[Scan]
initial_time=2016-02-17T22:19:10
final_time=2016-02-17T22:19:30
ip_count=19
run=1032
dataset=9
scan=446
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09611E0
qbias_imon=-1.08801E-4
ql1_vset=
ql1_vmon=-8.16655E-1
ql1_imon=1.37009E-8
ql2_vset=
ql2_vmon=-7.97987E-1
ql2_imon=1.89289E-9
ql3_vset=
ql3_vmon=-9.13131E0
ql3_imon=3.9736E-10
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=3.86703E-10
mult1=-9.93304E-9
mult2=-2.7266E-9
rf_tmon=-4.7828E-3
rf_agc=3.35499E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.72205E-3
ql5_imon=1.62433E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66693E0
bslens_imon=2.77909E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20025E1
lens5a_imon=1.99337E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.125E2
lens4a_imon=2.05045E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53864E1
cs_ef1b_imon=3.04785E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04622E2
lens23_imon=1.02251E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04874E1
cs_ea1_imon=2.15799E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39191E0
lens1_imon=2.69713E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64278E1
os_ef1alow_imon=2.94603E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03804E1
cs_ea2_imon=1.55759E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84081E1
cs_ef1a_imon=3.02944E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.72406E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11807E1
os_restr1_imon=4.29269E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15442E1
os_ea1_imon=2.17814E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63572E1
os_ef1bup_imon=3.05203E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25324E0
cs_ionrep_imon=1.25227E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91908E2
cs_nozzle_imon=1.93468E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01433E1
cs_anode1_imon=3.26541E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20518E0
olens4_imon=3.69392E-8
tplens_vset=1.4E-1
tplens_vmon=1.6198E0
tplens_imon=-2.5362E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26476E1
iondef3_imon=1.49612E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26759E1
iondef2_imon=1.55896E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02951E2
lens6_imon=2.98479E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=4.09946E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25836E0
ionrepsh_imon=2.00328E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33629E1
lens5b_imon=2.1976E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74884E1
cs_ef2b_imon=3.14516E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.86115E0
os_ea2_imon=-6.56616E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06127E2
lens4b_imon=2.00688E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71211E1
cs_ef2a_imon=3.16045E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.01459E0
os_ef2alow_imon=-2.99161E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-4.35083E-1
os_ef2bup_imon=-5.27833E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11384E1
os_restr2_imon=3.56671E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2308E2
cs_ionfoca_imon=6.30816E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02389E1
cs_anode2_imon=2.27322E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73387E1
iondef1_imon=1.09073E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67824E1
iondef4_imon=1.09163E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.09432E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.83119E-1
olens1_imon=9.84044E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.04963E0
cs_ionaccel_imon=-2.38692E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02063E2
cs_ionfocb_imon=1.47369E-4
einzel_vset=-2.1E1
einzel_vmon=-2.57013E1
einzel_imon=7.89288E-6
window_vset=0.0E0
window_vmon=1.69032E-1
window_imon=-1.4764E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82558E2
mask1_imon=2.39004E-4
mask2_vset=0.0E0
mask2_vmon=-1.87103E1
mask2_imon=-3.88648E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92637E3
multa_neg_imon=7.52966E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93701E3
defgrida_imon=6.49485E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.27352E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.76643E0
defgridb_imon=6.33434E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33268E1
os_fil1_imon=9.58441E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06814E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64044E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30765E1
cs_fil1_imon=1.00677E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62349E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65954E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.61144E-2
os_fil2_imon=-3.03988E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.53008E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.87685E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34771E-1
cs_fil2_imon=-1.9278E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.48374E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22413E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.00151E-1
chamber_ion_pmon=1.69875E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.4008E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=1.79072E-1
res40_imon=-2.67536E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=672
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09595E0	-8.16536E-1	-7.98106E-1	-9.13131E0	-9.14197E0	5.53131E-3	9.32693E-2	2.73289E1	-3.26921E1	-3.26318E1	2.67775E1	1.6986E-7	2.51886E-3	2.51886E-3	6.3282E-3	1.99776E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09704E0	-8.16607E-1	-7.97915E-1	-9.13124E0	-9.14195E0	5.45979E-3	9.3317E-2	2.72727E1	-3.26931E1	-3.26031E1	2.68156E1	1.6965E-7	2.52197E-3	2.52197E-3	6.3126E-3	2.00435E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.16798E-1	-7.98106E-1	-9.13064E0	-9.14211E0	5.84126E-3	9.32932E-2	2.73005E1	-3.26857E1	-3.2593E1	2.67926E1	1.69673E-7	2.51944E-3	2.51944E-3	6.31429E-3	2.00884E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09595E0	-8.16584E-1	-7.97963E-1	-9.1311E0	-9.1418E0	5.76973E-3	9.32455E-2	2.7359E1	-3.26517E1	-3.26285E1	2.67932E1	1.69723E-7	2.52553E-3	2.52553E-3	6.32858E-3	1.99896E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.16584E-1	-7.98106E-1	-9.13105E0	-9.14202E0	6.10352E-3	9.32932E-2	2.72835E1	-3.26849E1	-3.26669E1	2.68118E1	1.69581E-7	2.52027E-3	2.52027E-3	6.30182E-3	2.00463E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.16393E-1	-7.98249E-1	-9.13103E0	-9.14223E0	5.76973E-3	9.35078E-2	2.73167E1	-3.26602E1	-3.26434E1	2.68192E1	1.69875E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.99803E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09619E0	-8.16274E-1	-7.98249E-1	-9.13103E0	-9.14199E0	5.76973E-3	9.35078E-2	2.73188E1	-3.26628E1	-3.26497E1	2.68144E1	1.6965E-7	2.51783E-3	2.51783E-3	6.3126E-3	1.99776E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09657E0	-8.16655E-1	-7.97939E-1	-9.13138E0	-9.14204E0	5.88894E-3	9.33647E-2	2.73135E1	-3.26657E1	-3.26398E1	2.68082E1	1.69581E-7	2.52635E-3	2.52635E-3	6.31879E-3	1.99163E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09642E0	-8.16298E-1	-7.9813E-1	-9.13126E0	-9.14214E0	5.65052E-3	9.30786E-2	2.72827E1	-3.26526E1	-3.26514E1	2.67908E1	1.69802E-7	2.52209E-3	2.52209E-3	6.3074E-3	1.99283E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09603E0	-8.16321E-1	-7.98225E-1	-9.13117E0	-9.14176E0	5.55515E-3	9.30071E-2	2.72985E1	-3.26789E1	-3.26579E1	2.67986E1	1.69765E-7	2.52099E-3	2.52099E-3	6.31837E-3	1.9937E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09696E0	-8.16393E-1	-7.97987E-1	-9.13103E0	-9.14199E0	5.60284E-3	9.30786E-2	2.73428E1	-3.26856E1	-3.26313E1	2.67949E1					
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09634E0	-8.16321E-1	-7.98082E-1	-9.1311E0	-9.14209E0	5.6982E-3	9.32455E-2	2.73149E1	-3.26451E1	-3.26422E1	2.68094E1	1.6951E-7	2.51814E-3	2.51814E-3	6.30212E-3	2.00064E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09657E0	-8.16393E-1	-7.98011E-1	-9.13112E0	-9.14173E0	5.60284E-3	9.3317E-2	2.72955E1	-3.26945E1	-3.25882E1	2.67938E1	1.69653E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.00705E-1
1.7E1	1.4E1	0.0E0	6.87E2	4.7E2	-2.09611E0	-8.15988E-1	-7.98035E-1	-9.13091E0	-9.14176E0	5.31673E-3	9.33647E-2	2.72603E1	-3.26478E1	-3.26915E1	2.68124E1	1.69798E-7	2.51525E-3	2.51525E-3	6.33977E-3	2.00363E-1
1.8E1	9.0E1	0.0E0	7.27E2	5.0E2	-2.09627E0	-8.16274E-1	-7.97963E-1	-9.13122E0	-9.14168E0	5.24521E-3	9.3174E-2	2.73538E1	-3.26699E1	-3.26404E1	2.67625E1	1.69798E-7	2.52384E-3	2.52384E-3	6.33436E-3	1.99E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09642E0	-8.16298E-1	-7.98202E-1	-9.13131E0	-9.14202E0	5.53131E-3	9.34362E-2	2.73021E1	-3.27015E1	-3.25959E1	2.6796E1	1.69731E-7	2.51581E-3	2.51581E-3	6.32418E-3	1.98872E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.16321E-1	-7.97749E-1	-9.13134E0	-9.14195E0	5.55515E-3	9.30786E-2	2.72955E1	-3.26699E1	-3.2635E1	2.6795E1	1.69723E-7	2.51393E-3	2.51393E-3	6.32858E-3	1.98395E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.16607E-1	-7.97844E-1	-9.13124E0	-9.14192E0	5.45979E-3	9.32455E-2	2.73063E1	-3.2711E1	-3.25865E1	2.67884E1	1.69731E-7	2.51693E-3	2.51693E-3	6.28511E-3	2.00108E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.16607E-1	-7.97606E-1	-9.13124E0	-9.14207E0	5.57899E-3	9.31263E-2	2.72886E1	-3.27074E1	-3.26331E1	2.68001E1	1.69865E-7	2.51814E-3	2.51814E-3	6.30212E-3	2.00064E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09611E0	-8.16655E-1	-7.97987E-1	-9.13131E0	-9.14197E0	5.72205E-3	9.32932E-2	2.73387E1	-3.26759E1	-3.26476E1	2.67824E1	1.69875E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.00151E-1