[Scan]
initial_time=2016-02-17T22:17:20
final_time=2016-02-17T22:17:40
ip_count=19
run=1032
dataset=9
scan=442
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09611E0
qbias_imon=-1.08791E-4
ql1_vset=
ql1_vmon=-8.17013E-1
ql1_imon=1.36654E-8
ql2_vset=
ql2_vmon=-7.98035E-1
ql2_imon=1.89803E-9
ql3_vset=
ql3_vmon=-9.13136E0
ql3_imon=4.37152E-10
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=4.12464E-10
mult1=-1.01257E-8
mult2=-2.79446E-9
rf_tmon=-5.04716E-3
rf_agc=3.18676E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=1.63964E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65324E0
bslens_imon=2.31674E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19854E1
lens5a_imon=2.00032E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12507E2
lens4a_imon=2.05054E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53592E1
cs_ef1b_imon=3.04299E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.01916E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05E1
cs_ea1_imon=2.16915E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42978E0
lens1_imon=2.57511E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64939E1
os_ef1alow_imon=3.01067E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03897E1
cs_ea2_imon=1.54692E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84661E1
cs_ef1a_imon=3.00928E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.72222E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10759E1
os_restr1_imon=4.23361E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15264E1
os_ea1_imon=2.18189E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63554E1
os_ef1bup_imon=3.10485E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26921E0
cs_ionrep_imon=1.26023E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93413E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02446E1
cs_anode1_imon=3.29425E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20549E0
olens4_imon=3.68518E-8
tplens_vset=1.4E-1
tplens_vmon=1.58775E0
tplens_imon=-6.3867E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26392E1
iondef3_imon=1.52922E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26777E1
iondef2_imon=1.5632E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0297E2
lens6_imon=2.98498E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=4.06152E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29693E0
ionrepsh_imon=2.01377E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34029E1
lens5b_imon=2.18684E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74397E1
cs_ef2b_imon=3.09303E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.83374E0
os_ea2_imon=-6.9884E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.00786E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70748E1
cs_ef2a_imon=3.17609E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.12117E0
os_ef2alow_imon=-2.32784E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.15186E-1
os_ef2bup_imon=-5.16712E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10596E1
os_restr2_imon=3.51979E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.29008E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01398E1
cs_anode2_imon=2.29442E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72889E1
iondef1_imon=1.10272E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67962E1
iondef4_imon=1.05897E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.09479E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=9.83817E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16489E0
cs_ionaccel_imon=-1.61889E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02134E2
cs_ionfocb_imon=1.47181E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55722E1
einzel_imon=7.21868E-6
window_vset=0.0E0
window_vmon=2.04943E-1
window_imon=-8.05679E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82698E2
mask1_imon=2.39282E-4
mask2_vset=0.0E0
mask2_vmon=-1.85354E1
mask2_imon=-1.00029E-6
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.056E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.25964E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.24005E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.57682E0
defgridb_imon=6.18531E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33328E1
os_fil1_imon=9.58476E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07184E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64045E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30828E1
cs_fil1_imon=1.00631E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61926E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66186E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.7494E-2
os_fil2_imon=-2.37958E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.2483E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.89513E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3527E-1
cs_fil2_imon=-2.88929E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.16117E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22405E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=1.98937E-1
chamber_ion_pmon=1.69875E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.38182E-1
res40_imon=-2.50508E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	7.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-8.1687E-1	-7.97844E-1	-9.1311E0	-9.1419E0	5.93662E-3	9.3317E-2	2.72821E1	-3.26762E1	-3.26549E1	2.67914E1	1.69802E-7	2.51225E-3	2.51225E-3	6.32386E-3	1.9963E-1
2.0E0	7.0E0	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.16631E-1	-7.97915E-1	-9.13088E0	-9.14195E0	5.60284E-3	9.3174E-2	2.73082E1	-3.26865E1	-3.26048E1	2.67926E1	1.69653E-7	2.52169E-3	2.52169E-3	6.3074E-3	1.9934E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0941E0	-8.16345E-1	-7.9782E-1	-9.13119E0	-9.14207E0	5.67436E-3	9.34601E-2	2.72964E1	-3.26579E1	-3.26179E1	2.67931E1	1.69581E-7	2.51915E-3	2.51915E-3	6.33538E-3	1.99931E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.16607E-1	-7.97701E-1	-9.13126E0	-9.14204E0	5.84126E-3	9.30786E-2	2.72871E1	-3.265E1	-3.26873E1	2.67896E1	1.69653E-7	2.50882E-3	2.50882E-3	6.30202E-3	1.9951E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09588E0	-8.16488E-1	-7.98106E-1	-9.13126E0	-9.14171E0	6.19888E-3	9.30786E-2	2.73009E1	-3.26747E1	-3.26074E1	2.68166E1	1.69581E-7	2.52707E-3	2.52707E-3	6.30202E-3	1.98491E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09595E0	-8.16512E-1	-7.97939E-1	-9.13122E0	-9.14185E0	5.98431E-3	9.31978E-2	2.72943E1	-3.26795E1	-3.26356E1	2.67992E1	1.69728E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.99803E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09464E0	-8.16727E-1	-7.97844E-1	-9.13105E0	-9.14223E0	6.05583E-3	9.29594E-2	2.73063E1	-3.2653E1	-3.26326E1	2.67994E1	1.69731E-7	2.52362E-3	2.52362E-3	6.3074E-3	1.98872E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.16655E-1	-7.97844E-1	-9.13138E0	-9.14223E0	6.05583E-3	9.31025E-2	2.73357E1	-3.2647E1	-3.26218E1	2.68131E1	1.69875E-7	2.52209E-3	2.52209E-3	6.34588E-3	1.9911E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.1656E-1	-7.98106E-1	-9.13148E0	-9.14226E0	5.81741E-3	9.30309E-2	2.72951E1	-3.26868E1	-3.26231E1	2.67995E1	1.6987E-7	2.5131E-3	2.5131E-3	6.3074E-3	1.99E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-8.1687E-1	-7.97987E-1	-9.13141E0	-9.14187E0	5.96046E-3	9.30548E-2	2.73116E1	-3.26885E1	-3.26107E1	2.68208E1	1.69654E-7	2.52428E-3	2.52428E-3	6.29645E-3	2.01197E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.17084E-1	-7.9782E-1	-9.13112E0	-9.1418E0	5.8651E-3	9.32932E-2	2.72939E1	-3.26531E1	-3.2662E1	2.6803E1	1.69798E-7	2.52599E-3	2.52599E-3	6.29128E-3	2.00363E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0958E0	-8.16822E-1	-7.97844E-1	-9.13155E0	-9.14166E0	5.45979E-3	9.33409E-2	2.73101E1	-3.26716E1	-3.26104E1	2.67926E1	1.69653E-7	2.51847E-3	2.51847E-3	6.33436E-3	2.00705E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09673E0	-8.16846E-1	-7.97868E-1	-9.13112E0	-9.14185E0	5.76973E-3	9.29832E-2	2.73153E1	-3.26849E1	-3.26128E1	2.68184E1	1.69657E-7	2.52635E-3	2.52635E-3	6.3074E-3	2.00064E-1
1.7E1	2.2E1	0.0E0	6.87E2	4.7E2	-2.0965E0	-8.16679E-1	-7.98011E-1	-9.13148E0	-9.1418E0	5.57899E-3	9.33409E-2	2.72839E1	-3.26236E1	-3.26077E1	2.67926E1	1.6987E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.01047E-1
1.8E1	1.12E2	0.0E0	7.27E2	5.0E2	-2.0965E0	-8.16727E-1	-7.97725E-1	-9.13105E0	-9.1419E0	5.43594E-3	9.29594E-2	2.73033E1	-3.26603E1	-3.26861E1	2.67956E1	1.69802E-7	2.52209E-3	2.52209E-3	6.3074E-3	1.9963E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0965E0	-8.1718E-1	-7.98011E-1	-9.13124E0	-9.14233E0	5.6982E-3	9.30786E-2	2.73171E1	-3.26759E1	-3.26236E1	2.68184E1	1.69581E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.98937E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09704E0	-8.17084E-1	-7.97987E-1	-9.13103E0	-9.14209E0	5.48363E-3	9.33886E-2	2.73139E1	-3.26655E1	-3.2629E1	2.68192E1	1.69581E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.00673E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09727E0	-8.1706E-1	-7.98035E-1	-9.13115E0	-9.14202E0	5.88894E-3	9.34124E-2	2.73476E1	-3.26543E1	-3.25971E1	2.68188E1	1.69725E-7	2.52492E-3	2.52492E-3	6.28592E-3	2.00363E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09758E0	-8.17013E-1	-7.98059E-1	-9.13107E0	-9.14214E0	5.67436E-3	9.3174E-2	2.72756E1	-3.26714E1	-3.26242E1	2.67988E1	1.69723E-7	2.51603E-3	2.51603E-3	6.32858E-3	1.98395E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09611E0	-8.17013E-1	-7.98035E-1	-9.13136E0	-9.14185E0	5.45979E-3	9.34362E-2	2.72889E1	-3.26777E1	-3.26392E1	2.67962E1	1.69875E-7	2.51443E-3	2.51443E-3	6.29645E-3	1.98937E-1