[Scan]
initial_time=2016-02-17T22:28:35
final_time=2016-02-17T22:28:56
ip_count=19
run=1032
dataset=9
scan=466
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09603E0
qbias_imon=-1.08806E-4
ql1_vset=
ql1_vmon=-8.16011E-1
ql1_imon=1.36332E-8
ql2_vset=
ql2_vmon=-7.97915E-1
ql2_imon=1.94874E-9
ql3_vset=
ql3_vmon=-9.13131E0
ql3_imon=3.0961E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=4.35543E-10
mult1=-9.76447E-9
mult2=-2.7226E-9
rf_tmon=-4.08584E-3
rf_agc=3.30752E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=1.57458E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67978E0
bslens_imon=2.62113E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20332E1
lens5a_imon=1.99713E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12488E2
lens4a_imon=2.04874E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53965E1
cs_ef1b_imon=3.06451E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04619E2
lens23_imon=1.02139E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05077E1
cs_ea1_imon=2.18684E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37728E0
lens1_imon=2.43708E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64554E1
os_ef1alow_imon=2.9791E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04192E1
cs_ea2_imon=1.55789E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84286E1
cs_ef1a_imon=3.00865E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=1.72981E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11111E1
os_restr1_imon=4.26319E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15129E1
os_ea1_imon=2.19428E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63629E1
os_ef1bup_imon=3.07929E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25918E0
cs_ionrep_imon=1.26589E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91889E2
cs_nozzle_imon=1.93385E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01761E1
cs_anode1_imon=3.26994E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20542E0
olens4_imon=3.68766E-8
tplens_vset=1.4E-1
tplens_vmon=1.61135E0
tplens_imon=-1.43153E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26392E1
iondef3_imon=1.48569E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26591E1
iondef2_imon=1.57488E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02953E2
lens6_imon=2.98498E-4
ql6_vset=1.0E-1
ql6_vmon=9.30786E-2
ql6_imon=4.14089E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28867E0
ionrepsh_imon=2.01023E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33646E1
lens5b_imon=2.17729E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74423E1
cs_ef2b_imon=3.12037E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.86324E0
os_ea2_imon=-5.67882E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06157E2
lens4b_imon=2.00598E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71059E1
cs_ef2a_imon=3.17263E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09E0
os_ef2alow_imon=-2.7096E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.5749E-1
os_ef2bup_imon=-5.32969E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10715E1
os_restr2_imon=3.54059E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.30848E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01917E1
cs_anode2_imon=2.28101E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73003E1
iondef1_imon=1.09246E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6783E1
iondef4_imon=1.08557E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.10108E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82833E-1
olens1_imon=9.85263E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12353E0
cs_ionaccel_imon=-1.97079E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02097E2
cs_ionfocb_imon=1.47187E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56255E1
einzel_imon=7.73469E-6
window_vset=0.0E0
window_vmon=1.91514E-1
window_imon=-1.09863E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.39106E-4
mask2_vset=0.0E0
mask2_vmon=-1.85845E1
mask2_imon=-7.23817E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.49489E-5
defgrida_vset=2.902E3
defgrida_vmon=2.937E3
defgrida_imon=6.63835E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50153E3
multb_neg_imon=7.16573E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43508E0
defgridb_imon=5.95525E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33277E1
os_fil1_imon=9.59575E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06993E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64394E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30774E1
cs_fil1_imon=1.00704E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62282E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66369E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.7494E-2
os_fil2_imon=-2.77409E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.77292E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.87614E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34831E-1
cs_fil2_imon=-2.58788E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.98064E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22555E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=1.99E-1
chamber_ion_pmon=1.69581E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.88724E-1
res40_imon=-2.67356E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.1625E-1	-7.97749E-1	-9.13146E0	-9.14185E0	5.6982E-3	9.30548E-2	2.73099E1	-3.26711E1	-3.26116E1	2.67956E1	1.6987E-7	2.51954E-3	2.51954E-3	6.32896E-3	1.9917E-1
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.09565E0	-8.16035E-1	-7.97629E-1	-9.13126E0	-9.14176E0	5.72205E-3	9.28402E-2	2.72925E1	-3.26825E1	-3.26068E1	2.67956E1	1.69943E-7	2.52276E-3	2.52276E-3	6.35059E-3	2.01219E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.15821E-1	-7.97939E-1	-9.13141E0	-9.14211E0	5.6982E-3	9.2864E-2	2.73033E1	-3.26549E1	-3.26331E1	2.68034E1	1.69581E-7	2.52139E-3	2.52139E-3	6.30182E-3	2.00285E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.16011E-1	-7.98059E-1	-9.1316E0	-9.14226E0	5.45979E-3	9.26495E-2	2.72967E1	-3.26597E1	-3.26218E1	2.67978E1	1.69725E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.00876E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09595E0	-8.15964E-1	-7.98035E-1	-9.13122E0	-9.14223E0	5.4121E-3	9.2721E-2	2.73363E1	-3.26729E1	-3.26146E1	2.67962E1	1.69875E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.00499E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.16178E-1	-7.98011E-1	-9.1316E0	-9.14242E0	5.53131E-3	9.27925E-2	2.72837E1	-3.26419E1	-3.26413E1	2.68113E1	1.69507E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.00499E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.16441E-1	-7.97725E-1	-9.13146E0	-9.14214E0	5.57899E-3	9.29832E-2	2.73327E1	-3.26669E1	-3.25882E1	2.68136E1	1.69731E-7	2.5147E-3	2.5147E-3	6.29067E-3	2.00285E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.1625E-1	-7.98202E-1	-9.13148E0	-9.14202E0	5.84126E-3	9.29832E-2	2.72797E1	-3.26809E1	-3.26608E1	2.68094E1	1.69581E-7	2.52757E-3	2.52757E-3	6.3074E-3	2.00325E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-8.16059E-1	-7.98202E-1	-9.13131E0	-9.14197E0	5.74589E-3	9.27925E-2	2.72863E1	-3.26613E1	-3.2597E1	2.68082E1	1.69581E-7	2.52342E-3	2.52342E-3	6.33388E-3	1.99227E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09595E0	-8.16131E-1	-7.97987E-1	-9.13105E0	-9.14211E0	5.79357E-3	9.29356E-2	2.73118E1	-3.26658E1	-3.26346E1	2.67945E1	1.69936E-7	2.52025E-3	2.52025E-3	6.32328E-3	1.99061E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09634E0	-8.16083E-1	-7.97796E-1	-9.13138E0	-9.14178E0	5.6982E-3	9.32217E-2	2.72794E1	-3.26578E1	-3.27129E1	2.67926E1	1.69806E-7	2.51804E-3	2.51804E-3	6.29624E-3	1.97994E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09611E0	-8.16154E-1	-7.97796E-1	-9.13136E0	-9.1419E0	5.38826E-3	9.31263E-2	2.73134E1	-3.26797E1	-3.26413E1	2.68004E1	1.69728E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.99977E-1
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.0965E0	-8.16321E-1	-7.97653E-1	-9.13141E0	-9.14178E0	5.65052E-3	9.29832E-2	2.73237E1	-3.26482E1	-3.26044E1	2.67938E1	1.69802E-7	2.51007E-3	2.51007E-3	6.31288E-3	2.00499E-1
1.7E1	2.6E1	0.0E0	6.87E2	4.7E2	-2.09565E0	-8.1625E-1	-7.97653E-1	-9.13129E0	-9.14216E0	5.50747E-3	9.30786E-2	2.73334E1	-3.26685E1	-3.26467E1	2.68157E1	1.69654E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.9911E-1
1.8E1	9.3E1	0.0E0	7.27E2	5.0E2	-2.09603E0	-8.16178E-1	-7.97677E-1	-9.13103E0	-9.14199E0	5.45979E-3	9.2864E-2	2.73057E1	-3.26799E1	-3.26376E1	2.68146E1	1.69865E-7	2.51867E-3	2.51867E-3	6.32063E-3	1.98561E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.1625E-1	-7.97606E-1	-9.13098E0	-9.14211E0	5.50747E-3	9.31501E-2	2.73171E1	-3.26627E1	-3.2632E1	2.68004E1					
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09549E0	-8.16178E-1	-7.98059E-1	-9.13138E0	-9.14214E0	5.31673E-3	9.32455E-2	2.73111E1	-3.26747E1	-3.26404E1	2.67914E1	1.69656E-7	2.51581E-3	2.51581E-3	6.3074E-3	1.99401E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09657E0	-8.15821E-1	-7.97844E-1	-9.1316E0	-9.14228E0	5.72205E-3	9.31978E-2	2.72986E1	-3.27003E1	-3.2639E1	2.681E1	1.69581E-7	2.51954E-3	2.51954E-3	6.32356E-3	1.9985E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09627E0	-8.16035E-1	-7.97915E-1	-9.13177E0	-9.14226E0	5.48363E-3	9.31025E-2	2.73151E1	-3.26296E1	-3.26148E1	2.6807E1	1.69581E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.99977E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09603E0	-8.16011E-1	-7.97915E-1	-9.13131E0	-9.14199E0	5.48363E-3	9.30786E-2	2.73003E1	-3.26591E1	-3.26392E1	2.6783E1	1.69581E-7	2.51847E-3	2.51847E-3	6.32356E-3	1.99E-1