[Scan]
initial_time=2016-02-17T22:08:03
final_time=2016-02-17T22:08:25
ip_count=19
run=1032
dataset=9
scan=423
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.08809E-4
ql1_vset=
ql1_vmon=-8.1718E-1
ql1_imon=1.37356E-8
ql2_vset=
ql2_vmon=-7.98154E-1
ql2_imon=1.90679E-9
ql3_vset=
ql3_vmon=-9.1311E0
ql3_imon=5.35667E-10
ql4_vset=
ql4_vmon=-9.14226E0
ql4_imon=4.1244E-10
mult1=-9.40325E-9
mult2=-2.64276E-9
rf_tmon=-4.90897E-3
rf_agc=3.32915E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.07967E-3
ql5_imon=1.5559E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64616E0
bslens_imon=2.58927E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1999E1
lens5a_imon=1.98297E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.05153E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53796E1
cs_ef1b_imon=3.06667E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04572E2
lens23_imon=1.02079E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0497E1
cs_ea1_imon=2.20702E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41385E0
lens1_imon=2.63174E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64867E1
os_ef1alow_imon=2.97621E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04198E1
cs_ea2_imon=1.58833E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83866E1
cs_ef1a_imon=2.9672E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.71665E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11238E1
os_restr1_imon=4.27184E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15294E1
os_ea1_imon=2.20383E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63239E1
os_ef1bup_imon=3.06415E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23912E0
cs_ionrep_imon=1.26837E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91902E2
cs_nozzle_imon=1.93342E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02109E1
cs_anode1_imon=3.28291E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20527E0
olens4_imon=3.68219E-8
tplens_vset=1.4E-1
tplens_vmon=1.59129E0
tplens_imon=-3.44899E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26242E1
iondef3_imon=1.50303E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26759E1
iondef2_imon=1.59293E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02979E2
lens6_imon=2.98466E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=4.07919E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26685E0
ionrepsh_imon=2.01129E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33852E1
lens5b_imon=2.18437E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74519E1
cs_ef2b_imon=3.1247E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.85793E0
os_ea2_imon=-8.68732E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06129E2
lens4b_imon=2.00463E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.72057E1
cs_ef2a_imon=3.24327E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.11523E0
os_ef2alow_imon=-2.80691E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.47279E-1
os_ef2bup_imon=-5.3405E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10403E1
os_restr2_imon=3.52366E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.29716E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01893E1
cs_anode2_imon=2.26551E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73159E1
iondef1_imon=1.10237E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68028E1
iondef4_imon=1.08017E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.08589E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82642E-1
olens1_imon=9.80041E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11813E0
cs_ionaccel_imon=-2.0717E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.46952E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56039E1
einzel_imon=7.66982E-6
window_vset=0.0E0
window_vmon=1.59679E-1
window_imon=-1.04097E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39239E-4
mask2_vset=0.0E0
mask2_vmon=-1.86302E1
mask2_imon=-6.73362E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92606E3
multa_neg_imon=7.60107E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.75162E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.35331E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36126E0
defgridb_imon=6.21362E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33352E1
os_fil1_imon=9.56848E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06999E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63974E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.309E1
cs_fil1_imon=1.0045E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63297E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65679E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.7494E-2
os_fil2_imon=-2.44372E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90506E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.95461E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36384E-1
cs_fil2_imon=-2.0593E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.95952E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22549E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=1.9911E-1
chamber_ion_pmon=1.69802E-7
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.11259E-1
res40_imon=-2.78529E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=182
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E1	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.17156E-1	-7.98297E-1	-9.13131E0	-9.14199E0	5.74589E-3	9.33409E-2	2.73116E1	-3.26803E1	-3.26325E1	2.67057E1	1.69653E-7	2.50882E-3	2.50882E-3	6.29665E-3	1.9917E-1
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.17394E-1	-7.98416E-1	-9.13115E0	-9.14187E0	5.67436E-3	9.29594E-2	2.7318E1	-3.26646E1	-3.2648E1	2.68643E1	1.69798E-7	2.52384E-3	2.52384E-3	6.32356E-3	1.98491E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-8.17394E-1	-7.98488E-1	-9.13131E0	-9.14178E0	5.76973E-3	9.27925E-2	2.73075E1	-3.27039E1	-3.26331E1	2.67931E1	1.69806E-7	2.52362E-3	2.52362E-3	6.32978E-3	1.99224E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.17204E-1	-7.98464E-1	-9.13126E0	-9.14183E0	5.81741E-3	9.31263E-2	2.7291E1	-3.26426E1	-3.26213E1	2.67891E1	1.69943E-7	2.51417E-3	2.51417E-3	6.30202E-3	1.9934E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.17084E-1	-7.98345E-1	-9.13115E0	-9.1418E0	5.6982E-3	9.34124E-2	2.72984E1	-3.2647E1	-3.26165E1	2.6795E1	1.69625E-7	2.52187E-3	2.52187E-3	6.3074E-3	1.99803E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-8.16941E-1	-7.98702E-1	-9.13126E0	-9.14171E0	5.79357E-3	9.3317E-2	2.73478E1	-3.26482E1	-3.26176E1	2.68621E1	1.69698E-7	2.51758E-3	2.51758E-3	6.32483E-3	2.00755E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.17442E-1	-7.98249E-1	-9.13105E0	-9.14202E0	5.76973E-3	9.34839E-2	2.72727E1	-3.26679E1	-3.26384E1	2.67649E1	1.69653E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.00363E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.17418E-1	-7.98249E-1	-9.1311E0	-9.14176E0	5.55515E-3	9.32455E-2	2.73321E1	-3.26729E1	-3.25852E1	2.67932E1	1.69654E-7	2.5188E-3	2.5188E-3	6.28552E-3	1.99456E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-8.17347E-1	-7.98297E-1	-9.13091E0	-9.14207E0	5.65052E-3	9.32217E-2	2.72745E1	-3.26676E1	-3.26199E1	2.6786E1	1.69728E-7	2.51334E-3	2.51334E-3	6.31288E-3	1.98937E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-8.17466E-1	-7.98392E-1	-9.13122E0	-9.14209E0	5.65052E-3	9.33886E-2	2.72927E1	-3.26502E1	-3.26585E1	2.68514E1	1.69581E-7	2.51915E-3	2.51915E-3	6.32978E-3	1.98169E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.1706E-1	-7.98488E-1	-9.13093E0	-9.14202E0	5.67436E-3	9.35078E-2	2.72898E1	-3.26591E1	-3.2678E1	2.67571E1	1.69581E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.98419E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.17299E-1	-7.98368E-1	-9.13112E0	-9.14204E0	5.74589E-3	9.34362E-2	2.73128E1	-3.26679E1	-3.26266E1	2.67878E1	1.69728E-7	2.52099E-3	2.52099E-3	6.29098E-3	1.9911E-1
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.17323E-1	-7.98154E-1	-9.13134E0	-9.14209E0	5.6982E-3	9.33886E-2	2.73111E1	-3.26416E1	-3.26621E1	2.6804E1	1.69798E-7	2.52384E-3	2.52384E-3	6.32356E-3	1.9934E-1
1.7E1	2.9E1	1.0E0	6.87E2	4.7E2	-2.09379E0	-8.17156E-1	-7.98297E-1	-9.13112E0	-9.14223E0	6.05583E-3	9.35316E-2	2.72697E1	-3.26649E1	-3.26461E1	2.68328E1	1.70097E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.99977E-1
1.8E1	8.7E1	0.0E0	7.27E2	5.0E2	-2.0941E0	-8.17227E-1	-7.98082E-1	-9.13141E0	-9.14221E0	5.84126E-3	9.34124E-2	2.72937E1	-3.26753E1	-3.2632E1	2.67937E1	1.69802E-7	2.51334E-3	2.51334E-3	6.32936E-3	2.01022E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.0941E0	-8.16941E-1	-7.9844E-1	-9.13084E0	-9.14211E0	5.72205E-3	9.32217E-2	2.72883E1	-3.26795E1	-3.26452E1	2.67818E1	1.69725E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.01562E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09402E0	-8.16822E-1	-7.98297E-1	-9.13088E0	-9.14209E0	5.74589E-3	9.30548E-2	2.73183E1	-3.26494E1	-3.26344E1	2.67908E1	1.69728E-7	2.5188E-3	2.5188E-3	6.34588E-3	2.00673E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.17037E-1	-7.98011E-1	-9.13093E0	-9.14187E0	5.79357E-3	9.30309E-2	2.73486E1	-3.26839E1	-3.26231E1	2.68076E1	1.69581E-7	2.5199E-3	2.5199E-3	6.3074E-3	1.98419E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.1687E-1	-7.98202E-1	-9.13112E0	-9.14204E0	5.84126E-3	9.32455E-2	2.72426E1	-3.27239E1	-3.27215E1	2.6813E1	1.69723E-7	2.51603E-3	2.51603E-3	6.31798E-3	1.98063E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-8.1718E-1	-7.98154E-1	-9.1311E0	-9.14226E0	6.07967E-3	9.33886E-2	2.73159E1	-3.26759E1	-3.26242E1	2.68028E1	1.69802E-7	2.52209E-3	2.52209E-3	6.29645E-3	1.9911E-1