[Scan]
initial_time=2016-02-17T22:18:43
final_time=2016-02-17T22:19:04
ip_count=19
run=1032
dataset=9
scan=445
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08793E-4
ql1_vset=
ql1_vmon=-8.16512E-1
ql1_imon=1.36724E-8
ql2_vset=
ql2_vmon=-7.98082E-1
ql2_imon=1.94253E-9
ql3_vset=
ql3_vmon=-9.13124E0
ql3_imon=3.48175E-10
ql4_vset=
ql4_vmon=-9.14156E0
ql4_imon=4.29833E-10
mult1=-9.73579E-9
mult2=-2.70758E-9
rf_tmon=-6.1494E-3
rf_agc=3.12563E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.62668E-3
ql5_imon=1.5838E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62551E0
bslens_imon=2.52202E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19931E1
lens5a_imon=1.97696E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.05089E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53388E1
cs_ef1b_imon=3.06235E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02209E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05666E1
cs_ea1_imon=2.17976E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35663E0
lens1_imon=2.90074E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64765E1
os_ef1alow_imon=2.94486E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03968E1
cs_ea2_imon=1.58408E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83637E1
cs_ef1a_imon=3.00504E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.72511E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11922E1
os_restr1_imon=4.29022E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15406E1
os_ea1_imon=2.18472E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63665E1
os_ef1bup_imon=3.05406E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25682E0
cs_ionrep_imon=1.26518E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91859E2
cs_nozzle_imon=1.93293E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01455E1
cs_anode1_imon=3.25912E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20554E0
olens4_imon=3.70046E-8
tplens_vset=1.4E-1
tplens_vmon=1.64851E0
tplens_imon=-3.94451E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2659E1
iondef3_imon=1.47542E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26744E1
iondef2_imon=1.56072E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02979E2
lens6_imon=2.98417E-4
ql6_vset=1.0E-1
ql6_vmon=9.30548E-2
ql6_imon=4.08183E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2751E0
ionrepsh_imon=2.00775E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33882E1
lens5b_imon=2.19038E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74423E1
cs_ef2b_imon=3.13659E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.83669E0
os_ea2_imon=-7.83786E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06141E2
lens4b_imon=2.00782E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71684E1
cs_ef2a_imon=3.18813E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05216E0
os_ef2alow_imon=-3.01954E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-4.19959E-1
os_ef2bup_imon=-5.32969E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11129E1
os_restr2_imon=3.53663E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.29645E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02188E1
cs_anode2_imon=2.26083E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72892E1
iondef1_imon=1.12007E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68041E1
iondef4_imon=1.08485E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.0946E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=9.8307E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08329E0
cs_ionaccel_imon=-2.29154E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02009E2
cs_ionfocb_imon=1.47183E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56826E1
einzel_imon=7.99778E-6
window_vset=0.0E0
window_vmon=1.53673E-1
window_imon=-1.4374E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8258E2
mask1_imon=2.3903E-4
mask2_vset=0.0E0
mask2_vmon=-1.85323E1
mask2_imon=-5.00371E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92617E3
multa_neg_imon=7.51259E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.46492E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50148E3
multb_neg_imon=6.94982E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.56501E0
defgridb_imon=6.19593E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33273E1
os_fil1_imon=9.57905E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07113E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64121E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.308E1
cs_fil1_imon=1.00523E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6251E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6605E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.77472E-2
os_fil2_imon=-2.85217E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.64678E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.87361E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35219E-1
cs_fil2_imon=-1.95118E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.67681E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22506E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29002E-3
inlet_lpb_pmon=1.98734E-1
chamber_ion_pmon=1.69659E-7
chamber_cvt_pmon=2.51758E-3
foreline_cvt_pmon=2.51758E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.18447E-1
res40_imon=-2.62671E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09595E0	-8.1656E-1	-7.98059E-1	-9.13119E0	-9.14192E0	5.45979E-3	9.3174E-2	2.72962E1	-3.26661E1	-3.26154E1	2.67694E1	1.69653E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.00021E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.17108E-1	-7.97987E-1	-9.13134E0	-9.14195E0	5.4121E-3	9.3317E-2	2.731E1	-3.26887E1	-3.26387E1	2.68104E1	1.69581E-7	2.51287E-3	2.51287E-3	6.3074E-3	2.00231E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.16751E-1	-7.98059E-1	-9.13138E0	-9.14199E0	5.81741E-3	9.3317E-2	2.73168E1	-3.26364E1	-3.26435E1	2.67758E1	1.69855E-7	2.51345E-3	2.51345E-3	6.31251E-3	1.99983E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09588E0	-8.16417E-1	-7.97987E-1	-9.13131E0	-9.14218E0	5.65052E-3	9.31263E-2	2.7301E1	-3.26756E1	-3.26372E1	2.67306E1	1.69659E-7	2.51758E-3	2.51758E-3	6.29581E-3	1.991E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09595E0	-8.16512E-1	-7.98059E-1	-9.13146E0	-9.14185E0	5.62668E-3	9.31978E-2	2.73139E1	-3.26809E1	-3.26502E1	2.67885E1	1.69802E-7	2.52757E-3	2.52757E-3	6.30192E-3	1.99803E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09627E0	-8.16679E-1	-7.97939E-1	-9.13155E0	-9.14197E0	5.57899E-3	9.31978E-2	2.73399E1	-3.26496E1	-3.26496E1	2.68046E1	1.69865E-7	2.52236E-3	2.52236E-3	6.31798E-3	2.00903E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.16584E-1	-7.97963E-1	-9.13148E0	-9.14204E0	5.67436E-3	9.31501E-2	2.73098E1	-3.26425E1	-3.26649E1	2.68052E1	1.69654E-7	2.5199E-3	2.5199E-3	6.29645E-3	2.00325E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09642E0	-8.16536E-1	-7.97963E-1	-9.13148E0	-9.14197E0	5.67436E-3	9.32217E-2	2.73057E1	-3.26747E1	-3.26167E1	2.67972E1	1.69723E-7	2.52131E-3	2.52131E-3	6.32858E-3	1.98894E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09619E0	-8.16607E-1	-7.97772E-1	-9.13143E0	-9.14192E0	5.60284E-3	9.29832E-2	2.72986E1	-3.26773E1	-3.26178E1	2.68053E1	1.69865E-7	2.51498E-3	2.51498E-3	6.32328E-3	1.99896E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09657E0	-8.16536E-1	-7.97939E-1	-9.13146E0	-9.14197E0	5.6982E-3	9.33886E-2	2.73181E1	-3.26762E1	-3.2639E1	2.68406E1	1.69725E-7	2.52384E-3	2.52384E-3	6.33436E-3	1.9951E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09611E0	-8.16584E-1	-7.97939E-1	-9.13105E0	-9.14176E0	5.79357E-3	9.36508E-2	2.72998E1	-3.26455E1	-3.26703E1	2.67769E1	1.69943E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.00705E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09572E0	-8.16464E-1	-7.97987E-1	-9.13134E0	-9.14185E0	5.6982E-3	9.32693E-2	2.7337E1	-3.2675E1	-3.26236E1	2.68088E1	1.69581E-7	2.52384E-3	2.52384E-3	6.31278E-3	1.9985E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.16417E-1	-7.98154E-1	-9.13174E0	-9.14202E0	5.57899E-3	9.29832E-2	2.72744E1	-3.26638E1	-3.26402E1	2.68285E1	1.69943E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.00021E-1
1.7E1	2.3E1	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.16536E-1	-7.98106E-1	-9.1315E0	-9.1419E0	5.29289E-3	9.33647E-2	2.73157E1	-3.26626E1	-3.2629E1	2.68076E1	1.6987E-7	2.51203E-3	2.51203E-3	6.29128E-3	1.9968E-1
1.8E1	9.5E1	0.0E0	7.27E2	5.0E2	-2.0958E0	-8.16703E-1	-7.98154E-1	-9.13134E0	-9.1419E0	5.43594E-3	9.31263E-2	2.73446E1	-3.2649E1	-3.26054E1	2.67902E1	1.69943E-7	2.52276E-3	2.52276E-3	6.32896E-3	2.00192E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.16584E-1	-7.98178E-1	-9.13115E0	-9.14195E0	5.60284E-3	9.28879E-2	2.73294E1	-3.26845E1	-3.26515E1	2.68198E1	1.6987E-7	2.51739E-3	2.51739E-3	6.29665E-3	1.98661E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.16536E-1	-7.97868E-1	-9.13124E0	-9.14192E0	5.62668E-3	9.3174E-2	2.73287E1	-3.26803E1	-3.2626E1	2.67966E1	1.69723E-7	2.51919E-3	2.51919E-3	6.31798E-3	2.00735E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.16655E-1	-7.98011E-1	-9.13167E0	-9.14192E0	5.38826E-3	9.3174E-2	2.73246E1	-3.26555E1	-3.26275E1	2.68117E1	1.69798E-7	2.52061E-3	2.52061E-3	6.34518E-3	1.9968E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.16751E-1	-7.97868E-1	-9.13129E0	-9.1419E0	5.48363E-3	9.32217E-2	2.73019E1	-3.27024E1	-3.2647E1	2.68192E1	1.69829E-7	2.52144E-3	2.52144E-3	6.30278E-3	1.98894E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.16512E-1	-7.98082E-1	-9.13124E0	-9.14156E0	5.62668E-3	9.30548E-2	2.72892E1	-3.26744E1	-3.2659E1	2.68041E1	1.69659E-7	2.51758E-3	2.51758E-3	6.29002E-3	1.98734E-1