[Scan]
initial_time=2016-02-17T22:22:20
final_time=2016-02-17T22:22:40
ip_count=19
run=1032
dataset=9
scan=453
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09642E0
qbias_imon=-1.08764E-4
ql1_vset=
ql1_vmon=-8.16512E-1
ql1_imon=1.37499E-8
ql2_vset=
ql2_vmon=-7.98059E-1
ql2_imon=1.90469E-9
ql3_vset=
ql3_vmon=-9.1311E0
ql3_imon=3.48616E-10
ql4_vset=
ql4_vmon=-9.14192E0
ql4_imon=4.3025E-10
mult1=-1.01979E-8
mult2=-2.68069E-9
rf_tmon=-4.14592E-3
rf_agc=3.30211E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.93662E-3
ql5_imon=1.60335E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64203E0
bslens_imon=2.71669E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20096E1
lens5a_imon=2.00067E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.05157E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53172E1
cs_ef1b_imon=3.04937E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0464E2
lens23_imon=1.02192E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05082E1
cs_ea1_imon=2.17622E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40972E0
lens1_imon=2.67776E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64674E1
os_ef1alow_imon=2.97261E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04038E1
cs_ea2_imon=1.58054E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8449E1
cs_ef1a_imon=3.0155E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.7251E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11165E1
os_restr1_imon=4.27184E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1514E1
os_ea1_imon=2.20065E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63629E1
os_ef1bup_imon=3.07028E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23794E0
cs_ionrep_imon=1.26306E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91905E2
cs_nozzle_imon=1.93417E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01773E1
cs_anode1_imon=3.27138E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20532E0
olens4_imon=3.69226E-8
tplens_vset=1.4E-1
tplens_vmon=1.58067E0
tplens_imon=-3.83833E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26326E1
iondef3_imon=1.49914E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2647E1
iondef2_imon=1.5724E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02956E2
lens6_imon=2.98604E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=4.08478E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27805E0
ionrepsh_imon=2.02084E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33487E1
lens5b_imon=2.17729E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74531E1
cs_ef2b_imon=3.12326E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.84908E0
os_ea2_imon=-7.5901E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06131E2
lens4b_imon=2.00633E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71384E1
cs_ef2a_imon=3.18164E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.13985E0
os_ef2alow_imon=-2.57626E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.81516E-1
os_ef2bup_imon=-5.47024E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10727E1
os_restr2_imon=3.54095E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23066E2
cs_ionfoca_imon=6.31344E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01857E1
cs_anode2_imon=2.27524E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73345E1
iondef1_imon=1.10201E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68298E1
iondef4_imon=1.07692E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=1.10136E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82857E-1
olens1_imon=9.84058E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12233E0
cs_ionaccel_imon=-1.92754E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47158E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56219E1
einzel_imon=7.63738E-6
window_vset=0.0E0
window_vmon=1.53072E-1
window_imon=-1.06259E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39127E-4
mask2_vset=0.0E0
mask2_vmon=-1.8653E1
mask2_imon=-8.57164E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92622E3
multa_neg_imon=7.7922E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93693E3
defgrida_imon=6.34104E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.0737E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35536E0
defgridb_imon=6.17469E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33292E1
os_fil1_imon=9.60158E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06662E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64305E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30812E1
cs_fil1_imon=1.00574E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62276E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66136E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.54679E-2
os_fil2_imon=-2.58188E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.845E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.79009E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34831E-1
cs_fil2_imon=-2.35963E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.53906E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2255E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.01047E-1
chamber_ion_pmon=1.6987E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.16355E-1
res40_imon=-2.68437E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=180
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	9.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.16226E-1	-7.98273E-1	-9.13153E0	-9.14223E0	5.60284E-3	9.33886E-2	2.7285E1	-3.26862E1	-3.26354E1	2.67659E1	1.69725E-7	2.52169E-3	2.52169E-3	6.33436E-3	1.99E-1
2.0E0	4.0E0	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.16512E-1	-7.98249E-1	-9.13153E0	-9.14211E0	5.57899E-3	9.32217E-2	2.73428E1	-3.26478E1	-3.26107E1	2.68046E1	1.69798E-7	2.51847E-3	2.51847E-3	6.31278E-3	1.9917E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.1625E-1	-7.97987E-1	-9.13162E0	-9.14223E0	5.76973E-3	9.33886E-2	2.73425E1	-3.26953E1	-3.2656E1	2.6798E1	1.6987E-7	2.52061E-3	2.52061E-3	6.31278E-3	1.9883E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.16154E-1	-7.98035E-1	-9.13143E0	-9.14237E0	5.8651E-3	9.32217E-2	2.73552E1	-3.26189E1	-3.26832E1	2.68112E1	1.69581E-7	2.52139E-3	2.52139E-3	6.31299E-3	1.97818E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.16154E-1	-7.9813E-1	-9.1316E0	-9.14204E0	5.38826E-3	9.3317E-2	2.72843E1	-3.26554E1	-3.26474E1	2.67932E1	1.70023E-7	2.52428E-3	2.52428E-3	6.29098E-3	1.99456E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.16154E-1	-7.97892E-1	-9.1316E0	-9.14156E0	5.36442E-3	9.29117E-2	2.73175E1	-3.26797E1	-3.26272E1	2.67806E1	1.69728E-7	2.52099E-3	2.52099E-3	6.29645E-3	1.99456E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09572E0	-8.16131E-1	-7.97772E-1	-9.13165E0	-9.14164E0	5.88894E-3	9.34839E-2	2.72799E1	-3.26747E1	-3.25936E1	2.67944E1	1.69728E-7	2.5199E-3	2.5199E-3	6.3074E-3	1.99283E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-8.16464E-1	-7.98011E-1	-9.13162E0	-9.14176E0	5.98431E-3	9.34601E-2	2.72684E1	-3.26891E1	-3.25767E1	2.67974E1	1.69654E-7	2.5188E-3	2.5188E-3	6.29098E-3	1.98937E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09603E0	-8.16512E-1	-7.97844E-1	-9.13157E0	-9.14166E0	5.84126E-3	9.32217E-2	2.72606E1	-3.26669E1	-3.26086E1	2.68094E1	1.69725E-7	2.52384E-3	2.52384E-3	6.29128E-3	1.9917E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09619E0	-8.16441E-1	-7.97844E-1	-9.13136E0	-9.14168E0	5.57899E-3	9.32932E-2	2.72927E1	-3.27021E1	-3.26608E1	2.67884E1	1.69875E-7	2.52757E-3	2.52757E-3	6.31288E-3	1.9911E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09572E0	-8.16464E-1	-7.98035E-1	-9.13141E0	-9.14187E0	5.4121E-3	9.33886E-2	2.73113E1	-3.26791E1	-3.26095E1	2.67829E1	1.69581E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.9963E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09603E0	-8.16226E-1	-7.9813E-1	-9.13143E0	-9.14199E0	5.81741E-3	9.34362E-2	2.73273E1	-3.26993E1	-3.26032E1	2.68514E1	1.69707E-7	2.51802E-3	2.51802E-3	6.3074E-3	2.01222E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09595E0	-8.16464E-1	-7.97772E-1	-9.13165E0	-9.1419E0	5.38826E-3	9.33409E-2	2.73315E1	-3.26783E1	-3.26326E1	2.67878E1	1.69617E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.00586E-1
1.7E1	1.7E1	0.0E0	6.87E2	4.7E2	-2.09549E0	-8.15964E-1	-7.97772E-1	-9.13107E0	-9.14216E0	5.60284E-3	9.35316E-2	2.72967E1	-3.26549E1	-3.26206E1	2.68046E1					
1.8E1	9.7E1	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.16059E-1	-7.98154E-1	-9.13117E0	-9.1419E0	5.60284E-3	9.32932E-2	2.73016E1	-3.26608E1	-3.26178E1	2.67992E1	1.69728E-7	2.52099E-3	2.52099E-3	6.33486E-3	2.00325E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.16083E-1	-7.98106E-1	-9.13136E0	-9.14183E0	5.45979E-3	9.33409E-2	2.73424E1	-3.26591E1	-3.26438E1	2.6834E1	1.69943E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.00876E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.15988E-1	-7.97796E-1	-9.13103E0	-9.14166E0	5.74589E-3	9.32693E-2	2.7308E1	-3.26767E1	-3.26278E1	2.68064E1	1.69581E-7	2.51662E-3	2.51662E-3	6.32936E-3	1.99977E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-8.16345E-1	-7.97796E-1	-9.13086E0	-9.14192E0	5.79357E-3	9.35316E-2	2.73104E1	-3.26543E1	-3.26478E1	2.6774E1	1.69949E-7	2.52428E-3	2.52428E-3	6.32936E-3	2.00673E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.16298E-1	-7.97749E-1	-9.13088E0	-9.14164E0	5.76973E-3	9.37462E-2	2.72001E1	-3.25947E1	-3.2744E1	2.68442E1	1.69653E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.00363E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09642E0	-8.16512E-1	-7.98059E-1	-9.1311E0	-9.14192E0	5.93662E-3	9.34124E-2	2.73345E1	-3.2647E1	-3.26326E1	2.68298E1	1.6987E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.01047E-1