[Scan]
initial_time=2016-02-17T22:10:04
final_time=2016-02-17T22:10:26
ip_count=19
run=1032
dataset=9
scan=427
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08768E-4
ql1_vset=
ql1_vmon=-8.16917E-1
ql1_imon=1.37306E-8
ql2_vset=
ql2_vmon=-7.98202E-1
ql2_imon=1.93732E-9
ql3_vset=
ql3_vmon=-9.13105E0
ql3_imon=4.76992E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=4.02105E-10
mult1=-9.41661E-9
mult2=-2.77813E-9
rf_tmon=-4.06115E-3
rf_agc=3.38695E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.36442E-3
ql5_imon=1.59155E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6373E0
bslens_imon=2.50891E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20163E1
lens5a_imon=1.96433E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.0527E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5358E1
cs_ef1b_imon=3.05802E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02298E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04423E1
cs_ea1_imon=2.19396E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37316E0
lens1_imon=2.54857E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64632E1
os_ef1alow_imon=2.98558E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04069E1
cs_ea2_imon=1.55372E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84532E1
cs_ef1a_imon=3.00577E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.72118E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11015E1
os_restr1_imon=4.28157E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15612E1
os_ea1_imon=2.19757E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64044E1
os_ef1bup_imon=3.07857E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24309E0
cs_ionrep_imon=1.25631E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91917E2
cs_nozzle_imon=1.93416E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01761E1
cs_anode1_imon=3.25768E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20535E0
olens4_imon=3.69195E-8
tplens_vset=1.4E-1
tplens_vmon=1.56333E0
tplens_imon=-2.38062E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26189E1
iondef3_imon=1.50361E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27198E1
iondef2_imon=1.57715E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02962E2
lens6_imon=2.9844E-4
ql6_vset=1.0E-1
ql6_vmon=9.29356E-2
ql6_imon=4.07575E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23347E0
ionrepsh_imon=1.9928E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33862E1
lens5b_imon=2.18387E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74483E1
cs_ef2b_imon=3.111E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.82288E0
os_ea2_imon=-6.41816E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0614E2
lens4b_imon=2.00637E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7112E1
cs_ef2a_imon=3.1856E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.11282E0
os_ef2alow_imon=-2.66996E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.5749E-1
os_ef2bup_imon=-5.5243E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10853E1
os_restr2_imon=3.53483E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.29279E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01599E1
cs_anode2_imon=2.26803E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73263E1
iondef1_imon=1.0894E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67908E1
iondef4_imon=1.07152E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.09988E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82666E-1
olens1_imon=9.81447E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15957E0
cs_ionaccel_imon=-1.9816E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.47129E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56369E1
einzel_imon=7.59053E-6
window_vset=0.0E0
window_vmon=1.74095E-1
window_imon=-8.75184E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.38962E-4
mask2_vset=0.0E0
mask2_vmon=-1.85425E1
mask2_imon=-7.20213E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92695E3
multa_neg_imon=7.87669E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.52844E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50148E3
multb_neg_imon=7.03673E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.58202E0
defgridb_imon=6.00932E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33344E1
os_fil1_imon=9.57647E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07191E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64191E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30858E1
cs_fil1_imon=1.00609E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62258E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65814E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.57071E-2
os_fil2_imon=-2.73805E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92308E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.07427E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33407E-1
cs_fil2_imon=-2.44372E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01008E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22345E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=1.9963E-1
chamber_ion_pmon=1.69802E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.22361E-1
res40_imon=-2.65554E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	8.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-8.1687E-1	-7.98225E-1	-9.13091E0	-9.14187E0	5.6982E-3	9.29594E-2	2.72993E1	-3.26799E1	-3.26098E1	2.68175E1	1.69725E-7	2.52384E-3	2.52384E-3	6.33436E-3	1.9934E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09449E0	-8.1706E-1	-7.98345E-1	-9.131E0	-9.14195E0	5.91278E-3	9.29594E-2	2.73255E1	-3.26218E1	-3.26729E1	2.6813E1	1.69653E-7	2.51739E-3	2.51739E-3	6.33436E-3	1.99E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.17108E-1	-7.9844E-1	-9.13143E0	-9.14187E0	5.45979E-3	9.27687E-2	2.72714E1	-3.26872E1	-3.2656E1	2.68151E1	1.69798E-7	2.51847E-3	2.51847E-3	6.32356E-3	1.98661E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.1706E-1	-7.98392E-1	-9.13126E0	-9.14202E0	5.65052E-3	9.31025E-2	2.72968E1	-3.2636E1	-3.26484E1	2.67885E1	1.69731E-7	2.52027E-3	2.52027E-3	6.30182E-3	2.00285E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.16989E-1	-7.9844E-1	-9.131E0	-9.14185E0	5.65052E-3	9.31263E-2	2.73434E1	-3.2682E1	-3.26437E1	2.6798E1	1.69581E-7	2.51552E-3	2.51552E-3	6.30192E-3	1.99977E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09588E0	-8.16727E-1	-7.98416E-1	-9.13126E0	-9.1419E0	5.60284E-3	9.29117E-2	2.73015E1	-3.26573E1	-3.2638E1	2.67806E1	1.69725E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.01047E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.16751E-1	-7.98154E-1	-9.13124E0	-9.14173E0	5.91278E-3	9.33647E-2	2.73075E1	-3.26627E1	-3.26368E1	2.68232E1	1.69802E-7	2.52647E-3	2.52647E-3	6.32936E-3	2.00499E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0958E0	-8.16774E-1	-7.98678E-1	-9.13131E0	-9.1418E0	5.88894E-3	9.31263E-2	2.72853E1	-3.26597E1	-3.26446E1	2.67854E1	1.69654E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.9963E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-8.16727E-1	-7.98512E-1	-9.13105E0	-9.14214E0	5.88894E-3	9.3174E-2	2.73057E1	-3.26404E1	-3.26302E1	2.67794E1	1.69949E-7	2.52099E-3	2.52099E-3	6.34588E-3	2.00673E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09603E0	-8.17084E-1	-7.98535E-1	-9.13112E0	-9.14214E0	5.36442E-3	9.32217E-2	2.72847E1	-3.2644E1	-3.26332E1	2.6777E1	1.69654E-7	2.5188E-3	2.5188E-3	6.32112E-3	2.00412E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.16894E-1	-7.9844E-1	-9.131E0	-9.14202E0	5.36442E-3	9.30786E-2	2.73131E1	-3.26768E1	-3.2607E1	2.6795E1					
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.17657E-1	-7.98392E-1	-9.13141E0	-9.14187E0	5.36442E-3	9.32932E-2	2.73021E1	-3.26596E1	-3.26231E1	2.67854E1	1.69949E-7	2.5188E-3	2.5188E-3	6.32936E-3	1.99803E-1
1.6E1	3.0E0	0.0E0	6.47E2	4.41E2	-2.09588E0	-8.17323E-1	-7.98035E-1	-9.13119E0	-9.14221E0	5.50747E-3	9.31501E-2	2.73231E1	-3.26861E1	-3.26128E1	2.67854E1	1.69728E-7	2.5199E-3	2.5199E-3	6.3074E-3	1.98764E-1
1.7E1	2.0E1	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.16965E-1	-7.97868E-1	-9.13117E0	-9.14207E0	5.62668E-3	9.35316E-2	2.72781E1	-3.26855E1	-3.26056E1	2.68046E1	1.69802E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.9911E-1
1.8E1	6.8E1	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.1706E-1	-7.98059E-1	-9.13143E0	-9.14207E0	5.55515E-3	9.30786E-2	2.72853E1	-3.26579E1	-3.26549E1	2.681E1	1.69802E-7	2.52209E-3	2.52209E-3	6.29098E-3	1.9963E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.1687E-1	-7.98321E-1	-9.13146E0	-9.14192E0	5.55515E-3	9.28879E-2	2.73219E1	-3.26524E1	-3.26494E1	2.68088E1	1.69802E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.9911E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.16989E-1	-7.98249E-1	-9.13093E0	-9.14187E0	5.34058E-3	9.31263E-2	2.73198E1	-3.2688E1	-3.26148E1	2.68151E1	1.69875E-7	2.51116E-3	2.51116E-3	6.31288E-3	1.9963E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-8.17251E-1	-7.98273E-1	-9.13138E0	-9.14187E0	5.34058E-3	9.31978E-2	2.73381E1	-3.26467E1	-3.26201E1	2.68154E1	1.69581E-7	2.52169E-3	2.52169E-3	6.32896E-3	1.9883E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09418E0	-8.17227E-1	-7.98392E-1	-9.13115E0	-9.14195E0	5.43594E-3	9.33409E-2	2.73187E1	-3.26502E1	-3.26691E1	2.67787E1	1.69794E-7	2.51709E-3	2.51709E-3	6.29157E-3	1.99394E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.16917E-1	-7.98202E-1	-9.13105E0	-9.14199E0	5.36442E-3	9.29356E-2	2.73263E1	-3.27198E1	-3.26189E1	2.67908E1	1.69802E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.9963E-1