[Scan]
initial_time=2016-02-17T22:29:33
final_time=2016-02-17T22:29:54
ip_count=19
run=1032
dataset=9
scan=468
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08756E-4
ql1_vset=
ql1_vmon=-8.15988E-1
ql1_imon=1.36869E-8
ql2_vset=
ql2_vmon=-7.98345E-1
ql2_imon=1.92198E-9
ql3_vset=
ql3_vmon=-9.13143E0
ql3_imon=2.88069E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=4.26745E-10
mult1=-1.00047E-8
mult2=-2.69239E-9
rf_tmon=-3.91515E-3
rf_agc=3.45759E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.36442E-3
ql5_imon=1.59259E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66107E0
bslens_imon=2.56247E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19816E1
lens5a_imon=1.99748E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12474E2
lens4a_imon=2.05326E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53719E1
cs_ef1b_imon=3.05446E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04596E2
lens23_imon=1.02031E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05081E1
cs_ea1_imon=2.17928E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38357E0
lens1_imon=2.67719E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64435E1
os_ef1alow_imon=2.97244E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0354E1
cs_ea2_imon=1.57338E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84284E1
cs_ef1a_imon=3.01032E-5
olens2_vset=9.7E-1
olens2_vmon=9.70578E-1
olens2_imon=1.7269E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11268E1
os_restr1_imon=4.28087E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15752E1
os_ea1_imon=2.19875E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63548E1
os_ef1bup_imon=3.08226E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20227E0
cs_ionrep_imon=1.26887E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91911E2
cs_nozzle_imon=1.93333E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01919E1
cs_anode1_imon=3.27896E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20577E0
olens4_imon=3.70071E-8
tplens_vset=1.4E-1
tplens_vmon=1.58987E0
tplens_imon=-3.36683E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26393E1
iondef3_imon=1.49621E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26614E1
iondef2_imon=1.564E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02973E2
lens6_imon=2.98349E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=4.07692E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27585E0
ionrepsh_imon=2.0232E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33698E1
lens5b_imon=2.1765E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74507E1
cs_ef2b_imon=3.12188E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.85754E0
os_ea2_imon=-5.00065E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0613E2
lens4b_imon=2.00539E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71356E1
cs_ef2a_imon=3.17748E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05282E0
os_ef2alow_imon=-2.68927E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.58048E-1
os_ef2bup_imon=-5.41734E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10984E1
os_restr2_imon=3.53404E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23049E2
cs_ionfoca_imon=6.31388E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01867E1
cs_anode2_imon=2.28712E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73302E1
iondef1_imon=1.08532E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68207E1
iondef4_imon=1.07009E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.10095E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=9.86071E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11334E0
cs_ionaccel_imon=-1.96641E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02051E2
cs_ionfocb_imon=1.47112E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56463E1
einzel_imon=7.84075E-6
window_vset=0.0E0
window_vmon=1.92201E-1
window_imon=-1.16015E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39143E-4
mask2_vset=0.0E0
mask2_vmon=-1.85829E1
mask2_imon=-5.79787E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.63773E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.5462E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=6.92511E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3688E0
defgridb_imon=6.26811E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33249E1
os_fil1_imon=9.57775E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07329E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64426E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30785E1
cs_fil1_imon=1.00598E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62117E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66388E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.82221E-2
os_fil2_imon=-2.70394E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.05716E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.89266E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37018E-1
cs_fil2_imon=-2.13631E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.3077E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22479E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=1.9985E-1
chamber_ion_pmon=1.69943E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.37399E-1
res40_imon=-2.54331E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=205
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.16178E-1	-7.98035E-1	-9.13143E0	-9.14207E0	5.74589E-3	9.34601E-2	2.73257E1	-3.26678E1	-3.26266E1	2.68334E1	1.69794E-7	2.51603E-3	2.51603E-3	6.30212E-3	2.01072E-1
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.09565E0	-8.16131E-1	-7.9813E-1	-9.13141E0	-9.14192E0	5.24521E-3	9.34124E-2	2.73265E1	-3.26695E1	-3.2645E1	2.68082E1	1.69806E-7	2.51804E-3	2.51804E-3	6.31299E-3	1.99224E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-8.16154E-1	-7.98154E-1	-9.13153E0	-9.14197E0	5.31673E-3	9.30309E-2	2.72892E1	-3.26626E1	-3.26384E1	2.68442E1	1.6981E-7	2.52066E-3	2.52066E-3	6.33592E-3	1.99523E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09426E0	-8.16131E-1	-7.97963E-1	-9.13148E0	-9.14199E0	5.38826E-3	9.32217E-2	2.73151E1	-3.26832E1	-3.26065E1	2.67839E1	1.70088E-7	2.5131E-3	2.5131E-3	6.32896E-3	1.99E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09364E0	-8.16035E-1	-7.97701E-1	-9.13107E0	-9.1419E0	5.62668E-3	9.3317E-2	2.73099E1	-3.26452E1	-3.26416E1	2.68034E1	1.69865E-7	2.52448E-3	2.52448E-3	6.3074E-3	1.99394E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-8.16035E-1	-7.97606E-1	-9.13129E0	-9.1419E0	5.60284E-3	9.3174E-2	2.73045E1	-3.26843E1	-3.26326E1	2.68022E1	1.69802E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.9963E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.16488E-1	-7.97796E-1	-9.13136E0	-9.14192E0	5.65052E-3	9.33647E-2	2.73305E1	-3.26708E1	-3.26301E1	2.67854E1	1.69802E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.98937E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.16321E-1	-7.97892E-1	-9.13141E0	-9.14187E0	5.65052E-3	9.32217E-2	2.73003E1	-3.26627E1	-3.2629E1	2.68082E1	1.69802E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.9911E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.16154E-1	-7.9813E-1	-9.13146E0	-9.14168E0	5.6982E-3	9.31025E-2	2.73181E1	-3.26537E1	-3.26484E1	2.67932E1	1.69798E-7	2.52061E-3	2.52061E-3	6.31278E-3	1.99E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.16369E-1	-7.98106E-1	-9.13129E0	-9.14197E0	5.50747E-3	9.2864E-2	2.73351E1	-3.26621E1	-3.26236E1	2.6783E1	1.69728E-7	2.52209E-3	2.52209E-3	6.32386E-3	1.98937E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.16226E-1	-7.97582E-1	-9.13122E0	-9.1418E0	5.91278E-3	9.31025E-2	2.73147E1	-3.26428E1	-3.25785E1	2.68118E1	1.69949E-7	2.52318E-3	2.52318E-3	6.31837E-3	1.98592E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0941E0	-8.15916E-1	-7.97987E-1	-9.13143E0	-9.14161E0	5.74589E-3	9.33886E-2	2.72817E1	-3.26675E1	-3.26302E1	2.67776E1	1.69653E-7	2.52061E-3	2.52061E-3	6.29665E-3	1.9951E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09433E0	-8.15678E-1	-7.97915E-1	-9.13141E0	-9.14195E0	5.67436E-3	9.35078E-2	2.7298E1	-3.26673E1	-3.26508E1	2.68059E1	1.69875E-7	2.51225E-3	2.51225E-3	6.29098E-3	1.99283E-1
1.7E1	3.1E1	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.1594E-1	-7.97796E-1	-9.13143E0	-9.14159E0	5.67436E-3	9.3174E-2	2.72786E1	-3.26579E1	-3.26508E1	2.67938E1	1.69653E-7	2.51954E-3	2.51954E-3	6.3074E-3	1.9883E-1
1.8E1	1.13E2	0.0E0	7.27E2	5.0E2	-2.09433E0	-8.15988E-1	-7.97725E-1	-9.13124E0	-9.14178E0	5.91278E-3	9.32455E-2	2.73498E1	-3.26621E1	-3.26566E1	2.67848E1	1.69802E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.00499E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.16464E-1	-7.97892E-1	-9.13117E0	-9.14192E0	5.79357E-3	9.32217E-2	2.7337E1	-3.2675E1	-3.26408E1	2.68304E1	1.69875E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.99977E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.1625E-1	-7.97558E-1	-9.13117E0	-9.14178E0	5.60284E-3	9.36031E-2	2.73468E1	-3.26847E1	-3.26646E1	2.68066E1	1.69654E-7	2.5199E-3	2.5199E-3	6.29645E-3	1.99977E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.16345E-1	-7.97892E-1	-9.13136E0	-9.14183E0	5.79357E-3	9.33647E-2	2.73159E1	-3.26858E1	-3.26271E1	2.6797E1	1.69644E-7	2.51709E-3	2.51709E-3	6.3074E-3	2.01072E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.16178E-1	-7.98082E-1	-9.1315E0	-9.1419E0	5.53131E-3	9.33647E-2	2.72871E1	-3.26863E1	-3.26509E1	2.67978E1	1.69855E-7	2.51549E-3	2.51549E-3	6.32273E-3	1.99821E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.15988E-1	-7.98345E-1	-9.13143E0	-9.14202E0	5.36442E-3	9.32693E-2	2.73302E1	-3.26614E1	-3.26393E1	2.68207E1	1.69943E-7	2.51739E-3	2.51739E-3	6.33436E-3	1.9985E-1