[Scan]
initial_time=2016-02-17T22:23:44
final_time=2016-02-17T22:24:05
ip_count=19
run=1032
dataset=9
scan=456
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08838E-4
ql1_vset=
ql1_vmon=-8.16536E-1
ql1_imon=1.36575E-8
ql2_vset=
ql2_vmon=-7.9813E-1
ql2_imon=1.94527E-9
ql3_vset=
ql3_vmon=-9.1315E0
ql3_imon=3.64685E-10
ql4_vset=
ql4_vmon=-9.14192E0
ql4_imon=4.17209E-10
mult1=-9.81263E-9
mult2=-2.75654E-9
rf_tmon=-4.67465E-3
rf_agc=3.28769E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.79357E-3
ql5_imon=1.62044E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67978E0
bslens_imon=2.44415E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19718E1
lens5a_imon=1.99076E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12505E2
lens4a_imon=2.04969E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53268E1
cs_ef1b_imon=3.04901E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04588E2
lens23_imon=1.02086E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04681E1
cs_ea1_imon=2.17622E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37138E0
lens1_imon=2.61405E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64602E1
os_ef1alow_imon=2.97405E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03696E1
cs_ea2_imon=1.56922E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84058E1
cs_ef1a_imon=3.01117E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=1.72493E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11352E1
os_restr1_imon=4.274E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15105E1
os_ea1_imon=2.1872E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63479E1
os_ef1bup_imon=3.07208E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23381E0
cs_ionrep_imon=1.27792E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.9348E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02194E1
cs_anode1_imon=3.26597E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20515E0
olens4_imon=3.68458E-8
tplens_vset=1.4E-1
tplens_vmon=1.61607E0
tplens_imon=-2.74111E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26404E1
iondef3_imon=1.49206E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26524E1
iondef2_imon=1.58585E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02983E2
lens6_imon=2.98689E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=4.08728E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29988E0
ionrepsh_imon=2.01624E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33663E1
lens5b_imon=2.20135E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74351E1
cs_ef2b_imon=3.11965E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.83669E0
os_ea2_imon=-6.59907E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06127E2
lens4b_imon=2.0058E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71678E1
cs_ef2a_imon=3.18416E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08279E0
os_ef2alow_imon=-2.64833E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.88124E-1
os_ef2bup_imon=-5.36933E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10805E1
os_restr2_imon=3.53122E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.30742E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01899E1
cs_anode2_imon=2.26803E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73105E1
iondef1_imon=1.08255E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6813E1
iondef4_imon=1.07152E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.09915E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82738E-1
olens1_imon=9.84876E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13014E0
cs_ionaccel_imon=-2.01043E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02057E2
cs_ionfocb_imon=1.47154E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56357E1
einzel_imon=7.69144E-6
window_vset=0.0E0
window_vmon=1.93917E-1
window_imon=-1.18152E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8264E2
mask1_imon=2.3903E-4
mask2_vset=0.0E0
mask2_vmon=-1.8602E1
mask2_imon=-6.04886E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92619E3
multa_neg_imon=7.74265E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.54279E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50157E3
multb_neg_imon=7.20112E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47643E0
defgridb_imon=6.21716E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33327E1
os_fil1_imon=9.58235E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07047E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64406E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30857E1
cs_fil1_imon=1.00523E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62168E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66642E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.78738E-2
os_fil2_imon=-2.62392E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97113E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.8154E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37679E-1
cs_fil2_imon=-2.47976E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.65919E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22504E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.00534E-1
chamber_ion_pmon=1.69725E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.3947E-1
res40_imon=-2.66996E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.2E1	0.0E0	1.47E2	4.1E1	-2.09572E0	-8.16488E-1	-7.97868E-1	-9.13162E0	-9.14197E0	5.48363E-3	9.32217E-2	2.73063E1	-3.26933E1	-3.26502E1	2.67914E1	1.69798E-7	2.52815E-3	2.52815E-3	6.30202E-3	1.9968E-1
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.0958E0	-8.16441E-1	-7.98059E-1	-9.13148E0	-9.14197E0	5.62668E-3	9.33409E-2	2.72811E1	-3.26951E1	-3.26224E1	2.67962E1	1.69794E-7	2.51498E-3	2.51498E-3	6.31798E-3	2.00735E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.16441E-1	-7.97915E-1	-9.13126E0	-9.14214E0	5.57899E-3	9.33409E-2	2.7321E1	-3.26885E1	-3.26366E1	2.6786E1	1.69806E-7	2.52027E-3	2.52027E-3	6.29624E-3	2.00818E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09603E0	-8.16035E-1	-7.98106E-1	-9.13153E0	-9.14228E0	5.24521E-3	9.33409E-2	2.73141E1	-3.26543E1	-3.26452E1	2.67798E1	1.69798E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.00192E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-8.16607E-1	-7.97939E-1	-9.13138E0	-9.14202E0	5.67436E-3	9.30309E-2	2.73169E1	-3.26543E1	-3.26408E1	2.67824E1	1.69725E-7	2.52169E-3	2.52169E-3	6.33977E-3	1.9985E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09572E0	-8.16679E-1	-7.97987E-1	-9.13136E0	-9.14204E0	5.76973E-3	9.35078E-2	2.73135E1	-3.26747E1	-3.2632E1	2.68058E1	1.69802E-7	2.51771E-3	2.51771E-3	6.32936E-3	1.99977E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.1656E-1	-7.98059E-1	-9.13157E0	-9.14216E0	5.74589E-3	9.27687E-2	2.72829E1	-3.26759E1	-3.26104E1	2.6813E1	1.69654E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.00325E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.16727E-1	-7.98035E-1	-9.13134E0	-9.14223E0	5.72205E-3	9.29594E-2	2.72727E1	-3.26543E1	-3.26134E1	2.67962E1	1.69798E-7	2.52707E-3	2.52707E-3	6.31817E-3	2.00705E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.16441E-1	-7.97868E-1	-9.13136E0	-9.14211E0	5.84126E-3	9.31263E-2	2.72927E1	-3.26602E1	-3.26396E1	2.68058E1	1.69728E-7	2.52099E-3	2.52099E-3	6.33486E-3	1.98592E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.16607E-1	-7.98035E-1	-9.13117E0	-9.14195E0	5.57899E-3	9.32693E-2	2.73033E1	-3.26843E1	-3.26188E1	2.67962E1	1.69581E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.97559E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.16345E-1	-7.98035E-1	-9.13141E0	-9.14216E0	5.60284E-3	9.30309E-2	2.73153E1	-3.26284E1	-3.26146E1	2.68064E1	1.69802E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.97903E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.1656E-1	-7.97963E-1	-9.13124E0	-9.14187E0	5.65052E-3	9.3174E-2	2.72769E1	-3.26615E1	-3.26368E1	2.6797E1	1.69802E-7	2.5188E-3	2.5188E-3	6.32936E-3	1.99456E-1
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.16345E-1	-7.97939E-1	-9.13122E0	-9.14226E0	5.79357E-3	9.32455E-2	2.73299E1	-3.26762E1	-3.26408E1	2.68064E1	1.69725E-7	2.52923E-3	2.52923E-3	6.3074E-3	1.9934E-1
1.7E1	1.2E1	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.16607E-1	-7.98035E-1	-9.13129E0	-9.14209E0	5.50747E-3	9.32693E-2	2.73015E1	-3.26807E1	-3.26344E1	2.6801E1	1.69802E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.00847E-1
1.8E1	8.4E1	0.0E0	7.27E2	5.0E2	-2.0958E0	-8.1656E-1	-7.9813E-1	-9.1311E0	-9.14199E0	5.74589E-3	9.31263E-2	2.73159E1	-3.2653E1	-3.26543E1	2.67956E1	1.69654E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.00499E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09627E0	-8.16655E-1	-7.98059E-1	-9.13148E0	-9.14199E0	5.6982E-3	9.3317E-2	2.73097E1	-3.26807E1	-3.26118E1	2.67908E1	1.69728E-7	2.51552E-3	2.51552E-3	6.34588E-3	1.99456E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09627E0	-8.16655E-1	-7.97963E-1	-9.13146E0	-9.14185E0	5.67436E-3	9.31501E-2	2.73183E1	-3.26861E1	-3.2635E1	2.68028E1	1.69581E-7	2.52466E-3	2.52466E-3	6.32273E-3	1.98532E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09611E0	-8.16607E-1	-7.98059E-1	-9.13184E0	-9.14178E0	6.07967E-3	9.32693E-2	2.72774E1	-3.26744E1	-3.26313E1	2.67659E1	1.69881E-7	2.52473E-3	2.52473E-3	6.31858E-3	1.99577E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.16679E-1	-7.98011E-1	-9.13167E0	-9.14183E0	5.91278E-3	9.32217E-2	2.72951E1	-3.26231E1	-3.25653E1	2.68178E1	1.69725E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.9951E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.16536E-1	-7.9813E-1	-9.1315E0	-9.14192E0	5.79357E-3	9.33886E-2	2.73105E1	-3.26524E1	-3.26404E1	2.6813E1	1.69725E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.00534E-1