[Scan]
initial_time=2016-02-17T22:08:33
final_time=2016-02-17T22:08:55
ip_count=19
run=1032
dataset=9
scan=424
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.08793E-4
ql1_vset=
ql1_vmon=-8.17013E-1
ql1_imon=1.36779E-8
ql2_vset=
ql2_vmon=-7.98345E-1
ql2_imon=1.94286E-9
ql3_vset=
ql3_vmon=-9.13103E0
ql3_imon=5.44083E-10
ql4_vset=
ql4_vmon=-9.14183E0
ql4_imon=3.9475E-10
mult1=-9.89692E-9
mult2=-2.74656E-9
rf_tmon=-4.84288E-3
rf_agc=3.23783E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.8651E-3
ql5_imon=1.59425E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62528E0
bslens_imon=2.4296E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19743E1
lens5a_imon=1.96469E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12521E2
lens4a_imon=2.05201E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53646E1
cs_ef1b_imon=3.06091E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04635E2
lens23_imon=1.02355E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0503E1
cs_ea1_imon=2.18026E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37436E0
lens1_imon=2.61706E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64566E1
os_ef1alow_imon=2.97982E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04135E1
cs_ea2_imon=1.59518E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84292E1
cs_ef1a_imon=3.00252E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.71829E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11177E1
os_restr1_imon=4.27472E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15552E1
os_ea1_imon=2.20189E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63563E1
os_ef1bup_imon=3.07604E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24309E0
cs_ionrep_imon=1.26821E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91865E2
cs_nozzle_imon=1.93301E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01797E1
cs_anode1_imon=3.25912E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20532E0
olens4_imon=3.68831E-8
tplens_vset=1.4E-1
tplens_vmon=1.58616E0
tplens_imon=-2.45272E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2635E1
iondef3_imon=1.50325E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26765E1
iondef2_imon=1.57319E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02952E2
lens6_imon=2.98461E-4
ql6_vset=1.0E-1
ql6_vmon=9.29594E-2
ql6_imon=4.06858E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28154E0
ionrepsh_imon=2.00218E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33387E1
lens5b_imon=2.20297E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74579E1
cs_ef2b_imon=3.12181E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.8331E0
os_ea2_imon=-4.57964E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06132E2
lens4b_imon=2.00547E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71246E1
cs_ef2a_imon=3.18777E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.11943E0
os_ef2alow_imon=-2.70239E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.55688E-1
os_ef2bup_imon=-5.40537E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10829E1
os_restr2_imon=3.52113E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23039E2
cs_ionfoca_imon=6.31983E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01899E1
cs_anode2_imon=2.26479E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73345E1
iondef1_imon=1.10418E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67669E1
iondef4_imon=1.08593E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.08808E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82833E-1
olens1_imon=9.81352E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12113E0
cs_ionaccel_imon=-1.98521E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0205E2
cs_ionfocb_imon=1.47104E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56243E1
einzel_imon=7.64459E-6
window_vset=0.0E0
window_vmon=1.73494E-1
window_imon=-9.72491E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.39235E-4
mask2_vset=0.0E0
mask2_vmon=-1.86146E1
mask2_imon=-7.63461E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.73609E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.83125E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50162E3
multb_neg_imon=7.40804E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.68428E0
defgridb_imon=6.51041E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33356E1
os_fil1_imon=9.53701E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07593E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63915E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30834E1
cs_fil1_imon=1.00232E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62372E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65138E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.66099E-2
os_fil2_imon=-2.66597E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89906E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.09103E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36126E-1
cs_fil2_imon=-2.5098E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.22031E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22301E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.99E-1
chamber_ion_pmon=1.69798E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.10949E-1
res40_imon=-2.65915E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.16965E-1	-7.98273E-1	-9.13119E0	-9.14233E0	5.57899E-3	9.31978E-2	2.73299E1	-3.2662E1	-3.26661E1	2.68111E1	1.69802E-7	2.5188E-3	2.5188E-3	6.29098E-3	1.96703E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.16727E-1	-7.98583E-1	-9.13107E0	-9.14221E0	5.62668E-3	9.32217E-2	2.73124E1	-3.26682E1	-3.26542E1	2.67864E1	1.69653E-7	2.51954E-3	2.51954E-3	6.31278E-3	1.96303E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.16798E-1	-7.98488E-1	-9.13126E0	-9.14245E0	5.60284E-3	9.30786E-2	2.7264E1	-3.26909E1	-3.26301E1	2.67856E1	1.69581E-7	2.5225E-3	2.5225E-3	6.31858E-3	1.96771E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.17132E-1	-7.9844E-1	-9.13093E0	-9.14218E0	5.55515E-3	9.31025E-2	2.7318E1	-3.26744E1	-3.26499E1	2.6804E1	1.69652E-7	2.51393E-3	2.51393E-3	6.32328E-3	1.97069E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09611E0	-8.16846E-1	-7.98345E-1	-9.13107E0	-9.14254E0	5.65052E-3	9.31501E-2	2.73231E1	-3.26873E1	-3.26506E1	2.67962E1	1.69881E-7	2.52027E-3	2.52027E-3	6.31299E-3	1.99401E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.17132E-1	-7.98345E-1	-9.13129E0	-9.14268E0	5.88894E-3	9.29832E-2	2.73303E1	-3.26693E1	-3.26212E1	2.68088E1	1.69875E-7	2.5188E-3	2.5188E-3	6.32386E-3	1.99456E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.16941E-1	-7.98583E-1	-9.13093E0	-9.1423E0	5.6982E-3	9.31501E-2	2.73045E1	-3.26398E1	-3.26374E1	2.68088E1	1.69728E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.99803E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.17132E-1	-7.98488E-1	-9.13115E0	-9.14254E0	5.36442E-3	9.3317E-2	2.73021E1	-3.26645E1	-3.2611E1	2.67926E1	1.69654E-7	2.51334E-3	2.51334E-3	6.34037E-3	2.01547E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09418E0	-8.17204E-1	-7.98297E-1	-9.13093E0	-9.14216E0	5.55515E-3	9.33409E-2	2.72432E1	-3.26567E1	-3.26188E1	2.68112E1	1.69728E-7	2.5188E-3	2.5188E-3	6.34037E-3	2.00673E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.16965E-1	-7.98488E-1	-9.13107E0	-9.1423E0	5.84126E-3	9.31978E-2	2.72813E1	-3.26596E1	-3.26364E1	2.67914E1	1.69875E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.9963E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09379E0	-8.16941E-1	-7.9844E-1	-9.13105E0	-9.14211E0	5.91278E-3	9.31263E-2	2.73388E1	-3.26646E1	-3.26413E1	2.6802E1	1.69865E-7	2.51709E-3	2.51709E-3	6.32328E-3	2.00567E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09418E0	-8.16941E-1	-7.98535E-1	-9.13124E0	-9.14204E0	5.76973E-3	9.31263E-2	2.73207E1	-3.26729E1	-3.2638E1	2.6801E1	1.69731E-7	2.51915E-3	2.51915E-3	6.34661E-3	1.99754E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.1656E-1	-7.98416E-1	-9.13112E0	-9.14192E0	5.8651E-3	9.34124E-2	2.73399E1	-3.26856E1	-3.26048E1	2.67986E1	1.69728E-7	2.5188E-3	2.5188E-3	6.29098E-3	1.99977E-1
1.7E1	1.6E1	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.16512E-1	-7.98559E-1	-9.13122E0	-9.14185E0	5.26905E-3	9.34124E-2	2.73243E1	-3.26494E1	-3.2632E1	2.67984E1	1.69653E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.00363E-1
1.8E1	8.0E1	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.16727E-1	-7.98655E-1	-9.13143E0	-9.14199E0	5.48363E-3	9.3174E-2	2.72552E1	-3.265E1	-3.26098E1	2.6816E1	1.69654E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.00151E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.16607E-1	-7.9844E-1	-9.13131E0	-9.1418E0	5.88894E-3	9.3174E-2	2.73249E1	-3.26554E1	-3.265E1	2.67986E1	1.69802E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.99803E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09418E0	-8.1706E-1	-7.9813E-1	-9.13138E0	-9.1419E0	5.96046E-3	9.29832E-2	2.73169E1	-3.26767E1	-3.26225E1	2.68094E1	1.69802E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.01022E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.17037E-1	-7.98488E-1	-9.13119E0	-9.14178E0	5.96046E-3	9.29832E-2	2.73051E1	-3.26579E1	-3.26579E1	2.67914E1	1.69725E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.00534E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.17204E-1	-7.98464E-1	-9.13098E0	-9.14214E0	5.88894E-3	9.29832E-2	2.73027E1	-3.26024E1	-3.25894E1	2.67944E1	1.69652E-7	2.52236E-3	2.52236E-3	6.33919E-3	1.98894E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-8.17013E-1	-7.98345E-1	-9.13103E0	-9.14183E0	5.8651E-3	9.29594E-2	2.73345E1	-3.26765E1	-3.2635E1	2.67669E1	1.69798E-7	2.51417E-3	2.51417E-3	6.3074E-3	1.99E-1