[Scan]
initial_time=2016-02-17T22:06:16
final_time=2016-02-17T22:06:35
ip_count=19
run=1032
dataset=9
scan=419
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08739E-4
ql1_vset=
ql1_vmon=-8.17156E-1
ql1_imon=1.37735E-8
ql2_vset=
ql2_vmon=-7.9813E-1
ql2_imon=1.92035E-9
ql3_vset=
ql3_vmon=-9.13124E0
ql3_imon=7.11274E-10
ql4_vset=
ql4_vmon=-9.14183E0
ql4_imon=3.99244E-10
mult1=-1.00432E-8
mult2=-2.80949E-9
rf_tmon=-4.81032E-3
rf_agc=3.27664E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=1.56503E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66326E0
bslens_imon=2.41938E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20113E1
lens5a_imon=1.98651E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.0504E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53893E1
cs_ef1b_imon=3.05932E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.02135E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05118E1
cs_ea1_imon=2.17375E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39085E0
lens1_imon=2.92197E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64435E1
os_ef1alow_imon=2.97209E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03501E1
cs_ea2_imon=1.5547E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84429E1
cs_ef1a_imon=2.98634E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.71457E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11326E1
os_restr1_imon=4.28365E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15276E1
os_ea1_imon=2.21127E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6356E1
os_ef1bup_imon=3.07427E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24384E0
cs_ionrep_imon=1.2358E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91936E2
cs_nozzle_imon=1.93491E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01636E1
cs_anode1_imon=3.2668E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=3.68856E-8
tplens_vset=1.4E-1
tplens_vmon=1.55531E0
tplens_imon=-4.0153E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26449E1
iondef3_imon=1.49312E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26673E1
iondef2_imon=1.57063E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02973E2
lens6_imon=2.98516E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=4.06269E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25446E0
ionrepsh_imon=2.0074E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33764E1
lens5b_imon=2.18791E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74507E1
cs_ef2b_imon=3.12744E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.83669E0
os_ea2_imon=-4.617E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06114E2
lens4b_imon=2.00626E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71287E1
cs_ef2a_imon=3.18339E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.098E0
os_ef2alow_imon=-2.70664E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.42409E-1
os_ef2bup_imon=-5.33046E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10892E1
os_restr2_imon=3.52883E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23095E2
cs_ionfoca_imon=6.33255E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0163E1
cs_anode2_imon=2.2767E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7321E1
iondef1_imon=1.0914E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68118E1
iondef4_imon=1.09337E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.08607E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82809E-1
olens1_imon=9.79477E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11508E0
cs_ionaccel_imon=-2.095E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02057E2
cs_ionfocb_imon=1.4723E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56127E1
einzel_imon=7.76082E-6
window_vset=0.0E0
window_vmon=1.55131E-1
window_imon=-1.1671E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39074E-4
mask2_vset=0.0E0
mask2_vmon=-1.8591E1
mask2_imon=-5.13757E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92613E3
multa_neg_imon=7.9267E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93746E3
defgrida_imon=6.77285E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50118E3
multb_neg_imon=7.2259E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.54729E0
defgridb_imon=6.03311E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33379E1
os_fil1_imon=9.60439E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0708E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63895E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30916E1
cs_fil1_imon=1.00695E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6236E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65649E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.73673E-2
os_fil2_imon=-2.75607E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83127E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.19379E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33897E-1
cs_fil2_imon=-2.13631E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.50869E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22503E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=1.9985E-1
chamber_ion_pmon=1.6987E-7
chamber_cvt_pmon=2.52492E-3
foreline_cvt_pmon=2.52492E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.41251E-1
res40_imon=-2.797E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=201
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-8.17513E-1	-7.98535E-1	-9.13155E0	-9.14192E0	5.96046E-3	9.34362E-2	2.73305E1	-3.27056E1	-3.2593E1	2.67854E1	1.69653E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.00021E-1
2.0E0	8.0E0	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.1768E-1	-7.98678E-1	-9.13122E0	-9.14197E0	6.03199E-3	9.3174E-2	2.72837E1	-3.26609E1	-3.26364E1	2.68016E1	1.69654E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.99803E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-8.17442E-1	-7.98321E-1	-9.13122E0	-9.14178E0	5.81741E-3	9.29832E-2	2.72962E1	-3.26655E1	-3.26018E1	2.68154E1	1.69949E-7	2.5188E-3	2.5188E-3	6.33486E-3	1.99456E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09595E0	-8.17275E-1	-7.98416E-1	-9.13117E0	-9.14199E0	6.05583E-3	9.33647E-2	2.73122E1	-3.26708E1	-3.26124E1	2.67836E1	1.69943E-7	2.51632E-3	2.51632E-3	6.34518E-3	1.9934E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.1718E-1	-7.98178E-1	-9.13112E0	-9.14211E0	6.1512E-3	9.32217E-2	2.72937E1	-3.26488E1	-3.262E1	2.67866E1	1.69654E-7	2.52318E-3	2.52318E-3	6.3074E-3	1.99283E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.17227E-1	-7.98035E-1	-9.13126E0	-9.14197E0	6.05583E-3	9.3317E-2	2.73261E1	-3.26368E1	-3.26398E1	2.6792E1	1.69581E-7	2.51443E-3	2.51443E-3	6.32386E-3	1.9911E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.0958E0	-8.1718E-1	-7.98464E-1	-9.13093E0	-9.14192E0	6.24657E-3	9.34124E-2	2.73207E1	-3.26386E1	-3.26266E1	2.67992E1	1.69725E-7	2.51739E-3	2.51739E-3	6.33977E-3	2.01391E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09634E0	-8.17204E-1	-7.98297E-1	-9.13134E0	-9.14199E0	5.88894E-3	9.31263E-2	2.72847E1	-3.26615E1	-3.26741E1	2.68088E1	1.69728E-7	2.52977E-3	2.52977E-3	6.32936E-3	1.97903E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0965E0	-8.1718E-1	-7.98345E-1	-9.13131E0	-9.14156E0	5.62668E-3	9.3317E-2	2.73081E1	-3.26122E1	-3.26506E1	2.67932E1	1.69692E-7	2.52063E-3	2.52063E-3	6.32957E-3	1.98035E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09634E0	-8.17251E-1	-7.98297E-1	-9.13136E0	-9.1418E0	5.00679E-3	9.3317E-2	2.73261E1	-3.26717E1	-3.26362E1	2.67842E1					
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09657E0	-8.17418E-1	-7.98368E-1	-9.13143E0	-9.14185E0	5.31673E-3	9.33409E-2	2.73772E1	-3.27275E1	-3.26164E1	2.6807E1	1.69581E-7	2.52318E-3	2.52318E-3	6.30192E-3	1.97731E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.17609E-1	-7.98345E-1	-9.13098E0	-9.1418E0	5.48363E-3	9.33886E-2	2.73285E1	-3.27173E1	-3.26663E1	2.68009E1	1.69581E-7	2.51771E-3	2.51771E-3	6.32936E-3	1.9911E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09611E0	-8.1768E-1	-7.98249E-1	-9.13119E0	-9.14195E0	5.34058E-3	9.30071E-2	2.73087E1	-3.26885E1	-3.26398E1	2.67995E1	1.69654E-7	2.52318E-3	2.52318E-3	6.29645E-3	2.00499E-1
1.7E1	2.0E1	0.0E0	6.87E2	4.7E2	-2.09565E0	-8.17513E-1	-7.98178E-1	-9.13095E0	-9.14204E0	5.07832E-3	9.34601E-2	2.73381E1	-3.26803E1	-3.26443E1	2.68046E1	1.69653E-7	2.51847E-3	2.51847E-3	6.2645E-3	2.00021E-1
1.8E1	9.2E1	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.1718E-1	-7.98345E-1	-9.13143E0	-9.14178E0	5.34058E-3	9.32932E-2	2.73333E1	-3.26362E1	-3.26585E1	2.6801E1	1.69802E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.01022E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.17084E-1	-7.9813E-1	-9.13131E0	-9.1419E0	5.19753E-3	9.32932E-2	2.72955E1	-3.26549E1	-3.26422E1	2.6798E1	1.6987E-7	2.51096E-3	2.51096E-3	6.30202E-3	1.9985E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09595E0	-8.1687E-1	-7.9813E-1	-9.13126E0	-9.14211E0	5.29289E-3	9.35793E-2	2.73153E1	-3.26759E1	-3.2641E1	2.67944E1	1.69728E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.9963E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.17132E-1	-7.98178E-1	-9.13138E0	-9.14199E0	5.07832E-3	9.32932E-2	2.73529E1	-3.2721E1	-3.26036E1	2.67978E1	1.69875E-7	2.52209E-3	2.52209E-3	6.31837E-3	1.99283E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.17347E-1	-7.98202E-1	-9.13112E0	-9.14195E0	5.48363E-3	9.3317E-2	2.74175E1	-3.28207E1	-3.25852E1	2.67998E1	1.69875E-7	2.52209E-3	2.52209E-3	6.28552E-3	1.99456E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.17156E-1	-7.9813E-1	-9.13124E0	-9.14183E0	5.29289E-3	9.32455E-2	2.7321E1	-3.26673E1	-3.26449E1	2.68118E1	1.6987E-7	2.52492E-3	2.52492E-3	6.30202E-3	1.9985E-1