[Scan]
initial_time=2016-02-17T22:07:37
final_time=2016-02-17T22:07:56
ip_count=19
run=1032
dataset=9
scan=422
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08764E-4
ql1_vset=
ql1_vmon=-8.17347E-1
ql1_imon=1.37137E-8
ql2_vset=
ql2_vmon=-7.98535E-1
ql2_imon=1.93537E-9
ql3_vset=
ql3_vmon=-9.13136E0
ql3_imon=5.90086E-10
ql4_vset=
ql4_vmon=-9.14209E0
ql4_imon=3.8271E-10
mult1=-9.54665E-9
mult2=-2.72522E-9
rf_tmon=-5.26455E-3
rf_agc=3.33917E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.76973E-3
ql5_imon=1.55365E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64557E0
bslens_imon=2.50079E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19954E1
lens5a_imon=2.00244E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.05217E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53328E1
cs_ef1b_imon=3.03856E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04653E2
lens23_imon=1.02089E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04823E1
cs_ea1_imon=2.18083E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36312E0
lens1_imon=2.59989E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64308E1
os_ef1alow_imon=2.97297E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0408E1
cs_ea2_imon=1.5678E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84436E1
cs_ef1a_imon=3.01153E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.71767E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=4.27184E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15335E1
os_ea1_imon=2.16915E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63299E1
os_ef1bup_imon=3.07857E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23145E0
cs_ionrep_imon=1.25102E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93544E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01761E1
cs_anode1_imon=3.26417E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20518E0
olens4_imon=3.69093E-8
tplens_vset=1.4E-1
tplens_vmon=1.61725E0
tplens_imon=-2.98887E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26254E1
iondef3_imon=1.48781E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2675E1
iondef2_imon=1.58798E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02962E2
lens6_imon=2.98402E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=4.04729E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29162E0
ionrepsh_imon=2.0074E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33699E1
lens5b_imon=2.18578E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74814E1
cs_ef2b_imon=3.1283E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.83669E0
os_ea2_imon=-7.97944E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06151E2
lens4b_imon=2.00644E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71252E1
cs_ef2a_imon=3.18092E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07798E0
os_ef2alow_imon=-2.69879E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.73107E-1
os_ef2bup_imon=-5.39456E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10745E1
os_restr2_imon=3.53447E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.33184E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01905E1
cs_anode2_imon=2.27668E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73193E1
iondef1_imon=1.08255E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68118E1
iondef4_imon=1.0726E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.08517E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82547E-1
olens1_imon=9.79744E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11512E0
cs_ionaccel_imon=-1.94196E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47219E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56099E1
einzel_imon=7.6482E-6
window_vset=0.0E0
window_vmon=1.68689E-1
window_imon=-1.1599E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82612E2
mask1_imon=2.39041E-4
mask2_vset=0.0E0
mask2_vmon=-1.85665E1
mask2_imon=-6.98589E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.84883E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.73746E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50161E3
multb_neg_imon=7.15157E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46757E0
defgridb_imon=6.09682E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3336E1
os_fil1_imon=9.60764E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06759E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63478E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30875E1
cs_fil1_imon=1.00768E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61849E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66039E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.59744E-2
os_fil2_imon=-2.67798E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95912E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.32414E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35349E-1
cs_fil2_imon=-2.41369E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.06414E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22473E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=2.00673E-1
chamber_ion_pmon=1.69654E-7
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.13351E-1
res40_imon=-2.70239E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=214
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.0965E0	-8.16798E-1	-7.98273E-1	-9.13107E0	-9.14195E0	5.45979E-3	9.32455E-2	2.72727E1	-3.26714E1	-3.26425E1	2.68004E1	1.69943E-7	2.51525E-3	2.51525E-3	6.32896E-3	1.9951E-1
2.0E0	1.0E1	0.0E0	3.16E2	1.6E2	-2.09642E0	-8.16965E-1	-7.98273E-1	-9.13076E0	-9.14173E0	5.38826E-3	9.31263E-2	2.72957E1	-3.26572E1	-3.26092E1	2.67974E1	1.69875E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.99456E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-8.16917E-1	-7.98535E-1	-9.13103E0	-9.14199E0	5.53131E-3	9.35078E-2	2.7324E1	-3.26531E1	-3.26425E1	2.6801E1	1.69806E-7	2.52139E-3	2.52139E-3	6.31299E-3	2.02066E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09595E0	-8.16751E-1	-7.98464E-1	-9.13117E0	-9.14199E0	5.65052E-3	9.32455E-2	2.73008E1	-3.26666E1	-3.26482E1	2.68087E1	1.69798E-7	2.51632E-3	2.51632E-3	6.30202E-3	2.00534E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09611E0	-8.16822E-1	-7.98464E-1	-9.131E0	-9.14178E0	5.60284E-3	9.32693E-2	2.72468E1	-3.26705E1	-3.26008E1	2.68106E1	1.69912E-7	2.52483E-3	2.52483E-3	6.29754E-3	2.00534E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09704E0	-8.16965E-1	-7.98655E-1	-9.13115E0	-9.14204E0	5.62668E-3	9.33647E-2	2.72715E1	-3.26651E1	-3.26272E1	2.68094E1	1.69802E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.01022E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0965E0	-8.1706E-1	-7.98392E-1	-9.13103E0	-9.14214E0	5.60284E-3	9.3174E-2	2.72835E1	-3.26621E1	-3.26524E1	2.6816E1	1.69802E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.01022E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-8.17585E-1	-7.98249E-1	-9.13098E0	-9.14192E0	5.48363E-3	9.29832E-2	2.73339E1	-3.26999E1	-3.25677E1	2.6816E1	1.70023E-7	2.5199E-3	2.5199E-3	6.31837E-3	1.99283E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-8.17275E-1	-7.98178E-1	-9.13093E0	-9.14221E0	5.55515E-3	9.32217E-2	2.73039E1	-3.26356E1	-3.26554E1	2.67926E1	1.69654E-7	2.5199E-3	2.5199E-3	6.3074E-3	1.98937E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.17513E-1	-7.98368E-1	-9.131E0	-9.14209E0	5.38826E-3	9.29356E-2	2.73263E1	-3.2685E1	-3.25859E1	2.67891E1	1.69654E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.9911E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09611E0	-8.17347E-1	-7.98512E-1	-9.13124E0	-9.14176E0	5.53131E-3	9.33409E-2	2.73478E1	-3.25996E1	-3.26194E1	2.67995E1	1.6987E-7	2.51632E-3	2.51632E-3	6.33436E-3	2.00192E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0958E0	-8.17037E-1	-7.98154E-1	-9.13098E0	-9.14185E0	5.31673E-3	9.32455E-2	2.73111E1	-3.27474E1	-3.26278E1	2.6803E1	1.69802E-7	2.51334E-3	2.51334E-3	6.30192E-3	2.00499E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-8.17037E-1	-7.98368E-1	-9.13112E0	-9.14178E0	5.55515E-3	9.32932E-2	2.73106E1	-3.27295E1	-3.26205E1	2.6797E1	1.69728E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.01022E-1
1.7E1	2.4E1	0.0E0	6.87E2	4.7E2	-2.09634E0	-8.17227E-1	-7.98583E-1	-9.13136E0	-9.14199E0	5.29289E-3	9.34362E-2	2.73341E1	-3.26966E1	-3.263E1	2.68151E1	1.69731E-7	2.52473E-3	2.52473E-3	6.32418E-3	2.00818E-1
1.8E1	9.7E1	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.17204E-1	-7.98178E-1	-9.1315E0	-9.14211E0	5.36442E-3	9.31501E-2	2.73307E1	-3.2646E1	-3.26647E1	2.67806E1	1.69794E-7	2.52448E-3	2.52448E-3	6.31269E-3	2.00399E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.1737E-1	-7.98464E-1	-9.13153E0	-9.14183E0	5.57899E-3	9.30786E-2	2.72862E1	-3.2662E1	-3.26278E1	2.67908E1	1.69881E-7	2.52585E-3	2.52585E-3	6.29067E-3	2.00285E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09603E0	-8.17323E-1	-7.98488E-1	-9.13155E0	-9.14211E0	5.34058E-3	9.31978E-2	2.72991E1	-3.26603E1	-3.26404E1	2.68154E1	1.70015E-7	2.52061E-3	2.52061E-3	6.32896E-3	2.00705E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.1706E-1	-7.98512E-1	-9.13131E0	-9.14223E0	5.48363E-3	9.33409E-2	2.73474E1	-3.26828E1	-3.26011E1	2.68047E1	1.69949E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.01197E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.17204E-1	-7.98488E-1	-9.13134E0	-9.14197E0	5.84126E-3	9.32932E-2	2.73492E1	-3.27711E1	-3.2637E1	2.67782E1	1.69725E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.00192E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.17347E-1	-7.98535E-1	-9.13136E0	-9.14209E0	5.76973E-3	9.31978E-2	2.73193E1	-3.2675E1	-3.26254E1	2.68118E1	1.69654E-7	2.52209E-3	2.52209E-3	6.33486E-3	2.00673E-1