[Scan]
initial_time=2016-02-17T22:07:10
final_time=2016-02-17T22:07:29
ip_count=19
run=1032
dataset=9
scan=421
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08707E-4
ql1_vset=
ql1_vmon=-8.17275E-1
ql1_imon=1.37224E-8
ql2_vset=
ql2_vmon=-7.98154E-1
ql2_imon=1.945E-9
ql3_vset=
ql3_vmon=-9.13115E0
ql3_imon=5.78153E-10
ql4_vset=
ql4_vmon=-9.14145E0
ql4_imon=3.77429E-10
mult1=-9.68851E-9
mult2=-2.68014E-9
rf_tmon=-5.41202E-3
rf_agc=3.23535E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.50747E-3
ql5_imon=1.59944E-9
bslens_vset=-6.2E0
bslens_vmon=-6.59908E0
bslens_imon=2.59028E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20378E1
lens5a_imon=1.98392E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.04871E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53459E1
cs_ef1b_imon=3.04125E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04653E2
lens23_imon=1.02239E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05133E1
cs_ea1_imon=2.18902E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3743E0
lens1_imon=2.68414E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65431E1
os_ef1alow_imon=2.97765E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04061E1
cs_ea2_imon=1.56156E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84278E1
cs_ef1a_imon=3.00511E-5
olens2_vset=9.7E-1
olens2_vmon=9.70626E-1
olens2_imon=1.71505E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11274E1
os_restr1_imon=4.2635E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15172E1
os_ea1_imon=2.19666E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63751E1
os_ef1bup_imon=3.08156E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24225E0
cs_ionrep_imon=1.2779E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9185E2
cs_nozzle_imon=1.9342E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0185E1
cs_anode1_imon=3.26332E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=3.69093E-8
tplens_vset=1.4E-1
tplens_vmon=1.58523E0
tplens_imon=-3.22778E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26219E1
iondef3_imon=1.51602E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26573E1
iondef2_imon=1.57095E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02955E2
lens6_imon=2.98593E-4
ql6_vset=1.0E-1
ql6_vmon=9.30071E-2
ql6_imon=4.05958E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24862E0
ionrepsh_imon=1.99783E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33588E1
lens5b_imon=2.20014E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74704E1
cs_ef2b_imon=3.10867E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.8755E0
os_ea2_imon=-8.82447E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.00734E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71003E1
cs_ef2a_imon=3.18374E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10205E0
os_ef2alow_imon=-2.65799E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.55152E-1
os_ef2bup_imon=-5.32351E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10897E1
os_restr2_imon=3.5396E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23076E2
cs_ionfoca_imon=6.31562E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0207E1
cs_anode2_imon=2.28121E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72921E1
iondef1_imon=1.09992E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68088E1
iondef4_imon=1.07148E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.09192E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82594E-1
olens1_imon=9.79936E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12667E0
cs_ionaccel_imon=-2.10542E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47115E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56156E1
einzel_imon=7.60096E-6
window_vset=0.0E0
window_vmon=1.44126E-1
window_imon=-1.24704E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82612E2
mask1_imon=2.39188E-4
mask2_vset=0.0E0
mask2_vmon=-1.86385E1
mask2_imon=-8.50857E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9267E3
multa_neg_imon=7.49868E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.49406E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50155E3
multb_neg_imon=7.1163E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.63562E0
defgridb_imon=6.19858E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33331E1
os_fil1_imon=9.60358E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07236E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63817E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30847E1
cs_fil1_imon=1.00771E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6174E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65938E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.69784E-2
os_fil2_imon=-2.7329E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92394E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.07413E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38017E-1
cs_fil2_imon=-2.82557E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.24627E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22464E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.00151E-1
chamber_ion_pmon=1.69728E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.16345E-1
res40_imon=-2.60238E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-8.16989E-1	-7.98535E-1	-9.13117E0	-9.14207E0	5.74589E-3	9.3627E-2	2.72992E1	-3.26909E1	-3.26649E1	2.68124E1	1.69865E-7	2.51919E-3	2.51919E-3	6.29157E-3	1.99394E-1
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.0958E0	-8.17275E-1	-7.98464E-1	-9.13143E0	-9.1419E0	5.45979E-3	9.34839E-2	2.72855E1	-3.26334E1	-3.2645E1	2.68058E1	1.69725E-7	2.5131E-3	2.5131E-3	6.3074E-3	2.00705E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09611E0	-8.17108E-1	-7.98702E-1	-9.13129E0	-9.14211E0	5.43594E-3	9.32455E-2	2.73275E1	-3.26838E1	-3.26225E1	2.68304E1	1.69581E-7	2.52027E-3	2.52027E-3	6.32978E-3	2.00285E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09627E0	-8.17084E-1	-7.98821E-1	-9.13136E0	-9.14211E0	5.74589E-3	9.32455E-2	2.73225E1	-3.26567E1	-3.2615E1	2.67845E1	1.69798E-7	2.51954E-3	2.51954E-3	6.34518E-3	1.9968E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09642E0	-8.17156E-1	-7.98702E-1	-9.13134E0	-9.1419E0	5.53131E-3	9.33647E-2	2.73284E1	-3.26915E1	-3.26652E1	2.68058E1	1.69723E-7	2.52659E-3	2.52659E-3	6.32328E-3	2.00399E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.17037E-1	-7.98631E-1	-9.13134E0	-9.14185E0	5.53131E-3	9.32932E-2	2.73097E1	-3.26493E1	-3.26402E1	2.67671E1	1.69881E-7	2.52027E-3	2.52027E-3	6.31299E-3	1.99577E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09595E0	-8.17132E-1	-7.98512E-1	-9.13146E0	-9.14207E0	5.84126E-3	9.32932E-2	2.73111E1	-3.26152E1	-3.26248E1	2.68166E1	1.6979E-7	2.52197E-3	2.52197E-3	6.29185E-3	1.98465E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09619E0	-8.17299E-1	-7.98583E-1	-9.13086E0	-9.14221E0	5.43594E-3	9.32932E-2	2.73526E1	-3.26771E1	-3.2608E1	2.67938E1	1.69654E-7	2.52318E-3	2.52318E-3	6.28552E-3	1.98592E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09627E0	-8.1718E-1	-7.98559E-1	-9.13107E0	-9.1418E0	5.24521E-3	9.32217E-2	2.72839E1	-3.26549E1	-3.26431E1	2.682E1	1.69728E-7	2.51771E-3	2.51771E-3	6.32936E-3	1.99283E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09588E0	-8.1706E-1	-7.98297E-1	-9.13119E0	-9.14185E0	5.36442E-3	9.32932E-2	2.73293E1	-3.26254E1	-3.26195E1	2.67881E1	1.69728E-7	2.52318E-3	2.52318E-3	6.32386E-3	1.99803E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09595E0	-8.17132E-1	-7.98607E-1	-9.13117E0	-9.14195E0	5.36442E-3	9.33409E-2	2.73393E1	-3.26693E1	-3.26092E1	2.67884E1	1.69581E-7	2.51847E-3	2.51847E-3	6.30202E-3	1.9934E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-8.16965E-1	-7.9844E-1	-9.13107E0	-9.14202E0	5.19753E-3	9.33886E-2	2.73499E1	-3.2675E1	-3.26225E1	2.6818E1	1.6987E-7	2.52061E-3	2.52061E-3	6.32356E-3	1.9934E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.1718E-1	-7.98774E-1	-9.13117E0	-9.14195E0	5.62668E-3	9.32217E-2	2.73231E1	-3.26524E1	-3.26302E1	2.67932E1	1.69581E-7	2.51847E-3	2.51847E-3	6.31817E-3	1.9951E-1
1.7E1	2.2E1	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.17251E-1	-7.98249E-1	-9.13107E0	-9.14178E0	5.4121E-3	9.34124E-2	2.73231E1	-3.26741E1	-3.26224E1	2.67882E1	1.69618E-7	2.51567E-3	2.51567E-3	6.31017E-3	1.99516E-1
1.8E1	1.13E2	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.17204E-1	-7.98392E-1	-9.1311E0	-9.14173E0	5.31673E-3	9.30786E-2	2.73141E1	-3.27011E1	-3.26615E1	2.67986E1					
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.1687E-1	-7.98655E-1	-9.1311E0	-9.1418E0	5.60284E-3	9.31263E-2	2.72843E1	-3.2678E1	-3.26395E1	2.67956E1	1.69802E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.98937E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.17084E-1	-7.98607E-1	-9.13093E0	-9.14204E0	5.84126E-3	9.31263E-2	2.73472E1	-3.26837E1	-3.26332E1	2.6792E1	1.69654E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.9911E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.16965E-1	-7.98273E-1	-9.131E0	-9.14202E0	5.57899E-3	9.29356E-2	2.73511E1	-3.26933E1	-3.26431E1	2.68088E1	1.69949E-7	2.5188E-3	2.5188E-3	6.28006E-3	2.00673E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09595E0	-8.1718E-1	-7.98416E-1	-9.13086E0	-9.1419E0	5.67436E-3	9.29117E-2	2.73141E1	-3.26819E1	-3.26735E1	2.68154E1	1.69653E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.00705E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.17275E-1	-7.98154E-1	-9.13115E0	-9.14145E0	5.50747E-3	9.30071E-2	2.72921E1	-3.26573E1	-3.26219E1	2.68088E1	1.69728E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.00151E-1