[Scan]
initial_time=2016-02-17T22:13:35
final_time=2016-02-17T22:13:57
ip_count=19
run=1032
dataset=9
scan=434
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09619E0
qbias_imon=-1.08816E-4
ql1_vset=
ql1_vmon=-8.16154E-1
ql1_imon=1.36866E-8
ql2_vset=
ql2_vmon=-7.98154E-1
ql2_imon=1.86952E-9
ql3_vset=
ql3_vmon=-9.13115E0
ql3_imon=4.46212E-10
ql4_vset=
ql4_vmon=-9.14161E0
ql4_imon=4.20427E-10
mult1=-9.05013E-9
mult2=-2.72718E-9
rf_tmon=-4.19683E-3
rf_agc=3.37869E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.67436E-3
ql5_imon=1.56322E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67524E0
bslens_imon=2.65692E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19958E1
lens5a_imon=1.98354E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.05185E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.532E1
cs_ef1b_imon=3.01995E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.0229E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05074E1
cs_ea1_imon=2.18923E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38725E0
lens1_imon=2.50633E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64852E1
os_ef1alow_imon=2.98402E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03905E1
cs_ea2_imon=1.56445E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84662E1
cs_ef1a_imon=3.00123E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.72157E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11311E1
os_restr1_imon=4.27783E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1514E1
os_ea1_imon=2.18115E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63361E1
os_ef1bup_imon=3.06486E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25332E0
cs_ionrep_imon=1.25593E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91902E2
cs_nozzle_imon=1.93383E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01722E1
cs_anode1_imon=3.27744E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=3.69432E-8
tplens_vset=1.4E-1
tplens_vmon=1.60838E0
tplens_imon=-3.10841E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26136E1
iondef3_imon=1.5145E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26962E1
iondef2_imon=1.56813E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02967E2
lens6_imon=2.98474E-4
ql6_vset=1.0E-1
ql6_vmon=9.29117E-2
ql6_imon=4.07342E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26985E0
ionrepsh_imon=2.02725E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33829E1
lens5b_imon=2.19767E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74969E1
cs_ef2b_imon=3.13073E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.84834E0
os_ea2_imon=-7.36906E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06151E2
lens4b_imon=2.00711E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71096E1
cs_ef2a_imon=3.17826E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09323E0
os_ef2alow_imon=-2.72028E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.53147E-1
os_ef2bup_imon=-5.43365E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11098E1
os_restr2_imon=3.53829E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23091E2
cs_ionfoca_imon=6.30993E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0204E1
cs_anode2_imon=2.28939E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73647E1
iondef1_imon=1.08293E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67879E1
iondef4_imon=1.06071E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.08941E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82952E-1
olens1_imon=9.80782E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.06402E0
cs_ionaccel_imon=-2.07281E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02104E2
cs_ionfocb_imon=1.47372E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56199E1
einzel_imon=7.58679E-6
window_vset=0.0E0
window_vmon=1.50854E-1
window_imon=-1.1933E-6
mask1_vset=-4.8E2
mask1_vmon=-4.826E2
mask1_imon=2.39118E-4
mask2_vset=0.0E0
mask2_vmon=-1.87024E1
mask2_imon=-4.97183E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92621E3
multa_neg_imon=7.46117E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93735E3
defgrida_imon=6.64944E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.32527E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43113E0
defgridb_imon=5.90383E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33323E1
os_fil1_imon=9.58482E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07236E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64142E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30904E1
cs_fil1_imon=1.00526E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62852E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65833E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.67437E-2
os_fil2_imon=-2.6126E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91592E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.8872E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36509E-1
cs_fil2_imon=-2.32567E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08632E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22545E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29098E-3
inlet_lpb_pmon=2.00151E-1
chamber_ion_pmon=1.69728E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=2.38998E-1
res40_imon=-2.68285E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09634E0	-8.16774E-1	-7.97892E-1	-9.13088E0	-9.14192E0	5.4121E-3	9.30309E-2	2.7334E1	-3.26762E1	-3.26071E1	2.67705E1	1.69802E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.00325E-1
2.0E0	1.0E0	1.0E0	3.16E2	1.6E2	-2.09657E0	-8.1656E-1	-7.97939E-1	-9.13119E0	-9.14209E0	5.55515E-3	9.32455E-2	2.7346E1	-3.26729E1	-3.2644E1	2.67914E1	1.69725E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.00021E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-8.16822E-1	-7.98059E-1	-9.13126E0	-9.14185E0	5.07832E-3	9.30548E-2	2.73234E1	-3.2659E1	-3.26614E1	2.67788E1	1.69728E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.9911E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09619E0	-8.16727E-1	-7.98368E-1	-9.13143E0	-9.14216E0	5.72205E-3	9.28879E-2	2.73063E1	-3.26765E1	-3.26314E1	2.67998E1	1.69943E-7	2.52384E-3	2.52384E-3	6.32356E-3	2.00021E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09696E0	-8.16894E-1	-7.98178E-1	-9.13157E0	-9.14161E0	5.50747E-3	9.31025E-2	2.73165E1	-3.26591E1	-3.26044E1	2.67986E1	1.69802E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.00499E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09572E0	-8.16607E-1	-7.98011E-1	-9.13138E0	-9.14214E0	5.26905E-3	9.2864E-2	2.72991E1	-3.26801E1	-3.26218E1	2.68028E1	1.69802E-7	2.52209E-3	2.52209E-3	6.34037E-3	1.9963E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.16846E-1	-7.98154E-1	-9.13143E0	-9.14247E0	5.36442E-3	9.28879E-2	2.73075E1	-3.2653E1	-3.2653E1	2.67866E1	1.69654E-7	2.51771E-3	2.51771E-3	6.28006E-3	2.00151E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-8.16774E-1	-7.97987E-1	-9.13117E0	-9.1424E0	5.48363E-3	9.29832E-2	2.73003E1	-3.26603E1	-3.26362E1	2.67968E1	1.69875E-7	2.52428E-3	2.52428E-3	6.3074E-3	1.99456E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09634E0	-8.16798E-1	-7.9813E-1	-9.13138E0	-9.14195E0	5.43594E-3	9.30071E-2	2.7269E1	-3.2664E1	-3.26229E1	2.67968E1	1.69875E-7	2.51007E-3	2.51007E-3	6.32386E-3	1.99283E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-8.16631E-1	-7.98202E-1	-9.13138E0	-9.14214E0	6.10352E-3	9.32455E-2	2.73564E1	-3.26337E1	-3.26673E1	2.67734E1	1.69656E-7	2.51915E-3	2.51915E-3	6.3074E-3	2.00996E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09611E0	-8.16703E-1	-7.9782E-1	-9.13103E0	-9.14211E0	5.74589E-3	9.34839E-2	2.7358E1	-3.26579E1	-3.26314E1	2.6783E1	1.69653E-7	2.52276E-3	2.52276E-3	6.28592E-3	2.00534E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.16631E-1	-7.97844E-1	-9.13093E0	-9.14187E0	5.45979E-3	9.3174E-2	2.73556E1	-3.26603E1	-3.26308E1	2.67974E1	1.69802E-7	2.52099E-3	2.52099E-3	6.32936E-3	1.9911E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09603E0	-8.16154E-1	-7.98154E-1	-9.131E0	-9.14159E0	5.65052E-3	9.3317E-2	2.72961E1	-3.26963E1	-3.26416E1	2.68022E1	1.69802E-7	2.5199E-3	2.5199E-3	6.34588E-3	1.99456E-1
1.7E1	2.4E1	0.0E0	6.87E2	4.7E2	-2.09595E0	-8.16417E-1	-7.97987E-1	-9.13112E0	-9.14171E0	5.60284E-3	9.34839E-2	2.73942E1	-3.2636E1	-3.26402E1	2.68001E1	1.69802E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.9911E-1
1.8E1	1.05E2	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.16584E-1	-7.9813E-1	-9.13126E0	-9.14176E0	5.53131E-3	9.32217E-2	2.72871E1	-3.26729E1	-3.26428E1	2.68022E1	1.69798E-7	2.52384E-3	2.52384E-3	6.31817E-3	1.98153E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.16298E-1	-7.98225E-1	-9.13117E0	-9.14171E0	5.60284E-3	9.30786E-2	2.73094E1	-3.26523E1	-3.26303E1	2.68126E1	1.69802E-7	2.51771E-3	2.51771E-3	6.34037E-3	1.99456E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09619E0	-8.16488E-1	-7.98512E-1	-9.13122E0	-9.14156E0	5.98431E-3	9.32932E-2	2.73316E1	-3.26472E1	-3.26472E1	2.68065E1	1.69806E-7	2.51581E-3	2.51581E-3	6.30182E-3	2.00463E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09634E0	-8.16512E-1	-7.97939E-1	-9.13153E0	-9.14168E0	5.65052E-3	9.31978E-2	2.73116E1	-3.26856E1	-3.2649E1	2.67776E1	1.69798E-7	2.52061E-3	2.52061E-3	6.34518E-3	2.00534E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09627E0	-8.16107E-1	-7.98178E-1	-9.13122E0	-9.14178E0	5.60284E-3	9.31263E-2	2.73279E1	-3.27017E1	-3.26278E1	2.68298E1	1.69725E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.01219E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09619E0	-8.16154E-1	-7.98154E-1	-9.13115E0	-9.14161E0	5.67436E-3	9.29117E-2	2.73647E1	-3.26962E1	-3.26136E1	2.67879E1	1.69728E-7	2.51334E-3	2.51334E-3	6.29098E-3	2.00151E-1