[Scan]
initial_time=2016-02-17T22:18:15
final_time=2016-02-17T22:18:36
ip_count=19
run=1032
dataset=9
scan=444
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08796E-4
ql1_vset=
ql1_vmon=-8.16464E-1
ql1_imon=1.36546E-8
ql2_vset=
ql2_vmon=-7.97963E-1
ql2_imon=1.95247E-9
ql3_vset=
ql3_vmon=-9.13093E0
ql3_imon=3.42607E-10
ql4_vset=
ql4_vmon=-9.14214E0
ql4_imon=4.22513E-10
mult1=-9.57182E-9
mult2=-2.73658E-9
rf_tmon=-5.49778E-3
rf_agc=3.30812E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.34058E-3
ql5_imon=1.60068E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6202E0
bslens_imon=2.6813E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20143E1
lens5a_imon=1.97271E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12514E2
lens4a_imon=2.04937E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.52798E1
cs_ef1b_imon=3.04994E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04646E2
lens23_imon=1.02255E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04717E1
cs_ea1_imon=2.18507E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39734E0
lens1_imon=2.56449E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65054E1
os_ef1alow_imon=3.01206E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04085E1
cs_ea2_imon=1.54444E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84724E1
cs_ef1a_imon=3.01032E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.72284E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10747E1
os_restr1_imon=4.26315E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15364E1
os_ea1_imon=2.19675E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63456E1
os_ef1bup_imon=3.08852E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23086E0
cs_ionrep_imon=1.25846E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.93438E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02099E1
cs_anode1_imon=3.28035E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20518E0
olens4_imon=3.69005E-8
tplens_vset=1.4E-1
tplens_vmon=1.58539E0
tplens_imon=-2.98887E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26416E1
iondef3_imon=1.49984E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26807E1
iondef2_imon=1.58868E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02923E2
lens6_imon=2.98498E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=4.071E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27097E0
ionrepsh_imon=2.01023E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33681E1
lens5b_imon=2.1833E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7427E1
cs_ef2b_imon=3.08991E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.88978E0
os_ea2_imon=-6.88222E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06142E2
lens4b_imon=2.00686E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70725E1
cs_ef2a_imon=3.18826E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.13333E0
os_ef2alow_imon=-2.40429E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.17503E-1
os_ef2bup_imon=-5.30961E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10591E1
os_restr2_imon=3.5184E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2304E2
cs_ionfoca_imon=6.323E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01502E1
cs_anode2_imon=2.28399E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73111E1
iondef1_imon=1.06945E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68142E1
iondef4_imon=1.07391E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.09926E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.83334E-1
olens1_imon=9.83461E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.18111E0
cs_ionaccel_imon=-1.71619E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47035E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55635E1
einzel_imon=7.26038E-6
window_vset=0.0E0
window_vmon=2.04364E-1
window_imon=-8.78659E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82679E2
mask1_imon=2.39282E-4
mask2_vset=0.0E0
mask2_vmon=-1.85556E1
mask2_imon=-1.02462E-6
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92676E3
multa_neg_imon=7.74973E-5
defgrida_vset=2.902E3
defgrida_vmon=2.937E3
defgrida_imon=6.4543E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=7.20112E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.27563E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33316E1
os_fil1_imon=9.58881E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06854E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64368E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30778E1
cs_fil1_imon=1.00696E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62227E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66208E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.62277E-2
os_fil2_imon=-2.50122E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.25409E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.88374E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34396E-1
cs_fil2_imon=-2.91245E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.85968E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22434E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.9934E-1
chamber_ion_pmon=1.69725E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.84894E-1
res40_imon=-2.58848E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=185
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	7.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.1656E-1	-7.98106E-1	-9.13141E0	-9.1418E0	5.79357E-3	9.30548E-2	2.7265E1	-3.26484E1	-3.26467E1	2.68424E1	1.69798E-7	2.52384E-3	2.52384E-3	6.29665E-3	2.00021E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.1656E-1	-7.98202E-1	-9.13165E0	-9.1418E0	5.81741E-3	9.27687E-2	2.72506E1	-3.26701E1	-3.26285E1	2.6792E1	1.69728E-7	2.52318E-3	2.52318E-3	6.35692E-3	1.99803E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.1656E-1	-7.97987E-1	-9.13184E0	-9.14197E0	5.62668E-3	9.31263E-2	2.73328E1	-3.26472E1	-3.26178E1	2.67914E1	1.69728E-7	2.5199E-3	2.5199E-3	6.32936E-3	1.99283E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.16441E-1	-7.98154E-1	-9.13143E0	-9.14221E0	5.50747E-3	9.30309E-2	2.72865E1	-3.26951E1	-3.2605E1	2.68106E1	1.69728E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.9911E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.16369E-1	-7.98082E-1	-9.13146E0	-9.14237E0	5.24521E-3	9.29832E-2	2.73128E1	-3.26455E1	-3.2626E1	2.68012E1	1.69654E-7	2.52209E-3	2.52209E-3	6.3074E-3	1.98937E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09565E0	-8.16536E-1	-7.98368E-1	-9.13148E0	-9.14207E0	5.29289E-3	9.31263E-2	2.73193E1	-3.26644E1	-3.26349E1	2.67968E1	1.69943E-7	2.52276E-3	2.52276E-3	6.32356E-3	1.99E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-8.16679E-1	-7.98225E-1	-9.13126E0	-9.14214E0	5.53131E-3	9.31978E-2	2.73225E1	-3.27089E1	-3.25826E1	2.68037E1	1.69798E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.00534E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.16512E-1	-7.97939E-1	-9.1315E0	-9.14223E0	5.67436E-3	9.33886E-2	2.73057E1	-3.26705E1	-3.26206E1	2.67963E1	1.6972E-7	2.52093E-3	2.52093E-3	6.3074E-3	2.006E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.16393E-1	-7.97796E-1	-9.13148E0	-9.14178E0	5.67436E-3	9.34124E-2	2.72757E1	-3.2644E1	-3.26404E1	2.68052E1	1.69731E-7	2.51915E-3	2.51915E-3	6.31299E-3	1.99401E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09611E0	-8.16584E-1	-7.98202E-1	-9.13126E0	-9.14207E0	5.45979E-3	9.31501E-2	2.73027E1	-3.26632E1	-3.26195E1	2.67845E1	1.69802E-7	2.52318E-3	2.52318E-3	6.34037E-3	1.9911E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09611E0	-8.16488E-1	-7.97963E-1	-9.13115E0	-9.14207E0	5.55515E-3	9.3317E-2	2.72626E1	-3.26874E1	-3.25593E1	2.6801E1	1.6987E-7	2.51954E-3	2.51954E-3	6.32896E-3	1.9934E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.16464E-1	-7.98059E-1	-9.13136E0	-9.14204E0	5.65052E-3	9.34124E-2	2.73234E1	-3.26467E1	-3.26537E1	2.68157E1	1.69794E-7	2.52131E-3	2.52131E-3	6.30212E-3	1.97731E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.16488E-1	-7.97772E-1	-9.13138E0	-9.14216E0	5.65052E-3	9.31263E-2	2.72829E1	-3.26567E1	-3.26585E1	2.67908E1	1.69798E-7	2.51847E-3	2.51847E-3	6.30202E-3	1.97647E-1
1.7E1	2.4E1	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.16488E-1	-7.98082E-1	-9.13124E0	-9.14211E0	5.38826E-3	9.30548E-2	2.73039E1	-3.26669E1	-3.26669E1	2.67872E1	1.69581E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.98075E-1
1.8E1	8.6E1	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.16274E-1	-7.98082E-1	-9.13126E0	-9.14214E0	5.53131E-3	9.29832E-2	2.73592E1	-3.26645E1	-3.26176E1	2.67986E1	1.69728E-7	2.5199E-3	2.5199E-3	6.32936E-3	1.9963E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.16536E-1	-7.98273E-1	-9.13103E0	-9.14185E0	5.43594E-3	9.31263E-2	2.73346E1	-3.26372E1	-3.26744E1	2.6798E1	1.69875E-7	2.52099E-3	2.52099E-3	6.3074E-3	1.99456E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09402E0	-8.16441E-1	-7.98225E-1	-9.13115E0	-9.14216E0	5.65052E-3	9.32932E-2	2.72855E1	-3.26884E1	-3.26432E1	2.67812E1	1.69725E-7	2.52061E-3	2.52061E-3	6.33977E-3	2.00192E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09402E0	-8.16607E-1	-7.98082E-1	-9.1311E0	-9.14207E0	5.6982E-3	9.34124E-2	2.72987E1	-3.26532E1	-3.26289E1	2.6781E1	1.70031E-7	2.52362E-3	2.52362E-3	6.3074E-3	1.99577E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.16631E-1	-7.98154E-1	-9.13122E0	-9.1419E0	6.00815E-3	9.3317E-2	2.73138E1	-3.26857E1	-3.25924E1	2.67555E1	1.69865E-7	2.52131E-3	2.52131E-3	6.31269E-3	1.98894E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.16464E-1	-7.97963E-1	-9.13093E0	-9.14214E0	5.34058E-3	9.34124E-2	2.73111E1	-3.26807E1	-3.26416E1	2.68142E1	1.69725E-7	2.51417E-3	2.51417E-3	6.3074E-3	1.9934E-1