[Scan]
initial_time=2016-02-17T22:14:04
final_time=2016-02-17T22:14:25
ip_count=19
run=1032
dataset=9
scan=435
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0958E0
qbias_imon=-1.08753E-4
ql1_vset=
ql1_vmon=-8.16774E-1
ql1_imon=1.3689E-8
ql2_vset=
ql2_vmon=-7.98392E-1
ql2_imon=1.9194E-9
ql3_vset=
ql3_vmon=-9.13117E0
ql3_imon=4.41992E-10
ql4_vset=
ql4_vmon=-9.1418E0
ql4_imon=4.06754E-10
mult1=-9.78855E-9
mult2=-2.81842E-9
rf_tmon=-4.01374E-3
rf_agc=3.25705E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.72205E-3
ql5_imon=1.61395E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67875E0
bslens_imon=2.32867E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20361E1
lens5a_imon=1.99317E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1251E2
lens4a_imon=2.05219E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53262E1
cs_ef1b_imon=3.04433E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02262E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05337E1
cs_ea1_imon=2.18819E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34252E0
lens1_imon=2.66393E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6432E1
os_ef1alow_imon=2.99495E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03973E1
cs_ea2_imon=1.57175E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84779E1
cs_ef1a_imon=3.01586E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.72133E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10577E1
os_restr1_imon=4.2549E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15089E1
os_ea1_imon=2.16873E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63515E1
os_ef1bup_imon=3.09442E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23527E0
cs_ionrep_imon=1.25775E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93384E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01887E1
cs_anode1_imon=3.27606E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=3.70052E-8
tplens_vset=1.4E-1
tplens_vmon=1.5429E0
tplens_imon=-2.66901E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26104E1
iondef3_imon=1.50578E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26753E1
iondef2_imon=1.57968E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02973E2
lens6_imon=2.98407E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=4.07745E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27613E0
ionrepsh_imon=2.00326E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33628E1
lens5b_imon=2.19721E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74615E1
cs_ef2b_imon=3.10163E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.85232E0
os_ea2_imon=-7.3194E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06132E2
lens4b_imon=2.0068E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70789E1
cs_ef2a_imon=3.17443E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.11763E0
os_ef2alow_imon=-2.38885E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.19048E-1
os_ef2bup_imon=-5.4342E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10457E1
os_restr2_imon=3.54312E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.30325E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01617E1
cs_anode2_imon=2.29723E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73622E1
iondef1_imon=1.09193E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67806E1
iondef4_imon=1.08701E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.09376E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82499E-1
olens1_imon=9.83878E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08209E0
cs_ionaccel_imon=-1.95998E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02114E2
cs_ionfocb_imon=1.47226E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5575E1
einzel_imon=7.46079E-6
window_vset=0.0E0
window_vmon=1.59078E-1
window_imon=-7.77877E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82636E2
mask1_imon=2.39048E-4
mask2_vset=0.0E0
mask2_vmon=-1.85906E1
mask2_imon=-6.6255E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92643E3
multa_neg_imon=7.89832E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.51402E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.34676E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52187E0
defgridb_imon=6.25446E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3332E1
os_fil1_imon=9.59383E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07672E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6406E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30901E1
cs_fil1_imon=1.00765E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62864E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66114E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.69968E-2
os_fil2_imon=-2.58788E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00717E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.68113E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35737E-1
cs_fil2_imon=-2.83415E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=4.39449E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22459E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31555E-3
inlet_lpb_pmon=1.99312E-1
chamber_ion_pmon=1.69763E-7
chamber_cvt_pmon=2.51918E-3
foreline_cvt_pmon=2.51918E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.65609E-1
res40_imon=-2.6195E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.16751E-1	-7.9844E-1	-9.13095E0	-9.1419E0	5.38826E-3	9.31025E-2	2.73452E1	-3.26667E1	-3.26443E1	2.68522E1	1.69653E-7	2.5131E-3	2.5131E-3	6.32896E-3	1.9934E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.1656E-1	-7.98154E-1	-9.13095E0	-9.1419E0	5.60284E-3	9.29594E-2	2.73051E1	-3.26747E1	-3.26397E1	2.67677E1	1.69725E-7	2.51739E-3	2.51739E-3	6.36144E-3	1.9951E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.16798E-1	-7.98273E-1	-9.13115E0	-9.14195E0	5.76973E-3	9.30309E-2	2.72976E1	-3.2695E1	-3.26266E1	2.67891E1	1.70117E-7	2.51611E-3	2.51611E-3	6.31879E-3	2.00968E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.16703E-1	-7.98321E-1	-9.13143E0	-9.14218E0	5.57899E-3	9.31978E-2	2.72829E1	-3.26651E1	-3.26603E1	2.67878E1	1.69723E-7	2.52871E-3	2.52871E-3	6.31269E-3	2.00903E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09572E0	-8.16703E-1	-7.98225E-1	-9.13141E0	-9.14223E0	5.76973E-3	9.30548E-2	2.72846E1	-3.26687E1	-3.26084E1	2.67891E1	1.69654E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.00499E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.1656E-1	-7.98178E-1	-9.13131E0	-9.14247E0	5.55515E-3	9.3317E-2	2.73176E1	-3.26822E1	-3.26298E1	2.68157E1	1.6965E-7	2.51369E-3	2.51369E-3	6.3126E-3	2.00105E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0958E0	-8.16917E-1	-7.97868E-1	-9.13105E0	-9.14195E0	5.50747E-3	9.33647E-2	2.73345E1	-3.26573E1	-3.2629E1	2.67932E1	1.69734E-7	2.51725E-3	2.51725E-3	6.3074E-3	1.99883E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09665E0	-8.16703E-1	-7.98249E-1	-9.13112E0	-9.14199E0	5.74589E-3	9.30548E-2	2.73016E1	-3.26644E1	-3.26207E1	2.67984E1	1.69802E-7	2.52647E-3	2.52647E-3	6.31288E-3	1.99283E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0965E0	-8.16512E-1	-7.98225E-1	-9.1315E0	-9.14168E0	5.65052E-3	9.29832E-2	2.73021E1	-3.26615E1	-3.26272E1	2.67962E1	1.69725E-7	2.50989E-3	2.50989E-3	6.34518E-3	1.98491E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0958E0	-8.16274E-1	-7.98011E-1	-9.13134E0	-9.14199E0	5.45979E-3	9.27687E-2	2.73433E1	-3.26782E1	-3.26069E1	2.67902E1	1.69581E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.00325E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09611E0	-8.16417E-1	-7.98225E-1	-9.13136E0	-9.14216E0	5.65052E-3	9.3317E-2	2.73339E1	-3.26819E1	-3.26122E1	2.678E1	1.69581E-7	2.51814E-3	2.51814E-3	6.31798E-3	1.99729E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09642E0	-8.16488E-1	-7.98178E-1	-9.13141E0	-9.14228E0	5.88894E-3	9.30309E-2	2.73163E1	-3.26803E1	-3.26349E1	2.68124E1	1.69654E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.99803E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.16607E-1	-7.97987E-1	-9.13131E0	-9.14237E0	5.57899E-3	9.30309E-2	2.72961E1	-3.26819E1	-3.2632E1	2.67926E1	1.69581E-7	2.51334E-3	2.51334E-3	6.31288E-3	2.00673E-1
1.7E1	2.1E1	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.16345E-1	-7.98297E-1	-9.13138E0	-9.14237E0	5.43594E-3	9.26256E-2	2.73003E1	-3.26585E1	-3.26512E1	2.67872E1	1.69725E-7	2.52599E-3	2.52599E-3	6.30202E-3	2.01047E-1
1.8E1	8.9E1	0.0E0	7.27E2	5.0E2	-2.0958E0	-8.16393E-1	-7.98225E-1	-9.13124E0	-9.14209E0	5.55515E-3	9.32217E-2	2.73478E1	-3.27041E1	-3.26146E1	2.67872E1	1.69654E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.00673E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.1625E-1	-7.98082E-1	-9.13136E0	-9.14223E0	5.53131E-3	9.30786E-2	2.73171E1	-3.26669E1	-3.26452E1	2.68088E1	1.69731E-7	2.52362E-3	2.52362E-3	6.30182E-3	2.00463E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.16345E-1	-7.9844E-1	-9.13105E0	-9.1424E0	5.67436E-3	9.3317E-2	2.72829E1	-3.26723E1	-3.2647E1	2.67878E1	1.69654E-7	2.51552E-3	2.51552E-3	6.32936E-3	1.9911E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.16393E-1	-7.98416E-1	-9.13119E0	-9.14216E0	5.79357E-3	9.33409E-2	2.72538E1	-3.26349E1	-3.26319E1	2.68163E1	1.6987E-7	2.51954E-3	2.51954E-3	6.29665E-3	1.98491E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.16703E-1	-7.98202E-1	-9.13146E0	-9.14202E0	5.84126E-3	9.30071E-2	2.73139E1	-3.26296E1	-3.2603E1	2.68238E1	1.69725E-7	2.52276E-3	2.52276E-3	6.30202E-3	1.9934E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.0958E0	-8.16774E-1	-7.98392E-1	-9.13117E0	-9.1418E0	5.72205E-3	9.32455E-2	2.73622E1	-3.26753E1	-3.26104E1	2.67806E1	1.69763E-7	2.51918E-3	2.51918E-3	6.31555E-3	1.99312E-1