[Scan]
initial_time=2016-02-17T22:27:08
final_time=2016-02-17T22:27:30
ip_count=19
run=1032
dataset=9
scan=463
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08806E-4
ql1_vset=
ql1_vmon=-8.16321E-1
ql1_imon=1.36753E-8
ql2_vset=
ql2_vmon=-7.98106E-1
ql2_imon=1.98973E-9
ql3_vset=
ql3_vmon=-9.13155E0
ql3_imon=3.71099E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=4.13704E-10
mult1=-1.00313E-8
mult2=-2.72914E-9
rf_tmon=-4.30891E-3
rf_agc=3.36218E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.6982E-3
ql5_imon=1.64202E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64439E0
bslens_imon=2.64944E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20054E1
lens5a_imon=1.972E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12524E2
lens4a_imon=2.05072E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53634E1
cs_ef1b_imon=3.04108E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.02174E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04846E1
cs_ea1_imon=2.17127E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40382E0
lens1_imon=2.53264E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64452E1
os_ef1alow_imon=2.98306E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03909E1
cs_ea2_imon=1.54338E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8428E1
cs_ef1a_imon=3.01189E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.72602E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11093E1
os_restr1_imon=4.26896E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15188E1
os_ea1_imon=2.18047E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63461E1
os_ef1bup_imon=3.08325E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23145E0
cs_ionrep_imon=1.25421E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93409E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01767E1
cs_anode1_imon=3.26849E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20587E0
olens4_imon=3.69463E-8
tplens_vset=1.4E-1
tplens_vmon=1.56829E0
tplens_imon=-4.15688E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26478E1
iondef3_imon=1.49064E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26561E1
iondef2_imon=1.57771E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02916E2
lens6_imon=2.98314E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=4.08198E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26036E0
ionrepsh_imon=2.01235E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33551E1
lens5b_imon=2.19003E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74627E1
cs_ef2b_imon=3.12902E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.84495E0
os_ea2_imon=-8.8289E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0615E2
lens4b_imon=2.00559E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71318E1
cs_ef2a_imon=3.17083E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08159E0
os_ef2alow_imon=-2.74925E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-4.0314E-1
os_ef2bup_imon=-5.37293E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10973E1
os_restr2_imon=3.54564E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.31202E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01905E1
cs_anode2_imon=2.28101E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73086E1
iondef1_imon=1.0829E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67962E1
iondef4_imon=1.07512E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.10253E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=9.8437E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13735E0
cs_ionaccel_imon=-2.10414E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47251E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56531E1
einzel_imon=7.63378E-6
window_vset=0.0E0
window_vmon=1.86709E-1
window_imon=-1.02655E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82624E2
mask1_imon=2.39268E-4
mask2_vset=0.0E0
mask2_vmon=-1.86308E1
mask2_imon=-7.995E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.97625E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.74808E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50145E3
multb_neg_imon=7.1905E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.55911E0
defgridb_imon=5.94109E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33315E1
os_fil1_imon=9.58986E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07065E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64621E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30852E1
cs_fil1_imon=1.00631E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6236E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66359E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.90135E-2
os_fil2_imon=-2.68999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9411E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.80654E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36126E-1
cs_fil2_imon=-2.46174E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.37998E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22449E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=1.98153E-1
chamber_ion_pmon=1.69581E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.28969E-1
res40_imon=-2.58707E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.16131E-1	-7.97844E-1	-9.13138E0	-9.14202E0	5.36442E-3	9.29117E-2	2.73159E1	-3.26404E1	-3.26398E1	2.68105E1	1.6987E-7	2.51525E-3	2.51525E-3	6.32896E-3	1.99E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.1594E-1	-7.97844E-1	-9.1316E0	-9.14223E0	5.24521E-3	9.31978E-2	2.72996E1	-3.26762E1	-3.26272E1	2.6782E1	1.69949E-7	2.51662E-3	2.51662E-3	6.29098E-3	1.99803E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.1594E-1	-7.97749E-1	-9.13136E0	-9.14214E0	5.43594E-3	9.30309E-2	2.73213E1	-3.26631E1	-3.26318E1	2.68105E1	1.69881E-7	2.51359E-3	2.51359E-3	6.31858E-3	2.00108E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.16131E-1	-7.97725E-1	-9.13098E0	-9.14223E0	5.55515E-3	9.31025E-2	2.73171E1	-3.26392E1	-3.26236E1	2.68118E1	1.69652E-7	2.51814E-3	2.51814E-3	6.32328E-3	2.00399E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.16369E-1	-7.97725E-1	-9.13165E0	-9.14233E0	5.48363E-3	9.32693E-2	2.73309E1	-3.2626E1	-3.26266E1	2.6792E1	1.70023E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.9963E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-8.16369E-1	-7.97892E-1	-9.13155E0	-9.14207E0	5.53131E-3	9.33886E-2	2.72957E1	-3.26626E1	-3.26366E1	2.67998E1	1.69728E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.98247E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.16154E-1	-7.97915E-1	-9.13155E0	-9.14233E0	5.72205E-3	9.34362E-2	2.73231E1	-3.26831E1	-3.26056E1	2.68088E1	1.69725E-7	2.51203E-3	2.51203E-3	6.33436E-3	1.97478E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09379E0	-8.15845E-1	-7.97749E-1	-9.13119E0	-9.14168E0	5.93662E-3	9.35078E-2	2.73261E1	-3.26494E1	-3.2647E1	2.67953E1	1.69949E-7	2.52538E-3	2.52538E-3	6.32386E-3	1.98247E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.16035E-1	-7.97844E-1	-9.13138E0	-9.14199E0	6.07967E-3	9.33409E-2	2.73213E1	-3.26681E1	-3.26044E1	2.68088E1	1.69765E-7	2.52373E-3	2.52373E-3	6.30466E-3	1.9963E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.16059E-1	-7.97987E-1	-9.13165E0	-9.14214E0	5.74589E-3	9.33886E-2	2.73346E1	-3.2695E1	-3.26732E1	2.67896E1					
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09441E0	-8.16131E-1	-7.97701E-1	-9.13143E0	-9.14202E0	5.81741E-3	9.30786E-2	2.73502E1	-3.26627E1	-3.25695E1	2.67998E1	1.6987E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.00876E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-8.16059E-1	-7.9751E-1	-9.13177E0	-9.14204E0	5.60284E-3	9.33409E-2	2.73039E1	-3.26512E1	-3.26248E1	2.67992E1	1.69875E-7	2.5188E-3	2.5188E-3	6.34037E-3	2.00151E-1
1.6E1	3.0E0	0.0E0	6.47E2	4.41E2	-2.09402E0	-8.1625E-1	-7.97939E-1	-9.13143E0	-9.14159E0	5.43594E-3	9.30548E-2	2.73249E1	-3.27137E1	-3.25894E1	2.67914E1	1.70023E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.00847E-1
1.7E1	1.9E1	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.16274E-1	-7.97892E-1	-9.13138E0	-9.14195E0	5.38826E-3	9.31263E-2	2.73273E1	-3.26807E1	-3.26176E1	2.68202E1	1.69949E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.99977E-1
1.8E1	9.6E1	2.0E0	7.27E2	5.0E2	-2.09526E0	-8.1625E-1	-7.98106E-1	-9.13117E0	-9.14214E0	5.65052E-3	9.30309E-2	2.73189E1	-3.26536E1	-3.26188E1	2.67764E1	1.69728E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.00673E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.16321E-1	-7.98035E-1	-9.13136E0	-9.14218E0	5.98431E-3	9.31025E-2	2.72811E1	-3.26482E1	-3.26368E1	2.68064E1	1.69728E-7	2.52318E-3	2.52318E-3	6.31837E-3	2.00499E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.16226E-1	-7.98011E-1	-9.13134E0	-9.14197E0	5.62668E-3	9.31025E-2	2.73135E1	-3.26999E1	-3.26074E1	2.67601E1	1.69728E-7	2.51225E-3	2.51225E-3	6.33486E-3	1.98764E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.16226E-1	-7.98154E-1	-9.13141E0	-9.14221E0	5.91278E-3	9.30548E-2	2.73228E1	-3.26862E1	-3.26413E1	2.68012E1	1.69875E-7	2.52538E-3	2.52538E-3	6.32386E-3	1.99803E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.16226E-1	-7.97963E-1	-9.13146E0	-9.14176E0	5.98431E-3	9.30309E-2	2.7298E1	-3.26762E1	-3.26384E1	2.68028E1	1.69725E-7	2.52276E-3	2.52276E-3	6.31278E-3	1.9934E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.16321E-1	-7.98106E-1	-9.13155E0	-9.14195E0	5.6982E-3	9.3317E-2	2.73086E1	-3.26561E1	-3.26478E1	2.67962E1	1.69581E-7	2.52169E-3	2.52169E-3	6.31278E-3	1.98153E-1