[Scan]
initial_time=2016-02-17T22:04:27
final_time=2016-02-17T22:04:47
ip_count=19
run=1032
dataset=9
scan=415
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09619E0
qbias_imon=-1.0881E-4
ql1_vset=
ql1_vmon=-8.17394E-1
ql1_imon=1.384E-8
ql2_vset=
ql2_vmon=-7.98512E-1
ql2_imon=1.87907E-9
ql3_vset=
ql3_vmon=-9.13143E0
ql3_imon=8.15094E-10
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=3.87907E-10
mult1=-9.42733E-9
mult2=-2.71462E-9
rf_tmon=-4.72872E-3
rf_agc=3.3646E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=1.5924E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67755E0
bslens_imon=2.55217E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19809E1
lens5a_imon=1.99677E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12502E2
lens4a_imon=2.05158E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53306E1
cs_ef1b_imon=3.044E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04606E2
lens23_imon=1.02132E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04988E1
cs_ea1_imon=2.18026E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38878E0
lens1_imon=2.71439E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64794E1
os_ef1alow_imon=2.98102E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04333E1
cs_ea2_imon=1.5685E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84149E1
cs_ef1a_imon=2.99305E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.71859E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11289E1
os_restr1_imon=4.2959E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15492E1
os_ea1_imon=2.20802E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6388E1
os_ef1bup_imon=3.08009E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24969E0
cs_ionrep_imon=1.2455E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91907E2
cs_nozzle_imon=1.93377E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01974E1
cs_anode1_imon=3.27825E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20573E0
olens4_imon=3.68194E-8
tplens_vset=1.4E-1
tplens_vmon=1.60358E0
tplens_imon=-7.34474E-9
iondef3_vset=-3.249E1
iondef3_vmon=-3.2623E1
iondef3_imon=1.51767E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27059E1
iondef2_imon=1.58833E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02995E2
lens6_imon=2.98522E-4
ql6_vset=1.0E-1
ql6_vmon=9.30548E-2
ql6_imon=4.05656E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28755E0
ionrepsh_imon=2.01624E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33429E1
lens5b_imon=2.18134E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74383E1
cs_ef2b_imon=3.10698E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.81868E0
os_ea2_imon=-7.8962E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06147E2
lens4b_imon=2.00551E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7137E1
cs_ef2a_imon=3.1912E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07314E0
os_ef2alow_imon=-2.76117E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.28877E-1
os_ef2bup_imon=-5.40085E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10882E1
os_restr2_imon=3.53231E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23063E2
cs_ionfoca_imon=6.30613E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.28607E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72492E1
iondef1_imon=1.10274E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67962E1
iondef4_imon=1.07946E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.08854E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=9.78174E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15078E0
cs_ionaccel_imon=-2.03225E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02054E2
cs_ionfocb_imon=1.47109E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56252E1
einzel_imon=7.71261E-6
window_vset=0.0E0
window_vmon=1.83607E-1
window_imon=-1.19364E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39038E-4
mask2_vset=0.0E0
mask2_vmon=-1.85176E1
mask2_imon=-7.65492E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.53782E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93754E3
defgrida_imon=6.58972E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50118E3
multb_neg_imon=7.34676E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46773E0
defgridb_imon=6.05619E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33357E1
os_fil1_imon=9.56244E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06981E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63524E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30891E1
cs_fil1_imon=1.0049E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62313E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65547E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.80286E-2
os_fil2_imon=-2.75607E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96185E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.27793E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35944E-1
cs_fil2_imon=-2.25479E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.28784E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22421E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=1.98592E-1
chamber_ion_pmon=1.69802E-7
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.32081E-1
res40_imon=-2.61256E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	8.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.17537E-1	-7.98488E-1	-9.13122E0	-9.14216E0	5.74589E-3	9.35555E-2	2.73139E1	-3.26744E1	-3.26443E1	2.6784E1	1.69581E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.99283E-1
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.09441E0	-8.178E-1	-7.98583E-1	-9.13091E0	-9.14207E0	6.1512E-3	9.32693E-2	2.73189E1	-3.26434E1	-3.25996E1	2.68028E1	1.69725E-7	2.51632E-3	2.51632E-3	6.33436E-3	2.00363E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09309E0	-8.18181E-1	-7.98821E-1	-9.13103E0	-9.14216E0	5.93662E-3	9.32932E-2	2.73169E1	-3.26608E1	-3.26431E1	2.678E1	1.69806E-7	2.51248E-3	2.51248E-3	6.3074E-3	1.99931E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0934E0	-8.17919E-1	-7.98726E-1	-9.1311E0	-9.14228E0	5.74589E-3	9.32693E-2	2.73195E1	-3.26536E1	-3.26308E1	2.67884E1	1.69723E-7	2.52448E-3	2.52448E-3	6.31798E-3	1.99227E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.17728E-1	-7.98798E-1	-9.13112E0	-9.14187E0	5.74589E-3	9.31978E-2	2.72925E1	-3.26849E1	-3.26356E1	2.68196E1	1.69875E-7	2.5199E-3	2.5199E-3	6.33486E-3	1.99283E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.178E-1	-7.98583E-1	-9.13088E0	-9.14197E0	5.96046E-3	9.34839E-2	2.7301E1	-3.26773E1	-3.26378E1	2.68105E1	1.69654E-7	2.5188E-3	2.5188E-3	6.32386E-3	1.98419E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0958E0	-8.18014E-1	-7.98559E-1	-9.13126E0	-9.14207E0	5.55515E-3	9.34839E-2	2.73177E1	-3.26597E1	-3.25803E1	2.6792E1	1.69653E-7	2.5131E-3	2.5131E-3	6.30202E-3	1.98491E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-8.17919E-1	-7.98631E-1	-9.13122E0	-9.14226E0	5.65052E-3	9.34124E-2	2.73105E1	-3.26266E1	-3.26218E1	2.68046E1	1.69728E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.01197E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.17561E-1	-7.98821E-1	-9.13122E0	-9.14237E0	5.60284E-3	9.33886E-2	2.73333E1	-3.2638E1	-3.26206E1	2.68076E1	1.69728E-7	2.52318E-3	2.52318E-3	6.32386E-3	1.98592E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.17561E-1	-7.98917E-1	-9.13129E0	-9.14199E0	5.62668E-3	9.36747E-2	2.73195E1	-3.26494E1	-3.2629E1	2.67974E1	1.70097E-7	2.5188E-3	2.5188E-3	6.33486E-3	1.9911E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09387E0	-8.17823E-1	-7.98821E-1	-9.13138E0	-9.14221E0	5.67436E-3	9.31263E-2	2.73051E1	-3.26464E1	-3.26591E1	2.67914E1	1.69802E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.9911E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-8.17609E-1	-7.98631E-1	-9.13107E0	-9.14209E0	5.72205E-3	9.32932E-2	2.7347E1	-3.27062E1	-3.26384E1	2.68018E1	1.69653E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.00534E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-8.17657E-1	-7.98297E-1	-9.13093E0	-9.14192E0	5.6982E-3	9.31501E-2	2.73178E1	-3.26637E1	-3.26556E1	2.68065E1	1.70171E-7	2.5188E-3	2.5188E-3	6.33486E-3	2.00325E-1
1.7E1	1.0E1	0.0E0	6.87E2	4.7E2	-2.09371E0	-8.1749E-1	-7.98392E-1	-9.13093E0	-9.14221E0	5.55515E-3	9.32455E-2	2.72549E1	-3.26707E1	-3.26052E1	2.68013E1	1.6979E-7	2.52197E-3	2.52197E-3	6.3126E-3	2.006E-1
1.8E1	1.1E2	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.17609E-1	-7.9844E-1	-9.13105E0	-9.14252E0	5.34058E-3	9.32455E-2	2.72684E1	-3.26518E1	-3.2647E1	2.67884E1	1.6981E-7	2.51952E-3	2.51952E-3	6.3131E-3	2.00606E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.18086E-1	-7.98631E-1	-9.13095E0	-9.14237E0	5.65052E-3	9.34124E-2	2.73009E1	-3.26993E1	-3.26308E1	2.67896E1	1.69949E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.00151E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.17609E-1	-7.98631E-1	-9.13131E0	-9.14197E0	5.79357E-3	9.31978E-2	2.73159E1	-3.26789E1	-3.26314E1	2.67914E1	1.69875E-7	2.51552E-3	2.51552E-3	6.30192E-3	2.00847E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-8.17752E-1	-7.98535E-1	-9.13131E0	-9.1419E0	5.6982E-3	9.3174E-2	2.73045E1	-3.27121E1	-3.25865E1	2.68105E1	1.69581E-7	2.52209E-3	2.52209E-3	6.28552E-3	2.01722E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.17394E-1	-7.9844E-1	-9.13119E0	-9.1419E0	5.65052E-3	9.30071E-2	2.72644E1	-3.26354E1	-3.28112E1	2.67932E1	1.69865E-7	2.52236E-3	2.52236E-3	6.3074E-3	2.00231E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09619E0	-8.17394E-1	-7.98512E-1	-9.13143E0	-9.14187E0	5.48363E-3	9.30548E-2	2.72492E1	-3.27059E1	-3.2623E1	2.67962E1	1.69802E-7	2.52209E-3	2.52209E-3	6.30192E-3	1.98592E-1