[Scan]
initial_time=2016-02-17T22:13:05
final_time=2016-02-17T22:13:27
ip_count=19
run=1032
dataset=9
scan=433
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0958E0
qbias_imon=-1.08859E-4
ql1_vset=
ql1_vmon=-8.16488E-1
ql1_imon=1.36726E-8
ql2_vset=
ql2_vmon=-7.98225E-1
ql2_imon=1.95491E-9
ql3_vset=
ql3_vmon=-9.13129E0
ql3_imon=4.35901E-10
ql4_vset=
ql4_vmon=-9.14216E0
ql4_imon=4.0251E-10
mult1=-1.00351E-8
mult2=-2.77555E-9
rf_tmon=-4.05422E-3
rf_agc=3.3536E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.65052E-3
ql5_imon=1.60449E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64811E0
bslens_imon=2.60625E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19995E1
lens5a_imon=1.99208E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.04992E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53526E1
cs_ef1b_imon=3.08361E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.02132E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05162E1
cs_ea1_imon=2.17738E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37917E0
lens1_imon=2.66032E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65227E1
os_ef1alow_imon=2.98378E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04081E1
cs_ea2_imon=1.57607E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84052E1
cs_ef1a_imon=2.98811E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.7201E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11081E1
os_restr1_imon=4.28517E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15384E1
os_ea1_imon=2.17377E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64254E1
os_ef1bup_imon=3.09514E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26111E0
cs_ionrep_imon=1.26605E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91882E2
cs_nozzle_imon=1.93366E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01593E1
cs_anode1_imon=3.24579E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20575E0
olens4_imon=3.69152E-8
tplens_vset=1.4E-1
tplens_vmon=1.60418E0
tplens_imon=-2.88531E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26192E1
iondef3_imon=1.48451E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27006E1
iondef2_imon=1.58725E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02952E2
lens6_imon=2.98335E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=4.07761E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25931E0
ionrepsh_imon=2.01552E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3388E1
lens5b_imon=2.19324E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74261E1
cs_ef2b_imon=3.11785E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.82288E0
os_ea2_imon=-7.6799E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06135E2
lens4b_imon=2.00533E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7151E1
cs_ef2a_imon=3.2166E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.12964E0
os_ef2alow_imon=-2.82853E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.71305E-1
os_ef2bup_imon=-5.6144E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10577E1
os_restr2_imon=3.51681E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23092E2
cs_ionfoca_imon=6.30253E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01365E1
cs_anode2_imon=2.24929E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73085E1
iondef1_imon=1.10094E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68256E1
iondef4_imon=1.10612E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.09701E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.83095E-1
olens1_imon=9.81965E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12894E0
cs_ionaccel_imon=-2.01764E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0202E2
cs_ionfocb_imon=1.4697E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56039E1
einzel_imon=7.81398E-6
window_vset=0.0E0
window_vmon=1.44062E-1
window_imon=-9.43659E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82632E2
mask1_imon=2.38846E-4
mask2_vset=0.0E0
mask2_vmon=-1.8611E1
mask2_imon=-6.51738E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92609E3
multa_neg_imon=6.82044E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93698E3
defgrida_imon=6.88172E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50153E3
multb_neg_imon=7.42967E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46773E0
defgridb_imon=6.22201E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3333E1
os_fil1_imon=9.59695E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07503E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64082E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30875E1
cs_fil1_imon=1.00724E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62216E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6604E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.76417E-2
os_fil2_imon=-2.87019E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.851E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.9776E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33924E-1
cs_fil2_imon=-2.25752E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.67701E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22428E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31858E-3
inlet_lpb_pmon=2.00818E-1
chamber_ion_pmon=1.69806E-7
chamber_cvt_pmon=2.52362E-3
foreline_cvt_pmon=2.52362E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.41292E-1
res40_imon=-3.03756E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	7.0E0	0.0E0	1.47E2	4.1E1	-2.0968E0	-8.16584E-1	-7.98225E-1	-9.13115E0	-9.14249E0	5.45979E-3	9.32932E-2	2.72931E1	-3.26645E1	-3.26428E1	2.67686E1	1.69581E-7	2.5188E-3	2.5188E-3	6.29098E-3	2.00673E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09673E0	-8.16584E-1	-7.9813E-1	-9.13124E0	-9.14214E0	5.60284E-3	9.32455E-2	2.72871E1	-3.2653E1	-3.26518E1	2.6807E1	1.70023E-7	2.51007E-3	2.51007E-3	6.34588E-3	1.9911E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09603E0	-8.16369E-1	-7.98202E-1	-9.13115E0	-9.14199E0	5.48363E-3	9.29594E-2	2.73346E1	-3.26642E1	-3.26393E1	2.67937E1	1.70023E-7	2.52099E-3	2.52099E-3	6.31837E-3	1.99977E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09619E0	-8.16441E-1	-7.98368E-1	-9.13134E0	-9.14214E0	5.34058E-3	9.2864E-2	2.72967E1	-3.27185E1	-3.26344E1	2.68112E1	1.69581E-7	2.50989E-3	2.50989E-3	6.28592E-3	1.9917E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09588E0	-8.1625E-1	-7.97892E-1	-9.13093E0	-9.14185E0	5.26905E-3	9.30309E-2	2.72862E1	-3.26714E1	-3.26183E1	2.67931E1	1.69654E-7	2.52318E-3	2.52318E-3	6.29645E-3	1.98764E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.16441E-1	-7.97772E-1	-9.13117E0	-9.14197E0	5.55515E-3	9.31501E-2	2.73015E1	-3.26494E1	-3.26176E1	2.68064E1	1.70015E-7	2.52169E-3	2.52169E-3	6.32356E-3	1.9985E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.16417E-1	-7.98035E-1	-9.13129E0	-9.14185E0	5.57899E-3	9.30548E-2	2.73015E1	-3.26549E1	-3.26518E1	2.68184E1	1.69654E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.00151E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.1656E-1	-7.98225E-1	-9.13112E0	-9.14185E0	5.81741E-3	9.31263E-2	2.72841E1	-3.26831E1	-3.2602E1	2.68136E1	1.69798E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.00534E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.16369E-1	-7.98178E-1	-9.13112E0	-9.14183E0	5.67436E-3	9.28879E-2	2.7346E1	-3.265E1	-3.26122E1	2.68166E1	1.69802E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.00151E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.16226E-1	-7.98011E-1	-9.13122E0	-9.1419E0	5.84126E-3	9.30309E-2	2.73135E1	-3.26567E1	-3.26266E1	2.68352E1	1.69806E-7	2.51581E-3	2.51581E-3	6.31299E-3	2.00285E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.16369E-1	-7.97915E-1	-9.13119E0	-9.14168E0	5.81741E-3	9.31501E-2	2.72841E1	-3.26939E1	-3.25767E1	2.67812E1	1.69798E-7	2.52169E-3	2.52169E-3	6.31817E-3	2.00192E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-8.16393E-1	-7.9813E-1	-9.13119E0	-9.14187E0	5.53131E-3	9.31978E-2	2.73022E1	-3.26937E1	-3.26141E1	2.67984E1	1.69654E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.00499E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09642E0	-8.16369E-1	-7.98178E-1	-9.13124E0	-9.14207E0	5.38826E-3	9.29356E-2	2.7297E1	-3.26616E1	-3.26616E1	2.68076E1	1.69652E-7	2.52236E-3	2.52236E-3	6.31798E-3	2.00231E-1
1.7E1	2.2E1	0.0E0	6.87E2	4.7E2	-2.09634E0	-8.16607E-1	-7.9813E-1	-9.13103E0	-9.14164E0	5.72205E-3	9.32693E-2	2.73484E1	-3.26747E1	-3.26921E1	2.67914E1	1.69956E-7	2.5225E-3	2.5225E-3	6.33538E-3	1.99048E-1
1.8E1	9.2E1	0.0E0	7.27E2	5.0E2	-2.09611E0	-8.16584E-1	-7.97772E-1	-9.13122E0	-9.14216E0	5.45979E-3	9.32217E-2	2.73327E1	-3.26482E1	-3.26344E1	2.68124E1	1.69654E-7	2.52318E-3	2.52318E-3	6.31837E-3	1.9963E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09704E0	-8.16631E-1	-7.98178E-1	-9.13129E0	-9.14216E0	5.65052E-3	9.28879E-2	2.72968E1	-3.2659E1	-3.26331E1	2.67955E1	1.69581E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.9911E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.16393E-1	-7.97868E-1	-9.13117E0	-9.14207E0	5.81741E-3	9.30071E-2	2.72739E1	-3.26452E1	-3.26452E1	2.67992E1	1.69802E-7	2.5188E-3	2.5188E-3	6.36244E-3	1.98592E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09642E0	-8.16512E-1	-7.97892E-1	-9.13141E0	-9.14168E0	5.76973E-3	9.30548E-2	2.73499E1	-3.26856E1	-3.26502E1	2.6795E1	1.69725E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.00021E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0968E0	-8.16512E-1	-7.98011E-1	-9.13129E0	-9.14226E0	5.84126E-3	9.32693E-2	2.73088E1	-3.26578E1	-3.26456E1	2.67902E1	1.69653E-7	2.51739E-3	2.51739E-3	6.30202E-3	2.00363E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0958E0	-8.16488E-1	-7.98225E-1	-9.13129E0	-9.14216E0	5.65052E-3	9.33647E-2	2.73085E1	-3.27006E1	-3.26192E1	2.68256E1	1.69806E-7	2.52362E-3	2.52362E-3	6.31858E-3	2.00818E-1