[Scan]
initial_time=2016-02-17T22:15:56
final_time=2016-02-17T22:16:16
ip_count=19
run=1032
dataset=9
scan=439
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08836E-4
ql1_vset=
ql1_vmon=-8.16321E-1
ql1_imon=1.37337E-8
ql2_vset=
ql2_vmon=-7.97868E-1
ql2_imon=1.92046E-9
ql3_vset=
ql3_vmon=-9.13146E0
ql3_imon=4.02236E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=4.20034E-10
mult1=-1.03304E-8
mult2=-2.6727E-9
rf_tmon=-5.70807E-3
rf_agc=3.28769E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.36442E-3
ql5_imon=1.56218E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64953E0
bslens_imon=2.69732E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19939E1
lens5a_imon=1.96738E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12503E2
lens4a_imon=2.0495E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.52545E1
cs_ef1b_imon=3.05625E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04606E2
lens23_imon=1.02044E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05019E1
cs_ea1_imon=2.16976E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42521E0
lens1_imon=2.74507E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65507E1
os_ef1alow_imon=3.01882E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04125E1
cs_ea2_imon=1.54793E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84064E1
cs_ef1a_imon=2.9915E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=1.72305E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10787E1
os_restr1_imon=4.24602E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15287E1
os_ea1_imon=2.18849E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63355E1
os_ef1bup_imon=3.08207E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23618E0
cs_ionrep_imon=1.2596E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91889E2
cs_nozzle_imon=1.93427E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02152E1
cs_anode1_imon=3.27107E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20527E0
olens4_imon=3.6962E-8
tplens_vset=1.4E-1
tplens_vmon=1.60654E0
tplens_imon=-4.50414E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26218E1
iondef3_imon=1.49246E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27227E1
iondef2_imon=1.57327E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02966E2
lens6_imon=2.98515E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=4.06157E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.257E0
ionrepsh_imon=2.01109E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33658E1
lens5b_imon=2.18555E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74196E1
cs_ef2b_imon=3.0817E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.82753E0
os_ea2_imon=-5.34892E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06145E2
lens4b_imon=2.00593E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71183E1
cs_ef2a_imon=3.20483E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.15062E0
os_ef2alow_imon=-2.33853E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.19464E-1
os_ef2bup_imon=-5.09307E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10799E1
os_restr2_imon=3.5091E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.30553E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01709E1
cs_anode2_imon=2.27817E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72967E1
iondef1_imon=1.10019E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67992E1
iondef4_imon=1.05097E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.09729E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.8269E-1
olens1_imon=9.82823E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14199E0
cs_ionaccel_imon=-1.70604E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.46942E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55588E1
einzel_imon=7.26493E-6
window_vset=0.0E0
window_vmon=1.55844E-1
window_imon=-9.35065E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82647E2
mask1_imon=2.39428E-4
mask2_vset=0.0E0
mask2_vmon=-1.86144E1
mask2_imon=-1.05483E-6
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92593E3
multa_neg_imon=7.51626E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.36295E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50102E3
multb_neg_imon=7.41709E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2963E0
defgridb_imon=6.06544E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33336E1
os_fil1_imon=9.58401E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07055E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64343E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30875E1
cs_fil1_imon=1.00633E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61879E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66371E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.70065E-2
os_fil2_imon=-2.34438E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.27147E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.95286E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37181E-1
cs_fil2_imon=-2.55023E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.86513E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22512E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31014E-3
inlet_lpb_pmon=1.9937E-1
chamber_ion_pmon=1.69654E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40038E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.83315E-1
res40_imon=-2.3273E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09595E0	-8.16989E-1	-7.98225E-1	-9.13129E0	-9.14218E0	5.76973E-3	9.31025E-2	2.73196E1	-3.26915E1	-3.26283E1	2.68771E1	1.69731E-7	2.51248E-3	2.51248E-3	6.32418E-3	1.97994E-1
2.0E0	4.0E0	0.0E0	3.16E2	1.6E2	-2.09627E0	-8.16822E-1	-7.98583E-1	-9.13105E0	-9.14207E0	5.60284E-3	9.28879E-2	2.73314E1	-3.26609E1	-3.26266E1	2.68172E1	1.69794E-7	2.52131E-3	2.52131E-3	6.3074E-3	1.98395E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09642E0	-8.1687E-1	-7.98202E-1	-9.13146E0	-9.14218E0	5.79357E-3	9.30071E-2	2.73375E1	-3.26944E1	-3.26747E1	2.68105E1	1.69731E-7	2.51915E-3	2.51915E-3	6.31858E-3	1.99401E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-8.16846E-1	-7.98202E-1	-9.13136E0	-9.14218E0	5.76973E-3	9.29832E-2	2.72997E1	-3.26633E1	-3.26476E1	2.67734E1	1.69794E-7	2.51603E-3	2.51603E-3	6.31798E-3	2.00567E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09665E0	-8.16894E-1	-7.98392E-1	-9.13122E0	-9.14218E0	5.74589E-3	9.30309E-2	2.73315E1	-3.262E1	-3.26428E1	2.67686E1	1.69765E-7	2.51826E-3	2.51826E-3	6.32936E-3	2.00935E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09595E0	-8.16536E-1	-7.98535E-1	-9.13122E0	-9.14192E0	5.60284E-3	9.32693E-2	2.73118E1	-3.26401E1	-3.26315E1	2.68166E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09627E0	-8.16536E-1	-7.98225E-1	-9.13126E0	-9.14211E0	5.57899E-3	9.32693E-2	2.73291E1	-3.26392E1	-3.26729E1	2.68063E1	1.69728E-7	2.52318E-3	2.52318E-3	6.31837E-3	1.99977E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09665E0	-8.16846E-1	-7.98464E-1	-9.13084E0	-9.14202E0	5.48363E-3	9.33409E-2	2.72797E1	-3.26838E1	-3.26213E1	2.6807E1	1.69728E-7	2.5199E-3	2.5199E-3	6.33486E-3	1.99977E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-8.16822E-1	-7.98607E-1	-9.13119E0	-9.14202E0	5.38826E-3	9.3174E-2	2.72799E1	-3.27095E1	-3.26032E1	2.68052E1	1.69728E-7	2.52209E-3	2.52209E-3	6.31837E-3	1.99456E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.16822E-1	-7.98202E-1	-9.13122E0	-9.14211E0	5.38826E-3	9.30548E-2	2.73293E1	-3.26486E1	-3.26255E1	2.6792E1	1.69728E-7	2.52209E-3	2.52209E-3	6.33486E-3	1.98592E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09603E0	-8.16774E-1	-7.98392E-1	-9.13126E0	-9.14228E0	5.45979E-3	9.31025E-2	2.72738E1	-3.26852E1	-3.26203E1	2.6797E1	1.69713E-7	2.51498E-3	2.51498E-3	6.3074E-3	1.99127E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09611E0	-8.16846E-1	-7.98202E-1	-9.13138E0	-9.1419E0	5.50747E-3	9.32455E-2	2.73226E1	-3.26678E1	-3.26235E1	2.68082E1	1.69581E-7	2.51603E-3	2.51603E-3	6.31269E-3	1.99896E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09572E0	-8.16727E-1	-7.97892E-1	-9.13141E0	-9.14192E0	5.55515E-3	9.32932E-2	2.73357E1	-3.26771E1	-3.26488E1	2.68214E1	1.69657E-7	2.51158E-3	2.51158E-3	6.29035E-3	1.99703E-1
1.7E1	1.5E1	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.16417E-1	-7.98202E-1	-9.13162E0	-9.14228E0	5.45979E-3	9.3317E-2	2.72538E1	-3.26478E1	-3.2662E1	2.67968E1	1.69728E-7	2.52757E-3	2.52757E-3	6.3514E-3	2.01197E-1
1.8E1	9.4E1	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.16584E-1	-7.9782E-1	-9.13162E0	-9.1424E0	5.55515E-3	9.31025E-2	2.73345E1	-3.26615E1	-3.2607E1	2.67902E1	1.69943E-7	2.52492E-3	2.52492E-3	6.28592E-3	2.01047E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.16393E-1	-7.98059E-1	-9.13184E0	-9.14214E0	5.43594E-3	9.3174E-2	2.73586E1	-3.26506E1	-3.26302E1	2.67944E1	1.69656E-7	2.51915E-3	2.51915E-3	6.3074E-3	2.00108E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.16536E-1	-7.9813E-1	-9.13155E0	-9.14204E0	5.76973E-3	9.31025E-2	2.73075E1	-3.26609E1	-3.2641E1	2.68034E1	1.69943E-7	2.52492E-3	2.52492E-3	6.31817E-3	1.98661E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.16631E-1	-7.9782E-1	-9.13162E0	-9.14199E0	5.67436E-3	9.31263E-2	2.72842E1	-3.26376E1	-3.26179E1	2.67984E1	1.69731E-7	2.51581E-3	2.51581E-3	6.32978E-3	1.99401E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09619E0	-8.16441E-1	-7.97701E-1	-9.13172E0	-9.14207E0	5.62668E-3	9.31978E-2	2.72979E1	-3.27095E1	-3.25996E1	2.68106E1	1.69652E-7	2.51919E-3	2.51919E-3	6.3074E-3	1.99227E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.16321E-1	-7.97868E-1	-9.13146E0	-9.14199E0	5.36442E-3	9.31025E-2	2.72967E1	-3.27227E1	-3.26218E1	2.67992E1	1.69654E-7	2.51771E-3	2.51771E-3	6.31014E-3	1.9937E-1