[Scan]
initial_time=2016-02-17T22:21:53
final_time=2016-02-17T22:22:13
ip_count=19
run=1032
dataset=9
scan=452
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09595E0
qbias_imon=-1.08794E-4
ql1_vset=
ql1_vmon=-8.16536E-1
ql1_imon=1.3719E-8
ql2_vset=
ql2_vmon=-7.97725E-1
ql2_imon=1.88657E-9
ql3_vset=
ql3_vmon=-9.13112E0
ql3_imon=3.56567E-10
ql4_vset=
ql4_vmon=-9.14211E0
ql4_imon=4.62866E-10
mult1=-1.08481E-8
mult2=-2.81642E-9
rf_tmon=-4.70469E-3
rf_agc=3.24143E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=1.59584E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64203E0
bslens_imon=2.35213E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19895E1
lens5a_imon=1.99111E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12523E2
lens4a_imon=2.0515E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5336E1
cs_ef1b_imon=3.05446E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04604E2
lens23_imon=1.02255E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04959E1
cs_ea1_imon=2.19428E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41857E0
lens1_imon=2.62113E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64666E1
os_ef1alow_imon=2.9707E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04097E1
cs_ea2_imon=1.57983E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84417E1
cs_ef1a_imon=3.00546E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.72325E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11309E1
os_restr1_imon=4.26176E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15789E1
os_ea1_imon=2.17481E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63629E1
os_ef1bup_imon=3.08087E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25505E0
cs_ionrep_imon=1.26766E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91859E2
cs_nozzle_imon=1.93356E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01682E1
cs_anode1_imon=3.27097E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20558E0
olens4_imon=3.69658E-8
tplens_vset=1.4E-1
tplens_vmon=1.58126E0
tplens_imon=-3.27202E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26392E1
iondef3_imon=1.50692E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26122E1
iondef2_imon=1.56886E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02974E2
lens6_imon=2.98417E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=4.05771E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25623E0
ionrepsh_imon=2.0166E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33663E1
lens5b_imon=2.18967E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74588E1
cs_ef2b_imon=3.12084E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.83669E0
os_ea2_imon=-9.28902E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06123E2
lens4b_imon=2.00548E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71292E1
cs_ef2a_imon=3.1813E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08526E0
os_ef2alow_imon=-2.66841E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.7079E-1
os_ef2bup_imon=-5.34783E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10654E1
os_restr2_imon=3.54099E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23087E2
cs_ionfoca_imon=6.3099E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01728E1
cs_anode2_imon=2.27218E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73496E1
iondef1_imon=1.09954E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68214E1
iondef4_imon=1.08538E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.10345E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82857E-1
olens1_imon=9.84619E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13188E0
cs_ionaccel_imon=-2.1228E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47282E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56121E1
einzel_imon=7.62181E-6
window_vset=0.0E0
window_vmon=1.77141E-1
window_imon=-1.07675E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.39077E-4
mask2_vset=0.0E0
mask2_vmon=-1.86124E1
mask2_imon=-5.97163E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92645E3
multa_neg_imon=7.89838E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93695E3
defgrida_imon=6.94274E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.45596E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48528E0
defgridb_imon=6.08267E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33268E1
os_fil1_imon=9.57868E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07416E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64278E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30837E1
cs_fil1_imon=1.00588E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61897E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66125E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.66075E-2
os_fil2_imon=-2.66919E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97607E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.9217E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37268E-1
cs_fil2_imon=-2.6576E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.68592E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22466E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=1.9989E-1
chamber_ion_pmon=1.69765E-7
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.81419E-1
res40_imon=-2.797E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.16512E-1	-7.98082E-1	-9.13153E0	-9.14209E0	5.93662E-3	9.31978E-2	2.73004E1	-3.26697E1	-3.26154E1	2.68208E1	1.69725E-7	2.51632E-3	2.51632E-3	6.33977E-3	2.00363E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09603E0	-8.16345E-1	-7.97915E-1	-9.13148E0	-9.14202E0	5.88894E-3	9.30309E-2	2.73363E1	-3.26413E1	-3.26248E1	2.6828E1	1.69798E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.00021E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09595E0	-8.1656E-1	-7.98082E-1	-9.13129E0	-9.14223E0	5.81741E-3	9.31978E-2	2.72685E1	-3.27322E1	-3.26101E1	2.67893E1	1.69806E-7	2.51804E-3	2.51804E-3	6.31858E-3	1.98696E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09595E0	-8.16584E-1	-7.98106E-1	-9.13148E0	-9.14252E0	5.76973E-3	9.31978E-2	2.73051E1	-3.26596E1	-3.26496E1	2.67976E1	1.69725E-7	2.51525E-3	2.51525E-3	6.30202E-3	1.9883E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.16298E-1	-7.98035E-1	-9.13124E0	-9.1424E0	5.96046E-3	9.34362E-2	2.73189E1	-3.26963E1	-3.26488E1	2.67884E1	1.69943E-7	2.52169E-3	2.52169E-3	6.31817E-3	1.9934E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.16298E-1	-7.97939E-1	-9.13136E0	-9.14228E0	5.93662E-3	9.31263E-2	2.73151E1	-3.26561E1	-3.26437E1	2.68292E1	1.69949E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.99456E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09627E0	-8.16584E-1	-7.98154E-1	-9.13129E0	-9.14233E0	5.79357E-3	9.30071E-2	2.72811E1	-3.26398E1	-3.26506E1	2.6786E1	1.6987E-7	2.51739E-3	2.51739E-3	6.30202E-3	1.9985E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09603E0	-8.16464E-1	-7.9813E-1	-9.13146E0	-9.14204E0	5.76973E-3	9.34124E-2	2.73057E1	-3.2677E1	-3.26399E1	2.68209E1	1.69728E-7	2.51552E-3	2.51552E-3	6.29645E-3	1.99977E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0958E0	-8.16774E-1	-7.98106E-1	-9.13126E0	-9.14242E0	5.36442E-3	9.33886E-2	2.72935E1	-3.26682E1	-3.26211E1	2.68052E1	1.69865E-7	2.50972E-3	2.50972E-3	6.31269E-3	2.00064E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-8.16298E-1	-7.97987E-1	-9.13153E0	-9.14226E0	5.53131E-3	9.33647E-2	2.73231E1	-3.26398E1	-3.26524E1	2.681E1	1.69656E-7	2.51693E-3	2.51693E-3	6.32978E-3	1.99401E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.16202E-1	-7.98035E-1	-9.13134E0	-9.14218E0	5.67436E-3	9.34124E-2	2.73605E1	-3.2695E1	-3.2659E1	2.68256E1	1.69802E-7	2.5199E-3	2.5199E-3	6.32936E-3	1.98764E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-8.16393E-1	-7.98059E-1	-9.13115E0	-9.14216E0	5.96046E-3	9.3317E-2	2.73429E1	-3.26663E1	-3.26158E1	2.67908E1	1.70088E-7	2.51739E-3	2.51739E-3	6.32896E-3	1.98491E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.0941E0	-8.16298E-1	-7.97844E-1	-9.13115E0	-9.1423E0	5.65052E-3	9.31263E-2	2.73015E1	-3.26627E1	-3.2638E1	2.68004E1	1.69802E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.99283E-1
1.7E1	2.5E1	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.16584E-1	-7.98273E-1	-9.13103E0	-9.14221E0	5.62668E-3	9.31978E-2	2.73434E1	-3.26231E1	-3.26272E1	2.68146E1	1.69949E-7	2.51334E-3	2.51334E-3	6.3074E-3	1.99283E-1
1.8E1	8.1E1	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.16393E-1	-7.98082E-1	-9.13138E0	-9.14223E0	5.67436E-3	9.35078E-2	2.73123E1	-3.26446E1	-3.26657E1	2.67842E1	1.69798E-7	2.51954E-3	2.51954E-3	6.33436E-3	1.9934E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.16178E-1	-7.98059E-1	-9.13169E0	-9.14249E0	5.67436E-3	9.32455E-2	2.72757E1	-3.26831E1	-3.26026E1	2.68436E1	1.69875E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.00499E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.16369E-1	-7.97963E-1	-9.13169E0	-9.14207E0	5.84126E-3	9.33409E-2	2.72921E1	-3.26537E1	-3.2652E1	2.67932E1	1.69581E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.00499E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.16441E-1	-7.97892E-1	-9.1315E0	-9.14214E0	5.81741E-3	9.3174E-2	2.72833E1	-3.26614E1	-3.2652E1	2.68018E1	1.69943E-7	2.52169E-3	2.52169E-3	6.29665E-3	1.9934E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.16393E-1	-7.9782E-1	-9.13112E0	-9.14185E0	5.76973E-3	9.34839E-2	2.74229E1	-3.27155E1	-3.2483E1	2.67986E1	1.7016E-7	2.52384E-3	2.52384E-3	6.29665E-3	1.9985E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09595E0	-8.16536E-1	-7.97725E-1	-9.13112E0	-9.14211E0	5.48363E-3	9.32455E-2	2.73496E1	-3.26122E1	-3.26392E1	2.68214E1	1.69765E-7	2.52318E-3	2.52318E-3	6.31288E-3	1.9989E-1