[Scan]
initial_time=2016-02-17T22:30:31
final_time=2016-02-17T22:30:52
ip_count=19
run=1032
dataset=9
scan=470
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.0879E-4
ql1_vset=
ql1_vmon=-8.16154E-1
ql1_imon=1.36841E-8
ql2_vset=
ql2_vmon=-7.97796E-1
ql2_imon=1.97819E-9
ql3_vset=
ql3_vmon=-9.13146E0
ql3_imon=3.22366E-10
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=4.21667E-10
mult1=-9.63202E-9
mult2=-2.65673E-9
rf_tmon=-5.40765E-3
rf_agc=3.22461E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.53131E-3
ql5_imon=1.62848E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68056E0
bslens_imon=2.47647E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19682E1
lens5a_imon=1.98451E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12534E2
lens4a_imon=2.04985E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54097E1
cs_ef1b_imon=3.07316E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.02135E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04982E1
cs_ea1_imon=2.17197E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36715E0
lens1_imon=2.61346E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64698E1
os_ef1alow_imon=2.96396E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04129E1
cs_ea2_imon=1.56057E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84442E1
cs_ef1a_imon=3.01442E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.72634E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11298E1
os_restr1_imon=4.25166E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15035E1
os_ea1_imon=2.17197E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63539E1
os_ef1bup_imon=3.09334E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23588E0
cs_ionrep_imon=1.24225E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91889E2
cs_nozzle_imon=1.93388E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01917E1
cs_anode1_imon=3.26633E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20558E0
olens4_imon=3.70045E-8
tplens_vset=1.4E-1
tplens_vmon=1.57294E0
tplens_imon=-1.69568E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2632E1
iondef3_imon=1.51082E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26543E1
iondef2_imon=1.59013E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02987E2
lens6_imon=2.98422E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=4.09626E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2545E0
ionrepsh_imon=2.03498E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34054E1
lens5b_imon=2.1781E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74405E1
cs_ef2b_imon=3.12758E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.84091E0
os_ea2_imon=-5.87742E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06134E2
lens4b_imon=2.00561E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7124E1
cs_ef2a_imon=3.17227E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10381E0
os_ef2alow_imon=-2.54742E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.97734E-1
os_ef2bup_imon=-5.40177E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10559E1
os_restr2_imon=3.53699E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.30829E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01719E1
cs_anode2_imon=2.26912E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73075E1
iondef1_imon=1.08291E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67842E1
iondef4_imon=1.09458E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=1.10395E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82714E-1
olens1_imon=9.85436E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12954E0
cs_ionaccel_imon=-2.21225E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.47342E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56327E1
einzel_imon=7.49323E-6
window_vset=0.0E0
window_vmon=1.84907E-1
window_imon=-9.79699E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.3907E-4
mask2_vset=0.0E0
mask2_vmon=-1.86062E1
mask2_imon=-6.48134E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=7.71807E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.40587E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.07639E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41059E0
defgridb_imon=6.05258E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33256E1
os_fil1_imon=9.60428E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07161E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64273E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30791E1
cs_fil1_imon=1.00622E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62234E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66082E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.71258E-2
os_fil2_imon=-2.82815E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86902E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.96084E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35219E-1
cs_fil2_imon=-2.78009E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.06414E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22434E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.98937E-1
chamber_ion_pmon=1.69802E-7
chamber_cvt_pmon=2.52538E-3
foreline_cvt_pmon=2.52538E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.34064E-1
res40_imon=-2.69879E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.16298E-1	-7.98011E-1	-9.1315E0	-9.14249E0	5.48363E-3	9.30786E-2	2.72966E1	-3.26858E1	-3.26482E1	2.67677E1	1.69875E-7	2.51552E-3	2.51552E-3	6.32936E-3	1.99977E-1
2.0E0	4.0E0	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.16035E-1	-7.98106E-1	-9.13157E0	-9.14209E0	5.05447E-3	9.34124E-2	2.73326E1	-3.26682E1	-3.26303E1	2.67988E1	1.69794E-7	2.51709E-3	2.51709E-3	6.32328E-3	1.99896E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-8.16154E-1	-7.97701E-1	-9.13165E0	-9.14211E0	5.48363E-3	9.33409E-2	2.73333E1	-3.26536E1	-3.26356E1	2.68024E1	1.69581E-7	2.5225E-3	2.5225E-3	6.32418E-3	2.00108E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-8.16202E-1	-7.97629E-1	-9.13153E0	-9.14228E0	5.62668E-3	9.32693E-2	2.7308E1	-3.26449E1	-3.26207E1	2.6786E1	1.69653E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.00192E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09572E0	-8.16154E-1	-7.97606E-1	-9.13157E0	-9.14197E0	5.67436E-3	9.33409E-2	2.72774E1	-3.26649E1	-3.26166E1	2.68016E1	1.6987E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.01047E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.16321E-1	-7.98011E-1	-9.13153E0	-9.14216E0	5.60284E-3	9.33886E-2	2.731E1	-3.2634E1	-3.26395E1	2.68052E1	1.69802E-7	2.52318E-3	2.52318E-3	6.32386E-3	2.00325E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09565E0	-8.16274E-1	-7.97915E-1	-9.13165E0	-9.14216E0	5.60284E-3	9.30548E-2	2.72949E1	-3.26506E1	-3.26452E1	2.6804E1	1.69802E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.00325E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.16202E-1	-7.97725E-1	-9.13172E0	-9.14209E0	5.17368E-3	9.30786E-2	2.73099E1	-3.26651E1	-3.26242E1	2.67956E1	1.69802E-7	2.52099E-3	2.52099E-3	6.31837E-3	1.99456E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-8.15821E-1	-7.97749E-1	-9.13136E0	-9.14216E0	5.55515E-3	9.33409E-2	2.73499E1	-3.26372E1	-3.26449E1	2.68034E1	1.69802E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.98937E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-8.16059E-1	-7.97486E-1	-9.13146E0	-9.14211E0	5.65052E-3	9.33409E-2	2.73135E1	-3.26482E1	-3.265E1	2.68209E1	1.70023E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.99283E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.16274E-1	-7.97677E-1	-9.13153E0	-9.14209E0	5.96046E-3	9.31978E-2	2.73364E1	-3.26738E1	-3.26537E1	2.67674E1	1.69581E-7	2.51739E-3	2.51739E-3	6.31278E-3	1.9917E-1
1.5E1	3.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.16131E-1	-7.97772E-1	-9.13124E0	-9.14204E0	5.84126E-3	9.32455E-2	2.73345E1	-3.26386E1	-3.26152E1	2.68406E1	1.69949E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.99803E-1
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.09572E0	-8.16369E-1	-7.97725E-1	-9.13112E0	-9.14192E0	5.6982E-3	9.32932E-2	2.73231E1	-3.26765E1	-3.2605E1	2.67854E1	1.69798E-7	2.51417E-3	2.51417E-3	6.3074E-3	2.00363E-1
1.7E1	2.3E1	0.0E0	6.87E2	4.7E2	-2.09572E0	-8.16417E-1	-7.97772E-1	-9.13122E0	-9.14202E0	6.22272E-3	9.3317E-2	2.72913E1	-3.27071E1	-3.26008E1	2.67932E1	1.69731E-7	2.5225E-3	2.5225E-3	6.3074E-3	1.98872E-1
1.8E1	9.0E1	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.16631E-1	-7.98106E-1	-9.13162E0	-9.14199E0	5.98431E-3	9.34124E-2	2.73255E1	-3.26891E1	-3.26254E1	2.67938E1	1.69943E-7	2.52169E-3	2.52169E-3	6.32356E-3	2.00363E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.1656E-1	-7.98106E-1	-9.13131E0	-9.14214E0	5.8651E-3	9.33886E-2	2.72903E1	-3.26685E1	-3.26083E1	2.67799E1	1.69654E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.00151E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09418E0	-8.16536E-1	-7.97892E-1	-9.13157E0	-9.14152E0	5.67436E-3	9.32217E-2	2.72769E1	-3.26903E1	-3.26224E1	2.67752E1	1.69653E-7	2.52276E-3	2.52276E-3	6.31278E-3	1.9951E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09426E0	-8.16369E-1	-7.97939E-1	-9.1315E0	-9.14135E0	5.43594E-3	9.34601E-2	2.7308E1	-3.26364E1	-3.26671E1	2.68036E1	1.69728E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.01547E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09433E0	-8.16321E-1	-7.97725E-1	-9.13138E0	-9.14166E0	5.60284E-3	9.35555E-2	2.73057E1	-3.26756E1	-3.25983E1	2.68166E1	1.69652E-7	2.52236E-3	2.52236E-3	6.31798E-3	2.00399E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.16154E-1	-7.97796E-1	-9.13146E0	-9.14185E0	5.53131E-3	9.35078E-2	2.73075E1	-3.26543E1	-3.2632E1	2.67842E1	1.69802E-7	2.52538E-3	2.52538E-3	6.3074E-3	1.98937E-1