[Scan]
initial_time=2016-02-17T22:03:33
final_time=2016-02-17T22:03:53
ip_count=19
run=1032
dataset=9
scan=413
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.088E-4
ql1_vset=
ql1_vmon=-8.1799E-1
ql1_imon=1.38391E-8
ql2_vset=
ql2_vmon=-7.98535E-1
ql2_imon=1.90717E-9
ql3_vset=
ql3_vmon=-9.13107E0
ql3_imon=9.12464E-10
ql4_vset=
ql4_vmon=-9.14211E0
ql4_imon=3.74818E-10
mult1=-1.11928E-8
mult2=-2.78701E-9
rf_tmon=-3.42584E-3
rf_agc=3.4265E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.60284E-3
ql5_imon=1.60791E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64734E0
bslens_imon=2.64944E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19866E1
lens5a_imon=1.98828E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12516E2
lens4a_imon=2.05036E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53472E1
cs_ef1b_imon=3.04901E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.01965E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04941E1
cs_ea1_imon=2.18047E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38908E0
lens1_imon=2.77332E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64608E1
os_ef1alow_imon=2.98126E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03985E1
cs_ea2_imon=1.54338E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84286E1
cs_ef1a_imon=3.00541E-5
olens2_vset=9.7E-1
olens2_vmon=9.69744E-1
olens2_imon=1.7145E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11063E1
os_restr1_imon=4.25778E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15724E1
os_ea1_imon=2.19498E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63437E1
os_ef1bup_imon=3.07785E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23558E0
cs_ionrep_imon=1.25952E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91899E2
cs_nozzle_imon=1.93618E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01551E1
cs_anode1_imon=3.26165E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2057E0
olens4_imon=3.68576E-8
tplens_vset=1.4E-1
tplens_vmon=1.56947E0
tplens_imon=-4.19227E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26107E1
iondef3_imon=1.52179E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26921E1
iondef2_imon=1.58868E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02963E2
lens6_imon=2.98505E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=4.06947E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27687E0
ionrepsh_imon=2.01695E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34047E1
lens5b_imon=2.20029E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7494E1
cs_ef2b_imon=3.13803E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.8302E0
os_ea2_imon=-7.69629E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06146E2
lens4b_imon=2.00414E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7133E1
cs_ef2a_imon=3.16686E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08159E0
os_ef2alow_imon=-2.38885E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.53886E-1
os_ef2bup_imon=-5.29004E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10631E1
os_restr2_imon=3.53663E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.29503E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01731E1
cs_anode2_imon=2.26803E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73479E1
iondef1_imon=1.09423E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68176E1
iondef4_imon=1.0708E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.08833E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82594E-1
olens1_imon=9.80019E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0935E0
cs_ionaccel_imon=-2.00323E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.4728E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56435E1
einzel_imon=7.68063E-6
window_vset=0.0E0
window_vmon=1.79501E-1
window_imon=-1.13107E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39034E-4
mask2_vset=0.0E0
mask2_vmon=-1.86116E1
mask2_imon=-6.73362E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92618E3
multa_neg_imon=7.76743E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.71622E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.11263E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38193E0
defgridb_imon=6.12868E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33377E1
os_fil1_imon=9.58248E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07599E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63766E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30887E1
cs_fil1_imon=1.00505E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62156E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65652E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.80005E-2
os_fil2_imon=-2.65395E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95912E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.23302E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35349E-1
cs_fil2_imon=-2.44973E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2143E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22492E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31798E-3
inlet_lpb_pmon=1.99896E-1
chamber_ion_pmon=1.69652E-7
chamber_cvt_pmon=2.51498E-3
foreline_cvt_pmon=2.51498E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.9413E-1
res40_imon=-2.7961E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-8.17895E-1	-7.98154E-1	-9.13136E0	-9.14209E0	5.93662E-3	9.33409E-2	2.73273E1	-3.26753E1	-3.26182E1	2.67932E1	1.69725E-7	2.51847E-3	2.51847E-3	6.25916E-3	1.99E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.18014E-1	-7.98035E-1	-9.13117E0	-9.14214E0	5.93662E-3	9.35316E-2	2.7379E1	-3.26338E1	-3.26747E1	2.68022E1	1.69798E-7	2.52384E-3	2.52384E-3	6.32356E-3	2.00705E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-8.17895E-1	-7.98273E-1	-9.1311E0	-9.1419E0	5.72205E-3	9.32455E-2	2.73328E1	-3.26649E1	-3.26443E1	2.68128E1	1.69881E-7	2.5147E-3	2.5147E-3	6.40871E-3	1.99224E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-8.18229E-1	-7.98202E-1	-9.13112E0	-9.14185E0	5.67436E-3	9.35316E-2	2.72738E1	-3.2652E1	-3.26172E1	2.67992E1	1.69725E-7	2.51417E-3	2.51417E-3	6.29128E-3	1.99E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09572E0	-8.18133E-1	-7.97892E-1	-9.13117E0	-9.14161E0	5.74589E-3	9.33647E-2	2.72618E1	-3.26723E1	-3.26314E1	2.68178E1	1.69581E-7	2.52276E-3	2.52276E-3	6.28056E-3	1.9951E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09572E0	-8.18014E-1	-7.98082E-1	-9.13124E0	-9.14195E0	5.98431E-3	9.33409E-2	2.72811E1	-3.26308E1	-3.26783E1	2.67866E1	1.69728E-7	2.51771E-3	2.51771E-3	6.37905E-3	1.99803E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09595E0	-8.1768E-1	-7.98059E-1	-9.13115E0	-9.14199E0	5.76973E-3	9.31501E-2	2.73195E1	-3.26573E1	-3.2608E1	2.68076E1	1.6987E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.9883E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.17657E-1	-7.98559E-1	-9.13129E0	-9.14237E0	5.6982E-3	9.33886E-2	2.73231E1	-3.26603E1	-3.26446E1	2.68082E1	1.69656E-7	2.52139E-3	2.52139E-3	6.25735E-3	2.00108E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.17585E-1	-7.98154E-1	-9.13148E0	-9.1419E0	5.34058E-3	9.31263E-2	2.73267E1	-3.26464E1	-3.26554E1	2.67992E1	1.69728E-7	2.51771E-3	2.51771E-3	6.33486E-3	2.00325E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.17823E-1	-7.98488E-1	-9.13122E0	-9.14176E0	5.76973E-3	9.32455E-2	2.72937E1	-3.26759E1	-3.26549E1	2.67848E1	1.69654E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.00499E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09588E0	-8.17847E-1	-7.98106E-1	-9.1311E0	-9.14156E0	5.43594E-3	9.31978E-2	2.72727E1	-3.26803E1	-3.2695E1	2.6796E1	1.69654E-7	2.52318E-3	2.52318E-3	6.28552E-3	1.9911E-1
1.5E1	2.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.17513E-1	-7.98035E-1	-9.13103E0	-9.14164E0	5.8651E-3	9.33886E-2	2.72964E1	-3.26689E1	-3.26335E1	2.67962E1	1.69581E-7	2.51847E-3	2.51847E-3	6.38863E-3	1.9917E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09657E0	-8.17466E-1	-7.98178E-1	-9.13095E0	-9.14192E0	5.29289E-3	9.3627E-2	2.73226E1	-3.26727E1	-3.26299E1	2.67946E1	1.69865E-7	2.51919E-3	2.51919E-3	6.3074E-3	1.98727E-1
1.7E1	1.0E1	0.0E0	6.87E2	4.7E2	-2.09603E0	-8.17728E-1	-7.98345E-1	-9.13098E0	-9.14207E0	5.48363E-3	9.36508E-2	2.73364E1	-3.26644E1	-3.26183E1	2.68198E1	1.6966E-7	2.52502E-3	2.52502E-3	6.24263E-3	1.9997E-1
1.8E1	8.4E1	0.0E0	7.27E2	5.0E2	-2.09611E0	-8.17704E-1	-7.9844E-1	-9.13105E0	-9.14159E0	5.26905E-3	9.35078E-2	2.73003E1	-3.26705E1	-3.26098E1	2.67884E1	1.6987E-7	2.52061E-3	2.52061E-3	6.29128E-3	2.00363E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.17609E-1	-7.98202E-1	-9.131E0	-9.14187E0	5.126E-3	9.35078E-2	2.7361E1	-3.26506E1	-3.2647E1	2.6801E1	1.69728E-7	2.51443E-3	2.51443E-3	6.40682E-3	2.00499E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.17657E-1	-7.98416E-1	-9.13088E0	-9.14166E0	5.60284E-3	9.34362E-2	2.72913E1	-3.26765E1	-3.26603E1	2.68112E1	1.69728E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.01022E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.17871E-1	-7.98202E-1	-9.13076E0	-9.14216E0	5.79357E-3	9.37462E-2	2.73417E1	-3.26803E1	-3.26136E1	2.6798E1	1.69581E-7	2.52538E-3	2.52538E-3	6.26371E-3	2.00847E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.178E-1	-7.98559E-1	-9.13064E0	-9.14204E0	5.79357E-3	9.33647E-2	2.71713E1	-3.25571E1	-3.26364E1	2.6816E1	1.6987E-7	2.52276E-3	2.52276E-3	6.31278E-3	2.00363E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.1799E-1	-7.98535E-1	-9.13107E0	-9.14211E0	5.60284E-3	9.32217E-2	2.73479E1	-3.26921E1	-3.26107E1	2.68176E1	1.69652E-7	2.51498E-3	2.51498E-3	6.31798E-3	1.99896E-1