[Scan]
initial_time=2016-02-17T22:15:00
final_time=2016-02-17T22:15:21
ip_count=19
run=1032
dataset=9
scan=437
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08799E-4
ql1_vset=
ql1_vmon=-8.16345E-1
ql1_imon=1.37758E-8
ql2_vset=
ql2_vmon=-7.97892E-1
ql2_imon=1.91309E-9
ql3_vset=
ql3_vmon=-9.13136E0
ql3_imon=4.09937E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=4.30715E-10
mult1=-9.48754E-9
mult2=-2.75055E-9
rf_tmon=-4.24806E-3
rf_agc=3.33035E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.62668E-3
ql5_imon=1.5655E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67683E0
bslens_imon=2.47247E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20131E1
lens5a_imon=1.99536E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12516E2
lens4a_imon=2.04923E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54768E1
cs_ef1b_imon=3.08678E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.02309E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05153E1
cs_ea1_imon=2.16136E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41208E0
lens1_imon=2.81225E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65031E1
os_ef1alow_imon=2.97939E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03802E1
cs_ea2_imon=1.54232E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83867E1
cs_ef1a_imon=2.96827E-5
olens2_vset=9.7E-1
olens2_vmon=9.7065E-1
olens2_imon=1.72346E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11193E1
os_restr1_imon=4.27983E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15547E1
os_ea1_imon=2.2102E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63983E1
os_ef1bup_imon=3.1052E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28572E0
cs_ionrep_imon=1.24713E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91866E2
cs_nozzle_imon=1.93551E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01786E1
cs_anode1_imon=3.25081E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20535E0
olens4_imon=3.69247E-8
tplens_vset=1.4E-1
tplens_vmon=1.60427E0
tplens_imon=-5.53725E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2629E1
iondef3_imon=1.4917E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26933E1
iondef2_imon=1.56001E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0294E2
lens6_imon=2.98512E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=4.09205E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30047E0
ionrepsh_imon=2.01235E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3318E1
lens5b_imon=2.18472E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7427E1
cs_ef2b_imon=3.12188E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.86501E0
os_ea2_imon=-6.95301E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.00867E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71547E1
cs_ef2a_imon=3.20355E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.13912E0
os_ef2alow_imon=-2.70664E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.55152E-1
os_ef2bup_imon=-5.70926E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10486E1
os_restr2_imon=3.51597E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23092E2
cs_ionfoca_imon=6.30884E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01607E1
cs_anode2_imon=2.24924E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73177E1
iondef1_imon=1.09883E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68184E1
iondef4_imon=1.10345E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=1.09401E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82904E-1
olens1_imon=9.83214E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12435E0
cs_ionaccel_imon=-1.99422E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02043E2
cs_ionfocb_imon=1.46931E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55959E1
einzel_imon=7.7643E-6
window_vset=0.0E0
window_vmon=1.16324E-1
window_imon=-8.2653E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.38775E-4
mask2_vset=0.0E0
mask2_vmon=-1.85753E1
mask2_imon=-7.46599E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92631E3
multa_neg_imon=7.27899E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.44369E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50169E3
multb_neg_imon=7.19758E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37012E0
defgridb_imon=6.46846E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33353E1
os_fil1_imon=9.57375E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07596E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64218E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30871E1
cs_fil1_imon=1.00493E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62464E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66409E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.68608E-2
os_fil2_imon=-2.90666E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94132E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.8445E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37642E-1
cs_fil2_imon=-2.71552E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.49681E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22465E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34518E-3
inlet_lpb_pmon=1.99E-1
chamber_ion_pmon=1.69798E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.07484E-1
res40_imon=-2.93948E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.16965E-1	-7.98345E-1	-9.13169E0	-9.14197E0	5.67436E-3	9.28164E-2	2.73293E1	-3.26644E1	-3.2649E1	2.67553E1	1.6987E-7	2.52061E-3	2.52061E-3	6.33436E-3	2.00534E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09572E0	-8.1656E-1	-7.98249E-1	-9.13134E0	-9.14199E0	5.60284E-3	9.31263E-2	2.72855E1	-3.26634E1	-3.26376E1	2.6792E1	1.69798E-7	2.51954E-3	2.51954E-3	6.29665E-3	2.00021E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09603E0	-8.16822E-1	-7.97963E-1	-9.13129E0	-9.14192E0	5.72205E-3	9.28402E-2	2.7324E1	-3.26708E1	-3.26484E1	2.67896E1	1.69731E-7	2.51581E-3	2.51581E-3	6.29624E-3	1.98696E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.16917E-1	-7.98249E-1	-9.13119E0	-9.14207E0	5.43594E-3	9.30786E-2	2.73405E1	-3.26354E1	-3.26408E1	2.67949E1	1.69798E-7	2.52276E-3	2.52276E-3	6.32896E-3	1.9968E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.16822E-1	-7.9813E-1	-9.13098E0	-9.14199E0	5.55515E-3	9.29594E-2	2.73099E1	-3.26554E1	-3.26044E1	2.68028E1	1.69725E-7	2.51847E-3	2.51847E-3	6.33436E-3	1.98661E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.16751E-1	-7.98035E-1	-9.1311E0	-9.14195E0	5.36442E-3	9.3174E-2	2.73181E1	-3.26685E1	-3.26378E1	2.6786E1	1.69802E-7	2.52428E-3	2.52428E-3	6.29098E-3	1.9911E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.16393E-1	-7.97868E-1	-9.13107E0	-9.14204E0	5.65052E-3	9.29832E-2	2.73267E1	-3.26747E1	-3.26368E1	2.67908E1	1.6987E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.00192E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.16703E-1	-7.98035E-1	-9.13095E0	-9.14204E0	5.62668E-3	9.27687E-2	2.73063E1	-3.2638E1	-3.26356E1	2.68268E1	1.69728E-7	2.52099E-3	2.52099E-3	6.3074E-3	1.98764E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09433E0	-8.16417E-1	-7.98106E-1	-9.13131E0	-9.14233E0	5.48363E-3	9.31501E-2	2.73039E1	-3.26325E1	-3.26325E1	2.68175E1	1.69802E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.99803E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.16464E-1	-7.97987E-1	-9.13134E0	-9.14221E0	5.26905E-3	9.29117E-2	2.73387E1	-3.26356E1	-3.26476E1	2.6774E1	1.6987E-7	2.50989E-3	2.50989E-3	6.32356E-3	2.01047E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.16488E-1	-7.98178E-1	-9.13143E0	-9.14195E0	5.45979E-3	9.30071E-2	2.73736E1	-3.26434E1	-3.26639E1	2.67968E1	1.69802E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.00499E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.16774E-1	-7.97939E-1	-9.13119E0	-9.14173E0	5.43594E-3	9.33409E-2	2.73222E1	-3.26891E1	-3.26346E1	2.67945E1	1.69728E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.00151E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09611E0	-8.16441E-1	-7.98106E-1	-9.13136E0	-9.14195E0	5.67436E-3	9.30786E-2	2.72925E1	-3.26488E1	-3.26813E1	2.67998E1	1.69656E-7	2.52585E-3	2.52585E-3	6.29624E-3	2.0064E-1
1.7E1	1.8E1	0.0E0	6.87E2	4.7E2	-2.09549E0	-8.16464E-1	-7.98225E-1	-9.13115E0	-9.14161E0	5.8651E-3	9.30548E-2	2.72992E1	-3.26514E1	-3.26284E1	2.67845E1	1.69581E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.99977E-1
1.8E1	8.0E1	0.0E0	7.27E2	5.0E2	-2.0958E0	-8.16464E-1	-7.98273E-1	-9.13098E0	-9.14197E0	5.57899E-3	9.31978E-2	2.7251E1	-3.26494E1	-3.26675E1	2.68166E1	1.69798E-7	2.50882E-3	2.50882E-3	6.32896E-3	2.01047E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.16488E-1	-7.98273E-1	-9.13141E0	-9.14195E0	5.76973E-3	9.32217E-2	2.73189E1	-3.26747E1	-3.2617E1	2.68142E1	1.69581E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.99456E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09549E0	-8.16345E-1	-7.98059E-1	-9.13167E0	-9.14195E0	5.72205E-3	9.32217E-2	2.73207E1	-3.26494E1	-3.26344E1	2.67956E1	1.69943E-7	2.52169E-3	2.52169E-3	6.3074E-3	1.98661E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.16464E-1	-7.97749E-1	-9.13129E0	-9.14185E0	5.57899E-3	9.31025E-2	2.73033E1	-3.26685E1	-3.25983E1	2.68082E1	1.69806E-7	2.52362E-3	2.52362E-3	6.29624E-3	1.98169E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.16107E-1	-7.97772E-1	-9.1315E0	-9.1418E0	5.38826E-3	9.3174E-2	2.73541E1	-3.26573E1	-3.25918E1	2.67717E1	1.69725E-7	2.52061E-3	2.52061E-3	6.32356E-3	1.97478E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.16345E-1	-7.97892E-1	-9.13136E0	-9.14195E0	5.62668E-3	9.3174E-2	2.73177E1	-3.26933E1	-3.2629E1	2.68184E1	1.69798E-7	2.52384E-3	2.52384E-3	6.34518E-3	1.99E-1