[Scan]
initial_time=2016-02-17T22:10:34
final_time=2016-02-17T22:10:56
ip_count=19
run=1032
dataset=9
scan=428
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09611E0
qbias_imon=-1.08838E-4
ql1_vset=
ql1_vmon=-8.16607E-1
ql1_imon=1.374E-8
ql2_vset=
ql2_vmon=-7.98178E-1
ql2_imon=1.86253E-9
ql3_vset=
ql3_vmon=-9.13057E0
ql3_imon=5.32925E-10
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=4.12214E-10
mult1=-9.19856E-9
mult2=-2.69266E-9
rf_tmon=-4.30814E-3
rf_agc=3.35318E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.65052E-3
ql5_imon=1.58056E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68356E0
bslens_imon=2.52694E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19845E1
lens5a_imon=1.99605E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12524E2
lens4a_imon=2.0506E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5474E1
cs_ef1b_imon=3.06271E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04644E2
lens23_imon=1.02262E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05108E1
cs_ea1_imon=2.17918E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42844E0
lens1_imon=2.44042E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64362E1
os_ef1alow_imon=2.97333E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04183E1
cs_ea2_imon=1.56021E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84448E1
cs_ef1a_imon=3.02306E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.72082E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11304E1
os_restr1_imon=4.26787E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15516E1
os_ea1_imon=2.17918E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63293E1
os_ef1bup_imon=3.05478E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24549E0
cs_ionrep_imon=1.26136E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93305E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01803E1
cs_anode1_imon=3.27426E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=3.68683E-8
tplens_vset=1.4E-1
tplens_vmon=1.63182E0
tplens_imon=-4.00285E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26362E1
iondef3_imon=1.5083E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26536E1
iondef2_imon=1.59085E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02967E2
lens6_imon=2.984E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=4.07267E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25931E0
ionrepsh_imon=2.00867E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.337E1
lens5b_imon=2.18567E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74711E1
cs_ef2b_imon=3.12722E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.8367E0
os_ea2_imon=-6.31002E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06137E2
lens4b_imon=2.00504E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71035E1
cs_ef2a_imon=3.17263E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09721E0
os_ef2alow_imon=-2.65915E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-4.05543E-1
os_ef2bup_imon=-5.33689E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10775E1
os_restr2_imon=3.54852E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23074E2
cs_ionfoca_imon=6.30541E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02037E1
cs_anode2_imon=2.27813E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73478E1
iondef1_imon=1.1186E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68142E1
iondef4_imon=1.07909E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.0935E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=9.80296E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10431E0
cs_ionaccel_imon=-2.14378E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47345E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56537E1
einzel_imon=7.64459E-6
window_vset=0.0E0
window_vmon=2.3356E-1
window_imon=-1.15629E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8262E2
mask1_imon=2.39239E-4
mask2_vset=0.0E0
mask2_vmon=-1.86122E1
mask2_imon=-7.13005E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92612E3
multa_neg_imon=7.53782E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93681E3
defgrida_imon=7.11604E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50151E3
multb_neg_imon=7.23861E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38653E0
defgridb_imon=6.2148E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33321E1
os_fil1_imon=9.57617E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07359E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63867E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30878E1
cs_fil1_imon=1.0055E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6242E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65984E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.5836E-2
os_fil2_imon=-2.67197E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.79694E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.12583E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35349E-1
cs_fil2_imon=-2.37164E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01008E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22572E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=1.99977E-1
chamber_ion_pmon=1.69654E-7
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=2.3976E-1
res40_imon=-2.46453E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.0965E0	-8.1687E-1	-7.9844E-1	-9.13124E0	-9.14192E0	5.91278E-3	9.31025E-2	2.72915E1	-3.26449E1	-3.2603E1	2.67746E1	1.69806E-7	2.52139E-3	2.52139E-3	6.33538E-3	2.00463E-1
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.0965E0	-8.1706E-1	-7.98488E-1	-9.13095E0	-9.14192E0	5.96046E-3	9.31978E-2	2.73135E1	-3.26651E1	-3.26326E1	2.67848E1	1.69723E-7	2.52025E-3	2.52025E-3	6.31269E-3	2.00567E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-8.16822E-1	-7.97987E-1	-9.13126E0	-9.14187E0	5.96046E-3	9.30548E-2	2.73312E1	-3.26532E1	-3.2626E1	2.68064E1	1.69806E-7	2.52139E-3	2.52139E-3	6.31858E-3	2.00285E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-8.16679E-1	-7.9782E-1	-9.13115E0	-9.14226E0	5.67436E-3	9.29594E-2	2.72997E1	-3.26951E1	-3.26464E1	2.681E1	1.69652E-7	2.52131E-3	2.52131E-3	6.31269E-3	1.99061E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-8.17513E-1	-7.9782E-1	-9.13134E0	-9.14226E0	5.6982E-3	9.26971E-2	2.73104E1	-3.26779E1	-3.26596E1	2.68166E1	1.69725E-7	2.52492E-3	2.52492E-3	6.29128E-3	1.98491E-1
6.0E0	2.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.1687E-1	-7.98416E-1	-9.13129E0	-9.14173E0	5.50747E-3	9.28879E-2	2.73099E1	-3.26777E1	-3.26597E1	2.6801E1	1.69581E-7	2.53087E-3	2.53087E-3	6.29645E-3	2.00151E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.17013E-1	-7.98559E-1	-9.13167E0	-9.14204E0	5.72205E-3	9.3317E-2	2.72877E1	-3.27017E1	-3.25996E1	2.68004E1	1.69949E-7	2.5199E-3	2.5199E-3	6.29098E-3	2.00325E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.16989E-1	-7.98345E-1	-9.13148E0	-9.14187E0	5.8651E-3	9.31978E-2	2.73213E1	-3.26543E1	-3.26687E1	2.68016E1	1.69654E-7	2.52209E-3	2.52209E-3	6.29645E-3	2.01197E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-8.16917E-1	-7.98345E-1	-9.13165E0	-9.14183E0	5.57899E-3	9.31978E-2	2.72811E1	-3.26873E1	-3.26362E1	2.67824E1	1.69728E-7	2.52209E-3	2.52209E-3	6.29645E-3	1.9963E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.16727E-1	-7.98368E-1	-9.13155E0	-9.14176E0	5.60284E-3	9.29594E-2	2.73153E1	-3.26326E1	-3.26627E1	2.68058E1	1.69725E-7	2.52169E-3	2.52169E-3	6.31278E-3	1.9934E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-8.16989E-1	-7.98273E-1	-9.13143E0	-9.14178E0	5.43594E-3	9.30786E-2	2.73057E1	-3.26408E1	-3.26673E1	2.68053E1	1.69654E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.00673E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09595E0	-8.17108E-1	-7.98702E-1	-9.13136E0	-9.14173E0	5.67436E-3	9.28879E-2	2.73467E1	-3.26915E1	-3.26132E1	2.67951E1	1.69728E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.00325E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.16751E-1	-7.98535E-1	-9.13146E0	-9.14207E0	5.45979E-3	9.3174E-2	2.73538E1	-3.26717E1	-3.26266E1	2.67818E1	1.69802E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.00325E-1
1.7E1	2.0E1	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.16703E-1	-7.98178E-1	-9.13146E0	-9.14204E0	5.91278E-3	9.32217E-2	2.73039E1	-3.26609E1	-3.26633E1	2.68196E1	1.69731E-7	2.51248E-3	2.51248E-3	6.31858E-3	1.99048E-1
1.8E1	1.05E2	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.16774E-1	-7.9844E-1	-9.13146E0	-9.14202E0	5.65052E-3	9.30071E-2	2.73417E1	-3.26747E1	-3.2629E1	2.67992E1	1.69581E-7	2.5188E-3	2.5188E-3	6.28006E-3	1.98937E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.16607E-1	-7.98249E-1	-9.1311E0	-9.14199E0	5.65052E-3	9.30548E-2	2.72991E1	-3.26645E1	-3.26422E1	2.68226E1	1.69581E-7	2.5199E-3	2.5199E-3	6.30192E-3	1.9963E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.16798E-1	-7.98345E-1	-9.13138E0	-9.14185E0	5.67436E-3	9.32693E-2	2.73252E1	-3.26207E1	-3.26579E1	2.68298E1	1.69802E-7	2.52099E-3	2.52099E-3	6.3074E-3	1.99283E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-8.16464E-1	-7.98416E-1	-9.13131E0	-9.14187E0	5.6982E-3	9.3317E-2	2.73204E1	-3.27003E1	-3.26343E1	2.68007E1	1.69875E-7	2.52099E-3	2.52099E-3	6.34037E-3	2.00325E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.16536E-1	-7.98416E-1	-9.13095E0	-9.14223E0	5.88894E-3	9.31978E-2	2.72727E1	-3.26567E1	-3.26116E1	2.68154E1	1.69723E-7	2.51919E-3	2.51919E-3	6.32328E-3	1.99729E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09611E0	-8.16607E-1	-7.98178E-1	-9.13057E0	-9.14185E0	5.65052E-3	9.3317E-2	2.73478E1	-3.26536E1	-3.26362E1	2.68142E1	1.69654E-7	2.52209E-3	2.52209E-3	6.29645E-3	1.99977E-1