[Scan]
initial_time=2016-02-17T22:26:40
final_time=2016-02-17T22:27:01
ip_count=19
run=1032
dataset=9
scan=462
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08819E-4
ql1_vset=
ql1_vmon=-8.15964E-1
ql1_imon=1.36577E-8
ql2_vset=
ql2_vmon=-7.98106E-1
ql2_imon=1.92122E-9
ql3_vset=
ql3_vmon=-9.1311E0
ql3_imon=2.9757E-10
ql4_vset=
ql4_vmon=-9.14207E0
ql4_imon=4.61566E-10
mult1=-1.00195E-8
mult2=-2.71346E-9
rf_tmon=-5.73647E-3
rf_agc=3.33209E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.43594E-3
ql5_imon=1.61343E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66193E0
bslens_imon=2.24936E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19935E1
lens5a_imon=2.00146E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12491E2
lens4a_imon=2.05017E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5349E1
cs_ef1b_imon=3.05406E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0459E2
lens23_imon=1.01959E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04856E1
cs_ea1_imon=2.19612E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37737E0
lens1_imon=2.32146E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64554E1
os_ef1alow_imon=2.97946E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03931E1
cs_ea2_imon=1.55877E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84352E1
cs_ef1a_imon=3.01045E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.72855E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11292E1
os_restr1_imon=4.27112E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15228E1
os_ea1_imon=2.18783E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63473E1
os_ef1bup_imon=3.08145E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25811E0
cs_ionrep_imon=1.27145E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.93517E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01995E1
cs_anode1_imon=3.26489E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=3.69935E-8
tplens_vset=1.4E-1
tplens_vmon=1.58676E0
tplens_imon=-3.42605E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2649E1
iondef3_imon=1.50686E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26443E1
iondef2_imon=1.60455E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02972E2
lens6_imon=2.98407E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=4.10699E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28755E0
ionrepsh_imon=2.02092E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34E1
lens5b_imon=2.18747E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7479E1
cs_ef2b_imon=3.11425E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.85112E0
os_ea2_imon=-6.05767E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.00504E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71816E1
cs_ef2a_imon=3.18705E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07618E0
os_ef2alow_imon=-2.72402E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.73107E-1
os_ef2bup_imon=-5.3405E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10901E1
os_restr2_imon=3.53339E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.30108E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01851E1
cs_anode2_imon=2.28425E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73246E1
iondef1_imon=1.08724E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68118E1
iondef4_imon=1.07909E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.10305E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82738E-1
olens1_imon=9.8459E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0947E0
cs_ionaccel_imon=-2.04647E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02092E2
cs_ionfocb_imon=1.471E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56075E1
einzel_imon=7.77434E-6
window_vset=0.0E0
window_vmon=1.8791E-1
window_imon=-1.22116E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82626E2
mask1_imon=2.39138E-4
mask2_vset=0.0E0
mask2_vmon=-1.85882E1
mask2_imon=-6.98589E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.60992E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93746E3
defgrida_imon=6.59693E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.17733E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52187E0
defgridb_imon=6.25446E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33287E1
os_fil1_imon=9.58698E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07203E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64428E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3084E1
cs_fil1_imon=1.0055E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62276E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6634E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.6223E-2
os_fil2_imon=-2.64795E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.05523E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.71722E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36902E-1
cs_fil2_imon=-2.6059E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.83939E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22469E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32099E-3
inlet_lpb_pmon=2.00171E-1
chamber_ion_pmon=1.69727E-7
chamber_cvt_pmon=2.51863E-3
foreline_cvt_pmon=2.51863E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.31371E-1
res40_imon=-2.65194E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	7.0E0	0.0E0	1.47E2	4.1E1	-2.0965E0	-8.16107E-1	-7.98035E-1	-9.13124E0	-9.14207E0	5.74589E-3	9.33647E-2	2.73057E1	-3.26747E1	-3.26657E1	2.67966E1	1.6987E-7	2.51847E-3	2.51847E-3	6.29128E-3	2.00021E-1
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.16059E-1	-7.9782E-1	-9.13129E0	-9.14197E0	5.57899E-3	9.31978E-2	2.73287E1	-3.26891E1	-3.26113E1	2.67974E1	1.69581E-7	2.51771E-3	2.51771E-3	6.33486E-3	1.9963E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.16035E-1	-7.98202E-1	-9.13117E0	-9.14185E0	5.65052E-3	9.31025E-2	2.72973E1	-3.26536E1	-3.26164E1	2.68004E1	1.69725E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.00534E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.16154E-1	-7.97939E-1	-9.13107E0	-9.14214E0	5.45979E-3	9.32217E-2	2.73128E1	-3.26602E1	-3.26325E1	2.68058E1	1.69728E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.9911E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.15916E-1	-7.97939E-1	-9.13107E0	-9.14202E0	5.74589E-3	9.32217E-2	2.73183E1	-3.26627E1	-3.26182E1	2.6813E1	1.69654E-7	2.52209E-3	2.52209E-3	6.29645E-3	1.99977E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.16202E-1	-7.97677E-1	-9.13117E0	-9.14202E0	5.29289E-3	9.32455E-2	2.72895E1	-3.26579E1	-3.2647E1	2.6801E1	1.69798E-7	2.52276E-3	2.52276E-3	6.32896E-3	2.00021E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.16274E-1	-7.97749E-1	-9.13098E0	-9.14199E0	5.8651E-3	9.28402E-2	2.72979E1	-3.26759E1	-3.26284E1	2.67989E1	1.69875E-7	2.5199E-3	2.5199E-3	6.29645E-3	1.9911E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.16321E-1	-7.97606E-1	-9.131E0	-9.14202E0	5.57899E-3	9.29594E-2	2.72768E1	-3.26785E1	-3.26555E1	2.681E1	1.69654E-7	2.51334E-3	2.51334E-3	6.31837E-3	2.00499E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.16417E-1	-7.97796E-1	-9.13098E0	-9.14197E0	5.55515E-3	9.30786E-2	2.73123E1	-3.26494E1	-3.26086E1	2.67932E1	1.69725E-7	2.52384E-3	2.52384E-3	6.32356E-3	1.9951E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09588E0	-8.16417E-1	-7.97796E-1	-9.13107E0	-9.14223E0	5.43594E-3	9.32455E-2	2.73216E1	-3.2698E1	-3.26496E1	2.67956E1	1.69728E-7	2.5199E-3	2.5199E-3	6.29645E-3	1.99283E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09572E0	-8.16202E-1	-7.97629E-1	-9.13107E0	-9.14226E0	5.8651E-3	9.31263E-2	2.7324E1	-3.27074E1	-3.26461E1	2.68082E1	1.69943E-7	2.52169E-3	2.52169E-3	6.31817E-3	1.9985E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.16298E-1	-7.97844E-1	-9.13091E0	-9.1423E0	5.65052E-3	9.32932E-2	2.73094E1	-3.2648E1	-3.2675E1	2.67932E1	1.69581E-7	2.51203E-3	2.51203E-3	6.33436E-3	1.9917E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.16369E-1	-7.98297E-1	-9.13146E0	-9.14218E0	5.6982E-3	9.29832E-2	2.72815E1	-3.26921E1	-3.26231E1	2.68082E1	1.69731E-7	2.51693E-3	2.51693E-3	6.33538E-3	1.98872E-1
1.7E1	1.5E1	0.0E0	6.87E2	4.7E2	-2.09379E0	-8.16607E-1	-7.98249E-1	-9.13129E0	-9.14199E0	5.60284E-3	9.31978E-2	2.73541E1	-3.26585E1	-3.26349E1	2.67974E1	1.69798E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.00876E-1
1.8E1	9.1E1	0.0E0	7.27E2	5.0E2	-2.09387E0	-8.16202E-1	-7.98202E-1	-9.13112E0	-9.14185E0	5.67436E-3	9.2864E-2	2.73219E1	-3.26585E1	-3.26554E1	2.68052E1	1.69798E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.00363E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09348E0	-8.1625E-1	-7.98345E-1	-9.13117E0	-9.14192E0	5.91278E-3	9.29117E-2	2.72919E1	-3.26759E1	-3.26116E1	2.67908E1	1.69654E-7	2.51443E-3	2.51443E-3	6.32386E-3	1.9963E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.15988E-1	-7.98273E-1	-9.13112E0	-9.14178E0	5.79357E-3	9.31501E-2	2.72868E1	-3.26537E1	-3.26372E1	2.67972E1	1.69654E-7	2.52428E-3	2.52428E-3	6.32936E-3	1.98937E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.16226E-1	-7.98225E-1	-9.13131E0	-9.14204E0	5.6982E-3	9.33647E-2	2.73116E1	-3.26484E1	-3.25824E1	2.68142E1	1.69654E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.98764E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.15868E-1	-7.98273E-1	-9.13115E0	-9.14195E0	5.43594E-3	9.31263E-2	2.73273E1	-3.26765E1	-3.26609E1	2.68117E1	1.69723E-7	2.52342E-3	2.52342E-3	6.31798E-3	2.00231E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.15964E-1	-7.98106E-1	-9.1311E0	-9.14207E0	5.43594E-3	9.31263E-2	2.73246E1	-3.26443E1	-3.2649E1	2.68118E1	1.69727E-7	2.51863E-3	2.51863E-3	6.32099E-3	2.00171E-1