1918E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74555E1
cs_ef2b_imon=3.11821E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.84672E0
os_ea2_imon=-5.99737E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06157E2
lens4b_imon=2.00609E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7112E1
cs_ef2a_imon=3.17948E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06837E0
os_ef2alow_imon=-2.54022E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.58091E-1
os_ef2bup_imon=-5.32248E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10763E1
os_restr2_imon=3.53591E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.3191E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01749E1
cs_anode2_imon=2.2738E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73369E1
iondef1_imon=1.0737E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67842E1
iondef4_imon=1.08233E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.09167E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82857E-1
olens1_imon=9.80514E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11633E0
cs_ionaccel_imon=-1.83384E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47233E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56069E1
einzel_imon=7.53287E-6
window_vset=0.0E0
window_vmon=1.6989E-1
window_imon=-1.06259E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8266E2
mask1_imon=2.39106E-4
mask2_vset=0.0E0
mask2_vmon=-1.85377E1
mask2_imon=-8.49956E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92698E3
multa_neg_imon=8.08951E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.20301E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.36393E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48528E0
defgridb_imon=6.16761E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33323E1
os_fil1_imon=9.60104E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07894E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64431E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30866E1
cs_fil1_imon=1.00708E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62198E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65687E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.5088E-2
os_fil2_imon=-2.7861E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.02519E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.64581E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38068E-1
cs_fil2_imon=-2.65395E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.99846E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22526E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34518E-3
inlet_lpb_pmon=1.9985E-1
chamber_ion_pmon=1.69725E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.2116E-1
res40_imon=-2.706E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=179
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09595E0	-8.18133E-1	-7.9875E-1	-9.13091E0	-9.14197E0	5.6982E-3	9.30786E-2	2.7321E1	-3.26726E1	-3.26343E1	2.68036E1	1.69875E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.01022E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09673E0	-8.17943E-1	-7.98535E-1	-9.13098E0	-9.14233E0	5.55515E-3	9.31978E-2	2.73216E1	-3.26603E1	-3.26621E1	2.68094E1	1.69723E-7	2.51709E-3	2.51709E-3	6.32328E-3	1.98727E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09657E0	-8.18372E-1	-7.98655E-1	-9.13122E0	-9.14226E0	5.53131E-3	9.35555E-2	2.73322E1	-3.26543E1	-3.26213E1	2.67746E1	1.69731E-7	2.5147E-3	2.5147E-3	6.31299E-3	1.96597E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09627E0	-8.18443E-1	-7.98845E-1	-9.13157E0	-9.14221E0	5.53131E-3	9.3174E-2	2.73195E1	-3.26909E1	-3.26374E1	2.68118E1	1.69943E-7	2.52061E-3	2.52061E-3	6.30202E-3	1.9647E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09634E0	-8.18253E-1	-7.98726E-1	-9.13103E0	-9.14257E0	5.79357E-3	9.3317E-2	2.73086E1	-3.26555E1	-3.26107E1	2.67984E1	1.69875E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.97216E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09673E0	-8.183E-1	-7.98464E-1	-9.13103E0	-9.14192E0	5.79357E-3	9.32932E-2	2.72865E1	-3.26188E1	-3.26633E1	2.67704E1	1.69653E-7	2.51632E-3	2.51632E-3	6.31817E-3	1.97647E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09603E0	-8.18229E-1	-7.98249E-1	-9.13122E0	-9.1418E0	5.65052E-3	9.3174E-2	2.72835E1	-3.2635E1	-3.26272E1	2.68322E1	1.69728E-7	2.52099E-3	2.52099E-3	6.31837E-3	1.99977E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09619E0	-8.18396E-1	-7.98464E-1	-9.13115E0	-9.14211E0	5.74589E-3	9.32217E-2	2.72809E1	-3.26496E1	-3.26071E1	2.67794E1	1.69654E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.00673E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.18324E-1	-7.98798E-1	-9.13115E0	-9.14211E0	5.84126E-3	9.3174E-2	2.73526E1	-3.2629E1	-3.26681E1	2.68082E1	1.69802E-7	2.51225E-3	2.51225E-3	6.32386E-3	2.01372E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.18372E-1	-7.9875E-1	-9.13086E0	-9.14228E0	5.45979E-3	9.29832E-2	2.73075E1	-3.26849E1	-3.26543E1	2.6789E1	1.69728E-7	2.52318E-3	2.52318E-3	6.29098E-3	1.99456E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0941E0	-8.18372E-1	-7.98512E-1	-9.131E0	-9.14192E0	6.00815E-3	9.32693E-2	2.72781E1	-3.26645E1	-3.25797E1	2.67962E1	1.69725E-7	2.51847E-3	2.51847E-3	6.28592E-3	1.99E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.1811E-1	-7.98631E-1	-9.13095E0	-9.1423E0	6.00815E-3	9.3317E-2	2.73069E1	-3.26476E1	-3.26236E1	2.68238E1	1.69949E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.98592E-1
1.6E1	3.0E0	0.0E0	6.47E2	4.41E2	-2.09426E0	-8.18372E-1	-7.98678E-1	-9.13095E0	-9.14223E0	5.79357E-3	9.31025E-2	2.73123E1	-3.26518E1	-3.26302E1	2.678E1	1.69802E-7	2.52099E-3	2.52099E-3	6.28006E-3	1.98592E-1
1.7E1	2.0E1	0.0E0	6.87E2	4.7E2	-2.09433E0	-8.18372E-1	-7.98821E-1	-9.13095E0	-9.14199E0	5.8651E-3	9.29117E-2	2.73358E1	-3.26868E1	-3.26148E1	2.68059E1	1.69949E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.99283E-1
1.8E1	9.7E1	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.18467E-1	-7.98678E-1	-9.13105E0	-9.14233E0	6.34193E-3	9.3174E-2	2.73387E1	-3.26536E1	-3.26416E1	2.67982E1	1.69653E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.00705E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.18348E-1	-7.98488E-1	-9.13105E0	-9.14235E0	5.96046E-3	9.29117E-2	2.72998E1	-3.26809E1	-3.26012E1	2.68401E1	1.69654E-7	2.51443E-3	2.51443E-3	6.28552E-3	1.9963E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09426E0	-8.183E-1	-7.98512E-1	-9.13095E0	-9.14245E0	5.79357E-3	9.32455E-2	2.73235E1	-3.26695E1	-3.26248E1	2.68148E1	1.69581E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.00499E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-8.17966E-1	-7.98512E-1	-9.13136E0	-9.14204E0	5.65052E-3	9.30548E-2	2.73187E1	-3.26626E1	-3.25912E1	2.67824E1	1.69875E-7	2.52099E-3	2.52099E-3	6.3074E-3	1.99283E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0958E0	-8.18086E-1	-7.98845E-1	-9.13112E0	-9.14207E0	5.45979E-3	9.31263E-2	2.73694E1	-3.27658E1	-3.25735E1	2.67804E1	1.69725E-7	2.52707E-3	2.52707E-3	6.33436E-3	1.9934E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09634E0	-8.18014E-1	-7.98512E-1	-9.131E0	-9.14192E0	5.34058E-3	9.3317E-2	2.73369E1	-3.26861E1	-3.26266E1	2.67842E1	1.69725E-7	2.52061E-3	2.52061E-3	6.34518E-3	1.9985E-1