[Scan]
initial_time=2016-02-17T22:05:49
final_time=2016-02-17T22:06:08
ip_count=19
run=1032
dataset=9
scan=418
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08792E-4
ql1_vset=
ql1_vmon=-8.1737E-1
ql1_imon=1.37848E-8
ql2_vset=
ql2_vmon=-7.9875E-1
ql2_imon=1.91053E-9
ql3_vset=
ql3_vmon=-9.13091E0
ql3_imon=7.03442E-10
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=4.02057E-10
mult1=-9.70033E-9
mult2=-2.71542E-9
rf_tmon=-4.40919E-3
rf_agc=3.42353E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.62668E-3
ql5_imon=1.58836E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64586E0
bslens_imon=2.70834E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1986E1
lens5a_imon=1.95379E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12509E2
lens4a_imon=2.04961E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.55598E1
cs_ef1b_imon=3.06487E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04644E2
lens23_imon=1.02242E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05178E1
cs_ea1_imon=2.20465E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37807E0
lens1_imon=2.75242E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64578E1
os_ef1alow_imon=2.98522E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03892E1
cs_ea2_imon=1.54829E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8431E1
cs_ef1a_imon=3.01333E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.71914E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11183E1
os_restr1_imon=4.26679E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15795E1
os_ea1_imon=2.18188E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63894E1
os_ef1bup_imon=3.08469E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2876E0
cs_ionrep_imon=1.26107E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91909E2
cs_nozzle_imon=1.93471E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01965E1
cs_anode1_imon=3.26165E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20532E0
olens4_imon=3.68853E-8
tplens_vset=1.4E-1
tplens_vmon=1.63592E0
tplens_imon=-2.81457E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26384E1
iondef3_imon=1.50826E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26703E1
iondef2_imon=1.56335E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02975E2
lens6_imon=2.98313E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=4.05458E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26067E0
ionrepsh_imon=2.04782E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33909E1
lens5b_imon=2.16719E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74615E1
cs_ef2b_imon=3.10704E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.84834E0
os_ea2_imon=-6.3039E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0615E2
lens4b_imon=2.00524E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71053E1
cs_ef2a_imon=3.1838E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.12604E0
os_ef2alow_imon=-2.57986E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.55087E-1
os_ef2bup_imon=-5.36212E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10799E1
os_restr2_imon=3.52546E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2308E2
cs_ionfoca_imon=6.29377E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01677E1
cs_anode2_imon=2.28065E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73057E1
iondef1_imon=1.10901E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67956E1
iondef4_imon=1.0881E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.09009E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82761E-1
olens1_imon=9.79488E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12413E0
cs_ionaccel_imon=-2.04287E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02099E2
cs_ionfocb_imon=1.47169E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56177E1
einzel_imon=7.70226E-6
window_vset=0.0E0
window_vmon=1.73494E-1
window_imon=-1.04817E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39228E-4
mask2_vset=0.0E0
mask2_vmon=-1.86608E1
mask2_imon=-8.64372E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9268E3
multa_neg_imon=7.44647E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93745E3
defgrida_imon=6.38499E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50112E3
multb_neg_imon=7.35465E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41274E0
defgridb_imon=6.32989E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33374E1
os_fil1_imon=9.57851E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06921E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64143E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30906E1
cs_fil1_imon=1.00534E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62486E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65647E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.7138E-2
os_fil2_imon=-2.65395E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95912E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.8872E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33795E-1
cs_fil2_imon=-2.35963E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.63806E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22528E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31283E-3
inlet_lpb_pmon=2.01208E-1
chamber_ion_pmon=1.69727E-7
chamber_cvt_pmon=2.51647E-3
foreline_cvt_pmon=2.51647E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.18157E-1
res40_imon=-2.60148E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09402E0	-8.1706E-1	-7.98106E-1	-9.13148E0	-9.14228E0	6.17504E-3	9.34362E-2	2.73216E1	-3.26614E1	-3.26502E1	2.6831E1	1.69802E-7	2.51334E-3	2.51334E-3	6.3074E-3	1.98937E-1
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.17251E-1	-7.98249E-1	-9.13131E0	-9.14199E0	6.29425E-3	9.34601E-2	2.73187E1	-3.26667E1	-3.25818E1	2.68046E1	1.69725E-7	2.52492E-3	2.52492E-3	6.32896E-3	1.9951E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-8.17299E-1	-7.98297E-1	-9.13072E0	-9.14168E0	6.17504E-3	9.34362E-2	2.72991E1	-3.26879E1	-3.26236E1	2.6819E1	1.69875E-7	2.5188E-3	2.5188E-3	6.32936E-3	1.99803E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.17537E-1	-7.98202E-1	-9.13084E0	-9.14176E0	5.84126E-3	9.34601E-2	2.72937E1	-3.26603E1	-3.26242E1	2.67998E1	1.69728E-7	2.5188E-3	2.5188E-3	6.30192E-3	1.98592E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.17728E-1	-7.98464E-1	-9.131E0	-9.14209E0	6.19888E-3	9.34124E-2	2.72818E1	-3.26468E1	-3.26419E1	2.67896E1	1.69802E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.99283E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.17561E-1	-7.98607E-1	-9.131E0	-9.14204E0	6.03199E-3	9.31501E-2	2.72937E1	-3.27029E1	-3.26591E1	2.6819E1	1.69949E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.00673E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09348E0	-8.1749E-1	-7.98678E-1	-9.13126E0	-9.14197E0	5.88894E-3	9.28879E-2	2.73163E1	-3.26408E1	-3.26408E1	2.68082E1	1.69802E-7	2.52538E-3	2.52538E-3	6.29098E-3	1.99977E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.17752E-1	-7.98702E-1	-9.13126E0	-9.14192E0	5.98431E-3	9.32455E-2	2.72715E1	-3.26735E1	-3.26591E1	2.67935E1	1.70023E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.01022E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-8.17657E-1	-7.98607E-1	-9.13131E0	-9.1423E0	6.03199E-3	9.30786E-2	2.73252E1	-3.26944E1	-3.26083E1	2.68142E1	1.69581E-7	2.51847E-3	2.51847E-3	6.33436E-3	2.00705E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.17513E-1	-7.98512E-1	-9.13117E0	-9.14204E0	5.43594E-3	9.29356E-2	2.72877E1	-3.26332E1	-3.26266E1	2.67986E1	1.69728E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.00499E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.17394E-1	-7.98488E-1	-9.1311E0	-9.14185E0	5.79357E-3	9.3317E-2	2.73039E1	-3.26158E1	-3.26579E1	2.68082E1	1.69653E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.00192E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-8.17347E-1	-7.98631E-1	-9.13124E0	-9.14178E0	5.53131E-3	9.36031E-2	2.73093E1	-3.26885E1	-3.262E1	2.67968E1	1.69875E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.00673E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.17299E-1	-7.98726E-1	-9.131E0	-9.14207E0	5.6982E-3	9.32455E-2	2.73309E1	-3.26386E1	-3.2623E1	2.68064E1	1.69728E-7	2.52318E-3	2.52318E-3	6.31288E-3	1.9911E-1
1.7E1	2.0E1	0.0E0	6.87E2	4.7E2	-2.09627E0	-8.17204E-1	-7.98464E-1	-9.13112E0	-9.14183E0	5.6982E-3	9.32217E-2	2.73309E1	-3.26831E1	-3.26206E1	2.68112E1	1.69728E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.99283E-1
1.8E1	9.5E1	0.0E0	7.27E2	5.0E2	-2.09619E0	-8.17299E-1	-7.98297E-1	-9.13072E0	-9.14199E0	5.60284E-3	9.32693E-2	2.73057E1	-3.26667E1	-3.26124E1	2.6807E1	1.69728E-7	2.5188E-3	2.5188E-3	6.32936E-3	1.98592E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.17513E-1	-7.98082E-1	-9.13079E0	-9.14214E0	5.8651E-3	9.33886E-2	2.731E1	-3.26456E1	-3.26603E1	2.67938E1	1.69654E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.9911E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-8.17299E-1	-7.98631E-1	-9.13079E0	-9.14214E0	5.74589E-3	9.34601E-2	2.73147E1	-3.26819E1	-3.26044E1	2.67896E1	1.69875E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.00151E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.17442E-1	-7.98702E-1	-9.13086E0	-9.14202E0	5.53131E-3	9.34124E-2	2.72999E1	-3.26712E1	-3.26063E1	2.68221E1	1.69949E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.00847E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09603E0	-8.17442E-1	-7.98678E-1	-9.13076E0	-9.14178E0	5.67436E-3	9.33886E-2	2.73093E1	-3.26104E1	-3.24992E1	2.67932E1	1.69725E-7	2.51632E-3	2.51632E-3	6.32356E-3	1.9985E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.1737E-1	-7.9875E-1	-9.13091E0	-9.14197E0	5.62668E-3	9.33647E-2	2.73057E1	-3.26703E1	-3.26384E1	2.67956E1	1.69727E-7	2.51647E-3	2.51647E-3	6.31283E-3	2.01208E-1